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公开(公告)号：US12085178B2
公开(公告)日：2024-09-10
申请号：US18041139
申请日：2021-08-12
Applicant: Edwards Limited
Inventor： Cainan Long , Ian David Stones , Phillip North , Clifford George Burt , Robin Hockley , Konstantinos Karoulas
CPC classification number: F16K15/042 , F16K17/12 , F16K25/005 , F16K2200/204
Abstract: A vacuum system non-return valve includes a baffle for extending across a flow path in the vacuum system and a valve member. The baffle has an aperture, a perimeter of the aperture has a valve seat. The valve member has a curved sealing surface configured to mate with the valve seat. The valve member and aperture are configured such that the valve member obscures the aperture and seals with the valve seat to impede a flow of fluid in a closed position and is displaceable in use to move away from the valve seat and allow a fluid flow in an open position; at least a portion of the surface of the baffle surrounding the aperture slopes towards the inlet end of the valve such that the aperture is smaller at the inlet end than it is at the outlet end.
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公开(公告)号：US20220234056A1
公开(公告)日：2022-07-28
申请号：US17617473
申请日：2020-06-05
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Ian David Stones , Duncan Michael Price
Abstract: An inlet assembly for an abatement apparatus includes an inlet nozzle defining a non-circular inlet aperture coupleable with an inlet conduit providing an effluent gas stream for treatment by the abatement apparatus, at least one outlet aperture and a nozzle bore extending along a longitudinal axis between the non-circular inlet aperture and the outlet aperture for conveying the effluent gas stream from the non-circular inlet aperture to the outlet aperture for delivery to a treatment chamber of the abatement apparatus, the nozzle bore defining an inlet portion extending from the non-circular inlet aperture, a flow-dividing structure positioned downstream of the inlet portion and configured to separate the effluent gas stream into at least a pair of effluent gas streams and an outlet portion extending to the outlet aperture and configured to convey the pair of effluent gas streams to the treatment chamber of the abatement apparatus.
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公开(公告)号：US20220213892A1
公开(公告)日：2022-07-07
申请号：US17429845
申请日：2020-02-13
Applicant: Edwards Limited
Inventor： Ian David Stones
IPC: F04C5/00
Abstract: A pump includes a pump housing element and a further element; one of the pump housing and the further element comprising a helical protrusion extending towards the other element, the other element comprising at least one liquid opening. The helical protrusion, pump housing and further element form a path from a gas inlet to a gas outlet. The helical protrusion has an axial cross section that is wider at its attached end than it is at its free end. The pump housing and further element are mounted rotatably with respect to each other; and the at least one liquid opening is configured such that liquid output from the at least one liquid opening forms a liquid blade, the liquid blade being operable to drive gas along the path from the gas inlet to the gas outlet on rotation of one of the elements.
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公开(公告)号：US20200011335A1
公开(公告)日：2020-01-09
申请号：US16504985
申请日：2019-07-08
Applicant: Edwards Limited
Inventor： Ian David Stones , Christopher Mark Bailey
Abstract: A vacuum pump, vacuum pump arrangement and method are disclosed. The vacuum pump comprises: at least one rotor; and a stator, an inlet for receiving gas during operation; and an exhaust for exhausting the gas. The vacuum pump comprises a shaft extending through a centre of said pump and comprising a plate mounted on an end of the shaft towards the inlet. The vacuum pump comprises control circuitry configured to control an axial position of the plate, a change in axial position of the plate providing a change in inlet conductance of gas to the vacuum pump. The plate is mounted such that it extends beyond the inlet in at least some axial positions of the rotor such that the plate is not on the same side of the inlet as the stator.
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公开(公告)号：US20150377226A1
公开(公告)日：2015-12-31
申请号：US14767534
申请日：2014-01-28
Applicant: EDWARDS LIMITED
Inventor： Ian David Stones , Malcolm William Gray , Iain David Port
IPC: F04B37/14
Abstract: A vacuum pumping system comprises a plurality of vacuum pumping arrangements for evacuating an enclosure and an auxiliary vacuum chamber for evacuation by at least one first vacuum pumping arrangement. The vacuum pumping system has a first state for evacuating the enclosure and a second state for conserving power consumed by the system. In a first stage of the second state the first vacuum pumping arrangement is arranged to evacuate an exhaust of at least one second vacuum pumping arrangement and in a second stage the exhaust of the first pumping arrangement is arranged to be evacuated by the auxiliary vacuum chamber.
Abstract translation: 真空泵系统包括用于抽空外壳的多个真空泵送装置和用于通过至少一个第一真空泵送装置排空的辅助真空室。 真空泵系统具有用于抽空外壳的第一状态和用于节省由系统消耗的功率的第二状态。 在第二状态的第一阶段，第一真空泵送装置被布置成抽空至少一个第二真空泵送装置的排气，并且在第二阶段中，第一泵送装置的排气被布置成被辅助真空室排空。
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Patent Agency Ranking
公开(公告)号：US20150037137A1
公开(公告)日：2015-02-05
申请号：US14374106
申请日：2013-01-24
Applicant: Edwards Limited
Inventor： Nigel Paul Schofield , Ian David Stones , Stephen Dowdeswell
CPC classification number: F04D17/168 , F04D17/06 , F04D19/04 , F04D19/042 , F04D19/044 , F04D19/046 , F04D29/185 , F04D29/188 , F04D29/384 , F04D29/544
Abstract: An improved vacuum pump mechanism is described in which an intersecting solid or perforated element is arranged to intersect a channel member. Relative movement of the intersecting solid or perforated element and channel member causes gas molecules to be urged from inlet to an outlet of the pump. Gas molecules are constrained within the channel member and interaction of the gas molecules with the flat and smooth surfaces of the intersecting solid or perforated member influence momentum of the gas molecules so that they are directed towards the outlet. In one embodiment, the channel member is formed as a helix and the intersecting solid or perforated elements are disk-shaped. An alternative embodiment is provided having the channel member configured as a spiral and the perforated elements as cylindrical skirts. The pump provides significant improvements in pump capacity, reduced power consumption and size of pump.
Abstract translation: 描述了一种改进的真空泵机构，其中相交的固体或穿孔元件布置成与通道构件相交。 相交的固体或穿孔元件和通道构件的相对运动导致气体分子从泵的入口到出口被推动。 气体分子被限制在通道构件内并且气体分子与相交的固体或穿孔构件的平坦和平滑表面的相互作用影响气体分子的动量，使得它们被引导到出口。 在一个实施例中，通道构件形成为螺旋，并且相交的实体或穿孔元件是盘形的。 提供了一种替代实施例，其具有被配置为螺旋的通道构件和作为圆柱形裙部的多孔元件。 该泵提供了泵容量的显着改进，降低了功率消耗和泵的尺寸。
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公开(公告)号：US20230296183A1
公开(公告)日：2023-09-21
申请号：US18041139
申请日：2021-08-12
Applicant: Edwards Limited
Inventor： Cainan Long , Ian David Stones , Phillip North , Clifford George Burt , Robin Hockley , Konstantinos Karoulas
CPC classification number: F16K15/042 , F16K17/12 , F16K25/005 , F16K2200/204
Abstract: A vacuum system non-return valve includes a baffle for extending across a flow path in the vacuum system and a valve member. The baffle has an aperture, a perimeter of the aperture has a valve seat. The valve member has a curved sealing surface configured to mate with the valve seat. The valve member and aperture are configured such that the valve member obscures the aperture and seals with the valve seat to impede a flow of fluid in a closed position and is displaceable in use to move away from the valve seat and allow a fluid flow in an open position; at least a portion of the surface of the baffle surrounding the aperture slopes towards the inlet end of the valve such that the aperture is smaller at the inlet end than it is at the outlet end.
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公开(公告)号：US20220235779A1
公开(公告)日：2022-07-28
申请号：US17665964
申请日：2022-02-07
Applicant: Edwards Limited
Inventor： Ian David Stones , Christopher Mark Bailey
Abstract: A vacuum pump, vacuum pump arrangement and method are disclosed. The vacuum pump includes at least one rotor; and a stator, an inlet for receiving gas during operation; and an exhaust for exhausting the gas. The vacuum pump includes a shaft extending through a centre of said pump and comprising a plate mounted on an end of the shaft towards the inlet. The vacuum pump includes control circuitry configured to control an axial position of the plate, a change in axial position of the plate providing a change in inlet conductance of gas to the vacuum pump. The plate is mounted such that it extends beyond the inlet in at least some axial positions of the rotor such that the plate is not on the same side of the inlet as the stator.
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公开(公告)号：US20180372081A1
公开(公告)日：2018-12-27
申请号：US16117886
申请日：2018-08-30
Applicant: Edwards Limited
Inventor： Ian David Stones , Malcolm William Gray , Iain David Port
Abstract: A vacuum pumping system comprises a plurality of vacuum pumping arrangements for evacuating an enclosure and an auxiliary vacuum chamber for evacuation by at least one first vacuum pumping arrangement. The vacuum pumping system has a first state for evacuating the enclosure and a second state for conserving power consumed by the system. In a first stage of the second state the first vacuum pumping arrangement is arranged to evacuate an exhaust of at least one second vacuum pumping arrangement and in a second stage the exhaust of the first pumping arrangement is arranged to be evacuated by the auxiliary vacuum chamber.
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公开(公告)号：US20140369807A1
公开(公告)日：2014-12-18
申请号：US14471698
申请日：2014-08-28
Applicant: Edwards Limited
Inventor： Ian David Stones , Nigel Paul Schofield , Martin Nicholas Stuart
IPC: F04D19/04
CPC classification number: F04D19/042 , F04D17/168 , F04D19/044 , F04D19/046 , F04D23/008 , H01J49/24
Abstract: A vacuum pump comprises a molecular drag pumping mechanism and a regenerative pumping mechanism. A rotor element of the molecular drag pumping mechanism surrounds rotor elements of the regenerative pumping mechanism.
Abstract translation: 真空泵包括分子牵引泵机构和再生泵送机构。 分子拖拉机构的转子元件围绕再生泵送机构的转子元件。
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