SURFACE PROTECTANT FOR SEMICONDUCTOR WAFER
    11.
    发明申请

    公开(公告)号:US20200239727A1

    公开(公告)日:2020-07-30

    申请号:US16672916

    申请日:2019-11-04

    Inventor: Yuichi SAKANISHI

    Abstract: Provided is a surface protectant that suppresses corrosion of a semiconductor wafer surface by a basic compound, and reduces defects in the semiconductor wafer.The semiconductor wafer surface protectant of the present invention includes a compound represented by Formula (1) below; R1O—(C3H6O2)n—H  (1) where R1 denotes a hydrogen atom, a hydrocarbon group that has from 1 to 24 carbon atoms and may have a hydroxyl group, or a group represented by R2CO, where the R2 denotes a hydrocarbon group having from 1 to 24 carbon atoms; and n indicates an average degree of polymerization of a glycerin unit shown in the parentheses, and is from 2 to 60.

    EMULSIFIABLE PREPARATION, AQUEOUS COSMETIC, FOOD OR BEVERAGE AND PHARMACEUTICAL COMPOSITION

    公开(公告)号:US20230190592A1

    公开(公告)日:2023-06-22

    申请号:US17926426

    申请日:2021-05-14

    CPC classification number: A61K8/062 A61K8/731 A23D7/0053 A61K2800/412

    Abstract: Provided are an emulsifiable preparation that has little influence on the environment or the human body, that is excellent in long-term storage stability, and that imparts a pleasant touch feeling to the skin, and an aqueous cosmetic that contains the emulsifiable preparation, a food or beverage that contains the emulsifiable preparation, and a pharmaceutical composition that contains the emulsifiable preparation. The emulsifiable preparation includes: one or more aqueous components selected from the group consisting of water and alcohol; an oily component; and microparticles of a polymer compound, in which the microparticles contain cellulose acetate as the polymer compound, and the microparticles has an average particle size of 2 to 10 μm. The aqueous cosmetic contains the emulsifiable preparation. The food or beverage contains the emulsifiable preparation. The pharmaceutical composition contains the emulsifiable preparation.

    DETERGENT COMPOSITION AND CHEMICAL-MECHANICAL POLISHING COMPOSITION

    公开(公告)号:US20230174892A1

    公开(公告)日:2023-06-08

    申请号:US17924489

    申请日:2021-04-21

    Inventor: Yuichi SAKANISHI

    CPC classification number: C11D1/40 C11D1/62 C11D3/2065 C11D11/0047

    Abstract: A detergent composition and a polishing composition are provided. The detergent composition facilitates sufficient removal of polishing agents, metal microparticles, and anticorrosives in cleaning of a semiconductor substrate and long-term maintenance of flatness of a metal wiring surface after cleaning and achieves excellent quality stability for a long period of time; and the polishing composition facilitates suppression of scratching on a polished object such as a semiconductor substrate, and reduction of filter clogging. A detergent composition containing an alkanol hydroxylamine compound represented by General Formula (1) and having a pH of 10 to 13, and a chemical-mechanical polishing composition containing the detergent composition and a polishing agent. In Formula (1), Ra1 and Ra2 are the same or different and each represents a hydrogen atom or an alkyl group having from 1 to 10 carbons and having from 1 to 3 hydroxyl groups, with proviso that Ra1 and Ra2 are not simultaneously hydrogen atoms, and a total number of hydroxyl groups present in Ra1 and Ra2 is not 0.

    SEMICONDUCTOR SUBSTRATE CLEANING AGENT

    公开(公告)号:US20210130749A1

    公开(公告)日:2021-05-06

    申请号:US16478436

    申请日:2017-12-28

    Inventor: Yuichi SAKANISHI

    Abstract: To provide a cleaning agent that can remove impurities such as metal polishing dust adhering to a semiconductor substrate without corroding metal and can prevent re-adhesion of the impurities.
    The semiconductor substrate cleaning agent of the present invention contains at least the following component (A) and component (B):
    Component (A): a water-soluble oligomer having a weight average molecular weight of not less than 100 and less than 10000; and Component (B): water. It is preferable that the water-soluble oligomer is at least one compound selected from compounds represented by the following formulas (a-1) to (a-3). Ra1O—(C3H6O2)n—H  (a-1) Ra2O—(Ra3O)n′—H  (a-2) (Ra4)3-s—N—[(Ra5O)n″—H]s  (a-3)

    NONIONIC SURFACTANT
    16.
    发明申请
    NONIONIC SURFACTANT 审中-公开

    公开(公告)号:US20190300495A1

    公开(公告)日:2019-10-03

    申请号:US16308105

    申请日:2017-04-21

    Inventor: Yuichi SAKANISHI

    Abstract: A nonionic surfactant that is environmentally friendly, has excellent surface active power (emulsifying power and solubilizing power), and is capable of stably maintaining the excellent surface active power for a long time is provided. A nonionic surfactant of the present invention contains polyglycerol monoether represented by the formula (1), wherein a ring Z represents a condensed ring of an aromatic hydrocarbon ring having 6 to 14 carbon atoms and a 3 to 6-membered heterocycle containing an oxygen atom as a heteroatom; R1 is a substituent bonded to the ring Z and represents an aliphatic hydrocarbon group having 14 to 25 carbon atoms; the ring Z optionally has one or more substituents other than R1; and n is an average number of monomers of glycerol and represents 2 to 20.

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