Auger microlithography
    11.
    发明授权
    Auger microlithography 失效
    螺旋微光刻

    公开(公告)号:US4350755A

    公开(公告)日:1982-09-21

    申请号:US171573

    申请日:1980-07-23

    Applicant: Chia-Gee Wang

    Inventor: Chia-Gee Wang

    CPC classification number: G03F7/2039 G03C5/16

    Abstract: Relatively monochromatic soft X-rays at 4.5 m.mu. is used to induce auger electrons from the silver-halide crystal to sensitize the photosensitive grain, and the exposed crystal is developed into a fine silver grain. The pattern of the silver grains with sizes of about 0.02.mu. can be used as a photoresist with a resolution of about 0.1.mu.. The silver grains can also be used to initiate certain organic compounds for the resist, also with a resolution of the order of 0.1.mu..

    Abstract translation: 使用4.5μm的相对单色的软X射线从卤化银晶体诱导螺旋电子,使光敏晶粒感光,并将暴露的晶体发育成细银晶粒。 尺寸约为0.02微米的银晶粒图案可用作分辨率约为0.1微米的光致抗蚀剂。 银粒也可用于引发抗蚀剂的某些有机化合物,分辨率为0.1μm。

    Methods and apparatus for separating gases with ventilated blades
    12.
    发明授权
    Methods and apparatus for separating gases with ventilated blades 失效
    用通风叶片分离气体的方法和设备

    公开(公告)号:US4193775A

    公开(公告)日:1980-03-18

    申请号:US824515

    申请日:1977-08-15

    Applicant: Chia-Gee Wang

    Inventor: Chia-Gee Wang

    CPC classification number: B01D59/20 B04B5/08

    Abstract: Turbo-separative methods and apparatus for separation of mixtures of gaseous materials having different molecular weights, particularly gaseous isotope mixtures such as mixtures of UF.sub.6, in which differential sedimentation velocities of the components to be separated are established in a laminar boundary layer of the gas adjacent a hydraulically smooth, porous blade surface, and in which a predetermined amount of the boundary layer flow is conducted through the porous surface to stabilize the boundary layer and to provide a higher density gas fraction. The velocity of the gas conducted through the porous blade surface should not exceed the sedimentation velocity of the gas species to be separated.

    Abstract translation: 用于分离具有不同分子量的气态材料的混合物的涡轮分离方法和装置,特别是气态同位素混合物,例如UF6的混合物,其中待分离的组分的不同沉降速度建立在相邻气体的层流边界层中 液压平滑多孔叶片表面,并且其中预定量的边界层流通过多孔表面传导以稳定边界层并提供更高密度的气体部分。 通过多孔叶片表面传播的气体的速度不应超过要分离的气体种类的沉降速度。

    Chemotherapy method using x-rays
    13.
    发明授权
    Chemotherapy method using x-rays 有权
    使用X射线的化疗方法

    公开(公告)号:US07981928B2

    公开(公告)日:2011-07-19

    申请号:US10651307

    申请日:2003-08-28

    CPC classification number: A61K41/00

    Abstract: A method of treating cancer in a human uses x-rays to disrupt a linkage in a complex of a chemotherapeutic agent and a carrier compound comprising a pre-selected element. The complex is administered to the human and then a localized region of cells which contains the cancerous cells is irradiated with line emission x-rays of an energy selected to cause emission of Auger electrons from the pre-selected element of the carrier compound to disrupt the linkage and release the chemotherapeutic agent near the cancer cells. A kit useful for the treatment comprises an x-ray tube capable of emitting monochromatic line emission x-rays and the complex compound. A transfer compound useful in the method comprises a chemotherapeutic agent linked to a carrier compound.

    Abstract translation: 一种治疗人类癌症的方法使用X射线来破坏化学治疗剂和包含预先选择的元件的载体化合物的复合物中的连接。 将复合物施用于人,然后将包含癌细胞的细胞的局部区域用能量的线发射x射线照射,所述能量被选择以引起来自载体化合物的预先选择的元素的俄歇电子的发射以破坏 连接并释放癌细胞附近的化疗剂。 可用于治疗的试剂盒包括能够发射单色线发射x射线的X射线管和复合化合物。 用于该方法的转移化合物包括与载体化合物连接的化学治疗剂。

    Low dose X-ray mammography method
    14.
    发明授权
    Low dose X-ray mammography method 有权
    低剂量X射线乳腺摄影法

    公开(公告)号:US07430276B2

    公开(公告)日:2008-09-30

    申请号:US11065595

    申请日:2005-02-24

    CPC classification number: A61B6/502

    Abstract: A mammography method images breast tissue with an end window X-ray transmission tube to detect the presence of neovascular micro-vessels as defining vascular structure associated with a suspect tumorous mass. A kit therefor has a high-efficiency, end window X-ray transmission tube and a supply of a contrast agent.

    Abstract translation: 乳房X线摄影法利用端窗X射线透​​射管对乳房组织进行成像,以检测新生血管微血管的存在,以定义与可疑肿瘤组织相关的血管结构。 其工具包具有高效率的端窗X射线透​​射管和供应的造影剂。

    Epitaxial SiOx barrier/insulation layer
    15.
    发明授权
    Epitaxial SiOx barrier/insulation layer 失效
    外延SiOx阻隔层/绝缘层

    公开(公告)号:US07105895B2

    公开(公告)日:2006-09-12

    申请号:US10480403

    申请日:2001-06-14

    Abstract: A method for producing an insulating or barrier layer (FIG. 1B), useful for semiconductor devices, comprises depositing a layer of silicon and at least one additional element on a silicon substrate whereby said deposited layer is substantially free of defects such that epitaxial silicon substantially free of defects can be deposited on said deposited layer. Alternatively, a monolayer of one or more elements, preferably comprising oxygen, is absorbed on a silicon substrate. A plurality of insulating layers sandwiched between epitaxial silicon forms a barrier composite. Semiconductor devices are disclosed which comprise said barrier composite.

    Abstract translation: 一种用于半导体器件的绝缘或阻挡层(图1B)的制造方法,包括在硅衬底上沉积硅层和至少一个附加元件,由此所述沉积层基本上没有缺陷,使得外延硅 基本上没有缺陷可以沉积在所述沉积层上。 或者,一个或多个元素,优选包含氧的单层被吸收在硅衬底上。 夹在外延硅之间的多个绝缘层形成屏障复合材料。 公开了包含所述屏障复合材料的半导体器件。

    Atomic layer deposition apparatus and process
    16.
    发明申请
    Atomic layer deposition apparatus and process 审中-公开
    原子层沉积装置及工艺

    公开(公告)号:US20050268848A1

    公开(公告)日:2005-12-08

    申请号:US11116140

    申请日:2005-04-27

    Applicant: Chia-Gee Wang

    Inventor: Chia-Gee Wang

    CPC classification number: C23C16/45551 C23C16/45525 C30B25/02 C30B29/14

    Abstract: An atomic layer deposition apparatus for depositing a plurality of ultra-thin layers onto an epitaxial substrate comprises first and second chambers each having an inlet for a gas to be adsorbed on an epitaxial substrate, a transport chamber disposed between the first and second chambers, a loading chamber connected to the transport chamber for storing, loading and unloading epitaxial substrates, an outer chamber enclosing the first, second and transport chambers and at least partially enclosing said loading chamber, and means for individually heating the chambers and evacuating the chambers to ultra high vacuum pressures. An atomic layer deposition process comprises moving an epitaxial silicon substrate from a transport chamber to a first chamber and introducing a gas for formation of a first, adsorbed atomic layer, transferring the substrate through the transport chamber and into the second chamber and introducing a silicon-containing gas for formation of a second, ultra-thin epitaxial silicon layer, and maintaining different temperatures in the first and second chambers.

    Abstract translation: 用于将多个超薄层沉积到外延衬底上的原子层沉积设备包括第一和第二室,每个腔具有用于吸附在外延衬底上的气体的入口,设置在第一和第二室之间的运送室, 连接到运送室的装载室,用于存储,加载和卸载外延基板,封闭第一,第二和运输室的外室,并且至少部分地封闭所述装载室;以及用于单独加热室并将室排出到超高的装置 真空压力。 原子层沉积工艺包括将外延硅衬底从传输室移动到第一室,并引入用于形成第一吸附原子层的气体,将衬底转移通过传输室并进入第二室并引入硅 - 用于形成第二超薄外延硅层,并且保持第一和第二室中的不同温度。

    Epitaxial SiOx barrier/insulation layer
    17.
    发明授权
    Epitaxial SiOx barrier/insulation layer 失效
    外延SiOx阻隔层/绝缘层

    公开(公告)号:US06376337B1

    公开(公告)日:2002-04-23

    申请号:US09188586

    申请日:1998-11-09

    Abstract: A method for producing an insulating or barrier layer, useful for semiconductor devices, comprises depositing a layer of silicon and at least one additional element on said silicon substrate whereby said deposited layer is substantially free of defects such that epitaxial silicon substantially free of defects can be deposited on said deposited layer. Alternatively, a monolayer of one or more elements, preferably comprising oxygen, is absorbed on a silicon substrate. A plurality of insulating layers sandwiched between epitaxial silicon forms a barrier composite. Semiconductor devices are disclosed which comprise said barrier composite.

    Abstract translation: 一种制造用于半导体器件的绝缘或阻挡层的方法,包括在所述硅衬底上沉积硅层和至少一个附加元件,由此所述沉积层基本上没有缺陷,使得基本上没有缺陷的外延硅可以是 沉积在所述沉积层上。 或者,一个或多个元素,优选包含氧的单层被吸收在硅衬底上。 夹在外延硅之间的多个绝缘层形成屏障复合材料。 公开了包含所述屏障复合材料的半导体器件。

    Detection of atoms using monochromatic X-rays
    18.
    发明授权
    Detection of atoms using monochromatic X-rays 失效
    使用单色X射线检测原子

    公开(公告)号:US4382181A

    公开(公告)日:1983-05-03

    申请号:US239135

    申请日:1981-02-27

    Applicant: Chia-Gee Wang

    Inventor: Chia-Gee Wang

    CPC classification number: G01N23/227 G01N23/04 Y10T436/143333

    Abstract: A method and apparatus for detecting, in a specimen, atoms, of an element having an atomic number of at least 20, comprising irradiating the specimen with monochromatic X-rays having a wavelength capable of inducing an inner shell ionization of the atoms with subsequent auger cascade and recording the emission of the auger electrons emitted by the cascade.

    Abstract translation: 一种用于检测原子数至少为20的元素的样品中的原子的方法和装置,包括用具有能够引起原子的内壳电离的单色X射线照射样品,随后的螺旋钻 级联并记录由级联发射的螺旋电子的发射。

    Scanning X-ray microscope
    19.
    发明授权
    Scanning X-ray microscope 失效
    扫描X光显微镜

    公开(公告)号:US4317036A

    公开(公告)日:1982-02-23

    申请号:US129287

    申请日:1980-03-11

    Applicant: Chia-Gee Wang

    Inventor: Chia-Gee Wang

    CPC classification number: G01N23/223 G01N2223/076

    Abstract: A scanning X-ray microscope including an X-ray source capable of emitting a beam of X-rays, a collimator positioned to receive the beam of X-rays and, to collimate this beam, a focusing cone means to focus the beam of X-rays, directed by the collimator, onto a focal plane, a specimen mount for supporting a specimen in the focal plane to receive the focused beam of X-rays, and X-ray beam scanning means to relatively move the specimen and the focusing cone means and collimator to scan the focused X-ray beam across the specimen, a detector disposed adjacent the specimen to detect flourescent photons emitted by the specimen upon exposure to the focused beam of X-rays to provide an electrical output representative of this detection, means for displaying and/or recording the information provided by the output from the detector, means for providing information to the recording and/or display means representative of the scan rate and position of the focused X-ray beam relative to the specimen whereby the recording and/or display means can correlate the information received to record and/or display quantitive and distributive information as to the quantity and distribution of elements detected in the specimen. Preferably there is provided an X-ray beam modulation means upstream, relative to the direction of emission of the X-ray beam, of the focusing cone means.

    Abstract translation: 一种扫描X射线显微镜,包括能够发射X射线束的X射线源,准直器,其被定位成接收X射线束,并且准直该光束,用于聚焦X射线束 由准直器引导的焦点平面上的样本支架,用于将样本支撑在焦平面中以接收聚焦的X射线束;以及X射线束扫描装置,用于使样本和聚焦锥体相对移动 用于扫描穿过样本的聚焦的X射线束的装置和准直器,邻近样本设置的检测器,以在暴露于聚焦的X射线束时提供由样本发射的荧光光子,以提供代表该检测的电输出 用于显示和/或记录由检测器的输出提供的信息的装置,用于向记录和/或显示装置提供表示聚焦的X射线束相对于样本的扫描速率和位置的信息的装置 由此记录和/或显示装置可以将所接收的信息相关联以记录和/或显示关于在样本中检测到的元素的数量和分布的定量和分布信息。 优选地,提供了相对于X射线束的发射方向上的聚焦锥体装置的X射线束调制装置。

    Thick targets for transmission x-ray tubes
    20.
    发明授权
    Thick targets for transmission x-ray tubes 有权
    传输x射线管的目标较厚

    公开(公告)号:US08406378B2

    公开(公告)日:2013-03-26

    申请号:US12806976

    申请日:2010-08-25

    CPC classification number: H01J35/08 H01J35/18 H01J2235/081 H01J2235/087

    Abstract: This invention relates to the use of thick target materials 50 microns and thicker for an x-ray transmission tube; to possible target material compositions including various elements and their alloys, eutectic alloys, compounds, or intermetallic compounds; and applications for utilizing such thick target transmission x-ray tubes. The target comprises at lease one portion of the target with a thickness of 50 microns or greater. The target can be optionally attached to a substrate end-window essentially transparent to x-rays or be thick enough so that no such substrate is required. Applications include producing a high percentage of monochromatic line mission x-rays of said thick target for use in reduced dose medical imaging and other non-destructive testing applications.

    Abstract translation: 本发明涉及对于x射线透射管使用厚度为50微米厚的较厚靶材料; 包括各种元素及其合金,共晶合金,化合物或金属间化合物的可能的靶材料组合物; 以及用于使用这种厚目标透射x射线管的应用。 目标包括目标的至少一部分,厚度为50微米或更大。 靶可以任选地连接到对X射线基本上透明的基底端窗或足够厚,使得不需要这样的基底。 应用包括产生高比例的所述厚靶的单色线任务x射线,用于减少剂量的医学成像和其他非破坏性测试应用。

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