公开(公告)号：US06684664B2

公开(公告)日：2004-02-03

申请号：US09839795

申请日：2001-04-20

申请人： Waltraud Werdecker ,  Udo Gertig ,  Johann Leist ,  Helmut Leber

发明人： Waltraud Werdecker ,  Udo Gertig ,  Johann Leist ,  Helmut Leber

IPC分类号： C03B1909

CPC分类号： C03C3/06 ,  C03B19/09 ,  C03B19/095 ,  C03B23/047 ,  C03B23/0496 ,  C03C11/00 ,  C03C2201/32 ,  C03C2201/50 ,  C03C2201/80 ,  C03C2204/06 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/139 ,  Y10T428/1393

摘要： A process for manufacture of a component made of opaque synthetic quartz glass, and a quartz glass tube manufactured according to said process. The process comprises (i) providing a starting material in the form of granulated material of highly pure, synthetic SiO2 comprising at least partially porous agglomerates of SiO2 primary particles, the granulated material having a compacted bulk density of no less than 0.8 g/cm3, (ii) filling the granulated material into a mold and converting it to an opaque quartz glass preform through a process of melting, and (iii) reshaping the preform in a heat reshaping process to obtain a component made of opaque quartz glass. A quartz glass tube is made of quartz glass consisting of a granulated material of synthetic SiO2 with a lithium content of no more than 100 wt-ppb, and the wall thickness of said component being in the range of 0.5 mm to 15 mm.

摘要翻译： 一种制造由不透明的合成石英玻璃制成的部件的方法，以及根据所述方法制造的石英玻璃管。 该方法包括（i）提供高纯度合成SiO 2的造粒材料形式的起始材料，其包含SiO 2一次颗粒的至少部分多孔附聚物，所述造粒材料的压实堆积密度不小于0.8g / 3），（ii）将造粒材料填充到模具中并通过熔融过程将其转化为不透明的石英玻璃预制件，和（iii）在热成型工艺中重新成形预成型件以获得由不透明石英玻璃制成的部件。 石英玻璃管由石英玻璃制成，石英玻璃由合成SiO 2的粒状材料组成，锂含量不超过100wt-ppb，所述组分的壁厚在0.5mm至15mm的范围内。

公开(公告)号：US06306489B1

公开(公告)日：2001-10-23

申请号：US09202701

申请日：1998-12-18

申请人： Dietmar Hellmann ,  Johann Leist

发明人： Dietmar Hellmann ,  Johann Leist

IPC分类号： C03C1702

CPC分类号： C03C15/00 ,  B24C1/06 ,  C03B19/095 ,  C03C11/007 ,  C03C17/003 ,  C03C17/02 ,  C03C17/23 ,  C03C2204/04 ,  C03C2204/06 ,  C03C2217/213 ,  C03C2218/33 ,  Y10T428/24364 ,  Y10T428/24942 ,  Y10T428/249969 ,  Y10T428/249988 ,  Y10T428/24999

摘要： A quartz glass component for a reactor chamber, especially of a plasma etching device, comprises a substrate of a first quartz glass quality with an inner surface having an average roughness depth Ra of more than 1 &mgr;m, facing the inside of the reactor. To minimize particles in the reactor chamber, and to give the inner surface high adhesiveness for layers deposited on it and a long service life, a roughness zone is formed on the substrate by an open pore bubble layer made of a second quartz glass quality. The quartz glass component may be made by forming a blank from a granulate containing SiO2, and partial or complete vitrification of the blank by heating to a temperature above 1,000° C. During the forming of the inner surface of the blank, an additional constituent is added to the granulate containing siO2 in a roughness zone. The additional constituent reacts during the vitrification to release a gas, which forms a bubble layer during vitrification of the roughness zone.

摘要翻译： 用于反应室的石英玻璃组分，特别是等离子体蚀刻装置的石英玻璃组分包括面向反应器内部的具有平均粗糙度Ra大于1μm的内表面的第一石英玻璃质量的基底。 为了最小化反应器室中的颗粒，并且为了赋予内表面对其上沉积的层的高粘附性和长的使用寿命，通过由第二石英玻璃质量制成的开孔气泡层在基板上形成粗糙区域。 石英玻璃组分可以通过从含有SiO 2的颗粒形成坯料，以及通过加热到高于1000℃的温度部分或完全玻璃化坯料来制备。在坯料的内表面的形成过程中，另外的成分是 添加到在粗糙区域中含有siO2的颗粒。 另外的组分在玻璃化过程中发生反应以释放气体，这在粗糙区域的玻璃化过程中形成气泡层。

公开(公告)号：US07350378B2

公开(公告)日：2008-04-01

申请号：US10070847

申请日：2001-07-09

申请人： Johann Leist ,  Rolf Göbel ,  Helmut Fritz

发明人： Johann Leist ,  Rolf Göbel ,  Helmut Fritz

IPC分类号： C03B19/09

CPC分类号： C03B19/095

摘要： In a device (5) for the manufacture of a quartz glass crucible (2), one section (14, 15) of a wall (13) of the rotating quartz glass crucible (2) is heated at one time by means of at least two electrode arrangements (7, 8) distributed uniformly at the circumference of the quartz glass crucible (2) and generating a first and another electric arc. By providing several electrode arrangements (7, 8), the cooling-down phase of the sections (14, 15) until their reaching the subsequent heating zone (11, 12) can be shortened, and thus an undesirable high temperature difference of the wall (13) can be avoided. Moreover, the required thermal output of each individual electrode arrangement (7, 8) can be reduced, so that evaporation phenomena and connected bubble formation can be reduced. In addition to the higher quality that can be reached in this way, the duration of the manufacturing process is reduced.

摘要翻译： 在用于制造石英玻璃坩埚（2）的装置（5）中，旋转石英玻璃坩埚（2）的壁（13）的一个部分（14,15）通过至少一次加热 两个电极布置（7,8）均匀分布在石英玻璃坩埚（2）的圆周处并产生第一和另一个电弧。 通过提供多个电极布置（7,8），可以缩短部分（14,15）直到它们到达随后的加热区（11,12）的冷却阶段，因此壁的不期望的高温差 （13）可以避免。 此外，可以减少每个单独电极布置（7,8）所需的热输出，从而可以减少蒸发现象和连接的气泡形成。 除了可以以这种方式达到的更高质量之外，制造过程的持续时间也减少了。

公开(公告)号：US06548131B1

公开(公告)日：2003-04-15

申请号：US09547845

申请日：2000-04-12

申请人： Heinz Fabian ,  Martin Arndt ,  Johann Leist ,  Udo Gertig ,  Wolfgang Englisch

发明人： Heinz Fabian ,  Martin Arndt ,  Johann Leist ,  Udo Gertig ,  Wolfgang Englisch

IPC分类号： B32B108

CPC分类号： C30B35/002 ,  C03B19/095 ,  C03B23/0013 ,  C03B23/004 ,  C03C15/00 ,  C03C19/00 ,  C30B15/10 ,  Y10T428/13 ,  Y10T428/131 ,  Y10T428/2457 ,  Y10T428/2495 ,  Y10T428/249969 ,  Y10T428/249988 ,  Y10T428/24999

摘要： To facilitate the start of a process using a quartz glass crucible with a crucible body and an inner layer of quartz glass a quartz glass crucible is provided with an inner surface roughened at least in the starting zone region by multiple depressions disposed at a maximum distance of 5 mm from one another. Furthermore, a simple and inexpensive process for the manufacture of such a quartz glass crucible is described, by providing a crucible body with a smooth inner surface of quartz glass and subsequently roughening the inner layer in the starting zone region by multiple depressions disposed at a maximum of 5 mm from one another.

摘要翻译： 为了方便开始使用具有坩埚主体和石英玻璃的内层的石英玻璃坩埚的工艺，石英玻璃坩埚具有至少在起始区域中粗糙化的内表面，该内表面被设置在最大距离处的多个凹陷 距离彼此5毫米。 此外，通过提供具有石英玻璃的光滑内表面的坩埚主体，并且随后通过设置在最大的多个凹陷在起始区域中粗糙化内层，描述了用于制造这种石英玻璃坩埚的简单和便宜的方法 相距5毫米。

公开(公告)号：US06381987B1

公开(公告)日：2002-05-07

申请号：US09484103

申请日：2000-01-14

申请人： Waltraud Werdecker ,  Johann Leist ,  Heinz Fabian ,  Rolf Göbel ,  Bruno Uebbing ,  Erich Rosin

发明人： Waltraud Werdecker ,  Johann Leist ,  Heinz Fabian ,  Rolf Göbel ,  Bruno Uebbing ,  Erich Rosin

IPC分类号： C03B1900

CPC分类号： C03C3/06 ,  C03B19/09 ,  C03B19/095 ,  C30B31/10 ,  C30B35/002

摘要： Based on a known process for the manufacture of opaque quartz glass, by mixing SiO2 particles and an additive which is volatile at a melting temperature, forming a body and melting said body with an advancing melt front forming in the body, it is proposed according to the invention that in order to reduce the danger of contamination, a body (1) be formed with an inner bore (6) and be heated in such a manner that the melt front (10) advances from the inner bore (6) to the outside. The article of pure opaque quartz glass according to the invention has high resistance to temperature change, high mechanical strength and good chemical durability. It is distinguished by an opening (6) enclosed by an inner wall (9), with an inner SiO2 surface layer (15) having a layer thickness ranging from 30 mm to 500 mm and a density of at least 2.15 g/cm3.

摘要翻译： 基于用于制造不透明石英玻璃的已知方法，通过混合SiO 2颗粒和在熔融温度下挥发的添加剂，形成主体并且在体内形成前进的熔体前端来熔化所述主体，根据 本发明为了减少污染的危险，本体（1）形成有内孔（6）并被加热，使得熔体前部（10）从内孔（6）前进到 外。 根据本发明的纯不透明石英玻璃的制品具有高的耐温变化性，高机械强度和良好的化学耐久性。 其特征在于由内壁（9）包围的开口（6），具有层厚度范围为30mm至500mm，密度至少为2.15g / cm 3的内部SiO 2表面层（15）。

公开(公告)号：US08408027B2

公开(公告)日：2013-04-02

申请号：US12452413

申请日：2008-06-18

申请人： Waltraud Werdecker ,  Johann Leist

发明人： Waltraud Werdecker ,  Johann Leist

IPC分类号： C03C17/02

CPC分类号： C03C1/006 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03C1/008 ,  C03C3/06 ,  C03C17/02 ,  C03C2203/22 ,  C03C2218/11

摘要： To optimize a known method for producing a composite body from a basic body of opaque quartz glass and a dense sealing layer, in such a way that the basic body can be provided with the dense sealing layer without any significant changes and deformations in the opaque material being noticed, the invention suggests a method comprising the following steps: (a) producing the basic body by using a first slip which contains larger amorphous SiO2 particles; (b) providing a second slip which contains smaller amorphous SiO2 particles and the composition of which differs from that of the first slip at least in that it contains SiO2 nanoparticles in the range between 0.2% by wt. to 15% by wt. and which is distinguished by a relatively low vitrification temperature; (d) producing a slip layer from the second slip on a surface of the basic body, drying the slip layer, and (e) subsequently vitrifying the slip layer with formation of the dense sealing layer.

摘要翻译： 为了优化用于从不透明石英玻璃和致密密封层的基体制造复合体的已知方法，使得基体可以设置有致密的密封层，而在不透明材料中没有任何显着变化和变形 本发明提出了一种方法，包括以下步骤：（a）通过使用包含较大的非晶SiO 2颗粒的第一滑移来生产基体; （b）提供包含较小的非晶SiO 2颗粒的第二滑移，其组成与第一滑移的组成不同，至少其中含有0.2重量％范围内的SiO 2纳米颗粒。 至15重量％ 并且由相对低的玻璃化温度区分; （d）从基体表面上的第二滑移层产生滑动层，干燥滑动层，（e）随后形成致密密封层玻璃化滑动层。

公开(公告)号：US20100115996A1

公开(公告)日：2010-05-13

申请号：US12452413

申请日：2008-06-18

申请人： Waltraud Werdecker ,  Johann Leist

发明人： Waltraud Werdecker ,  Johann Leist

IPC分类号： C03C17/00

CPC分类号： C03C1/006 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03C1/008 ,  C03C3/06 ,  C03C17/02 ,  C03C2203/22 ,  C03C2218/11

摘要： To optimize a known method for producing a composite body from a basic body of opaque quartz glass and a dense sealing layer, in such a way that the basic body can be provided with the dense sealing layer without any significant changes and deformations in the opaque material being noticed, the invention suggests a method comprising the following steps: (a) producing the basic body by using a first slip which contains larger amorphous SiO2 particles; (b) providing a second slip which contains smaller amorphous SiO2 particles and the composition of which differs from that of the first slip at least in that it contains SiO2 nanoparticles in the range between 0.2% by wt. to 15% by wt. and which is distinguished by a relatively low vitrification temperature; (d) producing a slip layer from the second slip on a surface of the basic body, drying the slip layer, and (e) subsequently vitrifying the slip layer with formation of the dense sealing layer.

摘要翻译： 为了优化用于从不透明石英玻璃和致密密封层的基体制造复合体的已知方法，使得基体可以设置有致密的密封层，而在不透明材料中没有任何显着变化和变形 本发明提出了一种方法，包括以下步骤：（a）通过使用包含较大的非晶SiO 2颗粒的第一滑移来生产基体; （b）提供包含较小的非晶SiO 2颗粒的第二滑移，其组成与第一滑移的组成不同，至少其中含有0.2重量％范围内的SiO 2纳米颗粒。 至15重量％ 并且由相对低的玻璃化温度区分; （d）从基体表面上的第二滑移层产生滑动层，干燥滑动层，（e）随后形成致密密封层玻璃化滑动层。

公开(公告)号：US06672107B2

公开(公告)日：2004-01-06

申请号：US09913632

申请日：2001-08-16

申请人： Waltraud Werdecker ,  Johann Leist

发明人： Waltraud Werdecker ,  Johann Leist

IPC分类号： C03B1906

CPC分类号： C03C3/06 ,  C03B19/09 ,  C03B19/095 ,  C03B2201/04 ,  C03C2201/02 ,  C03C2201/23 ,  C03C2201/80 ,  C30B15/10 ,  C30B35/002 ,  Y10S65/04 ,  Y10T428/131

摘要： In order to provide a quartz glass crucible distinguished by high purity, high opacity and/or low transmissibility in the IR spectrum, it is proposed on the basis of a known quartz glass crucible of opaque quartz glass with a crucible body symmetrical in relation to a rotational axis, an outer zone (3) of opaque quartz glass transitioning radially toward the inside into an inner zone (2) of transparent quartz glass and with a density of at least 2.15 g/cm3, that according to the invention, the crucible body (1) be made of a synthetic SiO2 granulate with a specific BET surface ranging from 0.5 m2/g to 40 m2/g, a tamped volume of at least 0.8 g/cm3 and produced from at least partially porous agglomerates of SiO2 primary particles. A process for producing a quartz glass crucible of this kind is distinguished according to the invention in that for the production of the crucible a SiO2 granulate is used which was formed from at least partially porous agglomerates of synthetically manufactured SiO2 primary particles and that it has a specific BET surface ranging from 0.5 m2/g to 40 m2/g and a tamped volume of at least 0.8 g/cm3, the heating effected in such a way that a vitrification front advances from the inside outward while an inner zone (4) of transparent quartz glass is being formed.

摘要翻译： 为了提供在IR光谱中具有高纯度，高不透明性和/或低透射率的石英玻璃坩埚，提出了在已知的不透明石英玻璃的石英玻璃坩埚的基础上，坩埚体相对于 旋转轴线，不透明石英玻璃的外部区域（3），径向朝向内部转变成透明石英玻璃的内部区域（2），密度为至少2.15g / cm 3，根据本发明， 坩埚体（1）由合成SiO 2颗粒制成，比表面积为0.5m 2 / g至40m 2 / g，捣实体积至少为0.8g / cm 3， 由SiO 2一次颗粒的至少部分多孔的附聚物制成。 根据本发明，制造这种石英玻璃坩埚的方法的不同之处在于，对于坩埚的制造，使用由至少部分多孔的合成SiO 2原生颗粒的聚集体形成的SiO 2颗粒，并且其具有 比表面积为0.5m 2 / g至40m 2 / g，捣实体积为至少0.8g / cm 3，加热使玻璃化前沿从内部进入 外部形成透明石英玻璃的内部区域（4）。

公开(公告)号：US06660671B2

公开(公告)日：2003-12-09

申请号：US10103660

申请日：2002-03-21

申请人： Waltraud Werdecker ,  Udo Gertig ,  Johann Leist ,  Rainer Koeppler

发明人： Waltraud Werdecker ,  Udo Gertig ,  Johann Leist ,  Rainer Koeppler

IPC分类号： C03C100

CPC分类号： C04B35/653 ,  C03B19/06 ,  C03B19/066 ,  C03B19/12 ,  C03B20/00 ,  C03C3/06 ,  C03C14/004 ,  C03C2201/02 ,  C04B35/14 ,  Y10S977/775 ,  Y10S977/776 ,  Y10S977/90

摘要： Composite material with high resistance to temperature changes and a high density, and having an SiO2-containing matrix with quartz glass grains embedded therein is produced by preparing a suspension from a particle mixture of finely divided SiO2 powder having at least two different particle fractions and of the quartz glass grains, forming a green compact and sintering the compact. The matrix has an SiO2 content of at least 99% by wt. and is formed from at least first and second particle fractions, each of which is present as granules of nanoscale, amorphous, synthetically produced SiO2 primary particles having a mean primary particle size of less than 100 nm. The composite material has an SiO2-containing matrix with an SiO2 content of at least 99% by wt. It is particularly suited for applications such as starting material for producing a permanent mold for melting solar silicon.

摘要翻译： 通过从具有至少两种不同颗粒级分的细分SiO 2粉末和具有至少两种不同颗粒级分的颗粒混合物制备悬浮液，制备具有高耐温变化和高密度的复合材料，并且具有嵌入石英玻璃颗粒的含SiO 2基质 石英玻璃颗粒，形成一个生坯并烧结成型。 该基质具有至少99重量％的SiO 2含量。 并且由至少第一和第二颗粒组分形成，每个颗粒级分以纳米级，无定形，合成产生的平均一次粒径小于100nm的SiO 2一次颗粒的颗粒形式存在。 复合材料具有SiO 2含量至少为99重量％的含SiO 2的基体。 特别适合用于制造用于熔化太阳能硅的永久模具的起始材料。

公开(公告)号：US06380110B1

公开(公告)日：2002-04-30

申请号：US09484113

申请日：2000-01-14

申请人： Waltraud Werdecker ,  Heinz Fabian ,  Udo Gertig ,  Johann Leist ,  Rolf Göbel

发明人： Waltraud Werdecker ,  Heinz Fabian ,  Udo Gertig ,  Johann Leist ,  Rolf Göbel

IPC分类号： C03B2000

CPC分类号： C03C1/026 ,  C03B19/1065 ,  C03C3/06 ,  C03C2201/02 ,  C03C2201/24 ,  C03C2201/26 ,  C03C2201/32 ,  C03C2201/80 ,  C03C2203/10 ,  C03C2203/54

摘要： In a known process for the production of opaque quartz glass a blank is formed from synthetic SiO2 granulate and is heated at a vitrification temperature to form a body of opaque quartz glass. In order to provide on this basis a process for the production of pure opaque quartz glass with a homogenous pore distribution, high density, high viscosity and a low tendency to devitrify, it is proposed according to the invention that the SiO2 granulate to be used is a SiO2 granulate (21; 31) composed of at least partially porous agglomerates of SiO2 primary particles, with a specific BET surface ranging from 1.5 m2/g to 40 m2/g and an apparent density of at least 0.8 g/cm3. A SiO2 granulate (21; 31) suitable for the implementation of the process is distinguished in that it is formed from at least partially porous agglomerates of SiO2 primary particles and in that it has a specific BET surface ranging from 1.5 m2/g to 40 m2/g and an apparent density of at least 0.6 g/cm3.

摘要翻译： 在制造不透明石英玻璃的已知方法中，由合成SiO 2颗粒形成坯料，并在玻璃化温度下加热以形成不透明石英玻璃体。 为了在此基础上提供具有均匀孔分布，高密度，高粘度和低失透倾向的纯不透明石英玻璃的制备方法，根据本发明提出使用的SiO 2颗粒是 SiO 2颗粒（21; 31），其由SiO 2一次颗粒的至少部分多孔的附聚物组成，BET比表面积为1.5m 2 / g至40m 2 / g，表观密度为至少0.8g / cm 3。 适用于实施该方法的SiO 2颗粒（21; 31）的特征在于其由SiO 2一次颗粒的至少部分多孔的附聚物形成，并且其具有范围为1.5m 2 / g至40m 2的比BET表面积 / g，表观密度为0.6g / cm 3以上。