Abstract:
Relatively monochromatic soft X-rays at 4.5 m.mu. is used to induce auger electrons from the silver-halide crystal to sensitize the photosensitive grain, and the exposed crystal is developed into a fine silver grain. The pattern of the silver grains with sizes of about 0.02.mu. can be used as a photoresist with a resolution of about 0.1.mu.. The silver grains can also be used to initiate certain organic compounds for the resist, also with a resolution of the order of 0.1.mu..
Abstract:
Turbo-separative methods and apparatus for separation of mixtures of gaseous materials having different molecular weights, particularly gaseous isotope mixtures such as mixtures of UF.sub.6, in which differential sedimentation velocities of the components to be separated are established in a laminar boundary layer of the gas adjacent a hydraulically smooth, porous blade surface, and in which a predetermined amount of the boundary layer flow is conducted through the porous surface to stabilize the boundary layer and to provide a higher density gas fraction. The velocity of the gas conducted through the porous blade surface should not exceed the sedimentation velocity of the gas species to be separated.
Abstract:
A method of treating cancer in a human uses x-rays to disrupt a linkage in a complex of a chemotherapeutic agent and a carrier compound comprising a pre-selected element. The complex is administered to the human and then a localized region of cells which contains the cancerous cells is irradiated with line emission x-rays of an energy selected to cause emission of Auger electrons from the pre-selected element of the carrier compound to disrupt the linkage and release the chemotherapeutic agent near the cancer cells. A kit useful for the treatment comprises an x-ray tube capable of emitting monochromatic line emission x-rays and the complex compound. A transfer compound useful in the method comprises a chemotherapeutic agent linked to a carrier compound.
Abstract:
A mammography method images breast tissue with an end window X-ray transmission tube to detect the presence of neovascular micro-vessels as defining vascular structure associated with a suspect tumorous mass. A kit therefor has a high-efficiency, end window X-ray transmission tube and a supply of a contrast agent.
Abstract:
A method for producing an insulating or barrier layer (FIG. 1B), useful for semiconductor devices, comprises depositing a layer of silicon and at least one additional element on a silicon substrate whereby said deposited layer is substantially free of defects such that epitaxial silicon substantially free of defects can be deposited on said deposited layer. Alternatively, a monolayer of one or more elements, preferably comprising oxygen, is absorbed on a silicon substrate. A plurality of insulating layers sandwiched between epitaxial silicon forms a barrier composite. Semiconductor devices are disclosed which comprise said barrier composite.
Abstract:
An atomic layer deposition apparatus for depositing a plurality of ultra-thin layers onto an epitaxial substrate comprises first and second chambers each having an inlet for a gas to be adsorbed on an epitaxial substrate, a transport chamber disposed between the first and second chambers, a loading chamber connected to the transport chamber for storing, loading and unloading epitaxial substrates, an outer chamber enclosing the first, second and transport chambers and at least partially enclosing said loading chamber, and means for individually heating the chambers and evacuating the chambers to ultra high vacuum pressures. An atomic layer deposition process comprises moving an epitaxial silicon substrate from a transport chamber to a first chamber and introducing a gas for formation of a first, adsorbed atomic layer, transferring the substrate through the transport chamber and into the second chamber and introducing a silicon-containing gas for formation of a second, ultra-thin epitaxial silicon layer, and maintaining different temperatures in the first and second chambers.
Abstract:
A method for producing an insulating or barrier layer, useful for semiconductor devices, comprises depositing a layer of silicon and at least one additional element on said silicon substrate whereby said deposited layer is substantially free of defects such that epitaxial silicon substantially free of defects can be deposited on said deposited layer. Alternatively, a monolayer of one or more elements, preferably comprising oxygen, is absorbed on a silicon substrate. A plurality of insulating layers sandwiched between epitaxial silicon forms a barrier composite. Semiconductor devices are disclosed which comprise said barrier composite.
Abstract:
A method and apparatus for detecting, in a specimen, atoms, of an element having an atomic number of at least 20, comprising irradiating the specimen with monochromatic X-rays having a wavelength capable of inducing an inner shell ionization of the atoms with subsequent auger cascade and recording the emission of the auger electrons emitted by the cascade.
Abstract:
A scanning X-ray microscope including an X-ray source capable of emitting a beam of X-rays, a collimator positioned to receive the beam of X-rays and, to collimate this beam, a focusing cone means to focus the beam of X-rays, directed by the collimator, onto a focal plane, a specimen mount for supporting a specimen in the focal plane to receive the focused beam of X-rays, and X-ray beam scanning means to relatively move the specimen and the focusing cone means and collimator to scan the focused X-ray beam across the specimen, a detector disposed adjacent the specimen to detect flourescent photons emitted by the specimen upon exposure to the focused beam of X-rays to provide an electrical output representative of this detection, means for displaying and/or recording the information provided by the output from the detector, means for providing information to the recording and/or display means representative of the scan rate and position of the focused X-ray beam relative to the specimen whereby the recording and/or display means can correlate the information received to record and/or display quantitive and distributive information as to the quantity and distribution of elements detected in the specimen. Preferably there is provided an X-ray beam modulation means upstream, relative to the direction of emission of the X-ray beam, of the focusing cone means.
Abstract:
This invention relates to the use of thick target materials 50 microns and thicker for an x-ray transmission tube; to possible target material compositions including various elements and their alloys, eutectic alloys, compounds, or intermetallic compounds; and applications for utilizing such thick target transmission x-ray tubes. The target comprises at lease one portion of the target with a thickness of 50 microns or greater. The target can be optionally attached to a substrate end-window essentially transparent to x-rays or be thick enough so that no such substrate is required. Applications include producing a high percentage of monochromatic line mission x-rays of said thick target for use in reduced dose medical imaging and other non-destructive testing applications.