公开(公告)号：US20060150685A1

公开(公告)日：2006-07-13

申请号：US10559481

申请日：2004-06-03

Applicant: Heinz Fabian

Inventor： Heinz Fabian

IPC: C03B37/07 ,  C03B37/025

CPC classification number: C03B37/01242 ,  C03B37/0253 ,  C03B2205/44

Abstract: The invention relates to a method for the production of an optical component made of quartz glass by elongating a coaxial array, comprising of a hollow quartz glass cylinder that has an inner bore hole and that has been mechanically machined to the end volume and a core rod arranged inside the inner bore hole, wherein the coaxial array is fed to a heat zone with a predetermined forward feed motion and is softened zonewise therein and the optical component is drawn from the softened area, wherein an annular gap between the core rod and the hollow cylinder is collapsed. The invention aims at providing an economical method by means of which an optical component can be produced and which is characterized by a low break rate when the fibers are drawn. Depending on the outer diameter of the hollow cylinder D [in mm], the forward feed motion V [in mm/min] is maintained within a range complying with the following calculation Vmin=3000×(2/D)2 and Vmax=16000×(2/D)2.

Abstract translation: 本发明涉及一种用于生产由石英玻璃制成的光学部件的方法，该方法是通过延长同轴阵列，该同轴阵列包括具有内孔的中空石英玻璃圆筒，并且已经被机械加工到端部容积，并且芯棒 布置在所述内孔内部，其中所述同轴阵列以预定的向前进给运动被馈送到加热区，并且在其中同步地软化，并且所述光学部件从所述软化区域被拉出，其中所述芯棒和所述中空孔之间的环形间隙 气瓶倒塌。 本发明旨在提供一种经济的方法，通过该方法可以制造光学部件，并且其特征在于当拉伸纤维时具有低断裂率。 取决于中空圆筒D的外径[mm]，正向进给运动V [mm / min]保持在符合以下计算范围的范围内V = 3000x（2 / D）＆lt; 2＆gt;和V max max = 16000×（2 / D）＆lt; 2＆gt; 2。

公开(公告)号：US07028508B2

公开(公告)日：2006-04-18

申请号：US10507944

申请日：2003-03-06

Applicant: Heinz Fabian ,  Thomas J. Miller

Inventor： Heinz Fabian ,  Thomas J. Miller

IPC: C03B37/018

CPC classification number: C03B37/02754 ,  C03B2205/14 ,  C03B2205/16 ,  Y02P40/57

Abstract: In the known method for producing an optical fiber, a coaxial arrangement comprising a core rod and an outer jacket tube is elongated, the coaxial arrangement being supplied in a vertical orientation to a heating zone and being softened therein zonewise, starting with the lower end thereof, and the optical fiber being withdraw downwards from the softened portion, whereby an annular gap existing between core rod and jacket tube is collapsed. Starting therefrom, in order to provided a method which makes it possible to produce optical fibers with a minimum curl and at low costs, the invention suggests that a quartz glass cylinder treated mechanically to its final dimension and having an outer diameter of at least 100 mm should be used as the jacket tube. An optical fiber obtained according to the method is characterized in that without the action of external forces it assumes a radius of curvature of at least 6 mm.

Abstract translation: 在已知的光纤制造方法中，包括芯棒和外护套管的同轴装置是细长的，同轴装置以垂直取向供应到加热区并且沿着其下端开始被软化， 并且光纤从软化部分向下退回，由此存在于芯棒和护套管之间的环形间隙被折叠。 从此开始，为了提供一种使得可以以最小卷曲并且以低成本制造光纤的方法，本发明提出了一种石英玻璃圆筒机械地处理到其最终尺寸并具有至少100mm的外径 应用作护套管。 根据该方法获得的光纤的特征在于，在没有外力的作用下，其呈现至少6mm的曲率半径。

公开(公告)号：US08984911B2

公开(公告)日：2015-03-24

申请号：US13684394

申请日：2012-11-23

Applicant: Heinz Fabian ,  Juergen Roeper

Inventor： Heinz Fabian ,  Juergen Roeper

IPC: C03B37/018 ,  C03B20/00 ,  C03B37/01 ,  C03B37/014 ,  C03B19/14

CPC classification number: C03B20/00 ,  C03B19/1415 ,  C03B37/011 ,  C03B37/01413 ,  C03B2207/32 ,  C03B2207/34 ,  C03B2207/85

Abstract: The present invention relates to a method for producing synthetic quartz glass, comprising the steps of: providing a liquid SiO2 feedstock material (105), which comprises more than 70% by wt. of the octamethylcyclotetrasiloxane D4, vaporizing the SiO2 feedstock material (105) into a gaseous SiO2 feedstock vapor (107), converting the SiO2 feedstock vapor (107) into SiO2 particles, depositing the SiO2 particles on a deposition surface (160) while forming a SiO2 soot body (200), vitrifying the SiO2 soot body (200) while forming the synthetic quartz glass. According to the invention it is provided that vaporizing the heated SiO2 feedstock material (105) comprises an injection phase in an expansion chamber (125) in which the heated SiO2 feedstock material (105) is atomized into droplets, the droplets having a mean diameter of less than 5 pm, preferably less than 2 μm.

Abstract translation: 本发明涉及一种生产合成石英玻璃的方法，包括以下步骤：提供液体SiO 2原料（105），其包含大于70重量％ 的八甲基环四硅氧烷D4，将SiO 2原料（105）蒸发成气态SiO 2原料蒸气（107），将SiO 2原料蒸气（107）转化成SiO 2颗粒，将SiO 2颗粒沉积在沉积表面（160）上，同时形成SiO 2 烟炱体（200），同时形成合成石英玻璃，使SiO 2烟炱体（200）玻璃化。 根据本发明，提供了将加热的SiO 2原料（105）蒸发在膨胀室（125）中的注入相，其中加热的SiO 2原料（105）被雾化成液滴，液滴的平均直径为 小于5μm，优选小于2μm。

公开(公告)号：US07133591B2

公开(公告)日：2006-11-07

申请号：US10517330

申请日：2003-03-27

Applicant: Heinz Fabian

Inventor： Heinz Fabian

IPC: G02B6/02

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B37/01205 ,  C03B2201/04 ,  C03C13/00

Abstract: Jacket tubes of synthetically produced quartz glass as a semi-finished product for producing an outer cladding glass layer of an optical fiber are generally known. The invention relates to an improvement of a jacket tube in terms of inexpensive producibility and of suitability as a semi-finished product for optical fibers having a low optical attenuation. According to the invention this object is achieved by a jacket tube in which the quartz glass has a content of metastable OH groups of less than 0.05 wt ppm and a content of anneal-stable OH groups of less than 0.05 wt ppm.

Abstract translation: 综合生产的石英玻璃作为制造光纤外包层玻璃层的半成品的护套管通常是已知的。 本发明涉及在廉价的可生产性和适用性方面改进套管作为具有低光衰减性的光纤的半成品。 根据本发明，该目的通过夹套管实现，其中石英玻璃具有小于0.05重量ppm的亚稳OH基团的含量和小于0.05重量ppm的退火稳定的OH基团的含量。

公开(公告)号：US06548131B1

公开(公告)日：2003-04-15

申请号：US09547845

申请日：2000-04-12

Applicant: Heinz Fabian ,  Martin Arndt ,  Johann Leist ,  Udo Gertig ,  Wolfgang Englisch

Inventor： Heinz Fabian ,  Martin Arndt ,  Johann Leist ,  Udo Gertig ,  Wolfgang Englisch

IPC: B32B108

CPC classification number: C30B35/002 ,  C03B19/095 ,  C03B23/0013 ,  C03B23/004 ,  C03C15/00 ,  C03C19/00 ,  C30B15/10 ,  Y10T428/13 ,  Y10T428/131 ,  Y10T428/2457 ,  Y10T428/2495 ,  Y10T428/249969 ,  Y10T428/249988 ,  Y10T428/24999

Abstract: To facilitate the start of a process using a quartz glass crucible with a crucible body and an inner layer of quartz glass a quartz glass crucible is provided with an inner surface roughened at least in the starting zone region by multiple depressions disposed at a maximum distance of 5 mm from one another. Furthermore, a simple and inexpensive process for the manufacture of such a quartz glass crucible is described, by providing a crucible body with a smooth inner surface of quartz glass and subsequently roughening the inner layer in the starting zone region by multiple depressions disposed at a maximum of 5 mm from one another.

Abstract translation: 为了方便开始使用具有坩埚主体和石英玻璃的内层的石英玻璃坩埚的工艺，石英玻璃坩埚具有至少在起始区域中粗糙化的内表面，该内表面被设置在最大距离处的多个凹陷 距离彼此5毫米。 此外，通过提供具有石英玻璃的光滑内表面的坩埚主体，并且随后通过设置在最大的多个凹陷在起始区域中粗糙化内层，描述了用于制造这种石英玻璃坩埚的简单和便宜的方法 相距5毫米。

公开(公告)号：US06381987B1

公开(公告)日：2002-05-07

申请号：US09484103

申请日：2000-01-14

Applicant: Waltraud Werdecker ,  Johann Leist ,  Heinz Fabian ,  Rolf Göbel ,  Bruno Uebbing ,  Erich Rosin

Inventor： Waltraud Werdecker ,  Johann Leist ,  Heinz Fabian ,  Rolf Göbel ,  Bruno Uebbing ,  Erich Rosin

IPC: C03B1900

CPC classification number: C03C3/06 ,  C03B19/09 ,  C03B19/095 ,  C30B31/10 ,  C30B35/002

Abstract: Based on a known process for the manufacture of opaque quartz glass, by mixing SiO2 particles and an additive which is volatile at a melting temperature, forming a body and melting said body with an advancing melt front forming in the body, it is proposed according to the invention that in order to reduce the danger of contamination, a body (1) be formed with an inner bore (6) and be heated in such a manner that the melt front (10) advances from the inner bore (6) to the outside. The article of pure opaque quartz glass according to the invention has high resistance to temperature change, high mechanical strength and good chemical durability. It is distinguished by an opening (6) enclosed by an inner wall (9), with an inner SiO2 surface layer (15) having a layer thickness ranging from 30 mm to 500 mm and a density of at least 2.15 g/cm3.

Abstract translation: 基于用于制造不透明石英玻璃的已知方法，通过混合SiO 2颗粒和在熔融温度下挥发的添加剂，形成主体并且在体内形成前进的熔体前端来熔化所述主体，根据 本发明为了减少污染的危险，本体（1）形成有内孔（6）并被加热，使得熔体前部（10）从内孔（6）前进到 外。 根据本发明的纯不透明石英玻璃的制品具有高的耐温变化性，高机械强度和良好的化学耐久性。 其特征在于由内壁（9）包围的开口（6），具有层厚度范围为30mm至500mm，密度至少为2.15g / cm 3的内部SiO 2表面层（15）。

公开(公告)号：US5837024A

公开(公告)日：1998-11-17

申请号：US980072

申请日：1997-11-26

Applicant: Heinz Fabian

Inventor： Heinz Fabian

IPC: C03B19/14 ,  C03B37/018 ,  C03B19/06 ,  C03B37/10

CPC classification number: C03B19/1484 ,  C03B19/1476 ,  C03B37/01853 ,  C03B37/01884 ,  Y10S65/90

Abstract: An essentially cylindrical porous blank is formed by the deposition of SiO.sub.2 particles onto the lateral cylindrical surface of a cylindrical mandrel, rotating around its longitudinal axis; this blank is provided with a holding element of quartz glass in the form of a hollow body, which surrounds a section of the mandrel and which is at least partially embedded in the area of one of the ends of the blank. The blank is then sintered. In order to securely support even heavy blanks without complicated holding devices, the holding element is fused into the area of at least one of the ends of the blank during the deposition process by the maintenance of a high temperature.

Abstract translation: 通过将SiO 2颗粒沉积到围绕其纵向轴线旋转的圆柱形心轴的侧向圆柱形表面上形成基本上圆柱形的多孔坯料; 该坯件设置有中空体形式的石英玻璃保持元件，其围绕心轴的一部分并且至少部分地嵌入在坯料的一个端部的区域中。 然后将坯料烧结。 为了在没有复杂的保持装置的情况下可靠地支撑甚至重的坯料，保持元件通过保持高温在沉积过程中熔合到坯料的至少一个端部的区域中。

公开(公告)号：US5790736A

公开(公告)日：1998-08-04

申请号：US598925

申请日：1996-02-09

Applicant: Heinz Fabian

Inventor： Heinz Fabian

IPC: G02B6/00 ,  C03B37/023 ,  C03B37/027 ,  C03C13/04 ,  G02B1/00 ,  G02B6/02 ,  G02B6/036

CPC classification number: C03B37/027 ,  G02B6/02 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/32 ,  C03B2203/224

Abstract: In an optical component having a cylindrical core of quartz glass and a coaxial jacket of quartz glass containing a dopant which decreases the index of refraction, the jacket glass contains a viscosity-increasing stiffening agent to reduce tensile strength on the core at drawing temperature of 1000.degree. to 2500.degree. C. or a relaxation agent for lowering the viscosity of the quartz glass in a concentration which is lower than that present in the core glass.

Abstract translation: 在具有石英玻璃的圆柱形芯和含有掺杂剂的同轴套管的光学部件中，该玻璃包含降低折射率的掺杂剂，夹套玻璃含有增粘硬化剂，以在拉伸温度为1000℃时降低芯上的拉伸强度 DEG至2500℃或用于降低石英玻璃的粘度的松弛剂，其浓度低于芯玻璃中存在的浓度。

公开(公告)号：US5086352A

公开(公告)日：1992-02-04

申请号：US535205

申请日：1990-06-08

Applicant: Shigeru Yamagata ,  Kyoichi Inaki ,  Toshikatu Matsuya ,  Ralf Takke ,  Stephan Thomas ,  Heinz Fabian

Inventor： Shigeru Yamagata ,  Kyoichi Inaki ,  Toshikatu Matsuya ,  Ralf Takke ,  Stephan Thomas ,  Heinz Fabian

IPC: C03B19/14 ,  C03B32/00 ,  C03C3/06 ,  C03C23/00 ,  G02B1/00 ,  G03F7/20

CPC classification number: G03F7/70241 ,  C03B19/1423 ,  C03B19/1453 ,  C03B32/00 ,  C03C23/007 ,  C03C3/06 ,  G02B1/00 ,  C03B2201/07 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2207/06 ,  C03B2207/08 ,  C03B2207/12 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/36 ,  C03B2207/42 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/54 ,  Y02P40/57 ,  Y10S65/90

Abstract: The invention relates to lenses, prisms or other optical members which are subjected to high-power ultraviolet light having a wavelength of about 360 nm or less, or ionizing radiation, particularly optical members for use in laser exposure apparatus for lithography, and to blanks for such optical members. The homogeneity of the refractive index distribution and the resistance to optical deterioration when the optical members are exposed for a long period of time to short wavelength ultraviolet light from a laser beam are improved. The optical members are made of high-purity synthetic silica glass material containing at least about 50 wt. ppm of OH groups, and are doped with hydrogen. The refractive index distribution caused by the fictive temperature distribution during heat treatment in the process of producing high-purity silica glass blanks for optical members in accordance with the present invention is offset by the combined refractive index distribution determined by the OH group concentration distribution or by the OH group concentration distribution and the Cl concentration distribution in the glass.

Abstract translation: 本发明涉及经受大约360nm或更小的波长的大功率紫外光的透镜，棱镜或其它光学构件，或者电离辐射，特别是用于光刻的激光曝光装置的光学构件，以及用于 这种光学构件。 当光学元件长时间暴露于来自激光束的短波长紫外光时，折射率分布的均匀性和光学劣化的抵抗性得到改善。 光学构件由含有至少约50重量％的高纯度合成石英玻璃材料制成。 ppm的OH基团，并掺杂氢气。 在根据本发明的用于制造用于光学部件的高纯度二氧化硅玻璃毛坯的过程中由热处理期间的假想温度分布引起的折射率分布由由OH基浓度分布或由OH基浓度分布确定的组合折射率分布或由 玻璃中的OH基浓度分布和Cl浓度分布。

公开(公告)号：US20130133378A1

公开(公告)日：2013-05-30

申请号：US13684375

申请日：2012-11-23

Applicant: Heinz Fabian

Inventor： Heinz Fabian

IPC: C03B37/018

CPC classification number: C03B37/01807 ,  C03B19/1415 ,  C03B37/01413 ,  C03B2207/32 ,  C03B2207/85

Abstract: A known method for producing synthetic quartz glass comprises the method steps: providing a liquid SiO2 feedstock material, which contains octamethylcyclotetrasiloxane D4 as the main component, vaporizing the SiO2 feedstock material into a feedstock material vapor, converting the feedstock material vapor into SiO2 particles, depositing the SiO2 particles on a deposition surface while forming a porous SiO2 soot body, and vitrifying the SiO2 soot body while forming the synthetic quartz glass. Starting therefrom, to produce large-volume cylindrical soot bodies with outer diameters of more than 300 mm of improved material homogeneity, it is suggested according to the invention that the liquid feedstock material contains additional components comprising hexamethylcyclotrisiloxane D3 and the linear homolog thereof with a weight fraction mD3, decamethylcyclohexasiloxane D6 and the linear homolog thereof with a weight fraction mD6, and tetradecamethylcycloheptasiloxane D7 and/or hexadecamethylcyclooctasiloxane D8 and the linear homologs thereof with a weight fraction mD7+, wherein the weight ratio mD3/mD6 is in a range between 0.05 and 90 and the weight fraction mD7+ is at least 20 wt. ppm.

Abstract translation: 用于生产合成石英玻璃的已知方法包括以下步骤：提供含有八甲基环四硅氧烷D4作为主要成分的液体SiO 2原料，将SiO 2原料蒸发成原料蒸气，将原料蒸气转化成SiO 2颗粒，沉积 SiO 2颗粒在沉积表面上同时形成多孔SiO 2烟炱体，并且在形成合成石英玻璃的同时使SiO 2烟炱体玻璃化。 从其开始，为了生产具有改进的材料均匀性的外径大于300mm的大体积圆柱形烟灰体，根据本发明，建议液体原料包含另外的组分，其包含六甲基环三硅氧烷D3和其重量的线性同系物 分数mD3，十甲基环六硅氧烷D6及其重量分数mD6的线性同系物和十四烷基环庚硅烷D7和/或十六烷基环辛硅烷D8及其重量分数mD7 +的线性同系物，其中重量比mD3 / mD6在0.05和90之间的范围内 重量分数mD7 +为至少20重量％。 ppm。