公开(公告)号：US11911868B2

公开(公告)日：2024-02-27

申请号：US17355525

申请日：2021-06-23

Applicant: EBARA CORPORATION

Inventor： Takashi Mitsuya ,  Asagi Matsugu ,  Ayumu Saito

IPC: B24B37/005 ,  H01L21/66 ,  H01L21/306

CPC classification number: B24B37/005 ,  H01L21/30625 ,  H01L22/26

Abstract: Accuracy of detection of a fly out of a substrate from a polishing head is improved. A substrate processing apparatus includes a polishing table 350 to which a polishing pad 352 for polishing the substrate is attachable, a polishing head 302 for holding and pressing the substrate against the polishing pad 352, a retainer member disposed surrounding the polishing head 302, a retainer member pressurization chamber disposed adjacent to the retainer member, an arm 360 for holding and turning the polishing head 302, and a slip out detector 910 for detecting a fly out of the substrate from the polishing head 302 based on a turning torque of the arm 360 or based on a flow rate of a fluid supplied to the retainer member pressurization chamber.

公开(公告)号：USD890823S1

公开(公告)日：2020-07-21

申请号：US29676937

申请日：2019-01-16

Applicant: EBARA CORPORATION

Designer： Kenichi Kobayashi ,  Asagi Matsugu ,  Makoto Kashiwagi ,  Manao Hoshina

公开(公告)号：US20200039025A1

公开(公告)日：2020-02-06

申请号：US16530175

申请日：2019-08-02

Applicant: EBARA CORPORATION

Inventor： Kenichi Kobayashi ,  Asagi Matsugu ,  Makoto Kashiwagi ,  Manao Hoshina

IPC: B24B37/32

Abstract: Provided is a jig for assisting the dismounting and mounting of a top ring.One embodiment provides a jig for mounting/dismounting at least a part of the top ring for holding a substrate. The jig comprises a movable plate for supporting at least a part of the top ring, which is in a dismounted state, a plurality of posts for positioning the jig at a predetermined position relative to the top ring, the plurality of posts being configured to be engaged with the top ring, and a drive mechanism for moving the movable plate in a direction toward and away from the top ring.

公开(公告)号：US20200039024A1

公开(公告)日：2020-02-06

申请号：US16530129

申请日：2019-08-02

Applicant: EBARA CORPORATION

Inventor： Kenichi Kobayashi ,  Asagi Matsugu ,  Makoto Kashiwagi ,  Manao Hoshina

IPC: B24B37/32

Abstract: According to one embodiment, there is provided a top ring for holding a substrate. The top ring comprises a substrate supporting surface, a retainer member disposed to surround an outer periphery of the substrate supporting surface, and a retainer guiding device configured to guide the retainer member so as to allow the retainer member to be displaced in a direction perpendicular to the substrate supporting surface, and support the retainer member so as to inhibit the retainer member from being displaced in a direction parallel to and away from the substrate supporting surface. The retainer guiding device is disposed in an inner side of the retainer member surrounding the substrate supporting surface.