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    Method and apparatus for article inspection including speckle reduction
    1.
    发明授权
    Method and apparatus for article inspection including speckle reduction 有权
    用于物品检查的方法和装置，包括减少斑点

    公开(公告)号：US07463352B2

    公开(公告)日：2008-12-09

    申请号：US11040528

    申请日：2005-01-21

    申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

    发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

    IPC分类号： G01N21/88

    CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

    摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

    摘要翻译： 一种用于在用于制造半导体器件（包括晶片，掩模，光掩模和掩模版）的制品的检查期间减少斑点的方法和装置。 通过在光路中设置元件来减少由相干光源（例如脉冲激光）输出的光束的相干性。 这些元件的实例包括光纤束; 光学导光板; 光栅; 积分球; 和声光调制器。 这些各种元件可以根据需要组合，使得由元件组合输出的光束具有的光路长度差大于由相干光源输出的光束的相干长度。

    Method and apparatus for article inspection including speckle reduction
    5.
    发明授权
    Method and apparatus for article inspection including speckle reduction 失效
    用于物品检查的方法和装置，包括减少斑点

    公开(公告)号：US06429931B1

    公开(公告)日：2002-08-06

    申请号：US10043798

    申请日：2002-01-11

    申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

    发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elysaf ,  Shimon Yalov ,  Boaz Kenan

    IPC分类号： G01N2100

    CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

    摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

    摘要翻译： 一种用于在用于制造半导体器件（包括晶片，掩模，光掩模和掩模版）的制品的检查期间减少斑点的方法和装置。 通过在光路中设置元件来减少由相干光源（例如脉冲激光）输出的光束的相干性。 这些元件的实例包括光纤束; 光学导光板; 光栅; 积分球; 和声光调制器。 这些各种元件可以根据需要组合，使得由元件组合输出的光束具有的光路长度差大于由相干光源输出的光束的相干长度。

    Method and apparatus for article inspection including speckle reduction
    8.
    发明授权
    Method and apparatus for article inspection including speckle reduction 有权
    用于物品检查的方法和装置，包括减少斑点

    公开(公告)号：US06798505B2

    公开(公告)日：2004-09-28

    申请号：US10436920

    申请日：2003-05-12

    申请人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elyasaf ,  Shimon Yalov ,  Boaz Kenan

    发明人： Avner Karpol ,  Silviu Reinhorn ,  Emanuel Elyasaf ,  Shimon Yalov ,  Boaz Kenan

    IPC分类号： G01N2100

    CPC分类号： G03F7/70616 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/479 ,  G02B27/48 ,  G03F1/84

    摘要： A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.

    摘要翻译： 一种用于在用于制造半导体器件（包括晶片，掩模，光掩模和掩模版）的制品的检查期间减少斑点的方法和装置。 通过在光路中设置元件来减少由相干光源（例如脉冲激光）输出的光束的相干性。 这些元件的实例包括光纤束; 光学导光板; 光栅; 积分球; 和声光调制器。 这些各种元件可以根据需要组合，使得由元件组合输出的光束具有的光路长度差大于由相干光源输出的光束的相干长度。

    HIGH RESOLUTION WAFER INSPECTION SYSTEM
    9.
    发明申请
    HIGH RESOLUTION WAFER INSPECTION SYSTEM 有权
    高分辨率波浪检测系统

    公开(公告)号：US20080231845A1

    公开(公告)日：2008-09-25

    申请号：US11952010

    申请日：2007-12-06

    申请人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

    发明人： Dan Grossman ,  Moshe Langer ,  Roman Kris ,  Silviu Reinhorn ,  Ron Naftali ,  Haim Feldman

    IPC分类号： G01N21/95

    CPC分类号： G01N21/17 ,  G01N21/1717 ,  G01N21/9501 ,  G01N2021/1719

    摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region

    摘要翻译： 一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。 探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。 以扫描速率跨越该区域扫描光束。 检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。 泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。 从探测信号中提取的信息也可以区分该区域上的不同材料

    Collapsible portable display
    10.
    发明申请
    Collapsible portable display 审中-公开
    可折叠便携式显示屏

    公开(公告)号：US20060234784A1

    公开(公告)日：2006-10-19

    申请号：US11166965

    申请日：2005-06-27

    申请人： Silviu Reinhorn

    发明人： Silviu Reinhorn

    IPC分类号： H04M1/00

    CPC分类号： H04M1/0268 ,  H04M1/0272 ,  H04N9/3141

    摘要： A collapsible portable video display is provided, which incorporates a mini-projector, a folding mirror, and a rear projection foldable screen. In one type of implementation the display is incorporated into a mobile consumer appliance, such as a cellphone, mobile DVD player, etc. In other type of implementation the display device is a stand-alone device having inputs for video and audio signals.

    摘要翻译： 提供了可折叠便携式视频显示器，其包括微型投影仪，折叠镜和后投影式可折叠屏幕。 在一种类型的实现中，显示器被并入到诸如手机，移动DVD播放器等的移动消费者设备中。在其他类型的实现中，显示设备是具有用于视频和音频信号的输入的独立设备。