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公开(公告)号：US12166471B2
公开(公告)日：2024-12-10
申请号：US17574200
申请日：2022-01-12
Applicant: HRL Laboratories, LLC
Inventor： Randall L. Kubena , Walter S. Wall
Abstract: A RF antenna having a magnetostrictive film may be made by patterning selected portions of a top surface of the quartz wafer for deposition of electrode metal and deposition of the magnetostrictive film and depositing the electrode metal and the magnetostrictive film; temporarily bonding the quartz wafer to a handle wafer; thinning the quartz wafer to a desired thickness; etching the quartz wafer to define the outlines of at least one quartz resonator bearing the electrode metal and the magnetostrictive film; patterning selected portions of a bottom surface the at least one quartz resonator for deposition of electrode metal and at least one bond pad and depositing the electrode metal and the at least one bond pad; bonding the at least one quartz resonator to a substrate wafer; and releasing the at least one quartz resonator from the handle wafer.
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公开(公告)号：US11996636B1
公开(公告)日：2024-05-28
申请号：US17459891
申请日：2021-08-27
Applicant: HRL Laboratories, LLC
Inventor： Walter S. Wall , Hyok J. Song , Randall L. Kubena , Carson R White
IPC: H01Q9/04 , H01Q1/34 , H01Q1/36 , H01Q5/357 , H01Q9/06 , H01Q9/16 , H01Q9/30 , H01Q13/10 , H01Q13/18 , H01Q23/00
CPC classification number: H01Q9/0442 , H01Q1/34 , H01Q1/36 , H01Q5/357 , H01Q9/0421 , H01Q9/065 , H01Q9/16 , H01Q9/30 , H01Q13/106 , H01Q13/18 , H01Q23/00
Abstract: An antenna system having at least one active element with a first end thereof for connection to a radio receiver, transmitter or transceiver and at least one electromechanical resonator connected in series with (i) at least portion of said at least one active element and at least another portion of said at least one active element or (ii) said at least one active element and said radio receiver, transmitter or transceiver. The at least one active element exhibits capacitive reactance at an intended frequency of operation and the at least one electromechanical resonator exhibits inductive reactance at the intended frequency of operation, the inductive reactance of the at least one electromechanical resonator offsetting or partially offsetting the capacitive reactance of the at least one antenna element at the intended frequency of operation.
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公开(公告)号：US11563419B1
公开(公告)日：2023-01-24
申请号：US16543409
申请日：2019-08-16
Applicant: HRL Laboratories, LLC
Inventor： Yook-Kong Yong , Randall L. Kubena , Deborah J. Kirby
Abstract: A resonator includes a piezoelectric layer comprising a piezoelectric material, the piezoelectric layer having a first surface and a second surface; an inner electrode disposed on the first surface of the piezoelectric layer, the inner electrode connected to a circuit; and an outer electrode surrounding the inner electrode on the first surface of the piezoelectric layer, the outer electrode left floating or connected to ground. The inner electrode and the outer electrode are separated by at least one gap smaller than an acoustic wavelength. One single piece electrode or multiple piece electrodes may be disposed on the second surface of the piezoelectric layer. The outer electrodes are configured for optimal modal confinement of an acoustic resonance while the inner electrodes are configured to produce a higher motional resistance than the interconnect resistance for maintaining high Q.
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公开(公告)号：US10819276B1
公开(公告)日：2020-10-27
申请号：US16370602
申请日：2019-03-29
Applicant: HRL Laboratories, LLC
Inventor： Randall L. Kubena , Walter S. Wall
Abstract: A RF antenna or sensor comprising substrate with at least a pair of resonators bonded thereto, whereon a first one of the at least a pair of resonators is coated with a magnetostrictive film and a second one of the at least a pair of resonators is not coated with a magnetostrictive film. The resonators are preferably connected to sustaining circuits to form oscillators and the oscillators a preferably used within a phase lock loop to detect the magnetic component of an incident RF field with a bandwidth determined by the phase lock loop. Also disclosed is a method of making a RF sensor or antenna comprises providing a substrate of a semiconductor material, simultaneously forming two resonators on the substrate, and during the forming of the resonators a resist coating partially covering a first one of the resonators and completely covering a second one of the resonators is applied. Then, a magnetostrictive material is deposited to regions not covered by the resist coating. Thereafter, the resist coating is removed thereby leaving the magnetostrictive material deposited on only one of the two resonators.
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公开(公告)号：US10581402B1
公开(公告)日：2020-03-03
申请号：US16102469
申请日：2018-08-13
Applicant: HRL LABORATORIES LLC.
Inventor： Randall L. Kubena
IPC: H03H9/215 , H03H9/05 , H03H9/13 , H01L41/047 , H01L41/053 , H03H3/02 , H03H9/125
Abstract: A piezoelectric quartz tuning fork resonator having a pair of tines formed from a common quartz plate, with a middle electrode and two outer electrodes being disposed at or on top and bottom surfaces of each of the pair of tines and interconnected such that the outer electrodes at or on the top and bottom surfaces of a first one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of a second one of the pair of tines and further interconnected such that the outer electrodes at or on the top and bottom surfaces of the second one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of the first one of the pair of tines.
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Patent Agency Ranking
公开(公告)号：US10571267B1
公开(公告)日：2020-02-25
申请号：US15253704
申请日：2016-08-31
Applicant: HRL Laboratories, LLC
Inventor： Logan D. Sorenson , Raviv Perahia , David T. Chang , Randall L. Kubena , Deborah J. Kirby , Hung Nguyen , Richard J. Joyce
IPC: G01C25/00 , G01C19/5776 , G01C19/5684 , H03L7/26 , H03G3/20
Abstract: An angular rate sensor. The sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first normal mode and in a second normal mode; a frequency reference configured to generate a reference signal; and a first phase control circuit. The first phase control circuit is configured to: measure a first phase difference between: a first phase target, and the difference between: a phase of an oscillation of the first normal mode and a phase of the reference signal. The first phase control circuit is further configured to apply a first phase correction signal to the CVG resonator, to reduce the first phase difference. A second phase control circuit is similarly configured to apply a second phase correction signal to the CVG resonator, to reduce a corresponding, second phase difference.
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公开(公告)号：US20190250198A1
公开(公告)日：2019-08-15
申请号：US16269847
申请日：2019-02-07
Applicant: HRL Laboratories, LLC
Inventor： Randall L. Kubena , Walter S. WALL , Yook-Kong YONG , Richard J. JOYCE
IPC: G01R29/08 , H04B17/21 , H04B17/318
CPC classification number: G01R29/0878 , H04B17/21 , H04B17/318
Abstract: A RF field sensor in which a magnetostrictive film is deposited on one or more electrodes of one or more quartz resonator(s) in which an electric field of the RF field is detected along one axis of the RF field sensor and a magnetic field of the RF field is detected along an orthogonal axis of the RF field sensor simultaneously.
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公开(公告)号：US10141906B1
公开(公告)日：2018-11-27
申请号：US15149026
申请日：2016-05-06
Applicant: HRL LABORATORIES LLC
Inventor： David T. Chang , Frederic P. Stratton , Hung Nguyen , Randall L. Kubena
Abstract: A method of fabricating a resonator includes providing a first quartz substrate, forming a metallic etch stop on a first surface of the first quartz substrate; attaching, using a temporary adhesive, the first surface of the first quartz substrate to a second quartz substrate, etching an opening for a via in a second surface of the first quartz substrate to the metallic etch stop, forming a metal electrode on the second surface of the first quartz substrate, the metal electrode penetrating the via in the first quartz substrate to make ohmic contact with the metallic etch stop, bonding the metal electrode formed on the second surface of the first quartz substrate to a pad formed on a host substrate; and dissolving the temporary adhesive to release the second quartz substrate from the first quartz substrate, wherein the first quartz substrate and the host substrate each comprise crystalline quartz.
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公开(公告)号：US09991863B1
公开(公告)日：2018-06-05
申请号：US14680902
申请日：2015-04-07
Applicant: HRL LABORATORIES LLC
Inventor： Randall L. Kubena , Deborah J. Kirby , David T. Chang
CPC classification number: H03H9/19 , H03H9/02062 , H03H9/0514
Abstract: A piezoelectric quartz shear-mode resonator includes plasma etched quartz tethers, each including a mount. The tethers are for mounting the resonator to a semiconductor substrate for the purpose of isolating the thermally-induced stress from the mounts from the active resonating region, wherein the quartz tethers have rounded corners.
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20.发明授权公开(公告)号：US09879997B1
公开(公告)日：2018-01-30
申请号：US14547057
申请日：2014-11-18
Applicant: HRL LABORATORIES, LLC
Inventor： Randall L. Kubena , Yook-Kong Yong , Deborah J. Kirby , David T. Chang
IPC: G01C19/5677 , H03H9/19
CPC classification number: G01C19/5677 , G01C19/5684 , H03H9/19
Abstract: A resonator assembly includes a semiconductor substrate; a resonator gyroscope, the resonator gyroscope including a first resonator formed in a layer of a first material; and an oscillator on the semiconductor substrate, the oscillator including a second resonator formed of a second material. The second resonator is disposed in a cavity, the cavity comprising a first recess in the layer of a first material with the edges of the first recess being attached to the substrate, or the cavity comprising a second recess in the substrate and the edges of the second recess being attached to the layer of a first material.
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