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公开(公告)号：US11737200B2
公开(公告)日：2023-08-22
申请号：US17228157
申请日：2021-04-12
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Chun-Lin Louis Chang , Jen-Hao Yeh , Han-Lung Chang , Tzung-Chi Fu , Bo-Tsun Liu , Li-Jui Chen , Po-Chung Cheng
IPC: H05G2/00 , G21K1/06 , H01S3/13 , H01S3/104 , H01S3/23 , H01S3/11 , H01S3/223 , H01S3/134 , H01S3/10
CPC classification number: H05G2/008 , G21K1/062 , H01S3/104 , H01S3/1305 , H05G2/005 , H01S3/10038 , H01S3/10069 , H01S3/11 , H01S3/134 , H01S3/2232 , H01S3/2316 , H01S3/2333 , H01S3/2383
Abstract: A system includes a laser source operable to provide a laser beam, a laser amplifier having a gain medium operable to provide energy to the laser beam when the laser beam passes through the laser amplifier, and a residual gain monitor operable to provide a probe beam and operable to derive a residual gain of the laser amplifier from the probe beam when the probe beam passes through the laser amplifier while being offset from the laser beam in time or in path.
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公开(公告)号：US20180317308A1
公开(公告)日：2018-11-01
申请号：US15946316
申请日：2018-04-05
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Chun-Lin Louis Chang , Jen-Hao Yeh , Han-Lung Chang , Tzung-Chi Fu , Bo-Tsun Liu , Li-Jui Chen , Po-Chung Cheng
CPC classification number: H05G2/008 , G21K1/062 , H01S3/10038 , H01S3/10069 , H01S3/104 , H01S3/11 , H01S3/1305 , H01S3/134 , H01S3/2232 , H01S3/2316 , H01S3/2333 , H01S3/2383 , H05G2/005
Abstract: A laser system includes a laser source operable to provide a laser beam; a laser amplifier having an input port and an output port and operable to amplify the laser beam, the laser beam travelling along a main beam path through the laser amplifier from the input port to the output port; and a residual gain monitor operable to provide a probe laser beam, the probe laser beam travelling along a probe beam path through the laser amplifier from the output port to the input port, wherein the residual gain monitor calculates a residual gain of the laser amplifier according to the probe laser beam.
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公开(公告)号：US20180102620A1
公开(公告)日：2018-04-12
申请号：US15830373
申请日：2017-12-04
Applicant: Carl Zeiss SMT GmbH
Inventor： Michael Schall , Johannes Kraus , Holger Muenz , Ingrid Schuster , Willi Anderl , Ulrich Weber , Markus Bauer , Jeffrey Erxmeyer , Michel Le Maire
CPC classification number: H01S3/0071 , G02B5/04 , G02B5/08 , G02B5/12 , G02B7/1815 , H01S3/005 , H01S3/10023 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2333
Abstract: A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.
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公开(公告)号：US20180006425A1
公开(公告)日：2018-01-04
申请号：US15700754
申请日：2017-09-11
Applicant: Cymer, LLC , ASML NETHERLANDS B.V.
Inventor： Joshua Jon Thornes , Tanuj Aggarwal , Kevin Michael O'Brien , Frank Everts , Herman Philip Godfried , Russell Allen Burdt
CPC classification number: H01S3/1305 , G01J1/0228 , G01J1/4257 , G03F7/70041 , G03F7/70516 , G03F7/7055 , G03F7/70558 , G03F7/70575 , H01S3/036 , H01S3/0385 , H01S3/09702 , H01S3/1055 , H01S3/137 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2308 , H01S3/2333
Abstract: Online calibration of laser performance as a function of the repetition rate at which the laser is operated is disclosed. The calibration can be periodic and carried out during a scheduled during a non-exposure period. Various criteria can be used to automatically select the repetition rates that result in reliable in-spec performance. The reliable values of repetition rates are then made available to the scanner as allowed values and the laser/scanner system is then permitted to use those allowed repetition rates.
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公开(公告)号：US09843153B2
公开(公告)日：2017-12-12
申请号：US14816217
申请日：2015-08-03
Applicant: Carl Zeiss SMT GmbH
Inventor： Michael Schall , Johannes Kraus , Holger Muenz , Ingrid Schuster , Willi Anderl , Ulrich Weber , Markus Bauer , Jeffrey Erxmeyer , Michel Le Maire
IPC: H01S3/07 , H01S3/081 , G02B7/18 , H01S3/00 , H01S3/225 , G02B5/08 , H01S3/10 , G02B5/04 , G02B5/12 , H01S3/23
CPC classification number: H01S3/0071 , G02B5/04 , G02B5/08 , G02B5/12 , G02B7/1815 , H01S3/005 , H01S3/10023 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2333
Abstract: A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.
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Patent Agency Ranking
公开(公告)号：US20170085052A1
公开(公告)日：2017-03-23
申请号：US15530060
申请日：2016-11-29
Applicant: Advanced Optowave Corporation
Inventor： Xiaojie Zhao , Chun He
CPC classification number: H01S3/06754 , G02B5/3083 , G02B27/283 , G02B27/286 , H01S3/0078 , H01S3/06712 , H01S3/06787 , H01S3/094003 , H01S3/094053 , H01S3/10023 , H01S3/2333 , H01S3/2341 , H01S2301/02
Abstract: A multipass fiber amplifier comprises a micro-optic-module polarization separating device including a first ASE blocking device, a micro-optic-module 90° polarization rotating reflector including a second ASE blocking device, a pump source for providing pump light; a micro-optic-module wavelength-division multiplexer (WDM) for combining the pump light and the laser beam; and a gain fiber having a first end and a second end for amplifying the laser beam using the pump light, where the first ASE blocking device is coupled to the first end of the gain fiber and the second ASE blocking device is coupled to the second end of the gain fiber.
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公开(公告)号：US20160226209A1
公开(公告)日：2016-08-04
申请号：US15041066
申请日：2016-02-11
Applicant: IMRA AMERICA, INC.
Inventor： Martin FERMANN , Ingmar HARTL , Andrius MARCINKEVICIUS , Liang DONG
CPC classification number: H01S3/06737 , G02B6/02042 , H01S3/0057 , H01S3/0085 , H01S3/06704 , H01S3/06712 , H01S3/06729 , H01S3/06741 , H01S3/06745 , H01S3/06754 , H01S3/08059 , H01S3/094007 , H01S3/094019 , H01S3/094053 , H01S3/094076 , H01S3/10084 , H01S3/1305 , H01S3/1307 , H01S3/2333 , H01S3/2383
Abstract: High power parallel fiber arrays for the amplification of high peak power pulses are described. Fiber arrays based on individual fiber amplifiers as well as fiber arrays based on multi-core fibers can be implemented. The optical phase between the individual fiber amplifier elements of the fiber array is measured and controlled using a variety of phase detection and compensation techniques. High power fiber array amplifiers can be used for EUV and X-ray generation as well as pumping of parametric amplifiers.
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公开(公告)号：US20160211637A1
公开(公告)日：2016-07-21
申请号：US15068950
申请日：2016-03-14
Applicant: Martin A. Stuart , Stephen L. Cunningham
Inventor： Martin A. Stuart , Stephen L. Cunningham
IPC: H01S3/06 , H01S3/00 , H01S3/08 , H01S3/16 , C23C14/02 , H01S3/04 , H01S3/042 , H01S3/11 , C23C14/28 , H01S3/092 , H01S3/23
CPC classification number: H01S3/0606 , C23C14/02 , C23C14/28 , C23C16/27 , G02B6/1223 , H01L21/02115 , H01L21/02181 , H01L21/02183 , H01L21/02194 , H01L21/02266 , H01L21/3205 , H01L31/024 , H01L31/18 , H01S3/0071 , H01S3/0407 , H01S3/042 , H01S3/0615 , H01S3/0621 , H01S3/08027 , H01S3/08086 , H01S3/08095 , H01S3/0915 , H01S3/092 , H01S3/093 , H01S3/11 , H01S3/1601 , H01S3/1623 , H01S3/1625 , H01S3/163 , H01S3/1633 , H01S3/1636 , H01S3/1666 , H01S3/23 , H01S3/2316 , H01S3/2333
Abstract: A slab laser and its method of use for high power applications including the manufacture of semiconductors and deposition of diamond and/or diamond-like-carbon layers, among other materials. A lamp driven slab design with a face-to-face beam propagation scheme and an end reflection that redirects the amplified radiation back out the same input surface is utilized. A side-to-side amplifier configuration permitting very high average and peak powers having scalability is also disclosed. Cavity filters adjacent to pump lamps convert the normally unusable UV portion of the pump lamp spectrum into light in the absorption band of the slab laser, thereby increasing the overall pump efficiency. The angle of the end reflecting surface is changed to cause the exit beam to be at a different angle than the inlet beam, thereby eliminating the costly need to separate the beams external to the laser with the subsequent loss of power.
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公开(公告)号：US20160118764A1
公开(公告)日：2016-04-28
申请号：US14895411
申请日：2014-05-20
Inventor： Jean-Eucher Montagne , Sandrine Auroux , Bruno Esmiller
IPC: H01S3/23 , H01S3/06 , H01S3/0941 , H01S3/16
CPC classification number: H01S3/2333 , H01S3/025 , H01S3/0604 , H01S3/09415 , H01S3/1611 , H01S3/2316
Abstract: The invention concerns a laser amplification system comprising a pumping device and at least one thick amplifier disc having a first face, which is reflective at the wavelengths of a pulsed laser beam of the laser amplification system and of a pump beam of the pumping device, as well as at least one heat-dissipation component to which this first face of the amplifier disc is firmly secured, the saturation fluence of the active medium of the amplifier disc being equal to or less than 3 J·cm−2.
Abstract translation: 本发明涉及一种激光放大系统，其包括泵送装置和至少一个厚放大器盘，其具有在激光放大系统的脉冲激光束和泵送装置的泵浦波束的波长处的反射的第一面，作为 以及至少一个放大器盘的第一面牢固固定的散热部件，放大器盘的有源介质的饱和注量等于或小于3J·cm -2。
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10.发明授权公开(公告)号：US09276375B2
公开(公告)日：2016-03-01
申请号：US14566106
申请日：2014-12-10
Applicant: Northrop Grumman Systems Corp.
Inventor： Timothy McComb , Fabio Di Teodoro
CPC classification number: H01S5/005 , H01S3/0057 , H01S3/11 , H01S3/2333 , H01S5/50
Abstract: A system for generating a shaped optical pulse is disclosed. The system includes a master oscillator for generating an initial optical pulse, which is then directed to a semiconductor optical amplifier to amplify a portion of the initial optical pulse. The amplified pulse is reflected from a fiber Bragg grating to spectrally clean the amplified pulse and the reflected portion is returned back through the semiconductor optical amplifier. The semiconductor optical amplifier is activated a second time to amplify the reflected portion of the pulse. The time delay between the two activations of the semiconductor optical amplifier is selected to generate an output pulse with desired duration and/or amplitude profile over time.
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