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公开(公告)号：US08136549B2
公开(公告)日：2012-03-20
申请号：US12753175
申请日：2010-04-02
IPC分类号： E03B5/00
CPC分类号： C23C14/566 , Y10T137/86131
摘要： A sluice system for a vacuum coating facility for coating substrates that can be moved through the vacuum coating in a direction of conveyance comprises a prevacuum slice chamber and a transfer chamber adjoining a coating chamber, wherein a fine vacuum can be regulated before the transfer chamber on the input side in the direction of conveyance and after the transfer device on the output side in the direction of conveyance. The prevacuum sluice chamber is directly adjacent to the transfer chamber and the fine vacuum can be regulated in the prevacuum sluice chamber. A high-vacuum pump system can also alternatively and selectively be connected to the prevacuum sluice chamber.
摘要翻译： 用于涂覆可以沿着输送方向移动通过真空涂层的基材的真空镀膜设备的闸阀系统包括预吸附切片室和邻接涂覆室的传送室，其中可以在传送室开启之前调节精细的真空度 在输送方向上的输入侧和输送侧的输送侧之后的输送侧。 预真空闸室直接邻近传送室，精密真空可以在先前的真空闸室调节。 高真空泵系统也可以选择性地连接到预真空闸室。
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12.发明申请METHOD AND ARRANGEMENT FOR PRODUCING CONTACTS ON PHOTOVOLTAIC ELEMENTS WITHOUT CARRIER SUBSTRATE 审中-公开在没有载体基板的光伏元件上生产接触的方法和装置公开(公告)号：US20090272642A1
公开(公告)日：2009-11-05
申请号：US12248927
申请日：2008-10-10
申请人： Ekkehart Reinhold , Steffen Mosshammer , Martin Dimer , Roland Koenig , Joerg Faber , Hans-Christian Hecht
发明人： Ekkehart Reinhold , Steffen Mosshammer , Martin Dimer , Roland Koenig , Joerg Faber , Hans-Christian Hecht
IPC分类号： C23C14/35
CPC分类号： H01L31/022425 , Y02E10/50
摘要： Please amend the Abstract of the Disclosure to read as follows. In accordance with 37 CFR §1.72, the abstract is submitted herewith on a separate sheet of paper, following page 9 of this amendment.
摘要翻译： 请将“披露摘要”修改如下。 根据37 CFR§1.72，摘要随附于本修正案第9页的单独一张纸上。
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公开(公告)号：US20050145488A1
公开(公告)日：2005-07-07
申请号：US10508819
申请日：2003-03-24
CPC分类号： H01J37/3405
摘要： A tube magnetron for a vacuum coating applications such as plasma sputtering is provided with a hollow rotating tube target arrangement and a magnet system. The hollow rotating tube target arrangement has longitudinally extended target plates that are fixed to a target support. The target plates in cross section are arranged adjacent to each other to form a polygon. The magnet system generates a magnetic field which extends through the tube target arrangement. The magnet system is configured so that generated magnet field has in cross section two maxima arranged in the axial longitudinal direction of the tube target arrangement. The tube magnetron is configured for use with sputtering targets that are in the form of target plates. The target plates may be made from ceramics, ceramic-like and/or high-melting point materials. Materials such as ITO, zinc oxide, silicon can be efficiently and uniformly sputter coated on substrates.
摘要翻译： 用于诸如等离子体溅射的真空涂覆应用的管磁控管设置有中空旋转管目标装置和磁体系统。 中空旋转管目标装置具有固定到目标支撑件的纵向延伸的目标板。 横截面中的目标板彼此相邻地布置以形成多边形。 磁体系统产生延伸穿过管目标装置的磁场。 磁体系统构造成使得所产生的磁场在管目标装置的轴向方向上具有两个最大值的横截面。 管磁控管配置为与目标板形式的溅射靶配合使用。 目标板可以由陶瓷，陶瓷样和/或高熔点材料制成。 诸如ITO，氧化锌，硅的材料可以有效地均匀地溅射涂覆在基片上。
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公开(公告)号：US08828194B2
公开(公告)日：2014-09-09
申请号：US11575985
申请日：2005-09-21
CPC分类号： C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C17/3694 , C23C14/027 , C23C14/08 , C23C14/352 , Y10T428/31504 , Y10T428/31663
摘要： A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.
摘要翻译： 可退火的层系统包括透明衬底，优选玻璃衬底，以及直接施加到衬底或沉积到衬底上的一个或多个底层的第一层序列。 层序列包括基底近端阻挡层，选择层和底物远侧阻断层。 还提供了即使在临界气候条件和/或基板的未定义条件下也可以进行退火并具有足够质量的层系统的制造方法。 在热处理（退火，弯曲）期间，层系统的颜色位置保持基本稳定，并且颜色位置可以在层系统的低发射率下广泛变化。 为此，第一电介质中间层介于基底近端阻挡层和选择层之间，并被构造为亚化学计量梯度层。
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15.发明申请PROCESS AND APPARATUS FOR THE INTRODUCTION AND REMOVAL OF A SUBSTRATE INTO AND FROM A VACUUM COATING UNIT 审中-公开将基材引入和除去真空涂料单元的方法和装置公开(公告)号：US20100239762A1
公开(公告)日：2010-09-23
申请号：US12665953
申请日：2008-06-23
CPC分类号： C23C14/566
摘要： An apparatus is provided for introduction and/or removal of a substrate into and/or from a process chamber of a vacuum coating unit that includes a process region adjoined by a lock chamber separable from surrounding atmosphere and from the process region by vacuum-tight lock gates. The process region encompasses a process chamber and a transfer chamber for altering transport speed. A vacuum-tight gate on the inlet side of a lock system is opened, the substrate is transported into the lock system and the gate is closed. Pressure in the lock system is subsequently matched to pressure in a subsequent space. An outlet-side gate of the lock system is opened and the substrate is transported from the lock system. The lock system includes a lock chamber and the adjoining transfer chamber. A passage between the transfer chamber and lock chamber remains open during introduction or removal of the substrate.
摘要翻译： 提供一种用于将衬底引入和/或去除真空镀膜单元的处理室的设备，该真空镀膜单元包括由与周围大气隔开的锁定室邻接的工艺区域和通过真空密封锁定的工艺区域 大门 处理区域包括用于改变传送速度的处理室和传送室。 打开锁定系统入口侧的真空密封门，将基板运送到锁定系统中，并关闭门。 随后，锁系统中的压力与后续空间中的压力匹配。 打开锁定系统的出口侧门，并且从锁定系统传送衬底。 锁定系统包括锁定室和相邻的传送室。 在引入或移除基板期间，转移室和锁定室之间的通道保持打开。
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公开(公告)号：US20070209973A1
公开(公告)日：2007-09-13
申请号：US10574368
申请日：2004-10-12
IPC分类号： B03B9/00
CPC分类号： C23C14/566 , Y10T137/86131
摘要： A sluice system for a vacuum coating facility for coating substrates that can be moved through the vacuum coating in a direction of conveyance comprises a prevacuum slice chamber and a transfer chamber adjoining a coating chamber, wherein a fine vacuum can be regulated before the transfer chamber on the input side in the direction of conveyance and after the transfer device on the output side in the direction of conveyance. The prevacuum sluice chamber is directly adjacent to the transfer chamber and the fine vacuum can be regulated in the prevacuum sluice chamber. A high-vacuum pump system can also alternatively and selectively be connected to the prevacuum sluice chamber.
摘要翻译： 用于涂覆可以沿着输送方向移动通过真空涂层的基材的真空镀膜设备的闸阀系统包括预吸附切片室和邻接涂覆室的传送室，其中可以在传送室开启之前调节精细的真空度 在输送方向上的输入侧和输送侧的输送侧之后的输送侧。 预真空闸室直接邻近传送室，精密真空可以在先前的真空闸室调节。 高真空泵系统也可以选择性地连接到预真空闸室。
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公开(公告)号：US20060225652A1
公开(公告)日：2006-10-12
申请号：US11400856
申请日：2006-04-10
IPC分类号： C23C16/00
CPC分类号： C23C14/566
摘要： The invention concerns an apparatus for vacuum coating of substrates of various sizes that consists of lock chambers at the entrance and at the exit and several processing chambers arranged one behind the other as well as of a conveying system for the sequential transport of substrates with a certain substrate width through the lock chambers and for their continuous transport through the coating chambers. The lock and processing chambers each have a chamber width that corresponds to the substrate width, and the lock chamber is characterized by a loading area AL having a width b and a length l that indicates the size of substrate that can be accommodated. The object of the apparatus according to the invention is to better utilize the coatable area of each processing chamber so that less coating material is wasted. The object is solved by making the ratio R of width to length R=w/l greater than a minimum ratio Rmin where Rmin =0.95−0.019 AL.
摘要翻译： 本发明涉及一种用于真空涂覆各种尺寸的基板的设备，其包括在入口处和出口处的锁定室以及一个彼此相邻布置的多个处理室以及用于以一定的顺序输送基板的输送系统 衬底宽度通过锁定室并且连续地通过涂覆室传送。 锁和处理室各自具有对应于基板宽度的室宽度，并且锁定室的特征在于具有宽度b的负载区域A和表示基板尺寸的长度l 可以容纳。 根据本发明的装置的目的是更好地利用每个处理室的可涂覆区域，从而浪费较少的涂层材料。 通过使宽度与长度R的比R大于最小比R min min来解决该目的，其中R min min = 0.95-0.019A L 。
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公开(公告)号：US08197222B2
公开(公告)日：2012-06-12
申请号：US12306956
申请日：2007-07-04
IPC分类号： F04B37/02
摘要： A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.
摘要翻译： 将具有低维护要求的高效吸气泵应用于真空涂布设备，使得可以通过吸气剂材料的除尘来涂覆基材以保持未被污染。 吸气泵包括具有曝光开口的泵壳体。 壳体具有吸气体，吸气剂材料基本上封闭曝光开口并且可以相对于曝光开口移动。 吸气体表面的内部子部分指向泵壳体的内部，并且外部子部分通过曝光开口指向泵壳体的外部。 内部和外部子部分的位置可以通过吸气体的移动而互换。 吸气泵配备有用于从内部子部分去除吸气剂材料的装置。
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19.发明申请HIGHLY REFLECTIVE LAYER SYSTEM, METHOD FOR PRODUCING THE LAYER SYSTEM AND DEVICE FOR CARRYING OUT THE METHOD 审中-公开高反射层系统，用于生产层系统的方法和实现方法的装置公开(公告)号：US20090220802A1
公开(公告)日：2009-09-03
申请号：US12278072
申请日：2006-09-06
申请人： Joerg Faber , Ekkehart Reinhold , Carsten Deus , Hans-Christian Hecht , David Schubert , Uwe Kralapp , Hendrik Hummel
发明人： Joerg Faber , Ekkehart Reinhold , Carsten Deus , Hans-Christian Hecht , David Schubert , Uwe Kralapp , Hendrik Hummel
CPC分类号： C23C14/568 , C23C14/14 , C23C28/321 , C23C28/322 , C23C28/34 , C23C28/345 , C23C28/3455 , G02B5/0875 , Y10T428/31678
摘要： A highly reflective layer system for coating substrates with reflection-enhancing layers, a method for producing the layer system and a device for carrying out the method are provided. On the surface of the substrate, a first functional reflection layer is applied. The first functional reflection layer may be reflective or partially reflective and comprise of metal or a metal alloy which contains one of more constituents from the group comprising copper, nickel, aluminum, titanium, molybdenum and tin. Provided there over is a second functional reflection layer. The second functional reflection later may comprise metal or a metal alloy, for example silver or a silver alloy. Over the second functional reflective layer there follows a first transparent dielectric layer. The first transparent dielectric layer may comprise, for example, silicon oxide. Arranged over the first transparent dielectric layer is a second transparent dielectric layer. This may consist, for example, of titanium oxide.
摘要翻译： 提供了一种用于涂覆反射增强层的基板的高反射层系统，该层系统的制造方法和用于实施该方法的装置。 在基板的表面上施加第一功能反射层。 第一功能反射层可以是反射的或部分反射的，并且包括金属或金属合金，其包含来自包括铜，镍，铝，钛，钼和锡的组的更多成分之一。 在那里提供了第二功能反射层。 稍后的第二功能反射可以包括金属或金属合金，例如银或银合金。 在第二功能性反射层之后，存在第一透明介电层。 第一透明介电层可以包括例如氧化硅。 排列在第一透明介电层上方的是第二透明介电层。 这可以由例如氧化钛组成。
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公开(公告)号：US20090202362A1
公开(公告)日：2009-08-13
申请号：US12306956
申请日：2007-07-04
摘要： A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.
摘要翻译： 将具有低维护要求的高效吸气泵应用于真空涂布设备，使得可以通过吸气剂材料的除尘来涂覆基材以保持未被污染。 吸气泵包括具有曝光开口的泵壳体。 壳体具有吸气体，吸气剂材料基本上封闭曝光开口并且可以相对于曝光开口移动。 吸气体表面的内部子部分指向泵壳体的内部，并且外部子部分通过曝光开口指向泵壳体的外部。 内部和外部子部分的位置可以通过吸气体的移动而互换。 吸气泵配备有用于从内部子部分去除吸气剂材料的装置。
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