公开(公告)号：US20120224416A1

公开(公告)日：2012-09-06

申请号：US13235664

申请日：2011-09-19

申请人： Tsuyoshi Kondo ,  Hirofumi Morise ,  Shiho Nakamura ,  Yoshinari Kurosaki

发明人： Tsuyoshi Kondo ,  Hirofumi Morise ,  Shiho Nakamura ,  Yoshinari Kurosaki

IPC分类号： G11C11/16 ,  H01L29/82

CPC分类号： H01L27/228 ,  G11C11/161 ,  G11C11/1659 ,  G11C11/1673 ,  G11C11/1675 ,  H01L29/82 ,  H01L43/08

摘要： A magnetic memory includes a first magnetic layer, a second magnetic layer, a third magnetic layer, a first intermediate layer, a second intermediate layer, an insulator film, and an electrode. The third magnetic layer is provided between the first magnetic layer and the second magnetic layer in a first direction being perpendicular to the plane of both the first magnetic layer and the second magnetic layer. The insulator film is provided on the third magnetic layer in a second direction perpendicular to the first direction. The electrode is provided on the insulator film so that the insulator is sandwiched between the third magnetic layer and the electrode in the second direction. In addition, a positive voltage is applied to the electrode and a first current passes from the first magnetic layer to the second magnetic layer, thereby writing information to the second magnetic layer.

摘要翻译： 磁存储器包括第一磁性层，第二磁性层，第三磁性层，第一中间层，第二中间层，绝缘膜和电极。 第三磁性层在与第一磁性层和第二磁性层的平面垂直的第一方向上设置在第一磁性层和第二磁性层之间。 绝缘体膜在与第一方向垂直的第二方向上设置在第三磁性层上。 电极设置在绝缘膜上，使得绝缘体沿第二方向被夹在第三磁性层和电极之间。 此外，向电极施加正电压，并且第一电流从第一磁性层流到第二磁性层，从而将信息写入第二磁性层。

公开(公告)号：US20120115250A1

公开(公告)日：2012-05-10

申请号：US13300062

申请日：2011-11-18

申请人： Tomotaka Ariga ,  Yuichi Ohsawa ,  Junichi Ito ,  Yoshinari Kurosaki ,  Saori Kashiwada ,  Toshiro Hiraoka ,  Minoru Amano ,  Satoshi Yanagi

发明人： Tomotaka Ariga ,  Yuichi Ohsawa ,  Junichi Ito ,  Yoshinari Kurosaki ,  Saori Kashiwada ,  Toshiro Hiraoka ,  Minoru Amano ,  Satoshi Yanagi

IPC分类号： H01L21/02 ,  H01L21/28

CPC分类号： G11B5/855 ,  H01L21/0337 ,  H01L21/31116 ,  H01L21/31122

摘要： A method of forming a concave-convex pattern according to an embodiment includes: forming a guide pattern on a base material, the guide pattern having a convex portion; forming a formative layer on the guide pattern, the formative layer including a stacked structure formed by stacking a first layer and a second layer, the first layer including at least one element selected from a first metal element and a metalloid element, the second layer including a second metal element different from the first metal element; selectively leaving the formative layer only at side faces of the convex portions by performing etching on the formative layer; removing the guide pattern; and forming the concave-convex pattern in the base material by performing etching on the base material, with the remaining formative layer being used as a mask.

摘要翻译： 根据实施例的形成凹凸图案的方法包括：在基材上形成引导图案，所述引导图案具有凸部; 在引导图案上形成形成层，所述形成层包括通过层叠第一层和第二层而形成的层叠结构，所述第一层包括选自第一金属元素和准金属元素中的至少一种元素，所述第二层包括 与第一金属元件不同的第二金属元件; 通过在形成层上进行蚀刻，仅选择性地离开形成层在凸部的侧面; 去除引导图案; 并且通过在基材上进行蚀刻，将其余形成层用作掩模，在基材中形成凹凸图案。