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公开(公告)号：US06660392B2
公开(公告)日：2003-12-09
申请号：US10004889
申请日：2001-12-07
IPC分类号： B32B1800
CPC分类号： G02B1/111 , G02B1/04 , G02B1/105 , G02B1/113 , G02B1/18 , G02B27/0006 , Y10T428/31663 , C08L83/00
摘要： An anti-reflection film which includes an inorganic anti-reflection layer including a silicon dioxide-based inorganic layer and having a monolayer structure or plural-layer structure, and a stain-resistant layer provided as a surface layer, is provided. The stain-resistant layer is composed of a cured product of a particular fluorine-containing silazane compound. An optical member having the anti-reflection film on a substrate, such as an optical element, is also provided. These have good stain resistance, wipe off cleanability, mar resistance and water and oil repellency, and these properties have good durability.
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公开(公告)号：US6114528A
公开(公告)日：2000-09-05
申请号：US456328
申请日：1999-12-08
IPC分类号： C08G69/26 , C07C233/36 , C07D295/185 , C08G69/40 , C08G69/42 , C07D403/14
CPC分类号： C07D295/185 , C07C233/36
摘要： The invention is directed at novel fluorinated amide compounds of formula (1): ##STR1## wherein Rf is a divalent perfluoroalkylene or perfluoropolyether group, X is a group of formula (2), (3) or (4), and m is an integer inclusive of 0. ##STR2## R.sup.1 is a monovalent hydrocarbon group, and R.sup.2 is a divalent hydrocarbon group. These compounds can be used to obtain elastomers or cured resins having a high fluorine content and a low surface energy, making them effective as starting materials in the production of chemical and solvent-resistant elastomeric materials, parting agents, and water repellents.
摘要翻译： 本发明涉及式（1）的新型氟化酰胺化合物：其中Rf是二价全氟亚烷基或全氟聚醚基团，X是式（2），（3）或（4）的基团，m是包括 R1是一价烃基，R2是二价烃基。 这些化合物可用于获得具有高氟含量和低表面能的弹性体或固化树脂，使其作为生产化学和耐溶剂的弹性体材料，脱模剂和防水剂的起始材料是有效的。
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13.发明授权
公开(公告)号：US5412135A
公开(公告)日：1995-05-02
申请号：US230470
申请日：1994-04-20
申请人： Kenichi Fukuda , Kouichi Yamaguchi , Shinichi Sato , Hirofumi Kishita , Masatoshi Arai , Hironao Fujiki
发明人： Kenichi Fukuda , Kouichi Yamaguchi , Shinichi Sato , Hirofumi Kishita , Masatoshi Arai , Hironao Fujiki
摘要： A novel organic silicon compound having at least one .tbd.SiH group in a molecule and a fluorinated organic group at either end is a useful crosslinking agent for various resins, especially fluorinated resins. An organopolysiloxane composition comprising (A) an organopolysiloxane having in a molecule at least two alkenyl groups and at least one fluorinated substituent, (B) an organohydrogenpolysiloxane having at least two .tbd.SiH groups in a molecule and a fluorinated organic group at either end, and (C) a platinum catalyst is readily curable to products having solvent and moisture resistance.
摘要翻译： 在分子中具有至少一个3BOND SiH基团并且在任一端具有氟化有机基团的新型有机硅化合物是用于各种树脂，特别是氟化树脂的有用的交联剂。 一种有机聚硅氧烷组合物，其包含（A）分子中具有至少两个烯基和至少一个氟化取代基的有机聚硅氧烷，（B）在分子中具有至少两个3BOND SiH基团和在任一端具有氟化有机基团的有机氢聚硅氧烷，以及 （C）铂催化剂易于固化成具有溶剂和耐湿性的产品。
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公开(公告)号：US6031131A
公开(公告)日：2000-02-29
申请号：US158574
申请日：1998-09-22
IPC分类号： C08G69/26 , C07C233/36 , C07D295/185 , C08G69/40 , C08G69/42 , C07C233/05
CPC分类号： C07D295/185 , C07C233/36
摘要： The invention is directed at novel fluorinated amide compounds of formula (1): ##STR1## wherein Rf is a divalent perfluoroalkylene or perfluoro-polyether group, X is a group of formula (2), (3) or (4), and m is an integer inclusive of 0. ##STR2## R.sub.1 is a monovalent hydrocarbon group, and R.sup.2 is a divalent hydrocarbon group. These compounds can be used to obtain elastomers or cured resins having a high fluorine content and a low surface energy, making them effective as starting materials in the production of chemical and isolvent-resistant elastomeric materials, parting agents, and water repellents.
摘要翻译： 本发明涉及式（1）的新型氟化酰胺化合物：其中Rf是二价全氟亚烷基或全氟聚醚基团，X是式（2），（3）或（4）的基团，m是整数 包括0. R1是一价烃基，R2是二价烃基。 这些化合物可用于获得具有高氟含量和低表面能的弹性体或固化树脂，使其在生产化学和抗隔离弹性体材料，脱模剂和防水剂时作为起始材料是有效的。
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15.发明授权Method of forming resist pattern utilizing fluorinated resin antireflective film layer 失效利用氟化树脂防反射膜层形成抗蚀剂图案的方法
公开(公告)号：US5728508A
公开(公告)日：1998-03-17
申请号：US672961
申请日：1996-07-01
申请人： Katsuya Takemura , Toshinobu Ishihara , Satoshi Watanabe , Kazumasa Maruyama , Hirofumi Kishita , Kouichi Yamaguchi
发明人： Katsuya Takemura , Toshinobu Ishihara , Satoshi Watanabe , Kazumasa Maruyama , Hirofumi Kishita , Kouichi Yamaguchi
CPC分类号： G03F7/091
摘要： A method of forming a resist pattern comprising forming a photoresist layer on a substrate, forming a transparent anti-reflective film on said photoresist layer by applying an anti-reflective material onto said photoresist layer, said anti-reflective material comprising a fluorinated resin which is soluble in an organic hydrocarbon solvent, exposing a light to said resist layer through said transparent anti-reflective film, removing said anti-reflective film using an organic hydrocarbon solvent, and developing said photoresist layer.
摘要翻译： 一种形成抗蚀剂图案的方法，包括在基材上形成光致抗蚀剂层，在所述光致抗蚀剂层上形成透明的抗反射膜，通过在所述光致抗蚀剂层上施加抗反射材料，所述抗反射材料包括氟化树脂， 可溶于有机烃溶剂中，通过所述透明抗反射膜将光暴露于所述抗蚀剂层，使用有机烃溶剂除去所述抗反射膜，并显影所述光致抗蚀剂层。
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公开(公告)号：US5370951A
公开(公告)日：1994-12-06
申请号：US7525
申请日：1993-01-22
申请人： Yoshihiro Kubota , Meguru Kashida , Yuichi Hamada , Hirofumi Kishita , Shinichi Sato , Kouichi Yamaguchi
发明人： Yoshihiro Kubota , Meguru Kashida , Yuichi Hamada , Hirofumi Kishita , Shinichi Sato , Kouichi Yamaguchi
IPC分类号： C08L83/04 , C08K5/5435 , C09J183/14 , G03F1/62 , H01L21/027 , G03F9/00
CPC分类号： G03F1/64 , C09J183/14 , Y10T428/31544
摘要： An improvement is proposed in a frame-supported pellicle, i.e. a thin transparent film of a polymeric resin adhesively bonded to a frame member, used for dust-proof protection of a photomask in a photolithographic patterning work for the manufacture of electronic devices. The improvement comprises using, as the adhesive, an organopolysiloxane-based composition which comprises (a) a perfluoroalkyl-containing diorganopolysiloxane having at least two vinyl groups per molecule, (b) an organohydrogenpolysiloxane having at least one epoxy group and (c) a platinum catalyst for promoting the hydrosilation reaction between (a) and (b). As compared with conventional adhesives, a quite good adhesive bonding strength can be obtained with this adhesive even when the membrane is made from a fluorocarbon group-containing polymeric resin and the adhesive layer obtained therefrom is highly resistant against ultraviolet irradiation to ensure a long serviceable life of the pellicle.
摘要翻译： 在用于电子设备的制造的光刻图案化工作中，在框架支撑的防护薄膜中提出了一种改进的粘合方式粘合到框架构件上的聚合物树脂透明薄膜，用于光掩模的防尘保护。 该改进包括使用基于有机聚硅氧烷的组合物作为粘合剂，其包含（a）每分子具有至少两个乙烯基的含全氟烷基的二有机聚硅氧烷，（b）具有至少一个环氧基的有机氢聚硅氧烷和（c）铂 促进（a）和（b）之间硅氢化反应的催化剂。 与常规粘合剂相比，即使膜由含碳氟化合物基团的聚合物树脂制成并且由其获得的粘合剂层也能够高度耐紫外线照射，从而可以获得相当好的粘合强度，以确保长的使用寿命 的防护薄膜。
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公开(公告)号：US5326611A
公开(公告)日：1994-07-05
申请号：US44624
申请日：1993-04-09
CPC分类号： C09K3/1018 , C08L83/08 , Y10S277/945 , Y10T428/24777 , Y10T428/31663
摘要： A cover-gasket assembly for a hard disk device which comprises a gasket applied to a predetermined position of a cover for the hard disk device, wherein the gasket is formed essentially of a cured product of a fluorosilicone rubber composition. The assembly is particularly excellent in sealing property against permeation of water vapor, and can be used extremely effectively for hard disk devices for handy office-automation apparatuses such as laptop or pocket-size personal computers, word processors and the like which are expected to be used under various temperature and humidity conditions.
摘要翻译： 一种用于硬盘装置的盖 - 垫圈组件，其包括施加到用于硬盘装置的盖的预定位置的垫圈，其中所述垫圈基本上由氟硅橡胶组合物的固化产物形成。 该组件在水蒸气渗透性方面特别优异的密封性，并且可以非常有效地用于便携式办公自动化设备（例如笔记本电脑或者口袋大小的个人计算机，文字处理器等）的硬盘设备，预计将是 在各种温度和湿度条件下使用。
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18.发明授权
公开(公告)号：US5262557A
公开(公告)日：1993-11-16
申请号：US961829
申请日：1992-10-16
摘要： A fluorine containing organosilicon compound represented by the following general formula: ##STR1## wherein R represents an alkyl group or an aryl group, a is an integer of 1 to 7, b is an integer of 2 to 8, and c is an integer of 1 to 3. This compound is useful as a surface treating agent for silicas, an adhesive improver for resists, an oil or water-repellent treating agent, and a raw material for synthesis of various silicone compounds.
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公开(公告)号：US4985526A
公开(公告)日：1991-01-15
申请号：US518220
申请日：1990-05-03
摘要： A curable silicone composition comprising;(a) an organopolysiloxane having at least two silicon-bonded C.sub.2 to C.sub.8 alkenyl groups and containing a particular silicon-bonded fluorine-containing substituent;(b) an organohydrogenpolysiloxane having at least three silicon-bonded hydrogen atoms and a particular silicon-bonded fluorine-containing substituent; and(c) a catalyst; the proportion of said silicon-bonded hydrogen atoms in Component (b) to said silicon-bonded alkenyl groups in Component (a) being at least 0.5. This composition can form a film, on various substrates, having good release properties, water repellency and oil repellency.
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公开(公告)号：US08143359B2
公开(公告)日：2012-03-27
申请号：US12620782
申请日：2009-11-18
IPC分类号： C08F30/08
CPC分类号： C07F7/081
摘要： The purpose of the present invention is to provide an organic silicon compound which has a vinyl group more reactive than those of the conventional organic silicon compounds and can be bonded with another compound.The present organic silicon compound is represented by the following formula (1), wherein R1 is, independently of each other, a vinyl group or an alkyl group having 1 to 4 carbon atoms, R2 is an alkylene group having 3 to 6 carbon atoms, and R3 is, independently of each other, a hydrogen atom or an alkyl group having 1 to 4 carbon atoms and optionally substituted with one or more fluorine atoms.
摘要翻译： 本发明的目的是提供一种有机硅化合物，其具有比常规有机硅化合物更具反应活性的乙烯基，并可与另一种化合物结合。 本发明的有机硅化合物由下式（1）表示，其中R 1彼此独立地为乙烯基或具有1至4个碳原子的烷基，R 2为具有3至6个碳原子的亚烷基， 并且R 3彼此独立地为氢原子或具有1至4个碳原子并且任选被一个或多个氟原子取代的烷基。
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