公开(公告)号：US07060138B2

公开(公告)日：2006-06-13

申请号：US10917750

申请日：2004-08-12

申请人： Kert Dolechek ,  Jeffry Davis

发明人： Kert Dolechek ,  Jeffry Davis

IPC分类号： B08B3/02

CPC分类号： H01L21/67769 ,  B08B9/0861 ,  B08B9/28 ,  H01L21/67051 ,  H01L21/67379 ,  H01L21/67775

摘要： A system and method for cleaning boxes used for handling flat media includes a rotor rotatably mounted within an enclosure, with spray nozzles in the enclosure for spraying fluid toward the rotor. The rotor has at least one box holder assembly for holding a box. At least one retainer bar is located on the rotor for engaging a front section of the box to retain the box in the box holder assembly during rotation of the rotor. The retainer bar is preferably moveable from a first position where the retainer bar restrains the box on the box holder assembly, to a second position where the retainer bar is moved away from the box. The box holder assembly may alternatively include a base with a plurality of grooved elements thereon that are adapted to engage a flange on the box for securing the box to the box holder assembly.

摘要翻译： 用于处理扁平介质的清洁盒的系统和方法包括可旋转地安装在外壳内的转子，在外壳中具有用于向转子喷射流体的喷嘴。 转子具有至少一个用于保持盒子的盒保持器组件。 至少一个保持杆位于转子上用于接合箱的前部，以在转子旋转期间将箱保持在箱保持器组件中。 保持杆优选地可以从保持杆将盒保持器组件上的盒限制的第一位置移动到保持杆从盒子移开的第二位置。 盒保持器组件可以可选地包括其上具有多个开槽元件的基座，其适于接合箱上的凸缘，以将盒固定到盒保持器组件。

公开(公告)号：US06895981B2

公开(公告)日：2005-05-24

申请号：US10200073

申请日：2002-07-19

申请人： Kert Dolechek ,  Jeffry Davis

发明人： Kert Dolechek ,  Jeffry Davis

IPC分类号： H01L21/00 ,  B08B3/00

CPC分类号： H01L21/67034 ,  H01L21/67028

摘要： A centrifugal processor includes an elongated inlet and outlet in fluid communication with a rotor housing having an eccentric bowl. A rotor having fan blades and adapted to hold flat media is rotatably disposed within the rotor housing. An intake gate is pivotably mounted to the rotor housing to swing about the rotor into a closed position during a rinse mode and into an open position during a drying mode. The gate has a wedge that is designed to almost contact the rotor when the gate is in the open position for drying. The geometry of the elongated inlet, outlet, and eccentric bowl, in combination with the design of the rotor and that of the intake gate, work together to create a cross flow fan having a flow path across the flat media and one that exposes the flat media to large volumes of incoming air only once.

摘要翻译： 离心处理器包括与具有偏心碗的转子壳体流体连通的细长入口和出口。 具有风扇叶片并且适于保持扁平介质的转子可旋转地设置在转子壳体内。 进气门可枢转地安装到转子壳体上，以在冲洗模式期间围绕转子摆动到关闭位置，并且在干燥模式期间进入打开位置。 闸门具有楔形件，当楔门处于打开位置进行干燥时，该楔形件设计成几乎接触转子。 细长的入口，出口和偏心碗的几何结构与转子的设计和进气门的几何结合在一起，以形成横流式风扇，该横流式风扇具有穿过平面介质的流动路径， 媒体大量进入空气只有一次。

公开(公告)号：US07067018B2

公开(公告)日：2006-06-27

申请号：US10200074

申请日：2002-07-19

申请人： Jeffry Davis

发明人： Jeffry Davis

IPC分类号： B08B3/02

CPC分类号： H01L21/67754 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  H01L21/67781 ,  H01L21/68707 ,  Y10S414/138

摘要： A workpiece handling and processing system has a interface section for loading wafers from cassettes into carriers. The wafers are lifted out of cassettes by a buffer elevator and moved into a position over an open carrier by a buffer robot. A comb elevator lifts combs entirely through the open cassette, to transfer the wafers from the buffer robot into the carrier. A process robot moves loaded carriers from the interface section to one or more process chambers in a process section. The advantages of processing wafers within a carrier are achieved within a compact space and with high throughput.

公开(公告)号：US06536131B2

公开(公告)日：2003-03-25

申请号：US09735154

申请日：2000-12-12

申请人： Jeffry Davis

发明人： Jeffry Davis

IPC分类号： F26B1724

CPC分类号： H01L21/67754 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  H01L21/67781 ,  H01L21/68707

摘要： A semiconductor wafer processing system has a carrier including wafer slots. A process robot engages the carrier and installs the carrier into a rotor within a process chamber. The rotor has a tapered or stepped inside surface matching a tapered or stepped outside surface of the carrier. Wafer retainers on the carrier pivot to better secure wafers within the carrier.

摘要翻译： 半导体晶片处理系统具有包括晶片槽的载体。 过程机器人接合载体并将载体安装在处理室内的转子中。 转子具有与载体的锥形或阶梯状外表面匹配的锥形或阶梯状内表面。 载体上的晶片固定器枢转以更好地将晶片保护在载体内。

公开(公告)号：US20070084832A1

公开(公告)日：2007-04-19

申请号：US11558723

申请日：2006-11-10

申请人： Paul Wirth ,  Jeffry Davis

发明人： Paul Wirth ,  Jeffry Davis

IPC分类号： B23H7/00 ,  B23H1/00

CPC分类号： H01L21/67109 ,  H01L21/67748 ,  Y10S438/907 ,  Y10S438/908

摘要： An apparatus for thermally processing a microelectronic workpiece comprises a rotatable carousel assembly configured to support at least one workpiece. A driver is coupled to the carousel assembly and rotates the carousel assembly, moving the workpiece between a loading station, a heating station and a cooling station. The loading, heating and cooling stations are radially positioned about a center axis of the carousel assembly. The heating station includes a heating element and an actuator for moving the heating element into thermal engagement with the workpiece in the heating station. The cooling station includes a cooling element and an actuator for moving the cooling element into thermal engagement with the workpiece in the cooling station. A process fluid distribution manifold for delivering process fluid to the workpieces at each station extends through a central opening in the carousel assembly. A non-oxidizing gas is delivered through the manifold to create an oxygen free environment during the thermal process.

摘要翻译： 用于热处理微电子工件的装置包括构造成支撑至少一个工件的可旋转转盘组件。 驱动器联接到转盘组件并旋转转盘组件，在加载站，加热站和冷却站之间移动工件。 装载，加热和冷却站围绕转盘组件的中心轴线径向定位。 加热站包括加热元件和用于使加热元件与加热站中的工件热接合的致动器。 冷却站包括冷却元件和用于使冷却元件与冷却站中的工件热接合的致动器。 用于在每个站处将工艺流体输送到工件的工艺流体分配歧管延伸穿过转盘组件中的中心开口。 通过歧管输送非氧化气体，以在热过程中产生无氧环境。

公开(公告)号：US20070057352A1

公开(公告)日：2007-03-15

申请号：US11555641

申请日：2006-11-01

申请人： Paul Wirth ,  Jeffry Davis

发明人： Paul Wirth ,  Jeffry Davis

IPC分类号： H01L23/495

CPC分类号： H01L21/67109 ,  H01L21/67748 ,  Y10S438/907 ,  Y10S438/908

摘要： An apparatus for thermally processing a microelectronic workpiece is provided. The apparatus comprises a rotatable carousel assembly configured to support at least one workpiece. A driver is coupled to the carousel assembly and rotates the carousel assembly, moving the workpiece between a loading station, a heating station and a cooling station. The loading, heating and cooling stations are radially positioned and approximately equally spaced about a center axis of the carousel assembly. The heating station includes a heating element and an actuator for moving the heating element into thermal engagement with the workpiece in the heating station. The cooling station includes a cooling element and an actuator for moving the cooling element into thermal engagement with the workpiece in the cooling station. A process fluid distribution manifold for delivering process fluid to the workpieces at each station extends through a central opening in the carousel assembly. A non-oxidizing gas is delivered through the manifold to create an oxygen free environment during the thermal process.

摘要翻译： 提供了一种用于热处理微电子工件的设备。 该装置包括构造成支撑至少一个工件的可旋转转盘组件。 驱动器联接到转盘组件并旋转转盘组件，在加载站，加热站和冷却站之间移动工件。 装载，加热和冷却站径向定位并围绕转盘组件的中心轴线大致等间隔。 加热站包括加热元件和用于使加热元件与加热站中的工件热接合的致动器。 冷却站包括冷却元件和用于使冷却元件与冷却站中的工件热接合的致动器。 用于在每个站处将工艺流体输送到工件的工艺流体分配歧管延伸穿过转盘组件中的中心开口。 通过歧管输送非氧化气体，以在热过程中产生无氧环境。

公开(公告)号：US20050011540A1

公开(公告)日：2005-01-20

申请号：US10917750

申请日：2004-08-12

申请人： Kert Dolechek ,  Jeffry Davis

发明人： Kert Dolechek ,  Jeffry Davis

IPC分类号： B08B9/08 ,  B08B9/28 ,  H01L21/00 ,  H01L21/673 ,  C23G1/00 ,  B08B7/00

CPC分类号： H01L21/67769 ,  B08B9/0861 ,  B08B9/28 ,  H01L21/67051 ,  H01L21/67379 ,  H01L21/67775

摘要： A system and method for cleaning boxes used for handling flat media includes a rotor rotatably mounted within an enclosure, with spray nozzles in the enclosure for spraying fluid toward the rotor. The rotor has at least one box holder assembly for holding a box. At least one retainer bar is located on the rotor for engaging a front section of the box to retain the box in the box holder assembly during rotation of the rotor. The retainer bar is preferably moveable from a first position where the retainer bar restrains the box on the box holder assembly, to a second position where the retainer bar is moved away from the box. The box holder assembly may alternatively include a base with a plurality of grooved elements thereon that are adapted to engage a flange on the box for securing the box to the box holder assembly.

摘要翻译： 用于处理扁平介质的清洁盒的系统和方法包括可旋转地安装在外壳内的转子，在外壳中具有用于向转子喷射流体的喷嘴。 转子具有至少一个用于保持盒子的盒保持器组件。 至少一个保持杆位于转子上用于接合箱的前部，以在转子旋转期间将箱保持在箱保持器组件中。 保持杆优选地可以从保持杆将盒保持器组件上的盒限制的第一位置移动到保持杆从盒子移开的第二位置。 盒保持器组件可以可选地包括其上具有多个开槽元件的基座，其适于接合箱上的凸缘，以将盒固定到盒保持器组件。

公开(公告)号：US06830057B2

公开(公告)日：2004-12-14

申请号：US10286317

申请日：2002-11-01

申请人： Kert Dolechek ,  Jeffry Davis

发明人： Kert Dolechek ,  Jeffry Davis

IPC分类号： B08B302

CPC分类号： H01L21/67769 ,  B08B9/0861 ,  B08B9/28 ,  H01L21/67051 ,  H01L21/67379 ,  H01L21/67775

摘要： A system and method for cleaning boxes used for handling flat media includes a rotor rotatably mounted within an enclosure, with spray nozzles in the enclosure for spraying fluid toward the rotor. The rotor has at least one box holder assembly for holding a box. At least one retainer bar is located on the rotor for engaging a front section of the box to retain the box in the box holder assembly during rotation of the rotor. The retainer bar is preferably moveable from a first position where the retainer bar restrains the box on the box holder assembly, to a second position where the retainer bar is moved away from the box. The box holder assembly may alternatively include a base with a plurality of grooved elements thereon that are adapted to engage a flange on the box for securing the box to the box holder assembly.

摘要翻译： 用于处理扁平介质的清洁盒的系统和方法包括可旋转地安装在外壳内的转子，在外壳中具有用于向转子喷射流体的喷嘴。 转子具有至少一个用于保持盒子的盒保持器组件。 至少一个保持杆位于转子上用于接合箱的前部，以在转子旋转期间将箱保持在箱保持器组件中。 保持杆优选地可以从保持杆将盒保持器组件上的盒限制的第一位置移动到保持杆从盒子移开的第二位置。 盒保持器组件可以可选地包括其上具有多个开槽元件的基座，其适于接合箱上的凸缘，以将盒固定到盒保持器组件。