Integrated electrodeposition and chemical mechanical polishing tool
    12.
    发明授权
    Integrated electrodeposition and chemical mechanical polishing tool 有权
    集成电沉积和化学机械抛光工具

    公开(公告)号:US06352467B1

    公开(公告)日:2002-03-05

    申请号:US09591186

    申请日:2000-06-08

    Abstract: A fabrication tool integrates one or more electrodeposition stations with a CMP apparatus. The tool may transport substrates from the electroplating stations to the CMP apparatus without an intervening cleaning step. In addition, the thickness of an electrodeposited layer may be measured at a metrology station prior to polishing utilizing an instrument which physically contacts the surface of the substrate, and the measured thickness may be used to adjust the polishing parameters. Furthermore, the fabrication tool may have a single interface in which a dry and clean wafer is returned to the interface.

    Abstract translation: 制造工具将一个或多个电沉积工位与CMP装置集成。 该工具可以将基板从电镀站输送到CMP设备,而无需中间清洁步骤。 此外,电沉积层的厚度可以在使用物理接触衬底的表面的仪器进行抛光之前在计量站处测量,并且可以使用测量的厚度来调整抛光参数。 此外,制造工具可以具有单个界面,其中干燥且干净的晶片返回到界面。

    Electrode pattern for solid state ionic devices
    14.
    发明授权
    Electrode pattern for solid state ionic devices 有权
    固体离子装置的电极图案

    公开(公告)号:US07255953B2

    公开(公告)日:2007-08-14

    申请号:US09682411

    申请日:2001-08-30

    CPC classification number: H01M4/8885 H01M4/8605 H01M8/1213

    Abstract: A solid oxide fuel cell electrode is stable during thermal cycling and includes a plurality of discrete geometric elements lightly packed on the electrolyte surface. Preferably, the geometric elements are regular hexagons, creating a “Thoneycomb” pattern electrode.

    Abstract translation: 固体氧化物燃料电池电极在热循环期间是稳定的,并且包括轻微包装在电解质表面上的多个离散的几何元素。 优选地,几何元件是正六边形,形成“Thoneycomb”图案电极。

    Parts authentication employing radio frequency identification
    16.
    发明申请
    Parts authentication employing radio frequency identification 有权
    使用射频识别的部件认证

    公开(公告)号:US20060164246A1

    公开(公告)日:2006-07-27

    申请号:US11043758

    申请日:2005-01-26

    Inventor: Debabrata Ghosh

    CPC classification number: G06K17/00

    Abstract: The present invention facilitates operation of systems by managing and authenticating components, including parts and subsystems, present within a system. The present invention includes RFID tags individually associated with the components of the system. The RFID tags generally include at least a part number and a serial number for the components. One or more readers are present and communicate with the RFID tags via a wireless communication medium. A controller generates interrogatory signals, receives response signals from the RFID tags, and employs the received response signals to authenticate the components.

    Abstract translation: 本发明通过管理和认证存在于系统内的部件(包括部件和子系统)来促进系统的操作。 本发明包括单独地与系统的部件相关联的RFID标签。 RFID标签通常至少包括用于组件的部件号和序列号。 存在一个或多个读取器并且经由无线通信介质与RFID标签通信。 控制器产生询问信号,从RFID标签接收响应信号,并采用接收到的响应信号来认证组件。

    Electrochemical cell interconnect
    17.
    发明授权
    Electrochemical cell interconnect 有权
    电化学电池互连

    公开(公告)号:US06855451B2

    公开(公告)日:2005-02-15

    申请号:US09682817

    申请日:2001-10-22

    Abstract: A solid oxide fuel cell stack incorporates metallic interconnects each of which includes a fuel intake manifold, a fuel exhaust manifold, an oxidant intake manifold and an oxidant exhaust manifold. The fuel side of the interconnect defines a fuel flow field surrounded by a continuous sealing surface and in fluid communication with the fuel intake and exhaust manifold. The oxidant side of the interconnect defines an oxidant flow field surrounded by a continuous sealing surface and in fluid communication with the oxidant intake and exhaust manifolds. The interconnect may be fabricated by brazing together three stainless steel plates having overlapping openings to permit the exclusionary flow of fuel and oxidant through the interconnect.

    Abstract translation: 固体氧化物燃料电池堆包括金属互连,每个金属互连包括燃料进气歧管,燃料排气歧管,氧化剂进气歧管和氧化剂排气歧管。 互连的燃料侧限定了由连续密封表面围绕并与燃料进入和排出歧管流体连通的燃料流动场。 互连的氧化剂侧限定了由连续密封表面包围并与氧化剂进气歧管和排气歧管流体连通的氧化剂流场。 互连可以通过将具有重叠开口的三个不锈钢板钎焊在一起来制造,以允许燃料和氧化剂通过互连排除流动。

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