公开(公告)号：US11581206B2

公开(公告)日：2023-02-14

申请号：US16812066

申请日：2020-03-06

Applicant: Applied Materials, Inc.

Inventor： Yaoling Pan ,  Patrick John Tae ,  Leonard Tedeschi ,  Jennifer Sun ,  Philip Allan Kraus ,  Xiaopu Li ,  Kallol Bera ,  Michael D. Willwerth ,  Albert Barrett Hicks, III ,  Lisa J. Enman ,  Mark Joseph Saly ,  Daniel Thomas McCormick

IPC: H01L21/67 ,  G01N27/22 ,  G05B19/418

Abstract: Embodiments disclosed herein comprise a sensor. In an embodiment, the sensor comprises a substrate having a first surface and a second surface opposite from the first surface. In an embodiment, the sensor further comprises a first electrode over the first surface of the substrate, and a second electrode over the first surface of the substrate and adjacent to the first electrode. In an embodiment, the sensor further comprises a barrier layer over the first electrode and the second electrode.

公开(公告)号：US20210280443A1

公开(公告)日：2021-09-09

申请号：US16812066

申请日：2020-03-06

Applicant: Applied Materials, Inc.

Inventor： Yaoling Pan ,  Patrick John Tae ,  Leonard Tedeschi ,  Jennifer Sun ,  Philip Allan Kraus ,  Xiaopu Li ,  Kallol Bera ,  Michael D. Willwerth ,  Albert Barrett Hicks, III ,  Lisa J. Enman ,  Mark Joseph Saly ,  Daniel Thomas McCormick

IPC: H01L21/67 ,  G01N27/22 ,  G05B19/418

Abstract: Embodiments disclosed herein comprise a sensor. In an embodiment, the sensor comprises a substrate having a first surface and a second surface opposite from the first surface. In an embodiment, the sensor further comprises a first electrode over the first surface of the substrate, and a second electrode over the first surface of the substrate and adjacent to the first electrode. In an embodiment, the sensor further comprises a barrier layer over the first electrode and the second electrode.

公开(公告)号：US20150270108A1

公开(公告)日：2015-09-24

申请号：US14729950

申请日：2015-06-03

Applicant: Applied Materials, Inc.

Inventor： Jennifer Sun ,  Biraja P. Kanungo ,  Tom Cho

IPC: H01J37/32 ,  C23C4/10 ,  C23C4/12

Abstract: An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 1 mol % to about 55 mol %, and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and ZrO2 in a range between about 1 mol % to about 55 mol %.

Abstract translation: 一种制品包括涂有陶瓷涂层的主体。 陶瓷涂层可以包括约45mol％至约99mol％范围内的Y 2 O 3，约1mol％至约55mol％范围内的ZrO 2和约1mol％至约10mol％范围内的Al 2 O 3， 。 陶瓷涂层可以可选地包括在约45mol％至约99mol％范围内的Y 2 O 3和约1mol％至约10mol％范围内的Al 2 O 3。 陶瓷涂层可以包括约45mol％至约99mol％范围内的Y 2 O 3和约1mol％至约55mol％范围内的ZrO 2。

公开(公告)号：US20240284650A1

公开(公告)日：2024-08-22

申请号：US18648278

申请日：2024-04-26

Applicant: APPLIED MATERIALS, INC.

Inventor： Gayatri Natu ,  Geetika Bajaj ,  Prerna Goradia ,  Darshan Thakare ,  David Fenwick ,  XiaoMing He ,  Sanni Seppaelae ,  Jennifer Sun ,  Rajkumar Thanu ,  Jeff Hudgens ,  Karuppasamy Muthukamatchy ,  Arun Dhayalan

IPC: H05K9/00 ,  H01J37/20 ,  H01J37/32 ,  H01L21/687 ,  H05F1/02

CPC classification number: H05K9/0064 ,  H01J37/20 ,  H01J37/32477 ,  H01J37/32495 ,  H01L21/68707 ,  H01L21/68757 ,  H05F1/02

Abstract: A coated chamber component comprises a chamber component and a coating deposited on a surface of the chamber component, the coating comprising an electrically-dissipative material. The electrically-dissipative material is to provide a dissipative path from the coating to a ground. The coating is uniform, conformal, and has a thickness ranging from about 10 nm to about 900 nm.

公开(公告)号：US20230077895A1

公开(公告)日：2023-03-16

申请号：US17985065

申请日：2022-11-10

Applicant: Applied Materials, Inc.

Inventor： Gayatri Natu ,  Geetika Bajaj ,  Prerna Goradia ,  Darshan Thakare ,  David Fenwick ,  XiaoMing He ,  Sanni Seppaelae ,  Jennifer Sun ,  Rajkumar Thanu ,  Jeff Hudgens ,  Karuppasamy Muthukamatchy ,  Arun Dhayalan

IPC: H05K9/00 ,  H01J37/32 ,  H01J37/20 ,  B25J18/00 ,  H01L21/687 ,  H05F1/02 ,  B65G49/07

Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.

公开(公告)号：US11540432B2

公开(公告)日：2022-12-27

申请号：US16890336

申请日：2020-06-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Gayatri Natu ,  Geetika Bajaj ,  Prerna Goradia ,  Darshan Thakare ,  David Fenwick ,  XiaoMing He ,  Sanni Seppaelae ,  Jennifer Sun ,  Rajkumar Thanu ,  Jeff Hudgens ,  Karuppasamy Muthukamatchy ,  Arun Dhayalan

IPC: H05K9/00 ,  H01J37/32 ,  H01J37/20 ,  B25J1/00 ,  H01L21/687 ,  H05F1/02 ,  B65G49/07

Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.

公开(公告)号：US20210100087A1

公开(公告)日：2021-04-01

申请号：US16890346

申请日：2020-06-02

Applicant: APPLIED MATERIALS, INC.

Inventor： Gayatri Natu ,  Geetika Bajaj ,  Prerna Goradia ,  Darshan Thakare ,  David Fenwick ,  XiaoMing He ,  Sanni Seppaelae ,  Jennifer Sun ,  Rajkumar Thanu ,  Jeff Hudgens ,  Karuppasamy Muthukamatchy ,  Arun Dhayalan

IPC: H05F1/02 ,  H01L21/687 ,  H01J37/32 ,  B25J18/00

Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.

公开(公告)号：US10734202B2

公开(公告)日：2020-08-04

申请号：US14729950

申请日：2015-06-03

Applicant: Applied Materials, Inc.

Inventor： Jennifer Sun ,  Biraja P. Kanungo ,  Tom Cho

IPC: B32B1/02 ,  B32B5/00 ,  H01J37/32 ,  C23C16/44 ,  C04B41/87 ,  C04B41/00 ,  C04B41/50 ,  C23C4/11 ,  C23C4/134

Abstract: An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 1 mol % to about 55 mol %, and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and ZrO2 in a range between about 1 mol % to about 55 mol %.