Method of forming a sensor device
    12.
    发明授权

    公开(公告)号:US11855019B2

    公开(公告)日:2023-12-26

    申请号:US17173237

    申请日:2021-02-11

    IPC分类号: H01L23/00 G01N27/22

    摘要: The disclosed subject matter relates generally to methods of forming a semiconductor device, such as a moisture sensor. A plurality of electrodes and a bond pad are formed in a dielectric region. A passivation layer is formed on each electrode in the plurality of electrodes and the bond pad. A barrier layer is formed on the passivation layer. A plurality of trenches are formed to extend through the barrier layer and into the dielectric region. Formation of the trenches simultaneously exposes an upper surface of the bond pad. A moisture sensitive dielectric layer is formed on the barrier layer. Formation of the moisture sensitive dielectric layer also fills the trenches to form a plurality of projections, each projection being formed between two electrodes in the plurality of electrodes.

    Bond pad reliability of semiconductor devices

    公开(公告)号:US10892239B1

    公开(公告)日:2021-01-12

    申请号:US16508288

    申请日:2019-07-10

    IPC分类号: H01L23/34 H01L23/00

    摘要: The disclosed subject matter relates to a structure and method to improve bond pad reliability of semiconductor devices. According to an aspect of the present disclosure, a bond pad structure is provided that includes a dielectric layer and at least one bond pad in the dielectric layer, wherein the bond pad has a top surface. A passivation layer has an opening over the bond pad, wherein the opening has sidewalls. A low-k barrier layer is covering the sidewalls of the opening and the top surface of the bond pad. Protective structures are formed over the sidewalls of the opening.