公开(公告)号：US20110154899A1

公开(公告)日：2011-06-30

申请号：US12736609

申请日：2009-04-01

申请人： Johannes Classen ,  Lars Tebje

发明人： Johannes Classen ,  Lars Tebje

IPC分类号： G01P15/125

CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0831

摘要： A micromechanical component comprising a substrate, a seismic mass, and first and second detection means, the substrate having a main extension plane and the first detection means being provided for detection of a substantially translational first deflection of the seismic mass along a first direction substantially parallel to the main extension plane, and the second detection means further being provided for detection of a substantially rotational second deflection of the seismic mass about a first rotation axis parallel to a second direction substantially perpendicular to the main extension plane. The seismic mass can be embodied as an asymmetrical rocker, with the result that accelerations can be sensed as rotations. Detection can be accomplished via capacitive sensors.

摘要翻译： 一种微机械部件，包括基板，地震块以及第一和第二检测装置，所述基板具有主延伸平面，并且所述第一检测装置被提供用于检测所述地震块沿着基本平行的第一方向的基本平移的第一偏转 并且第二检测装置还被设置用于检测围绕平行于基本上垂直于主延伸平面的第二方向的第一旋转轴线的地震质量的基本上旋转的第二偏转。 地震质量可以被体现为不对称的摇杆，结果可以将加速度感测为旋转。 可以通过电容式传感器进行检测。

公开(公告)号：US20080141774A1

公开(公告)日：2008-06-19

申请号：US11985254

申请日：2007-11-13

申请人： Johannes Classen ,  Markus Heitz ,  Lars Tebje ,  Fouad Bennini

发明人： Johannes Classen ,  Markus Heitz ,  Lars Tebje ,  Fouad Bennini

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/0802

摘要： An acceleration sensor includes a seismic mass which is suspended on springs above a substrate and is deflectable in a direction perpendicular to a surface of the substrate. In order to reduce deflections of the seismic mass along the surface of the substrate because of interference accelerations, which lead to a falsification of the measurements of the deflection of the seismic mass perpendicular to the surface of the substrate, the springs include two bending bars which are interconnected via crosspieces.

摘要翻译： 加速度传感器包括悬挂在基板上方的弹簧上并且可以在垂直于基板的表面的方向上偏转的地震质量。 为了减少由于干扰加速度导致的地震质体沿着衬底表面的偏转，这导致了垂直于衬底表面的地震质量偏转测量的伪造，弹簧包括两个弯曲杆 通过横档相互连接。

公开(公告)号：US08796791B2

公开(公告)日：2014-08-05

申请号：US13888920

申请日：2013-05-07

申请人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

发明人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

IPC分类号： G01P15/08

CPC分类号： B81B3/0075 ,  B81C1/00626 ,  B81C1/00674 ,  B81C2201/0112 ,  B81C2201/014 ,  B81C2203/0109

摘要： Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.

摘要翻译： 提出的措施是，在实现元件的MEMS元件的微机械结构的情况下，设计自由度显着增加，其包括用于MEMS元件的载体和用于MEMS元件的微机械结构的盖， MEMS元件通过支架结构安装在载体上。 MEMS元件以分层结构实现，并且MEMS元件的微机械结构在该分层结构的至少两个功能层上延伸，所述功能层通过至少一个中间层彼此分离。

公开(公告)号：US08333113B2

公开(公告)日：2012-12-18

申请号：US12505116

申请日：2009-07-17

申请人： Johannes Classen ,  Lars Tebje

发明人： Johannes Classen ,  Lars Tebje

IPC分类号： G01P15/125

CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0831

摘要： An acceleration sensor includes a substrate and a first mass element, which is connected to the substrate in such a way that the first mass element is rotatable about an axis, the first mass element being connected to a second mass element in such a way that the second mass element is movable along a first direction parallel to the axis, and the first mass element being connected to a third mass element in such a way that the third mass element is movable along a second direction perpendicular to the axis.

摘要翻译： 加速度传感器包括基板和第一质量元件，第一质量元件以与第一质量元件绕轴线旋转的方式连接到基板，第一质量元件以第二质量元件连接到第二质量元件， 第二质量元件可以沿着平行于轴线的第一方向移动，并且第一质量元件以与第三质量元件垂直的轴线可移动的方式连接到第三质量元件。

公开(公告)号：US20100024554A1

公开(公告)日：2010-02-04

申请号：US12505116

申请日：2009-07-17

申请人： Johannes Classen ,  Lars Tebje

发明人： Johannes Classen ,  Lars Tebje

IPC分类号： G01P15/125

CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0831

摘要： An acceleration sensor includes a substrate and a first mass element, which is connected to the substrate in such a way that the first mass element is rotatable about an axis, the first mass element being connected to a second mass element in such a way that the second mass element is movable along a first direction parallel to the axis, and the first mass element being connected to a third mass element in such a way that the third mass element is movable along a second direction perpendicular to the axis.

摘要翻译： 加速度传感器包括基板和第一质量元件，第一质量元件以与第一质量元件绕轴线旋转的方式连接到基板，第一质量元件以第二质量元件连接到第二质量元件， 第二质量元件可以沿着平行于轴线的第一方向移动，并且第一质量元件以与第三质量元件垂直的轴线可移动的方式连接到第三质量元件。

公开(公告)号：US20100024553A1

公开(公告)日：2010-02-04

申请号：US12304603

申请日：2007-10-15

申请人： Johannes Classen ,  Lars Tebje

发明人： Johannes Classen ,  Lars Tebje

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P2015/0831

摘要： A micromechanical z-sensor includes a sensitivity, a torsion spring, and a seismic additional mass, the torsion spring having a spring width, and the seismic additional mass including webs having a web width. The web width is selected smaller than the spring width.

摘要翻译： 微机械z传感器包括灵敏度，扭转弹簧和地震附加质量，扭簧具有弹簧宽度，并且地震附加质量包括具有腹板宽度的腹板。 卷材宽度选择为小于弹簧宽度。

公开(公告)号：US20130299927A1

公开(公告)日：2013-11-14

申请号：US13888920

申请日：2013-05-07

申请人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

发明人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

IPC分类号： B81B3/00 ,  B81C1/00

CPC分类号： B81B3/0075 ,  B81C1/00626 ,  B81C1/00674 ,  B81C2201/0112 ,  B81C2201/014 ,  B81C2203/0109

摘要： Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.

摘要翻译： 提出的措施是，在实现元件的MEMS元件的微机械结构的情况下，设计自由度显着增加，其包括用于MEMS元件的载体和用于MEMS元件的微机械结构的盖， MEMS元件通过支架结构安装在载体上。 MEMS元件以分层结构实现，并且MEMS元件的微机械结构在该分层结构的至少两个功能层上延伸，所述功能层通过至少一个中间层彼此分离。

公开(公告)号：US20120297879A1

公开(公告)日：2012-11-29

申请号：US13450901

申请日：2012-04-19

申请人： Guenther-Nino-Carlo ULLRICH ,  Frank Fischer ,  Lars Tebje ,  Carsten Geckeler

发明人： Guenther-Nino-Carlo ULLRICH ,  Frank Fischer ,  Lars Tebje ,  Carsten Geckeler

IPC分类号： G01P15/125 ,  G01P15/02

CPC分类号： G01P15/125 ,  G01P2015/0831

摘要： An inertial sensor, comprising a substrate and a rocker that is connected to the substrate via a spring apparatus, the spring apparatus having at least two springs for suspending the rocker on the substrate, the two springs being disposed with an offset from one another with reference to their longitudinal axis.

摘要翻译： 一种惯性传感器，包括通过弹簧装置连接到基板的基板和摇杆，该弹簧装置具有至少两个用于将摇臂悬挂在基板上的弹簧，两个弹簧以参考的方式彼此偏移地设置 到它们的纵轴。

公开(公告)号：US20100206072A1

公开(公告)日：2010-08-19

申请号：US12601689

申请日：2008-09-29

申请人： Lars Tebje ,  Fouad Bennini ,  Wolfgang Fuerst

发明人： Lars Tebje ,  Fouad Bennini ,  Wolfgang Fuerst

IPC分类号： G01C19/56

CPC分类号： G01P15/125 ,  G01P15/0802

摘要： A micromechanical component may include fixed electrodes and a seismic mass, the seismic mass being connected via a suspension element to a carrier substrate and being movable with respect to it. The seismic mass may include counterelectrodes, which are interconnected via a first electrically conductive connection. The fixed electrodes may include measuring electrodes and decoupled electrodes, the measuring electrodes being provided to function for an electrical evaluation, and the counterelectrodes situated across from the decoupled electrodes being provided to function as a frequency band-altering mechanical element.

摘要翻译： 微机械部件可以包括固定电极和地震块，地震质量块通过悬挂元件连接到载体基底并且可相对于其移动。 地震质量可以包括经由第一导电连接互连的反电极。 固定电极可以包括测量电极和去耦电极，测量电极被设置为用于电学评估，并且设置在去耦电极两侧的反电极被设置为用作频带改变的机械元件。

公开(公告)号：US20090314085A1

公开(公告)日：2009-12-24

申请号：US12468501

申请日：2009-05-19

申请人： Heiko Stahl ,  Dietrich Schubert ,  Lars Tebje

发明人： Heiko Stahl ,  Dietrich Schubert ,  Lars Tebje

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P2015/0814

摘要： A micromechanical acceleration sensor having a substrate, a suspension, a seismic mass, and stationary capacitive electrodes, in which the seismic mass is suspended over the substrate with the help of the suspension, the seismic mass has a mass center of gravity, the suspension has at least two anchors on the substrate, the two anchors are situated on opposite sides of the mass center of gravity, the distance between the two anchors being small compared to a horizontal extension of the seismic mass, the two anchors determine a central axis, the seismic mass have recesses which are situated on opposite sides of the central axis and are laterally open outward on the sides facing away from the central axis, and the stationary electrodes at least engage in the recesses of the seismic mass.

摘要翻译： 一种微机械加速度传感器，具有基板，悬架，抗震块和静止电容电极，其中借助于悬架将地震质量块悬挂在基板上，地震块具有质量重心，悬架具有 在基板上的至少两个锚固件，两个锚固件位于质量重心的相对侧上，两个锚固件之间的距离与地震块的水平延伸部分相比较小，两个锚固件确定中心轴线， 地震质量具有位于中心轴线的相对侧上的凹槽，并且在背离中心轴线的侧面上向外侧向开放，并且固定电极至少与地震块的凹部啮合。