-
公开(公告)号：US12285715B2
公开(公告)日：2025-04-29
申请号：US18006057
申请日：2021-07-27
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Stephen Bruce Cottle , Neil Condon , Christopher Mark Bailey , Julian Richard Dean , Joanne Rachel Greenwood , Zachary William Dunbar
Abstract: A system comprising a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas, and a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.
-
公开(公告)号：US20240337381A1
公开(公告)日：2024-10-10
申请号：US18577523
申请日：2022-07-07
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Michael Jay Silberstein
CPC classification number: F23G7/065 , B01D53/70 , B01D2258/0216 , F23G2209/14
Abstract: An inlet assembly includes an inlet nozzle configured to deliver an effluent stream into a combustion chamber of an abatement apparatus; and a reagent nozzle configured to deliver a reagent into the combustion chamber of the abatement apparatus, the reagent nozzle being located concentrically with respect to the inlet nozzle, the reagent nozzle being configured to deliver the reagent in different quantities at different positions around its perimeter.
-
公开(公告)号：US20240318817A1
公开(公告)日：2024-09-26
申请号：US18578171
申请日：2022-07-07
Applicant: Edwards Limited
Inventor： Andrew James Seeley , David Frederick Bartz , Michael Jay Silberstein
CPC classification number: F23G7/065 , B01D53/70 , F23C3/002 , F23D14/145 , F23J15/04 , B01D2257/2066 , B01D2258/0216 , F23G2209/142 , F23J2219/40
Abstract: An abatement apparatus includes a combustion chamber formed by a foraminous sleeve defining an upstream portion of the combustion chamber for treating an effluent stream, the upstream portion of the combustion chamber having an inlet for receiving the effluent stream and a wetted sleeve fluidly coupled with foraminous sleeve, the wetted sleeve defining a downstream portion of the combustion chamber, wherein the foraminous sleeve is configured to provide a foraminous axial surface facing downstream towards the downstream portion of the combustion chamber. In this way, the foraminous surface not only faces inwards towards the upstream portion of the combustion chamber, but also faces downstream, towards the downstream portion of the combustion chamber.
-
公开(公告)号：US20240159395A1
公开(公告)日：2024-05-16
申请号：US18549671
申请日：2022-03-02
Applicant: Edwards Limited
Inventor： Andrew James Seeley
Abstract: A method of cooling an abatement apparatus for abatement of an effluent stream from a semiconductor processing tool includes: providing at least one modular cooling assembly having a cooling capacity; determining a cooling requirement of an abatement apparatus; and incorporating into the abatement apparatus a number of the modular cooling assemblies whose cumulative cooling capacity at least matches the cooling requirement of the abatement apparatus. In this way, multiple modular cooling assemblies may be incorporated into the abatement apparatus, each of which provides cooling capacity. The number of modular cooling assemblies can be selected to suit the cooling requirement of the abatement apparatus.
-
公开(公告)号：US11162676B2
公开(公告)日：2021-11-02
申请号：US14904964
申请日：2014-06-16
Applicant: Edwards Limited
Inventor： Andrew James Seeley
Abstract: A head assembly for a radiant burner, an inlet assembly and a method are disclosed. The head assembly is for a radiant burner. The head assembly may include a housing defining a plurality of identical housing apertures extending therethrough, an insulator received by the housing and defining a corresponding plurality of identical, complimentarily-located insulator apertures extending therethrough, and at least one inlet assembly configured to be received by one of the identical housing apertures. Each inlet assembly may include a housing portion configured to be received by the one of the identical housing apertures, and an insulator portion configured to fill the complimentarily-located insulator aperture. In this way, a head assembly is provided which has a number of apertures, any of which may receive an inlet assembly. Given that each inlet assembly is configured to be received by any of the apertures, this provides flexibility for the insertion and removal of the assemblies, without needing to completely disassemble the head assembly from the radiant burner. Also, by forming the inlet assembly with a housing portion and insulation portion, the assembly can be located within the head assembly and the insulating portion prevents heat damage.
-
Patent Agency Ranking
公开(公告)号：US11112110B2
公开(公告)日：2021-09-07
申请号：US15709524
申请日：2016-03-23
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Duncan Michael Price
Abstract: A radiant burner for treating an effluent gas stream from a manufacturing processing tool includes a plurality of treatment chambers, each treatment chamber having an effluent stream inlet for supplying a respective portion of the effluent gas stream to that treatment chamber for treatment therewithin. In this way, multiple treatment chambers may be provided, each of which treats part of the effluent stream. Accordingly, the number of treatment chambers can be selected to match the flow rate of the effluent gas stream from any particular processing tool. This provides an architecture which is reliably scalable to suit the needs of any effluent gas stream flow rate.
-
公开(公告)号：US10161628B2
公开(公告)日：2018-12-25
申请号：US14786596
申请日：2014-03-14
Applicant: Edwards Limited
Inventor： Andrew James Seeley
Abstract: A radiant burner for treating an effluent gas stream from a manufacturing process tool may include: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; and a plenum surrounding the porous sleeve supplying the combustion materials to the porous sleeve, the plenum being configured to provide the combustion materials with varying stoichiometry along a length of the porous sleeve. This approach of varying the stoichiometric ratios of the combustion materials correspondingly varies the heat generated by those combustion materials along the length of the porous sleeve. By varying the stoichiometry of the combustion materials to compensate for variations in the heat generated within the combustion chamber along the length of the porous sleeve, a more uniform temperature can be achieved along the length of the porous sleeve within the combustion chamber.
-
公开(公告)号：US10150120B2
公开(公告)日：2018-12-11
申请号：US15031096
申请日：2014-09-30
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Alexander Michael Pope , Thomas Frank Cohn
Abstract: A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume.
-
公开(公告)号：US20180073732A1
公开(公告)日：2018-03-15
申请号：US15563294
申请日：2016-03-23
Applicant: EDWARDS LIMITED
Inventor： Andrew James Seeley
Abstract: A radiant burner for treating an effluent gas stream from a manufacturing processing tool includes: a porous sleeve at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber; and an electrical energy device coupled with the porous sleeve and operable to provide electrical energy to heat the porous sleeve which heats the treatment materials as they pass through the porous sleeve into the treatment chamber. In this way, electrical energy, rather than combustion, is used to raise the temperature within the treatment chamber in order to treat the effluent gas stream.
-
公开(公告)号：US20160236205A1
公开(公告)日：2016-08-18
申请号：US15031096
申请日：2014-09-30
Applicant: EDWARDS LIMITED
Inventor： Andrew James Seeley , Alexander Michael Pope , Thomas Frank Cohn
CPC classification number: B03C3/01 , B01D53/14 , B01D53/1456 , B01D2252/103 , B01D2257/2045 , B01D2257/2047 , B01D2257/553 , B01D2258/0216 , B03C3/16 , B03C3/41 , B03C3/53 , B03C2201/10
Abstract: A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume.
Abstract translation: 气体处理包括：气体洗涤器室，其可操作以接收来自制造工艺工具的流出气体流，以在其中进行擦洗以提供洗涤气流; 以及静电沉淀室，其可操作以接收待处理的洗涤气体流以提供经处理的气流，气体洗涤室和静电沉淀室中的一个限定第一室，另一个气体洗涤室和静电沉淀室 限定第二室，所述第一室被构造成围绕所述第二室。 以这种方式，第一室和第二室可以共享相同的体积。
-
-
-
-
-
-
-
-
-
Search Results
47
records
(took 0.018 seconds)
