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公开(公告)号：US06279389B1
公开(公告)日：2001-08-28
申请号：US09698919
申请日：2000-10-27
IPC分类号： G01B528
CPC分类号： G01Q60/38 , G01Q70/04 , Y10S977/849 , Y10S977/852 , Y10S977/86 , Y10S977/868 , Y10S977/874 , Y10S977/955
摘要： Thermal drift and acoustic vibrations in the AFM are reduced using a probe-based detection device that references the topography measurement of the AFM to the sample surface in the proximity of the measurement probe. A differential measurement is made between the reference probe and the measurement probe for high sensitivity roughness quantification and defect detection. Multi-probe arrays may be used for large area defect detection with immunity from thermal and acoustic noise sources.
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公开(公告)号：US06951143B1
公开(公告)日：2005-10-04
申请号：US09724655
申请日：2000-11-28
CPC分类号： G01L5/161
摘要： According to a first aspect of the preferred embodiment, a three-axis sensor assembly for use in an elastomeric material includes a first pair of sensors disposed along a first pair of respective axes that intersect, the first sensors being adapted to detect a force in a first direction. In addition, the sensor assembly includes a second pair of sensors disposed along a second pair of respective axes that intersect, the second sensors detecting a force in a second direction generally orthogonal to the first direction. Furthermore, in the assembly, the force measured in the first direction is equal to the difference between the outputs of the first sensors, and the force measured in the second direction is equal to the difference between the outputs of said second sensors. According to another aspect of the preferred embodiment, the sum of the outputs of the first sensors and the second sensors equals a force in a third direction orthogonal to the first and second directions. In another aspect of the preferred embodiment, the first pair of sensors are disposed on first opposed faces of a pyramid-shaped body, and the second pair of sensors are disposed on second opposed faces of the pyramid-shaped body. In addition, the elastomeric material can be a vehicle tire, and the tire may include a plurality of the sensor assemblies disposed about its perimeter in mutually spaced relationship.
摘要翻译： 根据优选实施例的第一方面，用于弹性体材料的三轴传感器组件包括沿着相交的第一对相应轴线设置的第一对传感器，第一传感器适于检测 第一个方向 此外，传感器组件包括沿着相交的第二对相应轴线设置的第二对传感器，第二传感器检测大致正交于第一方向的第二方向上的力。 此外，在组件中，在第一方向上测量的力等于第一传感器的输出之间的差，并且在第二方向上测量的力等于所述第二传感器的输出之间的差。 根据优选实施例的另一方面，第一传感器和第二传感器的输出的总和等于在与第一和第二方向正交的第三方向上的力。 在优选实施例的另一方面，第一对传感器设置在金字塔形体的第一相对面上，第二对传感器设置在金字塔形体的第二相对面上。 此外，弹性体材料可以是车辆轮胎，并且轮胎可以包括以彼此间隔开的关系围绕其周边布置的多个传感器组件。
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13.发明授权公开(公告)号：US06672144B2
公开(公告)日：2004-01-06
申请号：US09904913
申请日：2001-07-13
IPC分类号： G01B528
CPC分类号： G01Q10/065 , G01Q60/34 , Y10S977/85 , Y10S977/86 , Y10S977/863 , Y10S977/881
摘要： A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.
摘要翻译： 扫描探针显微镜方法和装置，其使用主动驱动技术来修改成像动力学，以优化幅度检测的带宽。 偏转优选地通过包括激光器和光电检测器的光学检测系统来测量，其通过光束反弹技术或其他常规技术来测量悬臂偏转。 随后解调所检测到的悬臂的偏转，以产生与悬臂的振荡幅度成比例的信号，此后用于驱动悬臂。
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公开(公告)号：US06196061B1
公开(公告)日：2001-03-06
申请号：US09186742
申请日：1998-11-05
IPC分类号： G01B528
CPC分类号： G01Q60/38 , G01Q70/04 , Y10S977/849 , Y10S977/852 , Y10S977/86 , Y10S977/868 , Y10S977/874 , Y10S977/955
摘要： Thermal drift and acoustic vibrations in the AFM are reduced using a probe-based detection device that references the topography measurement of the AFM to the sample surface in the proximity of the measurement probe. A differential measurement is made between the reference probe and the measurement probe for high sensitivity roughness quantification and defect detection. Multi-probe arrays may be used for large area defect detection with immunity from thermal and acoustic noise sources.
摘要翻译： 使用基于探针的检测装置可以减少AFM中的热漂移和声振动，该装置将AFM的地形测量参考于测量探头附近的样品表面。 对于高灵敏度粗糙度定量和缺陷检测，在参考探针和测量探头之间进行差分测量。 多探针阵列可用于大面积缺陷检测，具有抗热噪声源和噪声源。
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公开(公告)号：US06941823B1
公开(公告)日：2005-09-13
申请号：US10045438
申请日：2001-11-07
IPC分类号： G01L1/04
摘要： A method to compensate for stress deflection in a compound microprobe that includes a substrate, a microcantilever extending outwardly from the substrate, and a film formed on the microcantilever. The method preferably comprises the steps of determining an amount of stress-induced deflection of the microcantilever, and then mounting the microprobe so as to compensate for the stress-induced deflection. The mounting step preferably includes selecting a compensation piece based upon the amount of stress-induced deflection, where the compensation piece is a wedge generally aligning the microcantilever with a deflection detection apparatus. In general, the step of selecting the compensation piece includes correcting an angle between a longitudinal axis of the microcantilever and the substrate so as to insure that light reflected from the microcantilever during operation contacts a detector of a deflection detection apparatus. The preferred embodiment is also directed to a microprobe assembly having a microcantilever and a substrate coupled to a support that includes a compensation piece disposed intermediate the support and the substrate. Again, the compensation piece is configured to compensate for an amount of static deflection of the microcantilever.
摘要翻译： 一种用于补偿复合微探针中的应力偏转的方法，其包括基底，从基底向外延伸的微悬臂梁以及形成在微悬臂梁上的膜。 该方法优选地包括以下步骤：确定微悬臂梁的应力引起的偏转量，然后安装微探针以便补偿应力引起的偏转。 安装步骤优选地包括基于应力引起的偏转量来选择补偿件，其中补偿件是通常将微型悬臂与偏转检测装置对准的楔形件。 通常，选择补偿件的步骤包括校正微悬臂梁的纵向轴线和基板之间的角度，以确保在操作期间从微型悬臂梁反射的光接触偏转检测装置的检测器。 优选实施例还涉及一种微探针组件，该微探针组件具有微型悬臂梁和联接到支撑件的基板，该支撑件包括设置在支撑件和基板之间的补偿件。 再次，补偿件被配置为补偿微悬臂梁的静态挠曲量。
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公开(公告)号：US06886395B2
公开(公告)日：2005-05-03
申请号：US10345513
申请日：2003-01-16
申请人： Stephen C. Minne
发明人： Stephen C. Minne
摘要： A method of making a probe having a cantilever and a tip include providing a substrate having a surface and forming a tip extending substantially orthogonally from the surface. The method includes depositing an etch stop layer on the substrate, whereby the etch stop layer protects the tip during process. A silicon nitride layer is then deposited on the etch stop layer. An etch operation is used to release the cantilever and expose the etch stop layer protecting the tip. Preferably, the tip is silicon and the cantilever supporting the tip, preferably via the etch stop layer, is silicon nitride. A probe for a surface analysis instrument made according to the method includes a tip and a silicon nitride cantilever having a thickness defined during the deposition process.
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公开(公告)号：US06189374B1
公开(公告)日：2001-02-20
申请号：US09280160
申请日：1999-03-29
IPC分类号： G01B528
CPC分类号： G01Q60/34 , G01Q10/045 , G01Q10/065 , Y10S977/849 , Y10S977/851 , Y10S977/863 , Y10S977/869 , Y10S977/875 , Y10S977/881
摘要： An AFM that combines an AFM Z position actuator and a self-actuated Z position cantilever (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample includes a self-actuated cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an oscillation amplitude generally equal to a setpoint value. The AFM includes a first feedback circuit nested within a second feedback circuit, wherein the first feedback circuit generates a cantilever control signal in response to vertical displacement of the self-actuated cantilever during a scanning operation, and the second feedback circuit is responsive to the cantilever control signal to generate a position control signal. A Z position actuator is also included within the second feedback circuit and is responsive to the position control signal to position the sample. In operation, preferably, the cantilever control signal alone is indicative of the topography of the sample surface. In a further embodiment, the first feedback circuit includes an active damping circuit for modifying the quality factor (“Q”) of the cantilever resonance to optimize the bandwidth of the cantilever response.
摘要翻译： AFM将AFM Z位置执行器和自动Z位置悬臂（可循环模式和接触模式）两者兼容，并配有适当的嵌套反馈控制电路，实现高速成像和精确的Z位置测量。 用于分析样品表面的AFM的优选实施例包括具有与其集成的Z定位元件的自动致动悬臂，以及振荡器，该振荡器以大体上等于自身的共振频率的频率振荡自动致动悬臂， 并且在大致等于设定值的振荡幅度下。 AFM包括嵌套在第二反馈电路内的第一反馈电路，其中第一反馈电路在扫描操作期间响应于自致动悬臂的垂直位移而产生悬臂控制信号，并且第二反馈电路响应于悬臂 控制信号以产生位置控制信号。 Z位置致动器还包括在第二反馈电路内，并且响应于位置控制信号来定位样品。 在操作中，优选地，悬臂控制信号单独指示样品表面的形貌。 在另一实施例中，第一反馈电路包括用于修改悬臂谐振的质量因子（“Q”）的主动阻尼电路，以优化悬臂响应的带宽。
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公开(公告)号：US07691661B2
公开(公告)日：2010-04-06
申请号：US11120553
申请日：2005-05-03
申请人： Stephen C. Minne
发明人： Stephen C. Minne
IPC分类号： H01L21/302
摘要： A method of making a probe having a cantilever and a tip include providing a substrate having a surface and forming a tip extending substantially orthogonally from the surface. The method includes depositing an etch stop layer on the substrate, whereby the etch stop layer protects the tip during process. A silicon nitride layer is then deposited on the etch stop layer. An etch operation is used to release the cantilever and expose the etch stop layer protecting the tip. Preferably, the tip is silicon and the cantilever supporting the tip, preferably via the etch stop layer, is silicon nitride. A probe for a surface analysis instrument made according to the method includes a tip and a silicon nitride cantilever having a thickness defined during the deposition process.
摘要翻译： 制造具有悬臂和尖端的探针的方法包括提供具有表面的基底，并形成从该表面基本正交延伸的尖端。 该方法包括在衬底上沉积蚀刻停止层，由此在处理期间蚀刻停止层保护尖端。 然后将氮化硅层沉积在蚀刻停止层上。 使用蚀刻操作来释放悬臂并暴露保护尖端的蚀刻停止层。 优选地，尖端是硅，并且优选通过蚀刻停止层支撑尖端的悬臂是氮化硅。 用于根据该方法制造的表面分析仪器的探针包括具有在沉积工艺期间限定的厚度的尖端和氮化硅悬臂。
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19.发明授权公开(公告)号：US07204131B2
公开(公告)日：2007-04-17
申请号：US11415602
申请日：2006-05-02
CPC分类号： G01Q10/065 , G01Q60/34 , Y10S977/85 , Y10S977/86 , Y10S977/863 , Y10S977/881
摘要： A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.
摘要翻译： 扫描探针显微镜方法和装置，其使用主动驱动技术来修改成像动力学，以优化幅度检测的带宽。 偏转优选地通过包括激光器和光电检测器的光学检测系统来测量，其通过光束反弹技术或其他常规技术来测量悬臂偏转。 随后解调所检测到的悬臂的偏转，以产生与悬臂的振荡幅度成比例的信号，此后用于驱动悬臂。
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公开(公告)号：US07036357B2
公开(公告)日：2006-05-02
申请号：US10752235
申请日：2004-01-06
CPC分类号： G01Q10/065 , G01Q60/34 , Y10S977/85 , Y10S977/86 , Y10S977/863 , Y10S977/881
摘要： A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.
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