公开(公告)号：US12189362B2

公开(公告)日：2025-01-07

申请号：US17055391

申请日：2019-05-13

Applicant: Edwards Limited

Inventor： Andrew James Seeley ,  Gary Peter Knight ,  Duncan Michael Price ,  Mayank Verma

IPC: G05B19/4099 ,  B33Y50/00 ,  F23D14/18 ,  G06F30/00 ,  G06F30/23 ,  G06F119/18 ,  G06T17/20 ,  F23G7/06 ,  G06F113/10

Abstract: A method for fabricating a component of an abatement apparatus is disclosed. The method comprises: meshing a 3D model representation of a component defining a reaction chamber of an abatement apparatus based on specified component characteristics to define an optimised finite element representation of the component; and fabricating the optimised finite element representation. In this way, a 3D model of a component of an abatement apparatus can be generated from which its performance can be modelled. Particular characteristics of the component may be defined which affect the operation of the abatement apparatus. Those characteristics may then be used to generate the optimized finite element representation of the component which has those characteristics using meshing (it will be appreciated that meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation may then fabricated, reliably producing a component having the required characteristics.

公开(公告)号：US20240179826A1

公开(公告)日：2024-05-30

申请号：US18553417

申请日：2022-03-30

Applicant: Edwards Limited

Inventor： Gary Peter Knight ,  Erik Wagenaars ,  Neil Condon ,  Simone Magni

IPC: H05H1/34 ,  H05H1/00

CPC classification number: H05H1/3425 ,  H05H1/0037

Abstract: Aspects relate to monitorable plasma torch device components and in particular to monitoring and predictive maintenance of one or more such monitorable plasma torch device components. One aspect provides a monitorable plasma torch device component, the component comprising: a component body and a sacrificial component located in an erosion zone of the component body. The sacrificial component comprises material which differs from the plasma torch device component body and which, on exposure to a plasma torch in a plasma torch device, generates electromagnetic radiation distinct from that of the plasma torch device component body. The distinct electromagnetic radiation generated is indicative of erosion of the monitorable plasma torch device component in the erosion zone. Such a monitorable plasma torch device component can facilitate effective component monitoring which allows for ameliorative action to be taken in the event that degradation of the device component is detected.

公开(公告)号：US20210223755A1

公开(公告)日：2021-07-22

申请号：US17055391

申请日：2019-05-13

Applicant: Edwards Limited

Inventor： Andrew James Seeley ,  Gary Peter Knight ,  Duncan Michael Price ,  Mayank Verma

IPC: G05B19/4099 ,  B33Y50/00

Abstract: A method for fabricating a component of an abatement apparatus is disclosed. The method comprises: meshing a 3D model representation of a component defining a reaction chamber of an abatement apparatus based on specified component characteristics to define an optimised finite element representation of the component; and fabricating the optimised finite element representation. In this way, a 3D model of a component of an abatement apparatus can be generated from which its performance can be modelled. Particular characteristics of the component may be defined which affect the operation of the abatement apparatus. Those characteristics may then be used to generate the optimized finite element representation of the component which has those characteristics using meshing (it will be appreciated that meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation may then fabricated, reliably producing a component having the required characteristics.

公开(公告)号：US20180209420A1

公开(公告)日：2018-07-26

申请号：US15745619

申请日：2016-06-15

Applicant: Edwards Limited

Inventor： Gary Peter Knight ,  Andrew James Seeley ,  Geoffrey Young ,  Duncan Michael Price

IPC: F04C19/00 ,  F04C25/00 ,  F04C29/00 ,  F04C29/02

CPC classification number: F04C19/005 ,  F04C19/00 ,  F04C19/004 ,  F04C25/00 ,  F04C29/0085 ,  F04C29/02 ,  F04C2280/04

Abstract: Liquid ring pumps are used to pump a variety of fluid types. Corrosive fluids are easily handled by the work fluid but can cause corrosion of pumping mechanisms. The present invention provides a magnetically driven liquid ring pump with corrosion resistant pumping mechanisms which achieves a longer time between service intervals.

公开(公告)号：US20180207581A1

公开(公告)日：2018-07-26

申请号：US15746266

申请日：2016-06-15

Applicant: Edwards Limited

Inventor： Christopher Mark Bailey ,  Clive Marcus Lloyd Tunna ,  Jack Raymond Tattersall ,  Ingo Stephen Graham ,  Michael Roger Czerniak ,  Gary Peter Knight ,  Darren Mennie ,  Duncan Michael Price ,  Derek Martin Baker ,  Andrew James Seeley

IPC: B01D53/75 ,  B01D53/68 ,  B01D53/78 ,  C23C16/44 ,  C23C16/24 ,  H01J37/32 ,  F04C19/00 ,  F04C29/00 ,  F04C23/00 ,  A62C4/00 ,  F23G7/06

CPC classification number: B01D53/75 ,  A62C4/00 ,  B01D53/68 ,  B01D53/78 ,  B01D2252/103 ,  B01D2257/204 ,  B01D2257/206 ,  B01D2258/0216 ,  C23C16/24 ,  C23C16/4405 ,  C23C16/4408 ,  C23C16/4412 ,  F04C19/001 ,  F04C19/005 ,  F04C23/006 ,  F04C29/0092 ,  F23G7/06 ,  H01J37/32807 ,  H01J37/32862 ,  H01J2237/335 ,  Y02C20/30

Abstract: Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.