公开(公告)号：US12261215B2

公开(公告)日：2025-03-25

申请号：US17649184

申请日：2022-01-27

Applicant: GlobalFoundries U.S. Inc.

Inventor： Hong Yu ,  Haiting Wang ,  Zhenyu Hu

IPC: H01L29/78 ,  H01L21/8234 ,  H01L29/66

Abstract: A structure is provided, the structure may include an active layer arranged over a buried oxide layer, the active layer having a top surface. The top surface of the active layer may have a first portion and a second portion. A barrier stack may be arranged over the first portion of the top surface of the active layer. The barrier stack may include a barrier layer. The second portion of the top surface of the active layer may be adjacent to the barrier stack. A fin may be spaced from the first portion of the top surface of the active layer by the barrier stack, the fin having a first side surface, a second side surface opposite to the first side surface and a top surface. A dielectric layer may be arranged on the first side surface, the second side surface and the top surface of the fin, and the second portion of the top surface of the active layer. A metal layer may be arranged over the dielectric layer.

公开(公告)号：US12159926B2

公开(公告)日：2024-12-03

申请号：US18373598

申请日：2023-09-27

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Haiting Wang ,  Alexander Derrickson ,  Jagar Singh ,  Vibhor Jain ,  Andreas Knorr ,  Alexander Martin ,  Judson R. Holt ,  Zhenyu Hu

IPC: H01L29/735 ,  H01L29/08 ,  H01L29/417 ,  H01L29/66 ,  H01L29/737

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. A structure includes: an intrinsic base comprising semiconductor material in a channel region of a semiconductor substrate; an extrinsic base vertically above the intrinsic base; a raised collector region on the semiconductor substrate and laterally connected to the intrinsic base; and a raised emitter region on the semiconductor substate and laterally connected to the intrinsic base.

公开(公告)号：US11810969B2

公开(公告)日：2023-11-07

申请号：US17509384

申请日：2021-10-25

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Haiting Wang ,  Alexander Derrickson ,  Jagar Singh ,  Vibhor Jain ,  Andreas Knorr ,  Alexander Martin ,  Judson R. Holt ,  Zhenyu Hu

IPC: H01L29/735 ,  H01L29/66 ,  H01L29/737 ,  H01L29/08 ,  H01L29/417

CPC classification number: H01L29/735 ,  H01L29/0808 ,  H01L29/0821 ,  H01L29/41708 ,  H01L29/6625 ,  H01L29/737

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. A structure includes: an intrinsic base comprising semiconductor material in a channel region of a semiconductor substrate; an extrinsic base vertically above the intrinsic base; a raised collector region on the semiconductor substrate and laterally connected to the intrinsic base; and a raised emitter region on the semiconductor substate and laterally connected to the intrinsic base.

公开(公告)号：US11784224B2

公开(公告)日：2023-10-10

申请号：US17455290

申请日：2021-11-17

Applicant: GlobalFoundries U.S. Inc.

Inventor： Hong Yu ,  Jagar Singh ,  Zhenyu Hu ,  John J. Pekarik

IPC: H01L29/10 ,  H01L29/417 ,  H01L29/423 ,  H01L29/40 ,  H01L29/737 ,  H01L29/66 ,  H01L29/735 ,  H01L29/08

CPC classification number: H01L29/1008 ,  H01L29/0808 ,  H01L29/0821 ,  H01L29/401 ,  H01L29/41708 ,  H01L29/42304 ,  H01L29/6625 ,  H01L29/66242 ,  H01L29/735 ,  H01L29/737

Abstract: The disclosure provides a lateral bipolar transistor structure with a base layer over a semiconductor buffer, and related methods. A lateral bipolar transistor structure may include an emitter/collector (E/C) layer over an insulator. The E/C layer has a first doping type. A semiconductor buffer is adjacent the insulator. A base layer is on the semiconductor buffer and adjacent the E/C layer, the base layer including a lower surface below the E/C layer and an upper surface above the E/C layer. The base layer has a second doping type opposite the first doping type.

公开(公告)号：US20230067523A1

公开(公告)日：2023-03-02

申请号：US17456943

申请日：2021-11-30

Applicant: GlobalFoundries U.S. Inc.

Inventor： Haiting Wang ,  Hong Yu ,  Zhenyu Hu ,  Alexander M. Derrickson

IPC: H01L29/10 ,  H01L29/735 ,  H01L29/66

Abstract: Embodiments of the disclosure provide a lateral bipolar transistor with a base layer of varying horizontal thickness, and related methods to form the same. A lateral bipolar transistor may include an emitter/collector (E/C) layer on a semiconductor layer. A first base layer is on the semiconductor layer and horizontally adjacent the E/C layer. The first base layer has a lower portion having a first horizontal width from the E/C layer. The first base layer also has an upper portion on the lower portion, with a second horizontal width from the E/C layer greater than the first horizontal width. A second base layer is on the first base layer and adjacent a spacer. The upper portion of the first base layer separates a lower surface of the second base layer from the E/C layer.

公开(公告)号：US20210273061A1

公开(公告)日：2021-09-02

申请号：US16803711

申请日：2020-02-27

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Haiting Wang ,  Tamilmani Ethirajan ,  Zhenyu Hu ,  Tung-Hsing Lee

IPC: H01L29/417 ,  H01L29/08 ,  H01L29/10 ,  H01L29/423 ,  H01L29/73

Abstract: One illustrative device disclosed herein includes a semiconductor substrate and a bipolar junction transistor (BJT) device that comprises a collector region, a base region and an emitter region. In this example, the device also includes a field effect transistor and at least one base conductive contact structure that conductively and physically contacts the base region.

公开(公告)号：US12107154B2

公开(公告)日：2024-10-01

申请号：US18324489

申请日：2023-05-26

Applicant: GlobalFoundries U.S. Inc.

Inventor： Haiting Wang ,  Hong Yu ,  Zhenyu Hu

IPC: H01L29/66 ,  H01L21/285 ,  H01L21/762 ,  H01L29/06 ,  H01L29/417 ,  H01L29/45 ,  H01L29/78

CPC classification number: H01L29/6681 ,  H01L21/28518 ,  H01L21/76224 ,  H01L29/0653 ,  H01L29/41791 ,  H01L29/45 ,  H01L29/7851

Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to single fin structures and methods of manufacture. The structure includes: an active single fin structure; a plurality of dummy fin structures on opposing sides of the active single fin structure; source and drain regions formed on the active single fin structure and the dummy fin structures; recessed shallow trench isolation (STI) regions between the dummy fin structures and the active single fin structure and below a surface of the dummy fin structures; and contacts formed on the source and drain regions of the active single fin structure with a spacing of at least two dummy fin structures on opposing sides of the contacts.

公开(公告)号：US20230066963A1

公开(公告)日：2023-03-02

申请号：US17537564

申请日：2021-11-30

Applicant: GlobalFoundries U.S. Inc.

Inventor： Hong Yu ,  Judson R. Holt ,  Zhenyu Hu

IPC: H01L29/10 ,  H01L29/165 ,  H01L29/735 ,  H01L29/737 ,  H01L29/66

Abstract: In a disclosed semiconductor structure, a lateral bipolar junction transistor (BJT) has a base positioned laterally between a collector and an emitter. The base includes a semiconductor fin with a first portion that extends from a substrate through an isolation layer, a second portion on the first portion, and a third portion on the second portion. The collector and emitter are on the isolation layer and positioned laterally immediately adjacent to opposing sidewalls of the second portion of the semiconductor fin. In some embodiments, the BJT is a standard BJT where the semiconductor fin (i.e., the base), the collector, and the emitter are made of the same semiconductor material. In other embodiments, the BJT is a heterojunction bipolar transistor (HBT) where a section of the semiconductor fin (i.e., the base) is made of a different semiconductor material for improved performance. Also disclosed is a method of forming the structure.

公开(公告)号：US20230061482A1

公开(公告)日：2023-03-02

申请号：US17455290

申请日：2021-11-17

Applicant: GlobalFoundries U.S. Inc.

Inventor： Hong Yu ,  Jagar Singh ,  Zhenyu Hu ,  John J. Pekarik

IPC: H01L29/10 ,  H01L29/417 ,  H01L29/423 ,  H01L29/735 ,  H01L29/737 ,  H01L29/66 ,  H01L29/40

Abstract: The disclosure provides a lateral bipolar transistor structure with a base layer over a semiconductor buffer, and related methods. A lateral bipolar transistor structure may include an emitter/collector (E/C) layer over an insulator. The E/C layer has a first doping type. A semiconductor buffer is adjacent the insulator. A base layer is on the semiconductor buffer and adjacent the E/C layer, the base layer including a lower surface below the E/C layer and an upper surface above the E/C layer. The base layer has a second doping type opposite the first doping type.

公开(公告)号：US11264470B2

公开(公告)日：2022-03-01

申请号：US16803711

申请日：2020-02-27

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Haiting Wang ,  Tamilmani Ethirajan ,  Zhenyu Hu ,  Tung-Hsing Lee

IPC: H01L29/417 ,  H01L29/08 ,  H01L29/73 ,  H01L29/10 ,  H01L29/423

Abstract: One illustrative device disclosed herein includes a semiconductor substrate and a bipolar junction transistor (BJT) device that comprises a collector region, a base region and an emitter region. In this example, the device also includes a field effect transistor and at least one base conductive contact structure that conductively and physically contacts the base region.