摘要:
The present invention provides a vehicle-use propeller shaft that includes a yoke having arm portions disposed at equal intervals in the circumferential direction, each arm portion extending outward in the radial direction, and that is capable of suppressing bending vibration.A vehicle-use propeller shaft (10) includes a yoke (16) having four arm portions (17) to (20) disposed at equal intervals in the circumferential direction, each arm portion extending outward in the radial direction. One pair of arm portions (17) and (19) that extend in opposite directions and the other pair of arm portions (18) and (20) that extend in opposite directions have mutually different shapes.
摘要:
A magnetic resonance imaging apparatus is configured to divide an object to be examined into a plurality of regions in a predetermined direction, set images of slice positions for each of the regions so that the slice positions are continuous in each region, obtain an image of each of the regions while moving the object stepwise, and acquire a plurality of image data having three types of categories for the region, the slice position and the imaging sequence. The magnetic resonance imaging apparatus selectively sets one of the three types of categories and rearranges and displays a plurality of images having the set category in the lengthwise direction or the lateral direction according to the two other categories that have not been selectively set.
摘要:
A method of creating writing data for writing a pattern on a target workpiece by using a writing apparatus provided with a plurality of columns that emit charged particle beams includes inputting information on distance between optical centers of the plurality of columns, inputting layout data and virtually dividing a writing region indicated by the layout data into a plurality of small regions, by a width of one integer-th of the distance indicated by the information on distance, converting, for each small region, the layout data to a format adaptable to the writing apparatus to create, for the each small region, the writing data whose writing region is divided into the small regions, and outputting the writing data.
摘要:
A magnetic resonance imaging apparatus comprises object placing means for placing an object in an imaging space, translating means for translating the object in a given direction by translating the object placing means in the given direction continuously or step-wise, magnetic field generating means for exciting the desired region of the object by generating a static magnetic field, a gradient magnetic field in the imaging space, and a high-frequency magnetic field in the imaging space, signal detecting means for detecting a magnetic resonance signal from the object, and control unit for controlling the translating means, magnetic field generating means and the signal detecting means, and translating the object continuously or stepwise to a predetermined position at a predetermined speed so as to capture a magnetic resonance image of the object.The magnetic resonance imaging apparatus further comprises translation error detecting means for detecting an error of the position or the set value of the speed, and correcting means for correcting the error detected by the positional error detecting means.
摘要:
A semiconductor device including a memory cell is provided. The memory cell comprises a transistor, a memory element and a capacitor. One of first and second electrodes of the memory element and one of first and second electrodes of the capacitor are formed by a same metal film. The metal film functioning as the one of first and second electrodes of the memory element and the one of first and second electrodes of the capacitor is overlapped with a film functioning as the other of first and second electrodes of the capacitor.
摘要:
A beam dose computing method includes specifying a matrix of rows and columns of regions as divided from a surface area of a target object to include first, second and third regions of different sizes, the third regions being less in size than the first and second regions, determining first corrected doses of a charged particle beam for correcting fogging effects in the first regions, determining corrected size values for correcting pattern line width deviations occurring due to loading effects in the second regions, using said corrected size values in said second regions to create a map of base doses of the beam in respective ones of said second regions, using said corrected size values to prepare a map of proximity effect correction coefficients in respective ones of said second regions, using the maps to determine second corrected doses of said beam for correction of proximity effects in said third regions, and using the first and second corrected doses to determine an actual beam dose at each position on the surface of said object.
摘要:
A pattern inspection apparatus includes a stage configured to mount thereon a target workpiece to be inspected where patterns are formed, at least one sensor configured to move relatively to the stage and capture optical images of the target workpiece to be inspected, a first comparing unit configured to compare first pixel data of an optical image captured by one of the at least one sensor with first reference data at a position corresponding to a position of the first pixel data, and a second comparing unit configured to compare second pixel data of an optical image captured by one of the at least one sensor at a position shifted by a sub-pixel unit from the position where the optical image of the first pixel data is captured, with second reference data at a position corresponding to the position of the second pixel data.
摘要:
An MRI apparatus and method are provided which are capable of properly setting imaging position of regions of a subject on a table and moving the table to the set positions, for imaging a wide range or the entire body range of the subject.
摘要:
A charged particle beam writing apparatus includes a first part configured, based on pattern data, to estimate a total writing time, a second part configured to acquire a base dose at an arbitrary time, after writing start time and within the total writing time by using a first correlation among a time having passed since the writing start time, the total writing time, and the base dose, a third part configured to acquire a fogging effect correction coefficient at the arbitrary time by using a second correlation among the time, the total writing time and the coefficient, a forth part configured to calculate a beam dose at the arbitrary time by using the base dose and the coefficient, a fifth part configured to calculate a beam irradiation time based on the beam dose, a deflector for deflecting the beam, and an aperture for blocking the beam.
摘要:
A pattern generation method includes changing a dimension of a pattern included in each mesh-like region of a plurality of mesh-like regions by using an area of the pattern and a total sum of lengths of circumferential sides of the pattern included in each mesh-like region to correct a dimension error of the pattern, wherein the dimension error being caused by loading effects and the plurality of mesh-like regions being virtually divided from a pattern forming region of a target object, and generating a pattern of the dimension changed on the target object.