公开(公告)号：US20240364070A1

公开(公告)日：2024-10-31

申请号：US18766700

申请日：2024-07-09

Applicant: Gigaphoton Inc.

Inventor： Atsushi FUCHIMUKAI ,  Toru SUZUKI

IPC: H01S3/083 ,  H01S3/00 ,  H01S3/105

CPC classification number: H01S3/0835 ,  H01S3/0071 ,  H01S3/105

Abstract: A laser apparatus includes an oscillator that outputs a laser beam, an amplifier that amplifies the laser beam in a chamber including discharge electrodes, front-side and rear-side optical systems disposed at positions facing each other across the chamber and constituting a ring resonator including a first optical path and a second optical path intersecting between the pair of discharge electrodes, a front-side observation device for observation of the first and second optical paths between the front-side optical system and the chamber, and a rear-side observation device for observation of the first and second optical paths between the rear-side optical system and the chamber. Through the first optical path, the front-side optical system outputs, toward the rear-side optical system, the laser beam from the oscillator. Through the second optical path, the rear-side optical system outputs, toward the front-side optical system, the laser beam through the first optical path.

公开(公告)号：US20240235149A1

公开(公告)日：2024-07-11

申请号：US18617704

申请日：2024-03-27

Applicant: Gigaphoton Inc.

Inventor： Hironori IGARASHI ,  Osamu WAKABAYASHI ,  Yousuke FUJIMAKI ,  Toru SUZUKI

IPC: H01S3/23 ,  H01S3/02 ,  H01S3/06 ,  H01S3/225

CPC classification number: H01S3/2333 ,  H01S3/025 ,  H01S3/0602 ,  H01S3/2251 ,  H01S3/2383

Abstract: A laser apparatus includes an oscillator that outputs laser light, an amplifier, a front optical system and a rear optical system that are disposed at positions where the front and rear optical systems face each other with a chamber sandwiched therebetween and constitute a ring resonator having a first optical path and a second optical path, and first plane parallel substrates disposed on the first optical path or the second optical path. The first optical path is an optical path along which the front optical system outputs the laser light. The second optical path is an optical path along which the rear optical system outputs the laser light. The first plane parallel substrates translate the first optical path and the second optical path, respectively, in the directions in which the first and second optical paths approach each other on the side facing the chamber.

公开(公告)号：US20160315439A1

公开(公告)日：2016-10-27

申请号：US15201769

申请日：2016-07-05

Applicant: Gigaphoton Inc.

Inventor： Toru SUZUKI ,  Yukio WATANABE ,  Miwa IGARASHI ,  Osamu WAKABAYASHI

IPC: H01S3/00 ,  H05G2/00 ,  G02B7/18 ,  G02B27/14 ,  G02B7/182

CPC classification number: H01S3/0071 ,  G02B7/1815 ,  G02B7/182 ,  G02B26/06 ,  G02B27/144 ,  H01S3/005 ,  H01S3/1003 ,  H01S3/2232 ,  H01S3/2316 ,  H05G2/003 ,  H05G2/008

Abstract: A mirror device may include: an optical element configured to reflect part of a laser beam and transmit the other part of the laser beam therethrough; and a holder in surface contact with the optical element to hold the optical element. A flatness of a contact surface of the holder in contact with the optical element may be equal to or smaller than a flatness of the optical element.

Abstract translation: 反射镜装置可以包括：光学元件，被配置为反射激光束的一部分并且透射激光束的另一部分; 以及与光学元件表面接触以保持光学元件的保持器。 与光学元件接触的保持器的接触表面的平坦度可以等于或小于光学元件的平坦度。

公开(公告)号：US20150264792A1

公开(公告)日：2015-09-17

申请号：US14724636

申请日：2015-05-28

Applicant: GIGAPHOTON INC.

Inventor： Toru SUZUKI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  G02B27/14 ,  H01S3/00

CPC classification number: H05G2/008 ,  G02B17/0892 ,  G02B27/0068 ,  G02B27/108 ,  G02B27/141 ,  H01S3/005 ,  H01S3/2391 ,  H05G2/003

Abstract: A laser beam controlling device may include: a guide laser device; a guide laser beam wavefront adjuster provided in a beam path of the guide laser beam outputted from the guide laser device; a beam combiner configured to adjust travel directions of a laser beam outputted from a laser system and the guide laser beam outputted from the guide laser beam wavefront adjuster to coincide with each other, a both beam wavefront adjuster provided in a beam path of both the laser beam and the guide laser beam outputted from the beam combiner, a beam monitor provided in a beam path of both the laser beam and the guide laser beam outputted from the both beam wavefront adjuster, and a controller configured to control the guide laser beam wavefront adjuster and the both beam wavefront adjuster based on detection results at the beam monitor with respect to both the laser beam and the guide laser beam.

Abstract translation: 激光束控制装置可以包括：导向激光装置; 引导激光束波前调整器，设置在从引导激光装置输出的引导激光束的光束路径中; 配置为调整从激光系统输出的激光束的行进方向和从引导激光束波前调整器输出的引导激光束彼此重合的光束组合器，设置在两个激光束的光束路径中的两个光束波前调整器 从束组合器输出的光束和引导激光束，设置在从两光束波前调整器输出的激光束和引导激光束的光束路径中的光束监视器，以及控制器，被配置为控制引导激光束波前调整器 以及基于在激光束和引导激光束两者的光束监视器处的检测结果的两个光束波前调整器。