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公开(公告)号：US10648572B2
公开(公告)日：2020-05-12
申请号：US16310866
申请日：2017-07-25
申请人： FUJIKIN INCORPORATED
发明人： Yohei Sawada , Kaoru Hirata , Masaaki Nagase , Kouji Nishino , Nobukazu Ikeda
摘要： A valve with a built-in orifice includes a base section having a housing recess and first and second flow passages; a valve seat body; an inner disc; a valve element; and an orifice body, wherein the housing recess has a wide-diameter section and a narrow-diameter section, the first flow passage is connected to a space between a wall surface of the narrow-diameter section and the orifice body to communicate with a valve chamber, and the second flow passage communicates with the valve chamber through a through hole of the orifice body and a through hole of the valve seat body.
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公开(公告)号：US10371630B2
公开(公告)日：2019-08-06
申请号：US14909424
申请日：2014-07-18
摘要： An inline concentration meter includes a light source unit emitting mixed light containing at least two wavelengths with a phase difference, a detecting unit including a light incident part for entering the mixed light emitted from the light source unit into a fluid passage of a detector body and at least two light detection parts receiving the mixed light passed through the fluid passage, a computing processor unit conducting frequency analyzes of detection signals of the mixed light output from the respective light detection parts and computing variations of intensities of the detection signals corresponding to absorbances in at least two frequency ranges to compute a concentration of fluid in the fluid passage based on the variations of the intensities of the detection signals, and a recording/displaying unit recording and displaying a value of the fluid concentration computed at the computing processor unit.
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公开(公告)号：US09746856B2
公开(公告)日：2017-08-29
申请号：US14785789
申请日：2014-04-09
申请人： FUJIKIN INCORPORATED
发明人： Kaoru Hirata , Atsushi Hidaka , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Katsuyuki Sugita , Takashi Hirose
IPC分类号： G01F1/42 , F16L55/027 , G05D7/06
CPC分类号： G05D7/0635 , F16L55/02718
摘要： A multi-hole orifice plate for flow control includes an orifice plate for controlling the flow rate of a fluid, wherein the opening area of one orifice necessary for the passage of a predetermined flow rate of fluid is divided to provide a plurality of orifices having a total opening area equal to said opening area.
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公开(公告)号：US09651467B2
公开(公告)日：2017-05-16
申请号：US14888841
申请日：2014-04-30
发明人： Yoshihiro Deguchi , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Michio Yamaji , Tadayuki Yakushijin
摘要： This invention is related to an optical-analysis-type raw material fluid density detector including a detector main body and a light oscillation unit and a light detection unit that are provided on the upper surface or the under surface of the detector main body, in which the detector main body has at least one recess formed in the upper surface and the under surface, a fluid flow path connecting a fluid inlet of the detector main body to the recess, a fluid flow path connecting the recesses to each other, and a fluid flow path connecting the recess to a fluid outlet of the detector main body; the light oscillation unit is disposed in the recess that is closest to the inlet; and light detection units are disposed in the remaining recesses.
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公开(公告)号：US20160274595A1
公开(公告)日：2016-09-22
申请号：US15171333
申请日：2016-06-02
发明人： Tadahiro Ohmi , Masahito Saito , Shoichi Hino , Tsuyoshi Shimazu , Kazuyuki Miura , Kouji Nishino , Masaaki Nagase , Katsuyuki Sugita , Kaoru Hirata , Ryousuke Dohi , Takashi Hirose , Tsutomu Shinohara , Nobukazu Ikeda , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
CPC分类号： G01F1/6847 , G01F1/363 , G01F1/40 , G01F5/005 , G01F7/005 , G05D7/0641 , G05D7/0652 , Y10T137/0379 , Y10T137/7759 , Y10T137/776 , Y10T137/7761 , Y10T137/8593 , Y10T137/86734 , Y10T137/86815 , Y10T137/87265 , Y10T137/87298 , Y10T137/87306 , Y10T137/87314 , Y10T137/87354 , Y10T137/8741 , Y10T137/87499 , Y10T137/87539 , Y10T137/87684
摘要： A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
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公开(公告)号：US20160169800A1
公开(公告)日：2016-06-16
申请号：US14909424
申请日：2014-07-18
CPC分类号： G01N21/5907 , G01N21/33 , G01N2021/3148 , G01N2021/5969 , G01N2021/8411 , G01N2021/8578 , G01N2201/0627 , G01N2201/0691
摘要： An inline concentration meter includes a light source unit emitting mixed light containing at least two wavelengths with a phase difference, a detecting unit including a light incident part for entering the mixed light emitted from the light source unit into a fluid passage of a detector body and at least two light detection parts receiving the mixed light passed through the fluid passage, a computing processor unit conducting frequency analyses of detection signals of the mixed light output from the respective light detection parts and computing variations of intensities of the detection signals corresponding to absorbances in at least two frequency ranges to compute a concentration of fluid in the fluid passage based on the variations of the intensities of the detection signals, and a recording/displaying unit recording and displaying a value of the fluid concentration computed at the computing processor unit.
摘要翻译： 在线浓度计包括发射包含至少两个具有相位差的波长的混合光的光源单元，包括用于将从光源单元发射的混合光进入检测器主体的流体通道的光入射部分的检测单元，以及 接收通过流体通道的混合光的至少两个光检测部件，计算处理器单元，对从各个光检测部分输出的混合光的检测信号进行频率分析，并计算与吸光度对应的检测信号的强度变化 至少两个频率范围，用于基于检测信号的强度的变化计算流体通道中的流体浓度;以及记录/显示单元，记录和显示在计算处理器单元处计算的流体浓度的值。
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公开(公告)号：US20130220451A1
公开(公告)日：2013-08-29
申请号：US13763178
申请日：2013-02-08
发明人： Tadahiro Ohmi , Masahito Saito , Shoichi Hino , Tsuyoshi Shimazu , Kazuyuki Miura , Kouji Nishino , Masaaki Nagase , Katsuyuki Sugita , Kaoru Hirata , Ryousuke Dohi , Takashi Hirose , Tsutomu Shinohara , Nobukazu Ikeda , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
IPC分类号： G05D7/06
CPC分类号： G05D7/0641 , G01F1/363 , G01F1/6842 , G01F1/6847 , G01F5/005 , G01F7/005 , G05D7/0635 , G05D7/0647 , G05D23/1927 , Y10T137/0379 , Y10T137/7759 , Y10T137/776 , Y10T137/8593 , Y10T137/86734 , Y10T137/86815 , Y10T137/87265 , Y10T137/87314 , Y10T137/8741 , Y10T137/87499 , Y10T137/87684
摘要： A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m (P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
摘要翻译： 提供一种压力式流量控制装置，其中通过孔口的流体流量计算为Qc = KP1（其中K是比例常数）或Qc = KP2m（P1-P2）n（其中K是比例常数 ，m和n常数）通过使用孔口上游侧压力P1和/或孔口下游侧压力P2。 控制阀的下游侧和压力式流量控制装置的流体供给管之间的流体通道平行地包括至少2个流体通道，并且为每个这些流体通道设置具有不同流量特性的孔，其中 小流量区域中的流体流向一个孔，用于在小流量区域中的流体的流量控制，而大流量区域中的流体流向另一个孔口，用于大流量区域中的流体的流量控制。
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18.发明授权公开(公告)号：US11988543B2
公开(公告)日：2024-05-21
申请号：US17755966
申请日：2020-11-26
申请人： FUJIKIN INCORPORATED
发明人： Atsushi Hidaka , Masaaki Nagase , Kouji Nishino , Nobukazu Ikeda , Kaoru Hirata
CPC分类号： G01F25/15 , G01F1/36 , G05D7/0635
摘要： An abnormality detection method is performed in a gas supply system including a flow rate control device having a restriction part, a control valve, a flow rate control pressure sensor for measuring upstream pressure, and a control circuit. The inflow pressure sensor measures the supply pressure. An upstream on/off valve is provided upstream of the inflow pressure sensor. The method includes closing the upstream on/off valve when the gas flows at a controlled flow rate at the downstream of the restriction part by controlling an opening degree of the control valve based on the output of the flow rate control pressure sensor; measuring a drop in supply pressure on the upstream side of the control valve after closing the upstream on/off valve while keeping the control valve open; and detecting the presence or absence of abnormality in the flow rate control device based on the measured supply pressure drop.
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公开(公告)号：US11686671B2
公开(公告)日：2023-06-27
申请号：US17288300
申请日：2019-10-18
申请人： FUJIKIN INCORPORATED
发明人： Masaaki Nagase , Hidekazu Ishii , Kouji Nishino , Nobukazu Ikeda
CPC分类号： G01N21/31 , G01N21/85 , G01N33/0037 , G01N2201/1211 , G01N2201/1218 , H01L21/02274
摘要： A concentration measurement device 100 includes a light source 22 for generating incident light to a measurement space 10A, a photodetector 24 for receiving light emitted from the measurement space, and an arithmetic control circuit 26 for calculating a concentration of a measurement fluid on the basis of an output of the photodetector, and the light source includes a first light-emitting element 22a for generating light having a first wavelength, and a second light-emitting element 22b for generating light having a second wavelength, and the concentration measurement device is configured so as to calculate the concentration using either light of the first wavelength or the second wavelength on the basis of the pressure or temperature of the measurement fluid.
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公开(公告)号：US11460396B2
公开(公告)日：2022-10-04
申请号：US17279179
申请日：2019-09-18
申请人： FUJIKIN INCORPORATED
发明人： Masaaki Nagase , Hidekazu Ishii , Kouji Nishino , Nobukazu Ikeda
IPC分类号： G01N21/27 , G01N21/17 , G01N21/3504 , G01N21/85
摘要： A concentration measurement method is performed using a concentration measurement device comprising: a measurement cell for flowing a fluid to be measured; a light source for generating light incident on the measurement cell; a photodetector for detecting light emitted from the measurement cell; an arithmetic unit for calculating the absorbance and concentration of the fluid to be measured based on an output of the photodetector; and a temperature sensor for measuring the temperature of the fluid to be measured. The concentration measurement method includes: a step of flowing a gas whose molecular structure varies with the temperature as the fluid to be measured in the measurement cell; a step of making light of a wavelength absorbable by the fluid to be measured to be incident from the light source to the measurement cell; a step of measuring the intensity of light emitted from the measurement cell by the photodetector; and a step of calculating the concentration of the fluid to be measured based on the temperature and the output of the photodetector measured by the temperature sensor.
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