公开(公告)号：US07531060B2

公开(公告)日：2009-05-12

申请号：US11178250

申请日：2005-07-07

申请人： Paul Wirth ,  Daniel J. Woodruff

发明人： Paul Wirth ,  Daniel J. Woodruff

IPC分类号： C23F1/00 ,  H01L21/306

CPC分类号： H01L21/67201 ,  H01L21/6719 ,  H01L21/67775

摘要： An intermediate module comprising a dimensionally stable mounting module and a first device attached to the dimensionally stable mounting module. The dimensionally stable mounting module can include a front docking unit with front alignment elements for connecting the mounting module to a load/unload module, and a rear docking unit with rear alignment elements for connecting the mounting module to a main processing unit. The mounting module can further include a deck between the front docking unit and the rear docking unit, positioning elements at the deck, and attachment elements at the deck. The first device can be a processing chamber, an annealing station, a metrology station, a buffer station, or another type of component for holding or otherwise performing a function on a workpiece. The first device has a device interface member engaged with one of the positioning elements and a device fastener engaged with one of the attachment elements so that the first device is positioned precisely at a known location in a fixed reference frame defined by the mounting module.

摘要翻译： 一种中间模块，包括尺寸稳定的安装模块和附接到尺寸稳定的安装模块的第一装置。 尺寸稳定的安装模块可以包括具有用于将安装模块连接到装载/卸载模块的前对准元件的前对接单元和具有用于将安装模块连接到主处理单元的后对准元件的后对接单元。 安装模块还可以包括在前对接单元和后对接单元之间的甲板，位于甲板处的定位元件和甲板上的附接元件。 第一装置可以是处理室，退火站，计量站，缓冲站或用于在工件上保持或以其他方式执行功能的另一类型的部件。 所述第一装置具有与所述定位元件中的一个接合的设备接口构件和与所述附接元件中的一个接合的设备紧固件，使得所述第一设备精确地定位在由所述安装模块限定的固定参考框架中的已知位置处。

公开(公告)号：US20070020080A1

公开(公告)日：2007-01-25

申请号：US11177936

申请日：2005-07-07

申请人： Paul Wirth

发明人： Paul Wirth

IPC分类号： B66C23/00

CPC分类号： H01L21/68707 ,  B25J9/104 ,  B25J15/0052 ,  B25J18/04 ,  H01L21/67766

摘要： Transfer devices and methods for handling microfeature workpieces are disclosed herein. In one embodiment, a transfer device includes a transport unit configured to move along a linear track and an arm assembly carried by the transport unit. The arm assembly can include an arm pivotable about a lift path. The transfer device further includes (a) a first end-effector coupled to the arm and rotatable about an axis generally parallel to the lift path, and (b) a second end-effector coupled to the arm and rotatable about the axis. The transfer device operates normally without pneumatic power.

摘要翻译： 本文公开了用于处理微特征工件的转移装置和方法。 在一个实施例中，传送装置包括传送单元，其构造成沿着线性轨道和由传送单元承载的臂组件移动。 臂组件可以包括可围绕提升路径枢转的臂。 传送装置还包括（a）连接到臂并可大体上平行于提升路径旋转的第一端部执行器，以及（b）耦合到臂并可围绕轴线旋转的第二端部执行器。 传送装置在没有气动动力的情况下正常工作。

公开(公告)号：US20070009344A1

公开(公告)日：2007-01-11

申请号：US11178250

申请日：2005-07-07

申请人： Paul Wirth ,  Daniel Woodruff

发明人： Paul Wirth ,  Daniel Woodruff

IPC分类号： H01L21/677

CPC分类号： H01L21/67201 ,  H01L21/6719 ,  H01L21/67775

摘要： An intermediate module comprising a dimensionally stable mounting module and a first device attached to the dimensionally stable mounting module. The dimensionally stable mounting module can include a front docking unit with front alignment elements for connecting the mounting module to a load/unload module, and a rear docking unit with rear alignment elements for connecting the mounting module to a main processing unit. The mounting module can further include a deck between the front docking unit and the rear docking unit, positioning elements at the deck, and attachment elements at the deck. The first device can be a processing chamber, an annealing station, a metrology station, a buffer station, or another type of component for holding or otherwise performing a function on a workpiece. The first device has a device interface member engaged with one of the positioning elements and a device fastener engaged with one of the attachment elements so that the first device is positioned precisely at a known location in a fixed reference frame defined by the mounting module.

摘要翻译： 一种中间模块，包括尺寸稳定的安装模块和附接到尺寸稳定的安装模块的第一装置。 尺寸稳定的安装模块可以包括具有用于将安装模块连接到装载/卸载模块的前对准元件的前对接单元和具有用于将安装模块连接到主处理单元的后对准元件的后对接单元。 安装模块还可以包括在前对接单元和后对接单元之间的甲板，位于甲板处的定位元件和甲板上的附接元件。 第一装置可以是处理室，退火站，计量站，缓冲站或用于在工件上保持或以其他方式执行功能的另一类型的部件。 所述第一装置具有与所述定位元件中的一个接合的设备接口构件和与所述附接元件中的一个接合的设备紧固件，使得所述第一设备精确地定位在由所述安装模块限定的固定参考框架中的已知位置处。

公开(公告)号：US20060105580A1

公开(公告)日：2006-05-18

申请号：US10987049

申请日：2004-11-12

申请人： Paul Wirth ,  Jeffry Davis

发明人： Paul Wirth ,  Jeffry Davis

IPC分类号： H01L21/31

CPC分类号： H01L21/67109 ,  H01L21/67748 ,  Y10S438/907 ,  Y10S438/908

摘要： An apparatus for thermally processing a microelectronic workpiece is provided. The apparatus comprises a rotatable carousel assembly configured to support at least one workpiece. A driver is coupled to the carousel assembly and rotates the carousel assembly, moving the workpiece between a loading station, a heating station and a cooling station. The loading, heating and cooling stations are radially positioned and approximately equally spaced about a center axis of the carousel assembly. The heating station includes a heating element and an actuator for moving the heating element into thermal engagement with the workpiece in the heating station. The cooling station includes a cooling element and an actuator for moving the cooling element into thermal engagement with the workpiece in the cooling station. A process fluid distribution manifold for delivering process fluid to the workpieces at each station extends through a central opening in the carousel assembly. A non-oxidizing gas is delivered through the manifold to create an oxygen free environment during the thermal process.

公开(公告)号：US20060045666A1

公开(公告)日：2006-03-02

申请号：US11178241

申请日：2005-07-07

申请人： Randy Harris ,  Paul Wirth

发明人： Randy Harris ,  Paul Wirth

IPC分类号： H01L21/677

CPC分类号： H01L21/67259 ,  H01L21/67772 ,  H01L21/68

摘要： A modular tool unit for wet chemical processing of microfeature workpieces including a dimensionally stable mounting module having front alignment elements at predetermined locations, positioning elements, and attachment elements. The tool unit further includes a wet chemical processing chamber and a transport system attached to the mounting module. The wet chemical processing chamber has chamber interface members engaged with corresponding positioning elements and chamber fasteners engaged with corresponding attachment elements. Similarly, the transport system has transport interface members engaged with corresponding positioning elements and transport fasteners engaged with corresponding attachment elements. The positioning elements for the wet chemical processing chamber and the transport system are precisely located at known points within the fixed reference frame defined by the dimensionally stable mounting module.

摘要翻译： 一种用于微型工件的湿化学处理的模块化工具单元，包括尺寸稳定的安装模块，其具有在预定位置处的前对准元件，定位元件和附接元件。 工具单元还包括湿化学处理室和连接到安装模块的输送系统。 湿化学处理室具有与相应的定位元件接合的腔室接口构件和与相应的附接元件接合的腔室紧固件。 类似地，运输系统具有与对应的定位元件接合的运输接口构件和与相应的附接元件接合的运输紧固件。 用于湿化学处理室和输送系统的定位元件精确地位于由尺寸稳定的安装模块限定的固定参考框架内的已知点处。

公开(公告)号：US20050199066A1

公开(公告)日：2005-09-15

申请号：US11078997

申请日：2005-03-11

申请人： Paul Wirth

发明人： Paul Wirth

IPC分类号： G01N29/04

CPC分类号： H01L21/6719 ,  H01L21/67028 ,  H01L21/67086 ,  Y10S134/902

摘要： A system for processing a workpiece includes a base having a bowl or recess for holding a processing fluid. A sonic energy source, such as a megasonic transducer, provides sonic energy into a processing fluid in the bowl. A process head holds a workpiece. A process head lifter lowers the head holding the workpiece into the processing fluid in the bowl. Sonic energy is provided to the workpiece through the processing fluid, optionally while the processing head spins the workpiece. The processing fluid may include de-ionized water and an etchant.

摘要翻译： 用于处理工件的系统包括具有用于保持处理流体的碗或凹部的底座。 声能量源，例如兆声换能器，为碗中的处理流体提供声能。 工艺头保持工件。 工艺头升降器将保持工件的头部降低到碗中的处理流体中。 通过处理流体，任选地在处理头旋转工件时，将能量提供给工件。 处理流体可以包括去离子水和蚀刻剂。

公开(公告)号：US20070084832A1

公开(公告)日：2007-04-19

申请号：US11558723

申请日：2006-11-10

申请人： Paul Wirth ,  Jeffry Davis

发明人： Paul Wirth ,  Jeffry Davis

IPC分类号： B23H7/00 ,  B23H1/00

CPC分类号： H01L21/67109 ,  H01L21/67748 ,  Y10S438/907 ,  Y10S438/908

摘要： An apparatus for thermally processing a microelectronic workpiece comprises a rotatable carousel assembly configured to support at least one workpiece. A driver is coupled to the carousel assembly and rotates the carousel assembly, moving the workpiece between a loading station, a heating station and a cooling station. The loading, heating and cooling stations are radially positioned about a center axis of the carousel assembly. The heating station includes a heating element and an actuator for moving the heating element into thermal engagement with the workpiece in the heating station. The cooling station includes a cooling element and an actuator for moving the cooling element into thermal engagement with the workpiece in the cooling station. A process fluid distribution manifold for delivering process fluid to the workpieces at each station extends through a central opening in the carousel assembly. A non-oxidizing gas is delivered through the manifold to create an oxygen free environment during the thermal process.

摘要翻译： 用于热处理微电子工件的装置包括构造成支撑至少一个工件的可旋转转盘组件。 驱动器联接到转盘组件并旋转转盘组件，在加载站，加热站和冷却站之间移动工件。 装载，加热和冷却站围绕转盘组件的中心轴线径向定位。 加热站包括加热元件和用于使加热元件与加热站中的工件热接合的致动器。 冷却站包括冷却元件和用于使冷却元件与冷却站中的工件热接合的致动器。 用于在每个站处将工艺流体输送到工件的工艺流体分配歧管延伸穿过转盘组件中的中心开口。 通过歧管输送非氧化气体，以在热过程中产生无氧环境。

公开(公告)号：US20070057352A1

公开(公告)日：2007-03-15

申请号：US11555641

申请日：2006-11-01

申请人： Paul Wirth ,  Jeffry Davis

发明人： Paul Wirth ,  Jeffry Davis

IPC分类号： H01L23/495

CPC分类号： H01L21/67109 ,  H01L21/67748 ,  Y10S438/907 ,  Y10S438/908

摘要： An apparatus for thermally processing a microelectronic workpiece is provided. The apparatus comprises a rotatable carousel assembly configured to support at least one workpiece. A driver is coupled to the carousel assembly and rotates the carousel assembly, moving the workpiece between a loading station, a heating station and a cooling station. The loading, heating and cooling stations are radially positioned and approximately equally spaced about a center axis of the carousel assembly. The heating station includes a heating element and an actuator for moving the heating element into thermal engagement with the workpiece in the heating station. The cooling station includes a cooling element and an actuator for moving the cooling element into thermal engagement with the workpiece in the cooling station. A process fluid distribution manifold for delivering process fluid to the workpieces at each station extends through a central opening in the carousel assembly. A non-oxidizing gas is delivered through the manifold to create an oxygen free environment during the thermal process.

摘要翻译： 提供了一种用于热处理微电子工件的设备。 该装置包括构造成支撑至少一个工件的可旋转转盘组件。 驱动器联接到转盘组件并旋转转盘组件，在加载站，加热站和冷却站之间移动工件。 装载，加热和冷却站径向定位并围绕转盘组件的中心轴线大致等间隔。 加热站包括加热元件和用于使加热元件与加热站中的工件热接合的致动器。 冷却站包括冷却元件和用于使冷却元件与冷却站中的工件热接合的致动器。 用于在每个站处将工艺流体输送到工件的工艺流体分配歧管延伸穿过转盘组件中的中心开口。 通过歧管输送非氧化气体，以在热过程中产生无氧环境。

公开(公告)号：US20070014656A1

公开(公告)日：2007-01-18

申请号：US11480313

申请日：2006-06-29

申请人： Randy Harris ,  Daniel Woodruff ,  Paul Wirth ,  David Mattson ,  James Erickson

发明人： Randy Harris ,  Daniel Woodruff ,  Paul Wirth ,  David Mattson ,  James Erickson

IPC分类号： B66C23/00

CPC分类号： H01L21/67742 ,  H01L21/68707

摘要： End-effectors and associated control and guidance systems and methods are disclosed. A transfer device in one embodiment includes a base unit, an arm carried by the base unit and movable relative to the base unit, and an end-effector carried by the arm and rotatable relative to the arm. The end-effector includes two grippers, at least one being movable toward and away from the other between a grip position and a release position. A transmission is coupled between a motor and the movable gripper to receive an input force from the motor and apply an output force to the gripper that increases as the gripper moves to the grip position.

摘要翻译： 公开了终端效应器和相关的控制和引导系统和方法。 在一个实施例中的传送装置包括基座单元，由基座单元承载并可相对于基座单元运动的臂，以及由臂承载并可相对于臂旋转的端部执行器。 末端执行器包括两个夹持器，至少一个可在夹持位置和释放位置之间朝向和远离另一个移动。 传动装置联接在电动机和可动夹具之间以接收来自电动机的输入力，并且向夹具施加输出力，该夹持器随着夹持器移动到把手位置而增加。

公开(公告)号：US20060177296A1

公开(公告)日：2006-08-10

申请号：US11054872

申请日：2005-02-09

申请人： Paul Wirth

发明人： Paul Wirth

IPC分类号： B66C23/00

CPC分类号： H01L21/67742 ,  B25J5/02 ,  B25J9/042 ,  B25J9/1045

摘要： Transfer devices and methods for handling microfeature workpieces are disclosed herein. In one embodiment, a transfer device includes a base unit, a first arm pivotably coupled to the base unit and rotatable about a first axis, a second arm pivotably coupled to the first arm and rotatable over 360 degrees about a second axis, and an end-effector pivotably coupled to the second arm and rotatable over 360 degrees about a third axis. The first axis is generally parallel to and spaced apart from the second axis, and the second axis is generally parallel to and spaced apart from the third axis. The end-effector can rotate about the third axis independent of the rotation of the second arm about the second axis.

摘要翻译： 本文公开了用于处理微特征工件的转移装置和方法。 在一个实施例中，传送装置包括基座单元，第一臂可枢转地联接到基座单元并可围绕第一轴线旋转;第二臂，其可枢转地联接到第一臂并且围绕第二轴线可旋转360度， - 可旋转地联接到第二臂并围绕第三轴线可旋转360度。 第一轴线通常平行于第二轴线并与第二轴线间隔开，而第二轴线大致平行于第三轴线并与第三轴线间隔开。 末端执行器可以围绕第三轴线旋转，而与第二臂臂围绕第二轴线的旋转无关。