Method of manufacturing an array substrate for LCD device having doubled-layered metal structure
    12.
    发明授权
    Method of manufacturing an array substrate for LCD device having doubled-layered metal structure 有权
    制造具有双层金属结构的LCD器件用阵列基板的方法

    公开(公告)号:US08432503B2

    公开(公告)日:2013-04-30

    申请号:US13100883

    申请日:2011-05-04

    IPC分类号: G02F1/136

    摘要: A method of forming an array substrate for a LCD device includes patterning a first metal layer and a first barrier metal layer to form a gate electrode, a gate line and a gate pad; forming a gate insulation layer to cover the gate electrode, line and pad; forming an active layer, an ohmic contact layer, a second barrier metal layer and a second metal layer including a copper (Cu) layer on the gate insulation layer; patterning the second metal layer and the second barrier metal layer by a first etching process; patterning an exposed portion of the second metal layer and the second barrier metal layer and ohmic contact layer to form source and drain electrodes each having a double layered structure of the second barrier metal layer and the second metal layer; and forming a pixel electrode on a passivation layer formed on the source and drain electrodes.

    摘要翻译: 形成LCD器件的阵列基板的方法包括:图案化第一金属层和第一势垒金属层以形成栅电极,栅极线和栅极焊盘; 形成栅极绝缘层以覆盖栅电极,线和焊盘; 在所述栅极绝缘层上形成有源层,欧姆接触层,第二阻挡金属层和包含铜(Cu)层的第二金属层; 通过第一蚀刻工艺图案化第二金属层和第二阻挡金属层; 图案化第二金属层和第二阻挡金属层和欧姆接触层的暴露部分,以形成各自具有第二阻挡金属层和第二金属层的双层结构的源极和漏极; 以及在形成在源极和漏极上的钝化层上形成像素电极。

    Array substrate for LCD device having metal-diffusion film and manufacturing method thereof
    15.
    发明授权
    Array substrate for LCD device having metal-diffusion film and manufacturing method thereof 有权
    具有金属扩散膜的LCD器件用阵列基板及其制造方法

    公开(公告)号:US07492420B2

    公开(公告)日:2009-02-17

    申请号:US12010753

    申请日:2008-01-29

    IPC分类号: G02F1/136

    CPC分类号: G02F1/1368 G02F1/136286

    摘要: The present invention is an array substrate for use in a liquid crystal display device, which includes a gate electrode, a gate line and a gate pad electrode on a substrate, wherein all of the gate electrode, the gate line and the gate pad electrode have a first barrier metal layer, a first copper layer, and a first out-diffusion film that covers and surrounds the first copper layer. In the liquid crystal display device, the pixel electrode, gate pad terminal and data pad terminal are formed of a transparent conductive material on a passivation layer.

    摘要翻译: 本发明是用于液晶显示装置的阵列基板,其包括在基板上的栅电极,栅极线和栅极焊盘电极,其中所有栅电极,栅极线和栅极焊盘电极具有 第一阻挡金属层,第一铜层和覆盖并包围第一铜层的第一外扩散膜。 在液晶显示装置中,像素电极,栅极焊盘端子和数据焊盘端子由钝化层上的透明导电材料形成。

    Array substrate for LCD device having metal-diffusion film and manufacturing method thereof
    16.
    发明申请
    Array substrate for LCD device having metal-diffusion film and manufacturing method thereof 有权
    具有金属扩散膜的LCD器件用阵列基板及其制造方法

    公开(公告)号:US20080129943A1

    公开(公告)日:2008-06-05

    申请号:US12010753

    申请日:2008-01-29

    IPC分类号: G02F1/1343

    CPC分类号: G02F1/1368 G02F1/136286

    摘要: The present invention is an array substrate for use in a liquid crystal display device, which includes a gate electrode, a gate line and a gate pad electrode on a substrate, wherein all of the gate electrode, the gate line and the gate pad electrode have a first barrier metal layer, a first copper layer, and a first out-diffusion film that covers and surrounds the first copper layer. In the liquid crystal display device, the pixel electrode, gate pad terminal and data pad terminal are formed of a transparent conductive material on a passivation layer.

    摘要翻译: 本发明是用于液晶显示装置的阵列基板,其包括在基板上的栅电极,栅极线和栅极焊盘电极,其中所有栅电极,栅极线和栅极焊盘电极具有 第一阻挡金属层,第一铜层和覆盖并包围第一铜层的第一外扩散膜。 在液晶显示装置中,像素电极,栅极焊盘端子和数据焊盘端子由钝化层上的透明导电材料形成。

    Array substrate for LCD device having double-layered metal structure and manufacturing method thereof
    17.
    发明授权
    Array substrate for LCD device having double-layered metal structure and manufacturing method thereof 有权
    具有双层金属结构的液晶显示装置用阵列基板及其制造方法

    公开(公告)号:US07777822B2

    公开(公告)日:2010-08-17

    申请号:US12078048

    申请日:2008-03-26

    IPC分类号: G02F1/136

    摘要: An array substrate in a liquid crystal display device includes a gate electrode, a gate line and a gate pad on a substrate, wherein the gate electrode, the gate line and the gate pad have a double-layered structure consisting of a first metal layer and a first barrier metal layer in series from the substrate, and wherein the first metal is one of aluminum and aluminum alloy; a gate insulation layer; an active layer and an ohmic contact layer; a data line, source and drain electrodes, and a data pad each having a double-layered structure consisting of a second barrier metal layer and a second metal layer of copper; a passivation layer; and a pixel electrode, a gate pad terminal and a data pad terminal on the passivation layer formed of a transparent conductive material.

    摘要翻译: 液晶显示装置中的阵列基板包括在基板上的栅电极,栅极线和栅极焊盘,其中栅电极,栅极线和栅极焊盘具有由第一金属层和第二金属层构成的双层结构, 从所述基板串联的第一阻挡金属层,其中所述第一金属是铝和铝合金之一; 栅极绝缘层; 有源层和欧姆接触层; 数据线,源极和漏极以及数据焊盘,每个数据焊盘具有由第二阻挡金属层和第二金属层构成的双层结构; 钝化层; 以及由透明导电材料形成的钝化层上的像素电极,栅极焊盘端子和数据焊盘端子。

    APPARATUS FOR CLEANING SUBSTRATE
    18.
    发明申请
    APPARATUS FOR CLEANING SUBSTRATE 有权
    清洁基板的装置

    公开(公告)号:US20120318306A1

    公开(公告)日:2012-12-20

    申请号:US13243954

    申请日:2011-09-23

    IPC分类号: B08B3/08 B08B7/04 B08B3/02

    摘要: An apparatus for cleaning a substrate is disclosed. The apparatus includes a first chamber through which a substrate is conveyed, a second chamber where an oxide film formed on the substrate conveyed from the first chamber is removed; and a third chamber that discharges the substrate conveyed from the second chamber to the outside after rinsing the substrate, wherein the first chamber and the third chamber are disposed on top and on bottom.

    摘要翻译: 公开了一种用于清洁衬底的设备。 该装置包括:第一室,其中输送基板;第二室,其中形成在从第一室输送的基板上的氧化膜被去除; 以及第三室,其在冲洗所述基板之后将从所述第二室输送的所述基板排出到外部,其中所述第一室和所述第三室设置在顶部和底部。