公开(公告)号：US20210388914A1

公开(公告)日：2021-12-16

申请号：US17284830

申请日：2019-10-21

Applicant: FUJIKIN INCORPORATED

Inventor： Kenji AIKAWA ,  Takahiro MATSUDA ,  Akihiro HARADA ,  Kazunari WATANABE ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA

IPC: F16K27/00 ,  H01L21/67

Abstract: A valve device has a structure more suitable for miniaturization and integration and is used for a semiconductor manufacturing process or the like. A valve device includes: a valve body which is accommodated in an accommodation recess and has a first port and a second port in a bottom surface; and a bonnet nut which has a screw portion formed on an outer periphery thereof and is screwed with the inner periphery of the accommodation recess to press the valve body toward the bottom of the accommodation recess to fix the valve body onto a flow path block. The valve body has first and second annular protrusions for sealing which are formed around the first port and the second port and protrude from a bottom surface. The first and the second annular protrusions are formed so as to share a part thereof.

公开(公告)号：US20210132638A1

公开(公告)日：2021-05-06

申请号：US17038459

申请日：2020-09-30

Applicant: FUJIKIN INCORPORATED

Inventor： Kenji AIKAWA ,  Takahiro MATSUDA ,  Toshiyuki INADA ,  Kazunari WATANABE ,  Yuta MOTEGI ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA

IPC: G05D7/06 ,  H01L21/67

Abstract: A fluid control device includes a first block row and a second block row each including a plurality of joint blocks having a width of the standard size and arranged along a first directions, the first block row and the second block row being arranged at predetermined intervals in the second directions perpendicular to the first directions, wherein each of the plurality of joint blocks constituting the first block row has a large diameter flow path for forming a single line, and each of the plurality of joint blocks constituting the second block row has a smaller diameter flow path than the large diameter flow path for forming the first line and the second line.

公开(公告)号：US20210131583A1

公开(公告)日：2021-05-06

申请号：US17038440

申请日：2020-09-30

Applicant: FUJIKIN INCORPORATED

Inventor： Takahiro MATSUDA ,  Kenji AIKAWA ,  Toshiyuki INADA ,  Kazunari WATANABE ,  Yuta MOTEGI ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA

IPC: F16K31/126 ,  F16K11/02

Abstract: A valve device includes: a body having a substantially block shape in which first and second valve chambers are recessed from an upper surface, and three flow paths communicating with the first valve chamber and three flow paths communicating with the second valve chamber are formed inside the body; first and second valve members disposed in the first and second valve chambers, respectively, to switch between communication and disconnection between one of the three flow paths and the other two flow paths; and first and second actuators for respectively driving the first and second valve members, wherein the other two flow paths communicating with the each of valve chambers have respective ports on the lower surface of the body, while the one flow path has a common port on the lower surface of the body.

公开(公告)号：US20200370664A1

公开(公告)日：2020-11-26

申请号：US16966270

申请日：2019-02-19

Applicant: FUJIKIN INCORPORATED

Inventor： Kazunari WATANABE ,  Kohei SHIGYOU ,  Yohei SAWADA ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA

IPC: F16K7/16 ,  F16K27/02 ,  H01L21/67 ,  C23C16/455

Abstract: Provided is a valve device in which influence of a physical impact on a valve element is further reduced. Valve device includes a valve seat disposed around an opening connected to a flow path formed in a valve body, a diaphragm for opening and closing flow path by moving between a contact position and a non-contact position with respect to the valve seat, a presser adapter that contacts a peripheral portion of the diaphragm, a casing that incorporates an actuator for actuating the diaphragm and is fixed on the valve body by being screwed into a screw hole formed in the valve body, and an adapter fixing ring that is screwed into the screw hole and thereby fixed in the valve body while pressing the presser adapter and the diaphragm.

公开(公告)号：US20200340591A1

公开(公告)日：2020-10-29

申请号：US16757172

申请日：2018-10-24

Applicant: FUJIKIN INCORPORATED

Inventor： Kazunari WATANABE ,  Kohei SHIGYOU ,  Kenji AIKAWA ,  Tomohiro NAKATA ,  Takahiro MATSUDA ,  Tsutomu SHINOHARA

IPC: F16K7/16 ,  F16K27/02

Abstract: A flow path assembly incorporating functional components, such as orifices and filters, is provided in which gaps between the functional components and the flow path components defining the flow path are sealed for an extended period of time. An annular elastic member interposed between the flow path members is provided outside the opposing surfaces of the flow path members, the flow path member has a caulking portion, the caulking portion integrates the flow path members and the plate-like member, exerts a force on the flow path member such that one of the opposing surfaces faces the other of the opposing surfaces, seals the gaps between the orifice plate and the opposing surfaces, and the elastic member is crushed between the flow path members to seal the gap between the flow path members.

公开(公告)号：US20180119860A1

公开(公告)日：2018-05-03

申请号：US15568938

申请日：2016-05-27

Applicant: FUJIKIN INCORPORATED

Inventor： Kazunari WATANABE ,  Toshiyuki INADA ,  Izuru SHIKATA ,  Tsutomu SHINOHARA

IPC: F16L37/15 ,  F16L37/14

CPC classification number: F16L37/15 ,  F16L23/036 ,  F16L37/144

Abstract: A method of forming a pipe joint includes: preparing a first pipe member, a second pipe member, a casing, and a pressing member to be arranged in the casing to press a second flange portion of the second pipe member against a first flange portion of the first pipe member, the casing having a first opening, a second opening, a third opening, a flange receiving space, and a receiving space in communication with the flange receiving space and adapted to receive the pressing member; inserting the first pipe member from the second opening toward the first opening until the first flange portion comes to rest within the flange receiving space; inserting the second pipe member into the second opening with the second flange portion ahead until the second flange portion comes into contact with the first flange portion.

公开(公告)号：US20240418290A1

公开(公告)日：2024-12-19

申请号：US18815030

申请日：2024-08-26

Applicant: FUJIKIN INCORPORATED

Inventor： Nobuo NAKAMURA ,  Kazunari WATANABE ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA

IPC: F16K31/122

Abstract: An actuator includes: a casing including a first pressing portion; a drive member including a second pressing portion, the drive member being driven by an operating fluid flowing from outside; and a sealing member disposed to be sandwiched between the casing and the drive member in a direction perpendicular to a moving direction of the drive member, the sealing member sealing a pressure chamber. The first pressing portion and the second pressing portion face each other in the moving direction of the drive member. The sealing member is positioned between the first pressing portion and the second pressing portion. The second pressing portion moves toward and away from the first pressing portion as the drive member moves, and when the second pressing portion is positioned close to the first pressing portion, the sealing member is configured to be sandwiched between the first pressing portion and the second pressing portion.

公开(公告)号：US20240240720A1

公开(公告)日：2024-07-18

申请号：US18575885

申请日：2022-05-12

Applicant: FUJIKIN INCORPORATED

Inventor： Kazunari WATANABE ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA

IPC: F16K7/17 ,  F16K31/122

CPC classification number: F16K7/17 ,  F16K31/1221

Abstract: A valve device includes: a flow path block in which a fluid inflow path and a fluid outflow path are formed; a diaphragm configured to open and close between the fluid inflow path and the fluid outflow path; and an actuator including a case, a piston accommodated in the case and having an air flow path formed therein, a stem configured to move the diaphragm to an open position or a closed position by moving integrally with the piston in an axial direction, an air introduction chamber surrounded by the case and the piston, and a one-touch joint configured to supply an air fluid to the air introduction chamber via the air flow path. The one-touch joint is coupled to the piston.

公开(公告)号：US20240229941A1

公开(公告)日：2024-07-11

申请号：US18576172

申请日：2022-06-08

Applicant: FUJIKIN INCORPORATED

Inventor： Kohei SHIGYOU ,  Takashi HIROSE ,  Takahiro MATSUDA ,  Kazunari WATANABE

IPC: F16K7/16 ,  F16K27/02

CPC classification number: F16K7/16 ,  F16K27/02

Abstract: A diaphragm valve, which is miniaturized while ensuring a required flow rate and has improved assemble workability and maintainability, includes a body defining a flow path; a diaphragm provided on a bottom surface of an accommodation recess; a fixing ring screwed with a screw portion formed on an inner peripheral surface of the accommodation recess to fix the diaphragm to the body; a stacked piezoelectric actuator; a support plate supporting the stacked piezoelectric actuator; a cylindrical actuator cover holding a diaphragm presser and configured to transmit the piezoelectric displacement of the stacked piezoelectric actuator while accommodating the stacked piezoelectric actuator inside; and a fixing member screwed with the common screw portion and cooperating with the fixing ring to fix the position of the support plate in the accommodation recess.

公开(公告)号：US20210404505A1

公开(公告)日：2021-12-30

申请号：US17363970

申请日：2021-06-30

Applicant: FUJIKIN INCORPORATED

Inventor： Tsutomu SHINOHARA ,  Tomohiro NAKATA ,  Takahiro MATUSDA ,  Kazunari WATANABE ,  Tomoki NAKADA ,  Yoshiaki WATANABE ,  Tomoko YUHARA ,  Kengo TSUJINO ,  Masanori UEBAYASHI

IPC: F16B39/01

Abstract: A bolt holding member is made of metal and holds a bolt in a fastened member. The bolt holding member includes: a main body portion that has a cylindrical shape; a first engaging piece that extends from the main body portion toward an inside of the main body portion at an incline relative to an axial direction of the main body portion; and a second engaging piece that extends from the main body portion toward an outside of the main body portion at an incline relative to the axial direction of the main body portion.