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公开(公告)号:US20240027745A1
公开(公告)日:2024-01-25
申请号:US18224093
申请日:2023-07-20
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Tomoyuki IDE , Yuki MORINAGA , Mikito TAKAHASHI
IPC: G02B26/08
CPC classification number: G02B26/0816
Abstract: An optical module includes: a mirror unit including a mirror device including a movable mirror portion provided with a coil; and a magnet unit including a first magnet, a second magnet, and a third magnet arranged along a first direction, and generating a magnetic field acting on the movable mirror portion. The mirror unit is disposed on the magnet unit in a second direction perpendicular to the first direction, and has a bottom surface facing the magnet unit. A protrusion portion protruding to a magnet unit side is formed on the bottom surface. A width of the protrusion portion in the first direction is equal to or less than a width of the first magnet in the first direction. The mirror unit is fixed to an upper surface of the first magnet at the protrusion portion.
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公开(公告)号:US20230168494A1
公开(公告)日:2023-06-01
申请号:US18103572
申请日:2023-01-31
Applicant: Hamamatsu Photonics K.K.
Inventor: Yuki MORINAGA , Anna YOSHIDA , Yoshihisa WARASHINA
CPC classification number: G02B27/0031 , G02B26/101 , G02B27/0006 , G02B26/085 , G02B26/0833 , G02B26/10
Abstract: An optical unit includes: a base which includes a main surface; a mirror device which includes a movable mirror portion and is disposed on the base; a frame member that is provided on the main surface so as to surround the mirror device; and a window member that is bonded to the frame member and has a flat plate shape. The frame member includes a first wall portion which is provided on the main surface and includes a first top surface on the side opposite to the main surface, a second wall portion which is provided on the main surface so as to face the first wall portion and includes a second top surface on the side opposite to the main surface.
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公开(公告)号:US20180148314A1
公开(公告)日:2018-05-31
申请号:US15316549
申请日:2015-06-10
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Sadaharu TAKIMOTO , Shinya IWASHINA , Masakuni KIMOTO , Yuki MORINAGA
CPC classification number: B81B3/001 , B81B3/00 , B81C3/00 , B81C3/001 , G02B7/1821 , G02B26/085 , G02B26/101
Abstract: A mirror drive device includes a support part, a movable part, a permanent magnet forming a magnetic field in the periphery of the movable part, and a circuit board disposed between the support part and the permanent magnet in a facing direction of a pair of principal surfaces of the movable part so as to cause the movable part to be positioned at an inside of the circuit board when viewed in the facing direction. The movable part includes a mirror disposition portion, a mirror disposed and a drive coil so as to face the permanent magnet. The support part includes a base portion connected to a connection member and a reinforcing portion extending from the base portion toward a side away from the permanent magnet and the circuit board. The drive coil is connected to electrodes by lead-out conductors.
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公开(公告)号:US20240190699A1
公开(公告)日:2024-06-13
申请号:US18581466
申请日:2024-02-20
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
CPC classification number: B81B7/0006 , B81B3/0075 , G02B26/08 , G02B26/085 , B81B2201/042 , B81B2201/045 , B81B2203/0154 , B81B2203/0181 , B81B2203/058 , B81B2207/07
Abstract: An actuator device includes a support portion, a movable portion, a connection portion, a first wiring provided to the connection portion, a second wiring provided to the movable portion, a first insulation layer which includes a first opening exposing a surface opposite to the movable portion in a first connection part located at the movable portion in one wiring of the first and second wirings, a second insulation layer covering the first and second wirings. The other wiring of the first and second wirings is connected to the surface of the first connection part in the first opening. A region corresponding to a corner of the other wiring of the first and second wirings in a surface opposite to the movable portion in the second insulation layer is curved in a convex shape toward an opposite side to the movable portion.
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公开(公告)号:US20240053603A1
公开(公告)日:2024-02-15
申请号:US18382777
申请日:2023-10-23
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Daiki SUZUKI , Tomoyuki IDE , Yuki MORINAGA
CPC classification number: G02B27/0031 , G02B26/101 , G02B27/0006 , G02B26/085 , G02B26/0833 , G02B26/10
Abstract: A mirror unit includes an optical scanning device, a frame member, and a window member. The frame member includes first and second wall portions facing each other in an X-axis direction. The first wall portion is higher than the second wall portion. The window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface of the optical scanning device. In a cross-section parallel to the X-axis direction, the first wall portion is separated from a first line passing through a first end at a side of the first wall portion in the mirror surface and a first corner portion formed at the side of the first wall portion by an outer surface opposite to the frame member and a first side surface in the window member.
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公开(公告)号:US20220242721A1
公开(公告)日:2022-08-04
申请号:US17725804
申请日:2022-04-21
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.
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公开(公告)号:US20200249470A1
公开(公告)日:2020-08-06
申请号:US16775467
申请日:2020-01-29
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Daiki SUZUKI , Tomoyuki IDE , Yuki MORINAGA
Abstract: In a mirror unit, a first wall portion is higher than a second wall portion. A window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface. When any one of first to fourth wall portions is set as a first reference wall portion, in a cross-section perpendicular to the first reference wall portion, a first line passing through a first end at a side of the first reference wall portion in the mirror surface and a first corner portion formed at the side of the first reference wall portion by an outer surface and a first side surface in the window member intersects the first wall portion. A wiring portion includes a portion extending inside a base and leads outside a frame member.
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公开(公告)号:US20190031500A1
公开(公告)日:2019-01-31
申请号:US16071558
申请日:2016-12-22
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis so that the movable portion is swingable about the second axis, a first wiring which is provided on the connection portion, and a second wiring which is provided on the support portion. The rigidity of a first metal material forming the first wiring is higher than that of a second metal material forming the second wiring. The second wiring is connected to a surface opposite to the support portion in a first connection part located on the support portion in the first connection part.
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公开(公告)号:US20230168493A1
公开(公告)日:2023-06-01
申请号:US18103030
申请日:2023-01-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Daiki SUZUKI , Tomoyuki IDE , Yuki MORINAGA
CPC classification number: G02B27/0031 , G02B26/101 , G02B27/0006 , G02B26/085 , G02B26/0833 , G02B26/10
Abstract: A mirror unit includes an optical scanning device, a frame member, and a window member. The frame member includes first and second wall portions facing each other in an X-axis direction. The first wall portion is higher than the second wall portion. The window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface of the optical scanning device. In a cross-section parallel to the X-axis direction, the first wall portion is separated from a first line passing through a first end at a side of the first wall portion in the mirror surface and a first corner portion formed at the side of the first wall portion by an outer surface opposite to the frame member and a first side surface in the window member.
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公开(公告)号:US20220342206A1
公开(公告)日:2022-10-27
申请号:US17763285
申请日:2020-09-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Shinya IWASHINA , Shigeyuki NAKAMURA , Naoto SAKURAI , Yuki MORINAGA , Daiki SUZUKI
Abstract: In an optical device, a mirror surface is provided in a movable portion. A support portion supports the movable portion through an elastic connection portion. A force generator generates force in the movable portion. A drive controller outputs a drive signal that operates the force generator. The movable portion has a resonance frequency higher than a frequency of the drive signal output from the drive controller in a state before the elastic connection portion is heated. The movable portion swings due to the elastic deformation of the elastic connection portion in response to the force of the force generator. A heat controller acquires a signal that indicates a swing state of the movable portion and performs, based on a phase of the acquired signal, feedback control of heating of the elastic connection portion by a heater.
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