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11.发明授权公开(公告)号：US08594826B2
公开(公告)日：2013-11-26
申请号：US13608032
申请日：2012-09-10
申请人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slonim , Hong Lin , Fateh A. Tipu , Adam D. Ticknor , Timothy M. McCormack
发明人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slonim , Hong Lin , Fateh A. Tipu , Adam D. Ticknor , Timothy M. McCormack
IPC分类号： G06F19/00
CPC分类号： G05B23/0216 , G05B23/0229 , G05B2219/32191 , G05B2219/32194 , G05B2219/45031 , G05B2219/50065 , Y02P90/22 , Y02P90/86 , Y10T409/309408
摘要： A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.
摘要翻译： 一种适用于制造环境的方法，系统和计算机程序产品，包括多个名义上相同的独立工具。 计算设备生成从至少一个独立工具导出的过程跟踪数据的多维阵列，其中，所述阵列包括表示包括制造配方中的步骤列表的第一维度的数据和表示包括列表的第二维度的数据 一组传感器从至少一个独立工具产生测量值。 为了评估至少一个独立工具的至少一个操作特征，计算设备对多维阵列的至少一个预选子集进行分析。 计算设备通过一组分层链接和可浏览的图形呈现分析结果。
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12.发明申请公开(公告)号：US20130006406A1
公开(公告)日：2013-01-03
申请号：US13608032
申请日：2012-09-10
申请人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slomin , Hong Lin , Fateh Ali Tipu , Adam Daniel Ticknor , Timothy M. McCormack
发明人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slomin , Hong Lin , Fateh Ali Tipu , Adam Daniel Ticknor , Timothy M. McCormack
IPC分类号： G05B19/18
CPC分类号： G05B23/0216 , G05B23/0229 , G05B2219/32191 , G05B2219/32194 , G05B2219/45031 , G05B2219/50065 , Y02P90/22 , Y02P90/86 , Y10T409/309408
摘要： A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.
摘要翻译： 一种适用于制造环境的方法，系统和计算机程序产品，包括多个名义上相同的独立工具。 计算设备生成从至少一个独立工具导出的过程跟踪数据的多维阵列，其中，所述阵列包括表示包括制造配方中的步骤列表的第一维度的数据和表示包括列表的第二维度的数据 一组传感器从至少一个独立工具产生测量值。 为了评估至少一个独立工具的至少一个操作特征，计算设备对多维阵列的至少一个预选子集进行分析。 计算设备通过一组分层链接和可浏览的图形呈现分析结果。
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公开(公告)号：US07834783B2
公开(公告)日：2010-11-16
申请号：US12198125
申请日：2008-08-26
申请人： Allon Adir , Ehud Aharoni , Oded Margalit
发明人： Allon Adir , Ehud Aharoni , Oded Margalit
IPC分类号： H03M7/40
CPC分类号： G06F7/00
摘要： Converting a mask constraint into a bitset constraint. For example, a method of converting a mask constraint into a bitset constraint may include determining an intermediate bitset based on a variable-bit component of the mask constraint; and generating the bitset constraint based on the intermediate bitset and on a fixed-bit component of the mask constraint. Other embodiments are described and claimed.
摘要翻译： 将掩码约束转换为bitset约束。 例如，将掩码约束转换为比特组约束的方法可以包括：基于掩码约束的可变比特分量来确定中间比特集; 以及基于所述中间位组和所述掩码约束的固定位分量生成所述位组约束。 描述和要求保护其他实施例。
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公开(公告)号：US08938482B2
公开(公告)日：2015-01-20
申请号：US13431987
申请日：2012-03-28
申请人： Ehud Aharoni , Oded Margalit
发明人： Ehud Aharoni , Oded Margalit
IPC分类号： G06F7/58
CPC分类号： G06F7/58
摘要： Generating a number based on mask and range constraints. For example, a method of generating a pseudo random number satisfying a range constraint and a mask constraint may include determining a number of possible solutions satisfying the range constraint and the mask constraint; selecting an index representing a solution of the possible solutions; and generating the pseudo random number based on the index. Other embodiments are described and claimed.
摘要翻译： 根据掩码和范围约束生成数字。 例如，生成满足范围约束和掩码约束的伪随机数的方法可以包括确定满足范围约束和掩码约束的可能解的数量; 选择表示可能解决方案的解的索引; 并基于该索引生成伪随机数。 描述和要求保护其他实施例。
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公开(公告)号：US08352525B2
公开(公告)日：2013-01-08
申请号：US12239783
申请日：2008-09-28
申请人： Allon Adir , Ehud Aharoni , Oded Margalit
发明人： Allon Adir , Ehud Aharoni , Oded Margalit
摘要： Generating a number based on a bitset constraints. For example, a method of generating a pseudo random number satisfying a bitset constraint may include determining a number of possible solutions satisfying the bitset constraint; selecting an index representing a solution of the possible solutions; and generating the pseudo-random number based on the index. Other embodiments are described and claimed.
摘要翻译： 基于一个位组约束生成一个数字。 例如，产生满足比特组约束的伪随机数的方法可以包括确定满足比特组约束的可能解的数量; 选择表示可能解决方案的解的索引; 以及基于所述索引生成所述伪随机数。 描述和要求保护其他实施例。
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16.发明申请公开(公告)号：US20100249976A1
公开(公告)日：2010-09-30
申请号：US12415348
申请日：2009-03-31
申请人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slonim , Hong Lin , Fateh All Tipu , Adam Daniel Ticknor , Timothy M. McCormack
发明人： Ehud Aharoni , Robert J. Baseman , Ramona Kei , Oded Margalit , Kevin Mackey , Michal Rosen-Zvi , Raminderpal Singh , Noam Slonim , Hong Lin , Fateh All Tipu , Adam Daniel Ticknor , Timothy M. McCormack
IPC分类号： G06F17/00
CPC分类号： G05B23/0216 , G05B23/0229 , G05B2219/32191 , G05B2219/32194 , G05B2219/45031 , G05B2219/50065 , Y02P90/22 , Y02P90/86 , Y10T409/309408
摘要： A method and system for evaluating a performance of a semiconductor manufacturing tool while manufacturing microelectronic devices are disclosed. At least one report is generated based on executions of at least one statistical test. The report includes at least one heat map having rows that correspond to sensors, columns that correspond to trace data obtained during recipe steps, and cells at the intersection of the rows and the columns. At least one sensor in the tool obtains trace data of a recipe step while manufacturing at least one microelectronic device. A computing device analyzes the obtained trace data to determine a level of operational significance found in the data and assigns a score to the trace data that indicates a level of operational significance. Then, the computing device places the score in a corresponding cell of the heat map. A user uses the cell for evaluating the tool performance.
摘要翻译： 公开了一种用于在制造微电子器件的同时评估半导体制造工具的性能的方法和系统。 至少根据执行至少一项统计测试生成一份报告。 该报告包括至少一个具有与传感器对应的行的热图，对应于配方步骤期间获得的跟踪数据的列，以及行和列的交叉点处的单元格。 工具中至少有一个传感器获得配方步骤的痕迹数据，同时制造至少一个微电子器件。 计算设备分析所获得的跟踪数据以确定在数据中发现的操作意义的水平，并向指示操作意义水平的跟踪数据分配分数。 然后，计算设备将分数放置在热图的相应单元中。 用户使用单元格来评估刀具性能。
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公开(公告)号：US07735009B2
公开(公告)日：2010-06-08
申请号：US11460262
申请日：2006-07-27
申请人： Ehud Aharoni
发明人： Ehud Aharoni
IPC分类号： G06F17/00
CPC分类号： G06F17/2247 , G06F17/227
摘要： Methods and systems are provided for converting text to XML code. A schema is applied to the text. The schema is a XML-compliant template that incorporates a single enhanced regular expression. One enhancement causes the matched text to be concatenated and displayed. The concatenated matched text is merged with the template to generate a markup language-compliant output. The enhanced regular expression can include a grouping operator that is nestable within another regular expression operator, for example the “*” operator that matches zero or more instances of its operand. Special purpose tags may be defined in the schema to represent regular expression operators.
摘要翻译： 提供了将文本转换为XML代码的方法和系统。 模式应用于文本。 该模式是一个兼容XML的模板，其中包含单个增强的正则表达式。 一个增强使得匹配的文本被连接并显示。 连接的匹配文本与模板合并以生成符合标记语言的输出。 增强的正则表达式可以包括可在另一个正则表达式运算符中嵌套的分组运算符，例如匹配其操作数的零个或多个实例的“*”运算符。 可以在模式中定义特殊用途标签来表示正则表达式运算符。
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公开(公告)号：US20100052954A1
公开(公告)日：2010-03-04
申请号：US12198125
申请日：2008-08-26
申请人： Allon Adir , Ehud Aharoni , Oded Margalit
发明人： Allon Adir , Ehud Aharoni , Oded Margalit
IPC分类号： H03M7/40
CPC分类号： G06F7/00
摘要： Converting a mask constraint into a bitset constraint. For example, a method of converting a mask constraint into a bitset constraint may include determining an intermediate bitset based on a variable-bit component of the mask constraint; and generating the bitset constraint based on the intermediate bitset and on a fixed-bit component of the mask constraint. Other embodiments are described and claimed.
摘要翻译： 将掩码约束转换为bitset约束。 例如，将掩码约束转换为比特组约束的方法可以包括：基于掩码约束的可变比特分量来确定中间比特集; 以及基于所述中间位组和所述掩码约束的固定位分量生成所述位组约束。 描述和要求保护其他实施例。
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公开(公告)号：US20090259704A1
公开(公告)日：2009-10-15
申请号：US12099793
申请日：2008-04-09
申请人： Ehud Aharoni , Oded Margalit
发明人： Ehud Aharoni , Oded Margalit
CPC分类号： G06F7/58
摘要： Generating a number based on mask and range constraints. For example, a method of generating a pseudo random number satisfying a range constraint and a mask constraint may include determining a number of possible solutions satisfying the range constraint and the mask constraint; selecting an index representing a solution of the possible solutions; and generating the pseudo random number based on the index. Other embodiments are described and claimed.
摘要翻译： 根据掩码和范围约束生成数字。 例如，生成满足范围约束和掩码约束的伪随机数的方法可以包括确定满足范围约束和掩码约束的可能解的数量; 选择表示可能解决方案的解的索引; 并基于该索引生成伪随机数。 描述和要求保护其他实施例。
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公开(公告)号：US20080028296A1
公开(公告)日：2008-01-31
申请号：US11460262
申请日：2006-07-27
申请人： Ehud Aharoni
发明人： Ehud Aharoni
CPC分类号： G06F17/2247 , G06F17/227
摘要： Methods and systems are provided for converting text to XML code. A schema is applied to the text. The schema is a XML-compliant template that incorporates a single enhanced regular expression. One enhancement causes the matched text to be concatenated and displayed. The concatenated matched text is merged with the template to generate a markup language-compliant output. The enhanced regular expression can include a grouping operator that is nestable within another regular expression operator, for example the “*” operator that matches zero or more instances of its operand. Special purpose tags may be defined in the schema to represent regular expression operators.
摘要翻译： 提供了将文本转换为XML代码的方法和系统。 模式应用于文本。 该模式是一个兼容XML的模板，其中包含单个增强的正则表达式。 一个增强使得匹配的文本被连接并显示。 连接的匹配文本与模板合并以生成符合标记语言的输出。 增强的正则表达式可以包括可在另一个正则表达式运算符中嵌套的分组运算符，例如匹配其操作数的零个或多个实例的“*”运算符。 可以在模式中定义特殊用途标签来表示正则表达式运算符。
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