Exposing a semiconductor wafer using two different spectral wavelengths and adjusting for chromatic aberration
    11.
    发明授权
    Exposing a semiconductor wafer using two different spectral wavelengths and adjusting for chromatic aberration 有权
    使用两种不同的光谱波长展现半导体晶片并调整色差

    公开(公告)号:US07286207B2

    公开(公告)日:2007-10-23

    申请号:US11116439

    申请日:2005-04-28

    CPC classification number: G03F7/70575 G03F7/70241 G03F7/70333

    Abstract: A semiconductor wafer is exposed with a pattern from a mask or reticle in an exposure tool. The exposure tool has an adjustable lens system and a light source, which is tunable in wavelength. A first exposure is performed with a tuned first wavelength and a first setting of the lenses. Prior to performing a second exposure onto the same wafer and into the same resist layer, the wavelength of the light source is varied to a second wavelength in order to mimic a focus offset. A resulting image shift at the slit edges of the scanning system due to chromatic aberration is then corrected for by setting the lens system in dependence of the difference between the tuned first and second wavelength. Having tuned second wavelength of the light source and having set the lens system, the second exposure is performed. A continuous adjustment of the lens system based upon a continuously varying light source wavelength can be accomplished.

    Abstract translation: 半导体晶片在曝光工具中以掩模或掩模版的图案曝光。 曝光工具具有可调透镜系统和可调波长的光源。 第一曝光是通过调节的第一波长和透镜的第一设置来执行的。 在对相同的晶片和相同的抗蚀剂层进行第二次曝光之前,为了模拟聚焦偏移,光源的波长变化到第二波长。 然后通过根据调谐的第一和第二波长之间的差设置透镜系统来校正由于色差导致的扫描系统的狭缝边缘处的所得到的图像偏移。 调整光源的第二波长并设置透镜系统后,进行第二次曝光。 可以实现基于连续变化的光源波长的透镜系统的连续调节。

    Synchrotron radiation source
    13.
    发明授权
    Synchrotron radiation source 失效
    同步辐射源

    公开(公告)号:US5341104A

    公开(公告)日:1994-08-23

    申请号:US14401

    申请日:1993-02-05

    CPC classification number: H05H13/04

    Abstract: A synchrotron radiation source includes a beam guidance system for accelerating and storing an electron or positron particle beam on a closed trajectory. In order to generate the synchrotron radiation, the beam guidance system has at least one approximately achromatic mirror magnet being formed of superconducting winding configurations and in which the trajectory is bent through approximately 270.degree.. Further components of the beam guidance system, such as deflecting magnets and focusing magnets do not necessarily need to be constructed from superconducting components. The synchrotron radiation source permits the utilization of all of the advantages of superconductors with the most extensive avoidance of the disadvantages associated therewith, since the application of superconducting components can be restricted to the components specifically constructed for the generation of the synchrotron radiation.

    Abstract translation: 同步加速器辐射源包括用于在闭合轨迹上加速和存储电子或正电子粒子束的光束引导系统。 为了产生同步加速器辐射,光束引导系统具有由超导绕组构造形成的至少一个近似消色差的反射镜磁体,并且其轨迹弯曲大约270°。 光束引导系统的其它部件,例如偏转磁体和聚焦磁体,不一定需要由超导部件构成。 同步加速器辐射源允许以最广泛的避免与之相关的缺点来利用超导体的所有优点,因为超导部件的应用可以限于特别构造用于产生同步加速器辐射的部件。

    Magnetic thin-film head for a recording medium that can be magnetized
vertically
    14.
    发明授权
    Magnetic thin-film head for a recording medium that can be magnetized vertically 失效
    用于可以垂直磁化的记录介质的磁性薄膜头

    公开(公告)号:US4710838A

    公开(公告)日:1987-12-01

    申请号:US807538

    申请日:1985-12-11

    Applicant: Andreas Jahnke

    Inventor: Andreas Jahnke

    CPC classification number: G11B5/1278

    Abstract: A magnetic thin-film head with layer-wise build-up on a nonmagnetic substrate for a recording medium which can be magnetized vertically, comprises a ring head-like conduction body for carrying magnetic flux having two magnet legs, of which the end pole pieces facing the recording medium have, respectively, a predetermined small width transverse to the direction of motion and change into widening leg parts a space being provided between the two magnet legs through which the turns of a write/read coil winding extend. A magnetic head having highly efficient write and read functions is thereby obtained. The vertical length (gap height h) of one of the two end pole pieces is relatively small, while the corresponding length (l) of the other end pole piece is several times the former, and a widening leg part of the magnet leg with the comparatively shorter vertical end pole piece is provided with a recess which extends along its center line lying in the conduction direction of the magnetic flux and extends at least approximately to the shorter end pole piece.

    Abstract translation: 一种在可磁化垂直磁记录介质的非磁性基片上分层积累的磁性薄膜头,包括用于承载具有两个磁极支腿的磁通的环形头状导电体,其末端极片 面对记录介质分别具有横向于运动方向的预定的小宽度,并且变成加宽的腿部件,在两个磁体支腿之间设置有一个空间,通过该空间,写入/读取线圈绕组的匝延伸穿过该空间。 由此获得具有高效写入和读取功能的磁头。 两个端极片中的一个的垂直长度(间隙高度h)相对较小,而另一端极片的相应长度(l)是前者的几倍,并且磁腿的加宽腿部具有 相对较短的垂直端极片设置有沿其位于磁通的传导方向的中心线延伸的凹部,并至少大致延伸到较短的端极。

    Apparatus for manufacturing a disc-shaped curved magnet coil
    15.
    发明授权
    Apparatus for manufacturing a disc-shaped curved magnet coil 失效
    用于制造盘形弯曲磁体线圈的装置

    公开(公告)号:US4694868A

    公开(公告)日:1987-09-22

    申请号:US805331

    申请日:1985-12-05

    Abstract: A method for manufacturing a disc-shaped curved magnet coil, particularly for a system for accelerating and/or storing electrically charged particles such as electrons. The conductors of the coil to be made are to be arranged around a winding core having a convex outside and a concave inside and are then to be fixed in position around the winding core. A coil form or fitting piece of predetermined shape is first added to a winding core, so that a provisional winding body with only positive radii of curvature on its outsides is formed. The conductors are wound under tension around the winding body and subsequently are fastened only to the winding core of the winding body and, after the coil form is removed, the thus exposed conductor portions facing the region of the concave inside of the winding core are pressed against this inside and fixed in position.

    Abstract translation: 一种用于制造盘形弯曲磁体线圈的方法,特别是用于加速和/或储存诸如电子的带电粒子的系统。 要制造的线圈的导体将被布置在具有凸形外部和凹入内部的卷绕芯周围,然后将其固定在绕组芯周围的位置。 首先将预定形状的线圈形式或配合片添加到卷芯上,从而形成在其外侧上仅具有正曲率半径的临时卷绕体。 这些导体在绕组体周围处于张力下缠绕,随后仅被紧固到卷绕体的卷绕芯上,并且在去除线圈形式之后,将这样暴露的导体部分面向卷绕芯部的凹入内部的区域被按压 反对这个内部并固定在位。

    Fast operating radiation detector and method for operating same
    16.
    发明授权
    Fast operating radiation detector and method for operating same 失效
    快速操作的辐射探测器及其操作方法

    公开(公告)号:US5821539A

    公开(公告)日:1998-10-13

    申请号:US847762

    申请日:1997-04-23

    CPC classification number: G01T1/241 H01L31/115

    Abstract: A directly converting radiation detector with a diode structure having first and second operating electrodes on opposite sides of a semiconductor body has an additional injector electrode, which injects charge carriers for the compensating charged traps in the semiconductor body. The secondary dark current generated in this way does not flow via the electrode used for measurement purposes and therefore does not influence the measured signal. The injection is facilitated by suitable doping under the injector electrode.

    Abstract translation: 具有在半导体本体的相对侧上具有第一和第二操作电极的二极管结构的直接转换辐射检测器具有另外的注入电极,其注入用于半导体本体中补偿的带电陷阱的电荷载流子。 以这种方式产生的次级暗电流不会通过用于测量目的的电极流动,因此不影响测量信号。 注射通过在注射器电极下的合适掺杂来促进。

    X-ray detector with direct conversion
    17.
    发明授权
    X-ray detector with direct conversion 失效
    X射线探测器直接转换

    公开(公告)号:US5512756A

    公开(公告)日:1996-04-30

    申请号:US361101

    申请日:1994-12-21

    CPC classification number: G01T1/24

    Abstract: An x-ray detector element suitable for use in computer tomography has a semi-insulating semiconductor body composed of a compound semiconductor, and is operated with a constant voltage source so that it functions as an x-ray-sensitive photoconductor. A measurement instrument is connected across the voltage source for detecting the photocurrent, which is indicative of the x-rays incident on the semiconductor body.

    Abstract translation: 适用于计算机断层摄影的x射线检测器元件具有由化合物半导体构成的半绝缘半导体本体,并且用恒定电压源操作,使其用作x射线敏感的感光体。 测量仪器连接在电压源两端,用于检测入射在半导体主体上的X射线的光电流。

    Magnetic field apparatus for a particle accelerator having a
supplemental winding with a hollow groove structure
    18.
    发明授权
    Magnetic field apparatus for a particle accelerator having a supplemental winding with a hollow groove structure 失效
    具有具有中空槽结构的补充绕组的粒子加速器的磁场装置

    公开(公告)号:US4734653A

    公开(公告)日:1988-03-29

    申请号:US826111

    申请日:1986-02-05

    Applicant: Andreas Jahnke

    Inventor: Andreas Jahnke

    CPC classification number: H01F7/202 G21K1/093 H05H7/04

    Abstract: A magnetic field apparatus for a particle accelerator having a particle track having curved sections contains several magnetic field-generating windings, and at least one supplemental winding provided for focusing the electrically charged particles. The system does not require pre-accelerators and relatively large particle streams should be capable of being accelerated nevertheless to relatively high energy levels. In the region of at least one of the curved sections of the particle track, an azimuthal guiding field for the particles is generated by the supplemental winding during the acceleration phase. This supplemental winding is designed as an appropriately curved electric conductor arrangement which in part encloses the particle track and which is designed in the manner of a hollow channel open toward the outside. The conductor arrangement is appropriately structured for suppressing eddy currents and carries a current transversely to the particle track.

    Abstract translation: 用于具有具有弯曲部分的粒子轨迹的粒子加速器的磁场装置包含若干磁场产生绕组,以及至少一个辅助绕组,用于聚焦带电粒子。 该系统不需要预加速器,并且相对较大的颗粒流应该能够被加速到相对较高的能量水平。 在粒子轨迹的至少一个弯曲部分的区域中,在加速阶段期间通过补充绕组产生颗粒的方位导向场。 该辅助绕组被设计为适当弯曲的电导体布置,其部分地包围颗粒轨道并且被设计成朝向外部敞开的中空通道的方式。 导体布置被适当地构造用于抑制涡流并且横向于携带横向于粒子轨道的电流。

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