公开(公告)号：US4427296A

公开(公告)日：1984-01-24

申请号：US299209

申请日：1981-09-03

Applicant: Frank C. Demarest ,  Richard A. Iderosa

Inventor： Frank C. Demarest ,  Richard A. Iderosa

IPC: G01B11/00 ,  G01B11/02 ,  G01B11/10 ,  G02B5/14

CPC classification number: G01B11/105

Abstract: An electro-optical measuring system is described wherein a laser or light beam is precisely translated in a straight line perpendicular to the direction of propagation of the beam at a uniform, repeatable speed to define a time-varying sensing field whose energy is picked up by a photosensor which yields an output signal. An object whose dimension is to be measured is inserted in the field whereby the output signal of the photosensor takes the form of a pulse whose leading edge is developed by the traversal of the beam across one edge of the object, thereby blocking passage of the energy to the photosensor. The trailing edge is developed by the traversal of the beam across the opposite edge of the object thereby restoring the energy to the photosensor. The width or time duration of the pulse is a measure of the distance between the two edges. Measurements of exceptional precision are obtained by a circulation reducer in the light path of the translated beam to substantially eliminate convection currents in the air, further precision is obtained by using group delay equalization in the edge sensing signal processing to reduce systematic errors due to variations in edge pulse width, and by using analog interpolation to provide high resolution measurement of the location of the edge of the object.

Abstract translation: 描述了一种电光测量系统，其中激光束或光束以均匀的可重复的速度精确地平移在与束的传播方向垂直的直线上，以限定时变感测场，其能量被 产生输出信号的光电传感器。 要测量其尺寸的物体被插入到场中，由此光电传感器的输出信号采取脉冲的形式，其脉冲的前沿是通过穿过物体的一个边缘的光束而产生的，从而阻挡能量的通过 到光电传感器。 后缘通过穿过对象的相对边缘的横梁进行展开，从而将能量恢复到光传感器。 脉冲的宽度或持续时间是两个边缘之间的距离的度量。 通过在平移光束的光路中的循环减速器来获得异常精度的测量，以基本上消除空气中的对流，通过在边缘感测信号处理中使用组延迟均衡来获得进一步的精度，以减少由于 边缘脉冲宽度，并通过使用模拟插值来提供高分辨率测量对象边缘的位置。

公开(公告)号：US08913226B2

公开(公告)日：2014-12-16

申请号：US13315957

申请日：2011-12-09

Applicant: Frank C. Demarest

Inventor： Frank C. Demarest

IPC: G03B27/42 ,  G01D5/244 ,  G01D5/38 ,  G03F7/20

CPC classification number: G01D5/24476 ,  G01D5/38 ,  G03F7/70775

Abstract: Methods and apparatuses for performing the same, where the methods include obtaining, from an interferometer, a time-varying interference signal S(t) based on a combination of a first beam and a second beam, the first beam being diffracted from an encoder scale, in which at least one of the encoder scale and the interferometer is moveable with respect to the other, obtaining one or more error correction signals based on one or more errors that modify the time-varying interference signal S(t), and outputting information about a change in a position of the encoder scale relative to the interferometer based on the time-varying interference signal S(t) and the one or more error correction signals.

Abstract translation: 用于执行相同的方法和装置，其中所述方法包括从干涉仪获得基于第一光束和第二光束的组合的时变干扰信号S（t），所述第一光束从编码器刻度 ，其中所述编码器标尺和所述干涉仪中的至少一个相对于另一个可移动，基于修改所述时变干扰信号S（t）的一个或多个错误获得一个或多个纠错信号，并输出信息 关于基于时变干扰信号S（t）和一个或多个纠错信号的编码器刻度相对于干涉仪的位置的变化。

公开(公告)号：US07616322B2

公开(公告)日：2009-11-10

申请号：US11462185

申请日：2006-08-03

Applicant: Henry A. Hill ,  Frank C. Demarest ,  Alan H. Field

Inventor： Henry A. Hill ,  Frank C. Demarest ,  Alan H. Field

IPC: G01B11/02

CPC classification number: G01B9/0207 ,  G01B9/02007 ,  G01B9/02084 ,  G03F7/70775

Abstract: An interference signal S(t) is provided from interference between two beams directed along different paths. The signal S(t) is indicative of changes in an optical path difference n{tilde over (L)}(t) between the different paths, where n is an average refractive index along the different paths, {tilde over (L)}(t) is a total physical path difference between the different paths, and t is time. An error signal is provided to reduce errors in an estimate of {tilde over (L)}(t). The error signal is derived at least in part based on one or more collective properties of a distribution of multi-dimensional values. At least one of the multi-dimensional values in the distribution is generated from a plurality of samples of the signal S(t) (e.g., samples of the signal captured at different times).

Abstract translation: 通过沿着不同路径指向的两个波束之间的干扰来提供干扰信号S（t）。 信号S（t）表示不同路径之间的光程差n（波形）（l）（t）的变化，其中n是沿着不同路径的平均折射率，（L）} （t）是不同路径之间的总物理路径差，t是时间。 提供了一个误差信号，以减少{tilde over（L）}（t）的估计中的误差。 至少部分地基于多维值的分布的一个或多个集合属性导出误差信号。 从信号S（t）的多个样本（例如，在不同时间捕获的信号的样本）生成分布中的多维值中的至少一个。

公开(公告)号：US06975406B2

公开(公告)日：2005-12-13

申请号：US10211435

申请日：2002-08-02

Applicant: Frank C. Demarest

Inventor： Frank C. Demarest

IPC: G01B9/02

CPC classification number: G01B9/02045 ,  G01B9/02003 ,  G01B9/02083 ,  G01B9/02084 ,  G01B2290/70

Abstract: A method and apparatus used to reduce glitches in measurements made by an accumulation of phase changes over a range greater than 2π. Embodiments of the invention feature the use of a glitch filter that receives a phase input indicating a position value. The glitch filter reduces glitches by using a feedback term that has been reduced modulo 2π.The method includes measuring a plurality of values of a measurement signal, determining a current position value based on each of the plurality of measured values, wherein determining includes determining a delta value based on a current measured value and a previous position value, wherein the delta value is reduced modulo 2π to a range of ±π, and determining the current position value based on the determined delta value, and outputting at least one of the determined current position value and a velocity value.

Abstract translation: 一种用于减少在大于2pi的范围内相位变化累积所产生的测量中的毛刺的方法和装置。 本发明的实施例的特征在于使用接收指示位置值的相位输入的毛刺滤波器。 毛刺滤波器通过使用已减少模数为2pi的反馈项来减少毛刺。 该方法包括测量测量信号的多个值，基于多个测量值中的每一个来确定当前位置值，其中确定包括基于当前测量值和先前位置值来确定增量值，其中Δ 将值2pi减小到±pi的范围，并且基于所确定的增量值来确定当前位置值，并输出所确定的当前位置值和速度值中的至少一个。

公开(公告)号：US06597459B2

公开(公告)日：2003-07-22

申请号：US09855473

申请日：2001-05-15

Applicant: Frank C. Demarest

Inventor： Frank C. Demarest

IPC: G01B902

CPC classification number: G01B9/02062 ,  G01B9/02003 ,  G01B9/02083 ,  G01B2290/70 ,  G01J3/45 ,  G03F7/70775 ,  G03F9/7049 ,  G03F9/7092

Abstract: A method for compensating data age in measurement signals from an interferometer includes measuring a value of the measurement signal and adjusting the measured value based on the measurement signal with a data age adjustment value to correct for data age.

公开(公告)号：US06525826B2

公开(公告)日：2003-02-25

申请号：US10101003

申请日：2002-03-19

Applicant: Peter De Groot ,  Henry A. Hill ,  Frank C. Demarest

Inventor： Peter De Groot ,  Henry A. Hill ,  Frank C. Demarest

IPC: G01B902

CPC classification number: G01B9/02007 ,  G01B9/02002 ,  G01B9/02027 ,  G01B9/02083 ,  G01B2290/60 ,  G01B2290/70

Abstract: Apparatus and methods particularly suitable for use in electro-optical metrology and other applications to measure and monitor the refractive index of a gas in a measurement path and/or the change in optical path length of the measurement path due to the gas while the refractive index of the gas may be fluctuating due to turbulence or the like and/or the physical length of the measuring path may be changing.

Abstract translation: 特别适用于电光计量学和其他应用的测量和监测测量路径中的气体的折射率和/或由于气体导致的测量路径的光路长度的变化的设备和方法，而折射率 的气体可能由于湍流等而波动，和/或测量路径的物理长度可能会改变。

公开(公告)号：US06407816B1

公开(公告)日：2002-06-18

申请号：US09736034

申请日：2000-12-13

Applicant: Peter De Groot ,  Henry A. Hill ,  Frank C. Demarest

Inventor： Peter De Groot ,  Henry A. Hill ,  Frank C. Demarest

IPC: G01B902

CPC classification number: G01B9/02007 ,  G01B9/02002 ,  G01B9/02027 ,  G01B9/02083 ,  G01B2290/60 ,  G01B2290/70

Abstract: Apparatus and methods particularly suitable for use in electro-optical metrology and other applications to measure and monitor the refractive index of a gas in a measurement path and/or the change in optical path length of the measurement path due to the gas while the refractive index of the gas may be fluctuating due to turbulence or the like and/or the physical length of the measuring path may be changing. More specifically, the invention employs electronic frequency processing to provide measurements of dispersion of the refractive index, the dispersion being substantially proportional to the density of the gas, and/or measurements of dispersion of the optical path length, the dispersion of the optical path length being related to the dispersion of the refractive index and the physical length of the measurement path. The refractive index of the gas and/or the optical path length effects of the gas are subsequently computed from the measured dispersion of the refractive index and/or the measured dispersion of the optical path length, respectively. The information generated by the inventive apparatus is particularly suitable for use in interferometric distance measuring instruments (DMI) to compensate for errors related to refractive index of gas in a measurement path brought about by environmental effects and turbulence induced by rapid stage slew rates.

Abstract translation: 特别适用于电光计量学和其他应用的测量和监测测量路径中的气体的折射率和/或由于气体导致的测量路径的光路长度的变化的设备和方法，而折射率 的气体可能由于湍流等而波动，和/或测量路径的物理长度可能会改变。 更具体地，本发明采用电子频率处理来提供折射率的色散的测量，该色散基本上与气体的密度成比例，和/或光程长度的色散的测量，光程长度的色散 与折射率的偏差和测量路径的物理长度有关。 随后根据测量的折射率的色散和/或光程长度的测量的色散分别计算气体的折射率和/或光程长度效应。 由本发明装置产生的信息特别适用于干涉测距仪（DMI），以补偿由环境影响引起的测量路径中的气体的折射率和由快速平台压摆率引起的湍流相关的误差。

公开(公告)号：US06327039B1

公开(公告)日：2001-12-04

申请号：US09252266

申请日：1999-02-18

Applicant: Peter de Groot ,  Henry A. Hill ,  Frank C. Demarest

Inventor： Peter de Groot ,  Henry A. Hill ,  Frank C. Demarest

IPC: G01B902

CPC classification number: G01B9/02007 ,  G01B9/02002 ,  G01B9/02027 ,  G01B9/02083 ,  G01B2290/60 ,  G01B2290/70

Abstract: Apparatus and methods particularly suitable for use in electro-optical metrology and other applications to measure and monitor the refractive index of a gas in a measurement path and/or the change in optical path length of the measurement path due to the gas while the refractive index of the gas may be fluctuating due to turbulence or the like and/or the physical length of the measuring path may be changing. More specifically, the invention employs electronic frequency processing to provide measurements of dispersion of the refractive index, the dispersion being substantially proportional to the density of the gas, and/or measurements of dispersion of the optical path length, the dispersion of the optical path length being related to the dispersion of the refractive index and the physical length of the measurement path. The refractive index of the gas and/or the optical path length effects of the gas are subsequently computed from the measured dispersion of the refractive index and/or the measured dispersion of the optical path length, respectively. The information generated by the inventive apparatus is particularly suitable for use in interferometric distance measuring instruments (DMI) to compensate for errors related to refractive index of gas in a measurement path brought about by environmental effects and turbulence induced by rapid stage slew rates.

Abstract translation: 特别适用于电光计量学和其他应用的测量和监测测量路径中的气体的折射率和/或由于气体导致的测量路径的光路长度的变化的设备和方法，而折射率 的气体可能由于湍流等而波动，和/或测量路径的物理长度可能会改变。 更具体地，本发明采用电子频率处理来提供折射率的色散的测量，该色散基本上与气体的密度成比例，和/或光程长度的色散的测量，光程长度的色散 与折射率的偏差和测量路径的物理长度有关。 随后根据测量的折射率的色散和/或光程长度的测量的色散分别计算气体的折射率和/或光程长度效应。 由本发明装置产生的信息特别适用于干涉测距仪（DMI），以补偿由环境影响引起的测量路径中的气体的折射率和由快速平台压摆率引起的湍流相关的误差。