公开(公告)号：US20080072413A1

公开(公告)日：2008-03-27

申请号：US11194260

申请日：2005-08-01

申请人： Stephen Krause ,  Eric R. Cobb ,  Russell Low

发明人： Stephen Krause ,  Eric R. Cobb ,  Russell Low

IPC分类号： B23Q3/18 ,  H01J9/18 ,  H05H1/24

CPC分类号： H01J9/18 ,  Y10T29/49895 ,  Y10T29/49899 ,  Y10T29/53909

摘要： A method and clamp system for use on an ion implanter system for aligning a cathode and filament relative to one another in-situ are disclosed. The invention includes a clamp system having a clamp including a first clamp member separably coupled to a second clamp member, and an opening to a mount portion of one of the cathode and the filament in at least one of the clamp members. Each clamp member includes a surface to engage a mount portion of one of the cathode and the filament. The opening is adapted to receive a positioning tool to position the cathode and the filament relative to one another by moving the mount portion when the clamp is released. The mount portion may include a tool receiving member to facilitate accurate positioning.

摘要翻译： 公开了一种用于离子注入机系统的方法和夹紧系统，用于将阴极和细丝相对于彼此原位排列。 本发明包括具有夹具的夹具系统，该夹具包括可分离地联接到第二夹紧构件的第一夹紧构件以及至少一个夹紧构件中的阴极和细丝之一的安装部分的开口。 每个夹持构件包括与阴极和细丝之一的安装部分接合的表面。 开口适于接收定位工具以通过在夹具被释放时移动安装部分来相对于彼此定位阴极和灯丝。 安装部分可以包括工具接收构件以便于精确定位。

公开(公告)号：US07887034B2

公开(公告)日：2011-02-15

申请号：US11194260

申请日：2005-08-01

申请人： Stephen Krause ,  Eric R. Cobb ,  Russell Low

发明人： Stephen Krause ,  Eric R. Cobb ,  Russell Low

IPC分类号： B25B3/00

CPC分类号： H01J9/18 ,  Y10T29/49895 ,  Y10T29/49899 ,  Y10T29/53909

摘要： A method and clamp system for use on an ion implanter system for aligning a cathode and filament relative to one another in-situ are disclosed. The invention includes a clamp system having a clamp including a first clamp member separably coupled to a second clamp member, and an opening to a mount portion of one of the cathode and the filament in at least one of the clamp members. Each clamp member includes a surface to engage a mount portion of one of the cathode and the filament. The opening is adapted to receive a positioning tool to position the cathode and the filament relative to one another by moving the mount portion when the clamp is released. The mount portion may include a tool receiving member to facilitate accurate positioning.

摘要翻译： 公开了一种用于离子注入机系统的方法和夹紧系统，用于将阴极和细丝相对于彼此原位排列。 本发明包括具有夹具的夹具系统，该夹具包括可分离地联接到第二夹紧构件的第一夹紧构件以及至少一个夹紧构件中的阴极和细丝之一的安装部分的开口。 每个夹持构件包括与阴极和细丝之一的安装部分接合的表面。 开口适于接收定位工具以通过在夹具被释放时移动安装部分来相对于彼此定位阴极和灯丝。 安装部分可以包括工具接收构件以便于精确定位。

公开(公告)号：US20070137576A1

公开(公告)日：2007-06-21

申请号：US11376850

申请日：2006-03-16

申请人： Peter F. Kurunczi ,  Russell Low ,  Alexander S. Perel ,  Eric R. Cobb ,  Ethan Adam Wright

发明人： Peter F. Kurunczi ,  Russell Low ,  Alexander S. Perel ,  Eric R. Cobb ,  Ethan Adam Wright

IPC分类号： H01J7/24 ,  C23C16/00

CPC分类号： H01J37/3171 ,  H01J37/026 ,  H01J2237/0041 ,  H01J2237/0044

摘要： A technique for providing an inductively coupled radio frequency plasma flood gun is disclosed. In one particular exemplary embodiment, the technique may be realized as a plasma flood gun in an ion implantation system. The plasma flood gun may comprise: a plasma chamber having one or more apertures; a gas source capable of supplying at least one gaseous substance to the plasma chamber; and a power source capable of inductively coupling radio frequency electrical power into the plasma chamber to excite the at least one gaseous substance to generate a plasma. Entire inner surface of the plasma chamber may be free of metal-containing material and the plasma may not be exposed to any metal-containing component within the plasma chamber. In addition, the one or more apertures may be wide enough for at least one portion of charged particles from the plasma to flow through.

摘要翻译： 公开了一种用于提供电感耦合射频等离子体喷枪的技术。 在一个特定的示例性实施例中，该技术可以被实现为离子注入系统中的等离子体喷枪。 等离子体喷枪可以包括：具有一个或多个孔的等离子体室; 能够向所述等离子体室供给至少一种气态物质的气体源; 以及能够将射频电力感应耦合到等离子体室中以激发至少一种气态物质以产生等离子体的电源。 等离子体室的整个内表面可以没有含金属的材料，并且等离子体可能不暴露于等离子体室内的任何含金属的组分。 此外，一个或多个孔可以足够宽以使来自等离子体的带电粒子的至少一部分流过。