公开(公告)号：US20170084419A1

公开(公告)日：2017-03-23

申请号：US15366660

申请日：2016-12-01

Applicant: CANON ANELVA CORPORATION

Inventor： Masashi Tsujiyama ,  Yukito Nakagawa ,  Yasushi Yasumatsu

IPC: H01J27/02 ,  H01J9/14 ,  H01J37/08

CPC classification number: H01J27/024 ,  H01J9/14 ,  H01J27/16 ,  H01J37/04 ,  H01J37/08 ,  H01J2237/303 ,  H01J2237/31701 ,  H01J2237/3174

Abstract: A grid of the present invention is a plate-shaped grid provided with a hole. The grid is formed of a carbon-carbon composite including carbon fibers arranged in random directions along a planar direction of the grid, and the hole is formed in the grid so as to cut off the carbon fibers.