公开(公告)号：US11921063B2

公开(公告)日：2024-03-05

申请号：US17382280

申请日：2021-07-21

Applicant: Applied Materials Israel Ltd.

Inventor： Michael Chemama ,  Ron Meiry ,  Moshe Eliasof ,  Lior Yaron ,  Guy Eytan ,  Konstantin Chirko ,  Rafael Bistritzer

IPC: G01N23/2206 ,  G01N23/2251 ,  H01J37/22 ,  H01J37/28 ,  H01L21/66

CPC classification number: G01N23/2206 ,  G01N23/2251 ,  H01J37/222 ,  H01J37/28 ,  H01L22/20 ,  G01N2223/053 ,  G01N2223/303 ,  G01N2223/306 ,  G01N2223/401 ,  G01N2223/418 ,  G01N2223/501 ,  G01N2223/61 ,  G01N2223/6116 ,  G01N2223/66 ,  H01J2237/2802 ,  H01J2237/2806 ,  H01J2237/2815

Abstract: There is provided a system and method of measuring a lateral recess in a semiconductor specimen, comprising: obtaining a first image acquired by collecting SEs emitted from the surface of the specimen, and a second image acquired by collecting BSEs scattered from an interior region of the specimen between the surface and a target second layer, the specimen scanned using an electron beam with a landing energy selected to penetrate to a depth corresponding to the target second layer; generating a first GL waveform based on the first image, and a second GL waveform based on the second image; estimating a first width of the first layers based on the first GL waveform, and a second width with respect to at least the target second layer based on the second GL; and measuring a lateral recess based on the first width and the second width.

公开(公告)号：US11321835B2

公开(公告)日：2022-05-03

申请号：US16821831

申请日：2020-03-17

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Anna Levant ,  Rafael Bistritzer

IPC: G06K9/62 ,  G06T7/00

Abstract: A method, a non-transitory computer readable medium and a system for determining three dimensional (3D) information of structural elements of a substrate.