公开(公告)号：US09134281B2

公开(公告)日：2015-09-15

申请号：US14001917

申请日：2012-03-02

Applicant: Hubert Grange

Inventor： Hubert Grange

IPC: G01N30/00 ,  G01N27/12 ,  B01J20/32 ,  G01N27/22

CPC classification number: G01N30/00 ,  B01D2253/202 ,  B01D2253/25 ,  B01J20/3204 ,  B01J20/3272 ,  B01J2220/445 ,  G01N27/12 ,  G01N27/121 ,  G01N27/126 ,  G01N27/22 ,  G01N27/223 ,  G01N2291/02845

Abstract: The invention relates to a humidity sensor including, as a humidity absorbent layer, a polymer layer including a blend including a first polyamide and a second polyamide, where the said second polyamide includes, in its repetitive units, a number of carbon atoms greater than that of the repetitive units of the first polyamide.

Abstract translation: 本发明涉及一种湿度传感器，其包括作为吸湿层的聚合物层，其包括包含第一聚酰胺和第二聚酰胺的共混物，其中所述第二聚酰胺以其重复单元包含大于 的第一聚酰胺的重复单元。

公开(公告)号：US08393223B2

公开(公告)日：2013-03-12

申请号：US12279396

申请日：2007-01-26

Applicant: Gilles Delapierre ,  Hubert Grange ,  Patrice Rey

Inventor： Gilles Delapierre ,  Hubert Grange ,  Patrice Rey

IPC: G01L9/04

CPC classification number: G01L9/0044 ,  G01L9/0055 ,  Y10T29/49103

Abstract: A pressure sensor micromachined by using microelectronics technologies includes a cavity hermetically sealed on one side by a silicon substrate and on the other side by a diaphragm that is configured to be formed under the effect of the pressure outside the cavity. The sensor includes at least one resistance strain gage fastened to the diaphragm and has resistance that varies as a function of the deformation of the diaphragm. The diaphragm is fastened to the resistance strain gages. The gages are located inside the sealed cavity. The diaphragm has an insulting layer deposited on a sacrificial layer and may cover integrated measurement circuits in the silicon substrate.

Abstract translation: 通过使用微电子技术微加工的压力传感器包括在一侧由硅衬底气密密封的腔体，另一侧由隔膜构成，该隔膜被构造成在空腔外部的压力作用下形成。 传感器包括至少一个紧固到隔膜的电阻应变计，并具有作为隔膜变形的函数而变化的阻力。 隔膜固定在电阻应变计上。 量具位于密封腔内。 隔膜具有沉积在牺牲层上的绝缘层，并且可以覆盖硅衬底中的集成测量电路。

公开(公告)号：US20110179861A1

公开(公告)日：2011-07-28

申请号：US13054322

申请日：2009-06-22

Applicant: Hubert Grange ,  Jean-Sébastien Danel ,  Brigitte Desloges ,  Vincent Jousseaume

Inventor： Hubert Grange ,  Jean-Sébastien Danel ,  Brigitte Desloges ,  Vincent Jousseaume

IPC: G01N27/22 ,  H01L21/36 ,  B82Y15/00 ,  B82Y40/00

CPC classification number: H01G5/0136 ,  B82Y15/00 ,  G01N27/225 ,  H01G5/0134 ,  H01G5/16

Abstract: A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor.

Abstract translation: 电容型湿度传感器，用于检测或测量湿度的装置，包括传感器，以及制造传感器的方法。 湿度传感器包括位于电容器的至少一个第一电极和电容器的至少一个第二电极之间的至少一个纳米多孔电介质材料。

公开(公告)号：US07671429B2

公开(公告)日：2010-03-02

申请号：US10567865

申请日：2004-08-24

Applicant: Hubert Grange ,  Murielle Moreau ,  Michel Borel

Inventor： Hubert Grange ,  Murielle Moreau ,  Michel Borel

IPC: H01L29/82

CPC classification number: B81C1/00039 ,  B81B2201/0235 ,  B81B2203/0118 ,  B81B2203/0181 ,  B81B2203/0307 ,  B81B2203/0361 ,  Y10T74/22

Abstract: A cavity is etched in a substrate and opens out onto the surface of the substrate facing the suspended element (1). The cavity has at least one broader zone having a cross-section which is greater than the cross-section of the cavity at said surface. A base (4) of the pillar (2), of complementary shape to the cavity, is buried in the cavity. The base (4) of the pillar (2) can form a dovetail assembly with the cavity of the substrate. This assembly is obtained by deposition, on a surface of the substrate, of a sacrificial layer and etching, in the sacrificial layer, of a hole passing through the sacrificial layer and reaching the surface of the substrate. The substrate is then etched, in the extension of the hole, so as to form the cavity of the substrate. Then a material designed to form the pillar (2) is deposited in the cavity and on the walls of the hole.

Abstract translation: 在衬底中蚀刻空腔，并向面向悬浮元件（1）的衬底表面开口。 空腔具有至少一个较宽的区域，该区域的横截面大于所述表面处空腔的横截面。 柱体（2）的与空腔互补形状的基座（4）被埋在空腔中。 支柱（2）的基部（4）可以形成具有基底的空腔的燕尾组件。 该组件通过在牺牲层上沉积在衬底的表面上并在牺牲层中蚀刻穿过牺牲层并到达衬底表面的孔而获得。 然后在孔的延伸部中蚀刻衬底，以形成衬底的空腔。 然后将设计成形成柱（2）的材料沉积在空腔中和孔的壁上。

公开(公告)号：US20100031752A1

公开(公告)日：2010-02-11

申请号：US12279396

申请日：2007-01-26

Applicant: Gilles Delapierre ,  Hubert Grange ,  Patrice Rey

Inventor： Gilles Delapierre ,  Hubert Grange ,  Patrice Rey

IPC: G01L9/04 ,  H01C17/00 ,  G01R3/00

CPC classification number: G01L9/0044 ,  G01L9/0055 ,  Y10T29/49103

Abstract: The invention relates to pressure sensors that are micromachined using microelectronics technologies. The sensor provided by the invention comprises a cavity (V) hermetically sealed on one side by a silicon substrate (40) and on the other side by a diaphragm (58) that can be formed under the effect of the pressure outside the cavity, the sensor having at least one resistance strain gage (54, 56) fastened to the diaphragm and having resistance that varies as a function of the deformation of the diaphragm. The diaphragm, preferably made of silicon nitride, is fastened to the resistance strain gages. The gages are located beneath the diaphragm inside the sealed cavity (V). It is not necessary to recess the substrate to produce the cavity: the diaphragm is formed by depositing an insulting layer on a sacrificial layer, for example made of a polyamide; it may cover integrated measurement circuits in the silicon substrate.

Abstract translation: 本发明涉及使用微电子技术微加工的压力传感器。 本发明提供的传感器包括一个由硅衬底（40）在一侧气密密封的腔（V），另一侧由隔膜（58）形成，该隔膜可在空腔外部压力的作用下形成， 传感器具有紧固到隔膜的至少一个电阻应变计（54,56），并具有作为膜片的变形的函数而变化的电阻。 优选由氮化硅制成的隔膜紧固到电阻应变计上。 量具位于密封腔（V）内的隔膜下方。 没有必要使衬底凹陷以产生空腔：通过在例如由聚酰胺制成的牺牲层上沉积绝缘层来形成隔膜; 它可以覆盖硅衬底中的集成测量电路。