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公开(公告)号：US20200370664A1
公开(公告)日：2020-11-26
申请号：US16966270
申请日：2019-02-19
Applicant: FUJIKIN INCORPORATED
Inventor： Kazunari WATANABE , Kohei SHIGYOU , Yohei SAWADA , Tomohiro NAKATA , Tsutomu SHINOHARA
IPC: F16K7/16 , F16K27/02 , H01L21/67 , C23C16/455
Abstract: Provided is a valve device in which influence of a physical impact on a valve element is further reduced. Valve device includes a valve seat disposed around an opening connected to a flow path formed in a valve body, a diaphragm for opening and closing flow path by moving between a contact position and a non-contact position with respect to the valve seat, a presser adapter that contacts a peripheral portion of the diaphragm, a casing that incorporates an actuator for actuating the diaphragm and is fixed on the valve body by being screwed into a screw hole formed in the valve body, and an adapter fixing ring that is screwed into the screw hole and thereby fixed in the valve body while pressing the presser adapter and the diaphragm.
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2.发明申请公开(公告)号：US20190129452A1
公开(公告)日：2019-05-02
申请号：US16094252
申请日：2017-04-21
Applicant: FUJIKIN INCORPORATED
Inventor： Kaoru HIRATA , Katsuyuki SUGITA , Yohei SAWADA , Masahiko TAKIMOTO , Kouji NISHINO
IPC: G05D7/06 , G05B19/042
Abstract: The fluid controller includes a fluid control module and an external control module. The fluid control module includes a control valve on a flow channel, a valve driver circuit that drives the control valve, a fluid meter on a flow channel, and a first processor that processes a signal output from the fluid meter. The external control module includes a second processor that processes a signal output from the first processor. The second processor outputs a valve control signal according to the signal of the fluid meter output from the first processor, the valve control signal is directly input to the valve driver circuit without through the first processor, and the valve driver circuit outputs a voltage that drives the control valve according to the valve control signal from the second processor.
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3.发明申请公开(公告)号：US20190017855A1
公开(公告)日：2019-01-17
申请号：US16069126
申请日：2017-01-12
Applicant: FUJIKIN INCORPORATED
Inventor： Yohei SAWADA , Nobukazu IKEDA , Kouji NISHINO , Masaaki NAGASE
Abstract: A gas supply system includes a flow controller, a first shutoff valve provided downstream of the flow controller, a second shutoff valve provided in a first flow passage communicating with the downstream side of the first shutoff valve, a second flow passage branching from the first flow passage, a third shutoff valve provided in the second flow passage, a pressure sensor that detects a pressure in a flow passage surrounded by the first, second, and third shutoff valves, a temperature sensor that detects a temperature in the flow passage, a volume measuring tank having a known volume connected downstream of the third shutoff valve, and a controller that obtains a volume of the flow passage by applying Boyle's law to open and closed states of the third shutoff valve and calculates the flow rate using the passage volume and outputs of the pressure and temperature sensors.
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公开(公告)号：US20200159257A1
公开(公告)日：2020-05-21
申请号：US16634603
申请日：2018-07-24
Applicant: FUJIKIN INCORPORATED
Inventor： Satoru YAMASHITA , Yohei SAWADA , Masaaki NAGASE , Kouji NISHINO , Nobukazu IKEDA
IPC: G05D7/06
Abstract: A fluid control system (1) comprises: a first valve (21) provided downstream of a flow rate controller (10), a flow rate measuring device (30) provided downstream of the first valve (21) and having a second valve (22), an open/close detector (26) provided to the second valve (22), and a controller (25) for controlling an open/close operation of the first valve (21) and the second valve (22), and the controller (25) controls the open/close operation of the first valve (21) in response to a signal output from the open/close detector (26).
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Patent Agency Ranking
公开(公告)号：US20190178389A1
公开(公告)日：2019-06-13
申请号：US16310866
申请日：2017-07-25
Applicant: FUJIKIN INCORPORATED
Inventor： Yohei SAWADA , Kaoru HIRATA , Masaaki NAGASE , Kouji NISHINO , Nobukazu IKEDA
Abstract: A valve with a built-in orifice includes a base section having a housing recess and first and second flow passages; a valve seat body; an inner disc; a valve element; and an orifice body, wherein the housing recess has a wide-diameter section and a narrow-diameter section, the first flow passage is connected to a space between a wall surface of the narrow-diameter section and the orifice body to communicate with a valve chamber, and the second flow passage communicates with the valve chamber through a through hole of the orifice body and a through hole of the valve seat body.
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6.发明申请公开(公告)号：US20200232873A1
公开(公告)日：2020-07-23
申请号：US16063794
申请日：2016-12-15
Applicant: FUJIKIN INCORPORATED
Inventor： Masaaki NAGASE , Kaoru HIRATA , Yohei SAWADA , Kouji NISHINO , Nobukazu IKEDA
Abstract: An abnormality detection method performed using a flow rate control device including a restriction portion, a control valve, a first pressure sensor, a second pressure sensor, and a downstream valve, includes a step of changing the control valve and the downstream valve from an open state to a closed state, a step of measuring an upstream pressure or a downstream pressure in the closed state, and at least one step of (a) extracting an upstream pressure at a point when a difference between the upstream pressure and the downstream pressure reaches a predetermined value as an upstream convergence pressure, and extracting the downstream pressure as a downstream convergence pressure, and (b) extracting the time from a point when the control valve are changed to a closed state to a point when a difference between the upstream pressure and the downstream pressure reaches a predetermined value as a convergence time.
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公开(公告)号：US20190137309A1
公开(公告)日：2019-05-09
申请号：US16309697
申请日：2017-06-22
Applicant: FUJIKIN INCORPORATED
Inventor： Yohei SAWADA , Masaaki NAGASE , Kouji NISHINO , Nobukazu IKEDA
Abstract: In a method of calibrating a flow rate control device in which a flow rate is calibrated based on comparison with a flow rate measured by a flow rate reference gauge, a predetermined permissible error range is set for a plurality of flow rate settings, and the permissible error range of at least one specific flow rate setting among the plurality of flow rate settings is set to be smaller than the predetermined permissible error range.
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公开(公告)号：US20200011720A1
公开(公告)日：2020-01-09
申请号：US16483518
申请日：2018-02-08
Applicant: FUJIKIN INCORPORATED
Inventor： Masaaki NAGASE , Yohei SAWADA , Kouji NISHINO , Nobukazu IKEDA
Abstract: The flow rate measuring method is performed in a common gas supply system comprising a plurality of gas supply paths each having a first valve, and a gas measuring device formed downstream side of the plurality of gas supply paths, having a pressure sensor, a temperature sensor, and a downstream side second valve. The flow rate measuring method includes: a first step of opening any one of the first valves and the second valve to allow gas to flow, closing the second valve while gas is flowing, and closing the first valve after a predetermined time has elapsed, and then measuring a pressure and a temperature after the first valve has been closed; a second step of opening any one of first valves and the second valve to allow gas to flow, closing the any one of the first valve and the second valve at the same time while gas is flowing, and then measuring a pressure and temperature after the first valve and the second valve have been closed; and a third step of calculating the flow rate in accordance with the pressure and temperature measured in the first step and the pressure and temperature measured in the second step.
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公开(公告)号：US20190094847A1
公开(公告)日：2019-03-28
申请号：US16088333
申请日：2017-03-23
Applicant: FUJIKIN INCORPORATED
Inventor： Masaaki NAGASE , Kaoru HIRATA , Yohei SAWADA , Katsuyuki SUGITA , Kouji NISHINO , Nobukazu IKEDA
Abstract: A pressure-type flow rate control device includes a restriction part, a control valve disposed upstream of the restriction part, an upstream pressure sensor, a downstream pressure sensor, and a controller that diagnoses flow rate control by using pressure drop data on a flow passage between the control valve and the restriction part and reference pressure drop data, wherein a close command is issued to the control valve and a shutoff valve provided downstream of the downstream pressure sensor, and the controller determines whether a predetermined critical expansion condition is satisfied by using outputs of the upstream pressure sensor and the downstream pressure sensor after the control valve is closed, and diagnoses flow rate control by using the pressure drop data acquired during a period in which the predetermined critical expansion condition is satisfied.
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