公开(公告)号：US06587194B2

公开(公告)日：2003-07-01

申请号：US10044454

申请日：2002-01-11

申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

IPC分类号： G01N2100

CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

公开(公告)号：US06735331B1

公开(公告)日：2004-05-11

申请号：US09655371

申请日：2000-09-05

申请人： Emanuel Binnun ,  Avner Karpol

发明人： Emanuel Binnun ,  Avner Karpol

IPC分类号： G06K900

CPC分类号： A61B3/12 ,  A61B3/1225

摘要： A method and apparatus for early detection and classification of retinal pathologies, especially glaucoma and macular edema. The method comprises; (a) illuminating predetermined locations on the retina; (b) receiving light returning from predetermined locations; (c) generating a series of primary graphs corresponding to the light intensity with respect to retinal depth of predetermined locations on the retina; (d) separating the component curves of said graphs; (e) analyzing said component curves to produce data including data corresponding to the front slope and/or the back slope, and/or the area of at least one of said component curves; (f) comparing said data to analogous pre-specified data.

摘要翻译： 用于早期检测和分类视网膜病变的方法和装置，特别是青光眼和黄斑水肿。 该方法包括： （a）照射视网膜上的预定位置; （b）接收从预定位置返回的光; （c）相对于视网膜上的预定位置的视网膜深度产生对应于光强度的一系列主图; （d）分离所述图形的分量曲线; （e）分析所述分量曲线以产生包括对应于前斜面和/或后斜面的数据的数据，和/或至少一个所述分量曲线的面积; （f）将所述数据与类似的预先指定的数据进行比较。

公开(公告)号：US4555727A

公开(公告)日：1985-11-26

申请号：US532172

申请日：1983-09-14

申请人： Emmanuel B. Nun ,  Rafi Izhar ,  Avner Karpol

发明人： Emmanuel B. Nun ,  Rafi Izhar ,  Avner Karpol

IPC分类号： G03B15/00 ,  G02B6/00 ,  G03B17/56 ,  H04N5/222 ,  H04N7/18

CPC分类号： H04N7/18

摘要： Scanning apparatus comprising a base, a light source mounted on the base, a camera mounted on the base and arranged to observe a workpiece surface to be scanned and an optical waveguide arranged in light receiving relationship with the light source for directing light to the workpiece surface, the optical waveguide being operative to provide uniform, homogeneous diffuse illumination of the workpiece surface, thereby to prevent definition of shadows thereon.

摘要翻译： 扫描装置，包括基座，安装在基座上的光源，安装在基座上并布置成观察待扫描的工件表面的照相机以及与光源以光接收关系布置的用于将光引导到工件表面的光波导 ，光波导可操作以提供工件表面的均匀均匀漫射照明，从而防止其上的阴影的定义。

公开(公告)号：US06267477B1

公开(公告)日：2001-07-31

申请号：US09125585

申请日：1998-08-21

申请人： Avner Karpol ,  Ran Zeimer

发明人： Avner Karpol ,  Ran Zeimer

IPC分类号： A61B310

CPC分类号： A61B3/1225

摘要： Disclosed is a three dimensional imaging scanning apparatus for retinal thickness and structure non-invasive analysis. The apparatus includes an optical path having a light source, common focusing optic and beam deflector for both incident and reflected beams going to and returning from the retina of an eye, and an imaging device. The apparatus further includes separate optical paths for imaging the fundus and iris of the eye. The speckles caused by retina non-uniformity can be removed by vibrating the common beam deflector during the image acquisition time. An eye model is obtained by spatially integrating images of the retina, the fundus and the iris.

摘要翻译： 公开了用于视网膜厚度和结构非侵入性分析的三维成像扫描装置。 该装置包括具有光源，公共聚焦光学元件和光束偏转器的光路，用于入射和反射的光束进入眼睛的视网膜并从眼睛的视网膜返回。 该装置还包括用于对眼底和虹膜进行成像的单独的光路。 视网膜不均匀引起的斑点可以通过在图像采集时间内振动普通光束偏转器来消除。 通过空间整合视网膜，眼底和虹膜的图像获得眼睛模型。

公开(公告)号：US5311111A

公开(公告)日：1994-05-10

申请号：US706767

申请日：1991-05-29

申请人： Avner Karpol ,  Amnon Ganot

发明人： Avner Karpol ,  Amnon Ganot

IPC分类号： H02P8/12 ,  H02P8/00 ,  H02P8/22 ,  G05B19/40

CPC分类号： H02P8/00 ,  H02P8/22

摘要： A method for calibrating a microstep motor comprising a step motor having a plurality of stator coils, a pair of drivers for applying respective driving voltages to the stator coils. Amplitude adjustment means are coupled to each of the drivers for adjusting the amplitudes of the respective driving voltages and offset adjustment means are coupled to each of the drivers for adjusting the d.c. offsets of the respective driving voltages. The method permits compensation for non-linearities associated with the stator coils, and comprises the steps of adjusting at least one of the amplitude adjustment means a predetermined amount, so as to produce a signal having a specified amplitude, measuring an imbalance of the motor, adjusting the offset and amplitude adjustment means as required in order to reduce the measured imbalance, and iteratively repeating the offset and amplitude adjustments as required until no further reduction in the measured imbalance is possible.

摘要翻译： 一种用于校准微步进电动机的方法，包括具有多个定子线圈的步进电机，用于将相应的驱动电压施加到定子线圈的一对驱动器。 幅度调节装置耦合到每个驱动器，用于调整相应的驱动电压的幅度，并且偏移调整装置耦合到每个驱动器，用于调节直流电压。 相应的驱动电压的偏移。 该方法允许对与定子线圈相关联的非线性进行补偿，并且包括以下步骤：将幅度调节装置中的至少一个调整预定量，以产生具有指定幅度的信号，测量电动机的不平衡， 根据需要调整偏移和振幅调节装置，以便减少测量的不平衡，并且根据需要迭代重复偏移和振幅调整，直到不可能进一步减小所测量的不平衡。

公开(公告)号：US5140608A

公开(公告)日：1992-08-18

申请号：US706658

申请日：1991-05-29

申请人： Avner Karpol ,  Eviatar Halevi ,  Abraham Gross

发明人： Avner Karpol ,  Eviatar Halevi ,  Abraham Gross

IPC分类号： G02B6/42 ,  G02B27/09 ,  H01S5/00

CPC分类号： G02B6/4206 ,  G02B19/0014 ,  G02B19/0052 ,  G02B27/09 ,  G02B27/0966 ,  H01S5/005

摘要： An optical system for focusing a light beam on to an image plane particularly suited for compensating for manufacturing tolerances associated with laser diodes having variable divergence and astigmatism characteristics. The system comprises a collimation lens for collimating the light beam so as to produce a collimated beam in a first plane and an optical shaper having an axis perpendicular to the first plane for correcting distortions associated with the collimated beam and spatially displaced from the collimation lens so as to form the collimated beam on to the image plane. Preferably, the optical shaper includes a pair of cylindrical lenses separated from each other a predetermined distance so as to minimize astigmatism and divergence of the beam. In use, the optical system is adjusted by displacing the collimating lens from the light source so as to produce a collimated beam of light, adjusting the distance between the cylindrical lenses so as to derive a shaped beam having minimal astigmatism and divergence, and adjusting the distance between the collimating lens and the optical shaper so as to focus the shaped beam on to the image plane.

摘要翻译： 一种用于将光束聚焦到图像平面的光学系统，特别适用于补偿与具有可变发散和像散特性的激光二极管相关的制造公差。 该系统包括：用于准直光束的准直透镜，以便在第一平面中产生准直光束;以及光学整形器，其具有垂直于第一平面的轴线，用于校正与准直光束相关联的失真并从准直透镜空间位移 以便在平面上形成准直光束。 优选地，光学整形器包括彼此分开预定距离的一对柱面透镜，以使束的散光和发散最小化。 在使用中，通过使准直透镜从光源移位来调整光学系统，以产生准直光束，调节柱面透镜之间的距离，以便导出具有最小散光和散度的成形光束，并且调整 准直透镜和光学整形器之间的距离，以便将成形光束聚焦到像平面上。