公开(公告)号：US08159107B2

公开(公告)日：2012-04-17

申请号：US11757331

申请日：2007-06-01

申请人： Harold L. Stalford

发明人： Harold L. Stalford

IPC分类号： H01L41/08

CPC分类号： H02N10/00 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/034 ,  B81B2201/037 ,  B81B2201/051 ,  H02K7/00 ,  H02N1/002 ,  H02N11/006

摘要： A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.

摘要翻译： 微型旋转机器可以包括微型致动器和耦合到微型致动器的微型轴。 微型轴包括水平轴，并且可由微型致动器旋转。 微型工具联接到微型轴，并且可操作以响应于微型轴的运动而执行工作。

公开(公告)号：US07710232B1

公开(公告)日：2010-05-04

申请号：US11746147

申请日：2007-05-09

申请人： Harold L. Stalford ,  Vincent M. Hietala ,  James G. Fleming ,  Carol Fleming, legal representative

发明人： Harold L. Stalford ,  Vincent M. Hietala ,  James G. Fleming

IPC分类号： H01F27/29 ,  H01F21/04 ,  H01F5/00 ,  H01H57/00 ,  H02N1/00 ,  H01G5/00

CPC分类号： H01F21/04 ,  H01F21/005

摘要： A microelectromechanical tunable inductor is formed from a pair of substantially-identically-sized coils arranged side by side and coiled up about a central axis which is parallel to a supporting substrate. An in-plane stress gradient is responsible for coiling up the coils which. The inductance provided by the tunable inductor can be electrostatically changed either continuously or in discrete steps using electrodes on the substrate and on each coil. The tunable inductor can be formed with processes which are compatible with conventional IC fabrication so that, in some cases, the tunable inductor can be formed on a semiconductor substrate alongside or on top of an IC.

摘要翻译： 微电子机械可调电感器由一对并排布置的大致相同尺寸的一对线圈形成，并围绕平行于支撑衬底的中心轴卷绕起来。 面内应力梯度负责卷绕线圈。 由可调电感器提供的电感可以使用基板和每个线圈上的电极以连续或分立的方式静电地改变。 可调电感器可以由与常规IC制造兼容的工艺形成，使得在一些情况下，可调谐电感器可以形成在IC旁边或顶部上的半导体衬底上。

公开(公告)号：US07095295B1

公开(公告)日：2006-08-22

申请号：US10443951

申请日：2003-05-21

申请人： Harold L. Stalford ,  Michael A. Butler ,  W. Kent Schubert

发明人： Harold L. Stalford ,  Michael A. Butler ,  W. Kent Schubert

IPC分类号： H03H9/46

CPC分类号： H03H9/02409

摘要： A method for tuning a vibratory device including a cantilevered resonator comprising the steps of increasing a voltage V0 supplied to the vibratory device to thereby increase the bandwidth of the vibratory device; and keeping the resonant frequency of the vibratory device at substantially that natural frequency of the cantilevered resonator, wherein the vibratory device comprises: a capacitor including a movable plate and a fixed plate spaced from each other, the movable plate being part of the cantilevered resonator; a voltage source connected to the capacitor for providing voltage V0 across the capacitor to produce an attractive force between movable plate and fixed plate; a circuit connecting the voltage source to the capacitor; and a load resistor in said circuit having a resistance RL satisfying the following equation: μ = ω 0 ⁢ c 0 ⁢ R L ( 1 - λ ) where: μ is at least 10; ω0 is the beam constant for the cantilevered resonator; c0 is the capacitance for the capacitor; and λ is the voltage dependent coupling parameter for voltage V0.

摘要翻译： 一种用于调谐包括悬臂谐振器的振动装置的方法，包括以下步骤：增加提供给振动装置的电压V SUB，从而增加振动装置的带宽; 并且将所述振动装置的谐振频率保持在所述悬臂谐振器的基本固有频率，其中所述振动装置包括：包括可移动板和彼此间隔开的固定板的电容器，所述可移动板是所述悬臂谐振器的一部分; 连接到电容器的电压源，用于在电容器之间提供电压V 0以在可动板和固定板之间产生吸引力; 将电压源连接到电容器的电路; 并且所述电路中的负载电阻具有满足以下等式的电阻R L：