OPTICAL PROPERTY MEASUREMENT APPARATUS AND OPTICAL PROPERTY MEASUREMENT METHOD

    公开(公告)号:US20230304923A1

    公开(公告)日:2023-09-28

    申请号:US18120551

    申请日:2023-03-13

    CPC classification number: G01N21/31 G02F1/31 G02F2203/055

    Abstract: An optical property measurement apparatus includes a pulse formation unit, a waveform measurement unit, and an optical system. The pulse formation unit is capable of changing a temporal waveform of pulsed light in accordance with a type of optical property to be measured. The waveform measurement unit measures a temporal waveform of the pulsed light output from a measurement object after being incident on the measurement object. The optical system has an attenuation unit with an attenuation rate with respect to one wavelength component constituting the pulsed light larger than an attenuation rate with respect to another wavelength component constituting the pulsed light. The optical system is capable of switching between a first state in which the attenuation unit is arranged on an optical path of the pulsed light output from the measurement object and a second state in which the attenuation unit is not arranged on the optical path.

    ADJUSTMENT METHOD FOR ADAPTIVE OPTICS SYSTEM, ADAPTIVE OPTICS SYSTEM, AND STORAGE MEDIUM STORING PROGRAM FOR ADAPTIVE OPTICS SYSTEM
    13.
    发明申请
    ADJUSTMENT METHOD FOR ADAPTIVE OPTICS SYSTEM, ADAPTIVE OPTICS SYSTEM, AND STORAGE MEDIUM STORING PROGRAM FOR ADAPTIVE OPTICS SYSTEM 有权
    自适应光学系统的自适应调整方法,自适应光学系统和自适应光学系统的存储媒体存储程序

    公开(公告)号:US20160131901A1

    公开(公告)日:2016-05-12

    申请号:US14895588

    申请日:2014-05-29

    Abstract: An adaptive optics system includes a spatial light modulator configured to spatially modulate a phase of an optical image incident on a modulation surface and a wavefront sensor including a lens array having a plurality of two-dimensionally arranged lenses and an optical detection element for detecting a light intensity distribution including converging spots formed by the lens array and configured to receive the optical image after the modulation from the spatial light modulator, and compensates for wavefront distribution by controlling a phase pattern displayed in the spatial light modulator based on a wavefront shape of the optical image obtained from the light intensity distribution, wherein a correspondence relation between the modulation surface and the wavefront sensor is adjusted.

    Abstract translation: 自适应光学系统包括:空间光调制器,被配置为空间调制入射在调制表面上的光学图像的相位;以及波前传感器,包括具有多个二维排列的透镜的透镜阵列和用于检测光的光学检测元件 强度分布,包括由透镜阵列形成的会聚点,并被配置为从空间光调制器接收调制后的光学图像,并且通过基于光学器件的波前形状控制在空间光调制器中显示的相位图案来补偿波前分布 从光强分布获得的图像,其中调整表面和波前传感器之间的对应关系被调整。

    ANGULAR DISPLACEMENT DETECTING METHOD FOR ADAPTIVE OPTICS SYSTEM, IMAGING MAGNIFICATION DETECTING METHOD FOR ADAPTIVE OPTICS SYSTEM, AND ADAPTIVE OPTICS SYSTEM
    14.
    发明申请
    ANGULAR DISPLACEMENT DETECTING METHOD FOR ADAPTIVE OPTICS SYSTEM, IMAGING MAGNIFICATION DETECTING METHOD FOR ADAPTIVE OPTICS SYSTEM, AND ADAPTIVE OPTICS SYSTEM 有权
    自适应光学系统的角位移检测方法,自适应光学系统的成像放大检测方法和自适应光学系统

    公开(公告)号:US20160109700A1

    公开(公告)日:2016-04-21

    申请号:US14895517

    申请日:2014-05-29

    Abstract: An adaptive optics system includes a spatial light modulator configured to spatially modulate a phase of an optical image incident on a modulation surface and a wavefront sensor including a lens array having a plurality of two-dimensionally arranged lenses and an optical detection element for detecting a light intensity distribution including converging spots formed by the lens array and configured to receive the optical image after the modulation from the spatial light modulator, and compensates for wavefront distribution by controlling a phase pattern displayed in the spatial light modulator based on a wavefront shape of the optical image obtained from the light intensity distribution, wherein an amount of angular displacement between the modulation surface and the wavefront sensor is calculated.

    Abstract translation: 自适应光学系统包括:空间光调制器,被配置为空间调制入射在调制表面上的光学图像的相位;以及波前传感器,包括具有多个二维排列的透镜的透镜阵列和用于检测光的光学检测元件 强度分布,包括由透镜阵列形成的会聚点,并被配置为从空间光调制器接收调制后的光学图像,并且通过基于光学器件的波前形状控制在空间光调制器中显示的相位图案来补偿波前分布 从光强度分布获得的图像,其中计算出调制表面和波前传感器之间的角位移量。

    OPTICAL MODULE, OPTICAL OBSERVATION DEVICE, AND LIGHT EXPOSURE DEVICE
    15.
    发明申请
    OPTICAL MODULE, OPTICAL OBSERVATION DEVICE, AND LIGHT EXPOSURE DEVICE 审中-公开
    光学模块,光学观测装置和曝光装置

    公开(公告)号:US20160048069A1

    公开(公告)日:2016-02-18

    申请号:US14782021

    申请日:2014-03-25

    Inventor: Takashi INOUE

    CPC classification number: G02F1/19 G02B27/283 G02F1/136 H04N5/2256 H04N5/372

    Abstract: An optical module (1A) includes a polarization beam splitter (10) that receives input light (L1) including a p-polarization component using a light splitting surface (11), a first polarization element (20) that rotates a polarization plane of the input light (L1) transmitted through the light splitting surface (11), a first reflective SLM (30) that modulates the input light (L1) to generate first modulation light (L2), a second polarization element (40) that rotates a polarization plane of the first modulation light (L2) passing through the first polarization element (20) again and reflected by the light splitting surface (11), and a second reflective SLM (50) that modulates the first modulation light (L2) to generate second modulation light (L3). The second modulation light (L3) passes through the second polarization element (40) again, is transmitted through the light splitting surface (11), and then is output.

    Abstract translation: 光学模块(1A)包括:偏振分束器(10),其使用光分离表面(11)接收包括p偏振分量的输入光(L1);第一偏振元件(20),其使所述偏振面 通过光分离表面(11)传输的输入光(L1),调制输入光(L1)以产生第一调制光(L2)的第一反射SLM(30),旋转极化的第二偏振元件 再次通过第一偏振元件(20)并由分光表面(11)反射的第一调制光(L2)的平面和调制第一调制光(L2)的第二反射SLM(50)产生第二调制光 调制光(L3)。 第二调制光(L3)再次穿过第二偏振元件(40),透过分光表面(11),然后被输出。

    DEVICE FOR GENERATING PATTERNED LIGHT INTERFERENCE
    16.
    发明申请
    DEVICE FOR GENERATING PATTERNED LIGHT INTERFERENCE 审中-公开
    用于产生图形光干扰的装置

    公开(公告)号:US20150346685A1

    公开(公告)日:2015-12-03

    申请号:US14654929

    申请日:2013-10-24

    Abstract: A patterned light interference generating device 1 is provided with a laser light source 10; a wavefront controller 20 for receiving laser light, presenting a hologram pattern to control the wavefront of the laser light, and outputting wavefront-controlled light; an imaging optical system 40 for imaging the wavefront-controlled light at a target position 2; a filter 50 arranged at a portion of concentration by the imaging optical system 40; and a control unit 30 for controlling the hologram pattern; the filter 50 has a plurality of slits in one-to-one correspondence to a plurality of bright spots of a desired order; each of the plurality of slits has an elongated shape extending radially from a center of the plurality of bright spots of the desired order; one end on the center side of each of the plurality of slits is separated from the center.

    Abstract translation: 图案化光干涉产生装置1设置有激光光源10; 用于接收激光的波前控制器20,呈现全息图图案以控制激光的波前,并输出波前控制的光; 用于对目标位置2处的波前控制的光进行成像的成像光学系统40; 配置在成像光学系统40的浓度部分的过滤器50; 以及控制单元30,用于控制全息图图形; 过滤器50具有与所需顺序的多个亮点一一对应的多个狭缝; 多个狭缝中的每一个具有从所需顺序的多个亮点的中心径向延伸的细长形状; 多个狭缝中的每一个的中心侧的一端与中心分离。

    APPARATUS CONVERTING INPUT VALUE TO CONTROL VALUE, DRIVING PIXEL BASED ON CONTROL VALUE, AND MODULATING LIGHT
    17.
    发明申请
    APPARATUS CONVERTING INPUT VALUE TO CONTROL VALUE, DRIVING PIXEL BASED ON CONTROL VALUE, AND MODULATING LIGHT 审中-公开
    设备转换输入值控制值,驱动像素基于控制值和调制光

    公开(公告)号:US20140232766A1

    公开(公告)日:2014-08-21

    申请号:US14264692

    申请日:2014-04-29

    Abstract: In an apparatus for modulating light, an spatial light modulator includes a plurality of pixels and configured to modulate input light in response to a drive voltage for each of the pixels. An input value setting unit is configured to set an input value for the each of pixels. The input value is a digital value, an entire gray level of the digital value is “N”, and “N” is a natural number. A converting unit is configured to convert the input value to a control value. A control value is a digital value, an entire gray level of the control value is “M”, and “M” is a natural number greater than “N”. A driving unit is configured to convert the control value to a voltage value and drive the each of the pixels in response to the drive voltage corresponding to the voltage value.

    Abstract translation: 在用于调制光的装置中,空间光调制器包括多个像素并且被配置为响应于每个像素的驱动电压来调制输入光。 输入值设置单元被配置为设置每个像素的输入值。 输入值为数字值,数字值的整个灰度级为“N”,“N”为自然数。 A转换单元被配置为将输入值转换为控制值。 控制值为数字值,控制值的全部灰度级为“M”,“M”为大于“N”的自然数。 驱动单元被配置为将控制值转换为电压值,并且响应于对应于电压值的驱动电压驱动每个像素。

    LIGHT CONTROL DEVICE AND LIGHT CONTROL METHOD
    18.
    发明申请
    LIGHT CONTROL DEVICE AND LIGHT CONTROL METHOD 审中-公开
    光控制装置和灯控制方法

    公开(公告)号:US20130242373A1

    公开(公告)日:2013-09-19

    申请号:US13871396

    申请日:2013-04-26

    Abstract: A light control device 1 includes a light source 10, a prism 20, a spatial light modulator 30, a drive unit 31, a control unit 32, a lens 41, an aperture 42, and a lens 43. The spatial light modulator 30 is a phase modulating spatial light modulator, includes a plurality of two-dimensionally arrayed pixels, is capable of phase modulation in each of these pixels in a range of 4π or more, and presents a phase pattern to modulate the phase of light in each of the pixels. This phase pattern is produced by superimposing a blazed grating pattern for light diffraction and a phase pattern having a predetermined phase modulation distribution, and with a phase modulation range of 2π or more.

    Abstract translation: 光控制装置1包括光源10,棱镜20,空间光调制器30,驱动单元31,控制单元32,透镜41,孔42和透镜43.空间光调制器30是 包括多个二维排列的像素的相位调制空间光调制器能够在4pi或更大的范围内在这些像素的每一个中进行相位调制,并且呈现相位图案以调制每个像素中的每一个中的相位 像素。 该相位图案通过叠加用于光衍射的闪耀光栅图案和具有预定相位调制分布的相位图案,并且相位调制范围为2pi或更大来产生。

    DATA CREATION APPARATUS, LIGHT CONTROL APPARATUS, DATA CREATION METHOD, AND DATA CREATION PROGRAM

    公开(公告)号:US20200218098A1

    公开(公告)日:2020-07-09

    申请号:US16732590

    申请日:2020-01-02

    Abstract: An iterative Fourier transform unit of a modulation pattern calculation apparatus performs a Fourier transform on a waveform function including an intensity spectrum function and a phase spectrum function, performs a replacement of a temporal intensity waveform function based on a desired waveform after the Fourier transform, and then performs an inverse Fourier transform. The iterative Fourier transform unit performs the replacement using a result of multiplying a function representing the desired waveform by a coefficient. The coefficient has a value with which a difference between the function after the multiplication of the coefficient and the temporal intensity waveform function after the Fourier transform is smaller than a difference before the multiplication, and a ratio of the difference is smaller when an intensity is higher at each time of the function before the multiplication.

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