Method of manufacturing a semiconductor device
    12.
    发明授权
    Method of manufacturing a semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US08440521B2

    公开(公告)日:2013-05-14

    申请号:US13067788

    申请日:2011-06-27

    IPC分类号: H01L21/3105

    摘要: A method of manufacturing a semiconductor device having a p-type field effect transistor and an n-type field effect transistor includes the steps of: forming an interface insulating layer and a high-permittivity layer on a substrate in the stated order; forming a pattern of a sacrifice layer on the high-permittivity layer; forming a metal-containing film containing metal elements therein on the high-permittivity layer in a first region where the sacrifice layer is formed and a second region where no sacrifice layer is formed; introducing the metal elements into an interface between the interface insulating layer and the high-permittivity layer in the second region by conducting a heat treatment; and removing the sacrifice layer by wet etching, wherein in the removing step, the sacrifice layer is etched easily more than the high-permittivity layer. With this configuration, the semiconductor device excellent in reliability is obtained.

    摘要翻译: 制造具有p型场效应晶体管和n型场效应晶体管的半导体器件的方法包括以下步骤:按照所述顺序在衬底上形成界面绝缘层和高电容率层; 在高电介质层上形成牺牲层的图案; 在形成有牺牲层的第一区域和形成牺牲层的第二区域的高介电常数层上形成含有金属元素的含金属膜; 通过进行热处理,将金属元素引入第二区域中的界面绝缘层与高电容率层之间的界面; 并且通过湿法蚀刻去除牺牲层,其中在去除步骤中,牺牲层比高介电常数层容易蚀刻。 由此,能够获得可靠性优异的半导体装置。

    EXHAUST GAS PURIFICATION APPARATUS FOR INTERNAL COMBUSTION ENGINE
    14.
    发明申请
    EXHAUST GAS PURIFICATION APPARATUS FOR INTERNAL COMBUSTION ENGINE 审中-公开
    用于内燃机的排气净化装置

    公开(公告)号:US20110088372A1

    公开(公告)日:2011-04-21

    申请号:US12906385

    申请日:2010-10-18

    申请人: Ichiro Yamamoto

    发明人: Ichiro Yamamoto

    IPC分类号: F01N11/00 F01N3/10 F01N9/00

    摘要: An exhaust gas purification apparatus for an internal combustion engine includes an exhaust passage through which exhaust gas flows, a selective catalytic reduction (SCR) catalyst provided in the exhaust passage, a urea water supply device and a control unit for controlling amount of urea water to be supplied into the exhaust passage upstream of the SCR catalyst at predetermined intervals. The control unit further estimates amount of ammonia converted from adsorbed deposit which is converted from the urea water and adsorbed on the SCR catalyst during the predetermined interval based on a physical quantity of the internal combustion engine or the exhaust gas purification apparatus, and determines amount of urea water to be supplied into the exhaust passage based on the estimated amount of ammonia converted from the adsorbed deposit on the SCR catalyst.

    摘要翻译: 用于内燃机的废气净化装置包括废气流过的排气通道,设置在排气通道中的选择性催化还原(SCR)催化剂,尿素供水装置和用于控制尿素水量的控制单元 以预定的间隔供给到SCR催化剂上游的排气通路。 控制单元进一步基于内燃机或排气净化装置的物理量,估计在预定间隔内从尿素水转化并吸附在SCR催化剂上的吸附沉积物转化的氨的量, 基于从SCR催化剂上的吸附沉积物转化的氨的估计量,将供给到排气通道中的尿素水。

    Semiconductor device and method for manufacturing same
    15.
    发明授权
    Semiconductor device and method for manufacturing same 有权
    半导体装置及其制造方法

    公开(公告)号:US07307303B2

    公开(公告)日:2007-12-11

    申请号:US11120995

    申请日:2005-05-04

    申请人: Ichiro Yamamoto

    发明人: Ichiro Yamamoto

    IPC分类号: H01L29/76 H01L29/94

    摘要: A semiconductor device is provided which has a capacitor insulating film made up of zirconium aliminate being an amorphous film obtained by having crystalline dielectric contain amorphous aluminum oxide and having its composition of AlXZr(1-X)OY (0.05≦x≦0.3), hereby being capable of preventing, in a process of forming a capacitor of MIM (Metal Insulator Metal) structure, dielectric breakdown of a capacitor insulating film while a relative dielectric constant of a metal oxide film used as the capacitor insulating film is kept high.

    摘要翻译: 提供了一种半导体器件,其具有由锆合金制成的电容器绝缘膜,其是通过具有包含无定形氧化铝并且其组成为Al x Zr(1- (0.05 <= x <= 0.3),因此能够在形成MIM(金属绝缘体金属)结构的电容器的过程中防止介电击穿 电容绝缘膜,而用作电容器绝缘膜的金属氧化物膜的相对介电常数保持较高。

    LIQUID SPRAYING METHOD, LIQUID SPRAYING SYSTEM AND LIQUID SPRAYING EXECUTE PROGRAM
    16.
    发明申请
    LIQUID SPRAYING METHOD, LIQUID SPRAYING SYSTEM AND LIQUID SPRAYING EXECUTE PROGRAM 有权
    液体喷雾方法,液体喷雾系统和液体喷雾执行程序

    公开(公告)号:US20070161201A1

    公开(公告)日:2007-07-12

    申请号:US11531610

    申请日:2006-09-13

    申请人: Ichiro Yamamoto

    发明人: Ichiro Yamamoto

    IPC分类号: H01L21/20

    摘要: A semiconductor device is provided which has a capacitor insulating film made up of zirconium aliminate being an amorphous film obtained by having crystalline dielectric contain amorphous aluminum oxide and having its composition of AlXZr(1−X)OY (0.05≦X≦0.3), hereby being capable of preventing, in a process of forming a capacitor of MIM (Metal Insulator Metal) structure, dielectric breakdown of a capacitor insulating film while a relative dielectric constant of a metal oxide film used as the capacitor insulating film is kept high.

    摘要翻译: 提供了一种半导体器件,其具有由锆合金制成的电容器绝缘膜,其是通过具有包含无定形氧化铝并且其组成为Al x Zr(1- (0.05 <= X <= 0.3),因此在形成MIM(金属绝缘体金属)结构的电容器的工艺中能够防止介电击穿 电容绝缘膜,而用作电容器绝缘膜的金属氧化物膜的相对介电常数保持较高。

    Semiconductor device including p-channel type transistor, and production method for manufacturing such semiconductor device
    17.
    发明授权
    Semiconductor device including p-channel type transistor, and production method for manufacturing such semiconductor device 失效
    包括p沟道型晶体管的半导体器件及其制造方法

    公开(公告)号:US07033918B2

    公开(公告)日:2006-04-25

    申请号:US10749915

    申请日:2003-12-31

    IPC分类号: H01L21/3205 H01L21/4763

    CPC分类号: H01L21/823842 H01L21/2807

    摘要: In a semiconductor device including at least one p-channel type MOS transistor, a silicon dioxide layer is formed on a silicon substrate, and a gate electrode is formed on the silicon dioxide layer. The gate electrode silicon has a three-layered structure including a silicon-seed layer formed on the silicon dioxide layer, a silicon/germanium layer formed on the silicon-seed layer, and a polycrystalline silicon layer on the silicon/germanium layer. An average grain size of polycrystalline silicon in the polycrystalline silicon layer is at most 100 nm, and p-type impurities are substantially uniformly distributed in the gate electrode along a height thereof, and the germanium atoms are diffused from the silicon/germanium layer into the silicon-seed layer at high density.

    摘要翻译: 在包括至少一个p沟道型MOS晶体管的半导体器件中,在硅衬底上形成二氧化硅层,并且在二氧化硅层上形成栅电极。 栅电极硅具有三层结构,其包括在二氧化硅层上形成的硅 - 籽晶层,在硅 - 籽晶层上形成的硅/锗层和硅/锗层上的多晶硅层。 多晶硅层的多晶硅的平均晶粒尺寸为100nm以下,p型杂质沿栅极电极的高度大致均匀分布,锗原子从硅/锗层扩散到 硅籽晶层。

    Semiconductor device including p-channel type transistor, and production method for manufacturing such semiconductor device
    18.
    发明授权
    Semiconductor device including p-channel type transistor, and production method for manufacturing such semiconductor device 失效
    包括p沟道型晶体管的半导体器件及其制造方法

    公开(公告)号:US06969876B2

    公开(公告)日:2005-11-29

    申请号:US11057742

    申请日:2005-02-14

    CPC分类号: H01L21/823842 H01L21/2807

    摘要: In a semiconductor device including at least one p-channel type MOS transistor, a silicon dioxide layer is formed on a silicon substrate, and a gate electrode is formed on the silicon dioxide layer. The gate electrode silicon has a three-layered structure including a silicon-seed layer formed on the silicon dioxide layer, a silicon/germanium layer formed on the silicon-seed layer, and a polycrystalline silicon layer on the silicon/germanium layer. An average grain size of polycrystalline silicon in the polycrystalline silicon layer is at most 100 nm, and p-type impurities are substantially uniformly distributed in the gate electrode along a height thereof, and the germanium atoms are diffused from the silicon/germanium layer into the silicon-seed layer at high density.

    摘要翻译: 在包括至少一个p沟道型MOS晶体管的半导体器件中,在硅衬底上形成二氧化硅层,并且在二氧化硅层上形成栅电极。 栅电极硅具有三层结构,其包括在二氧化硅层上形成的硅 - 籽晶层,在硅 - 籽晶层上形成的硅/锗层和硅/锗层上的多晶硅层。 多晶硅层的多晶硅的平均晶粒尺寸为100nm以下,p型杂质沿栅极电极的高度大致均匀分布,锗原子从硅/锗层扩散到 硅籽晶层。

    4-hydroxypiperidine derivatives having analgesic activity
    19.
    发明授权
    4-hydroxypiperidine derivatives having analgesic activity 失效
    具有止痛活性的4-羟基哌啶衍生物

    公开(公告)号:US06956046B2

    公开(公告)日:2005-10-18

    申请号:US10478845

    申请日:2002-05-17

    CPC分类号: C07D401/12 C07D211/48

    摘要: A compound represented by the following Formula (I): (wherein A represents oxygen atom or —NR3— (R3 represents hydrogen atom or lower alkyl group); R1 represents nitro group, lower alkoxycarbonyl group, carbamoyl group unsubstituted or mono- or di-substituted by lower alkyl group, unprotected or protected hydroxyl group, unprotected or protected carboxyl group, lower alkyl group substituted by unprotected or protected hydroxyl group, or tetrazolyl group; and R2 represents hydrogen atom, cyano group or lower alkylsulfonyl group, provided that when A is —NR3—, it is excluded that R1 represents unprotected or protected hydroxyl group or lower alkyl group substituted by unprotected or protected hydroxyl group) or its salt, and method for producing the compound, and a pharmaceutical composition containing the compound as active ingredient.

    摘要翻译: 由下式(I)表示的化合物:其中A表示氧原子或-NR 3 - (R 3表示氢原子或低级烷基) SUP> 1表示硝基,低级烷氧基羰基,未取代的或被低级烷基单取代或未被保护或被保护的羟基,未被保护或保护的羧基,未被保护或被保护的羟基取代的低级烷基的氨基甲酰基 羟基或四唑基; R 2表示氢原子,氰基或低级烷基磺酰基,条件是当A是-NR 3 - 时,排除R 代表未被保护或保护的羟基或被未保护或被保护的羟基取代的低级烷基)或其盐,以及制备该化合物的方法,以及含有该化合物作为活性成分的药物组合物。

    Semiconductor device with improved peripheral resistance element and method for fabricating same
    20.
    发明授权
    Semiconductor device with improved peripheral resistance element and method for fabricating same 失效
    具有改进的外围电阻元件的半导体器件及其制造方法

    公开(公告)号:US06696719B2

    公开(公告)日:2004-02-24

    申请号:US09729803

    申请日:2000-12-06

    申请人: Ichiro Yamamoto

    发明人: Ichiro Yamamoto

    IPC分类号: H01L2976

    摘要: A semiconductor device in which a cell capacitor with an MIM or MIS structure is formed using a conductive material with a low resistivity for the upper electrode and a resistance element is formed using a conductive material with high resistance without increasing the complexity of the fabrication process. A plate electrode used for the upper electrode of the cell capacitor and for the resistance element is made by forming a three-layer structure including a low resistance conductive material layer, an insulating film layer on the low resistance conductive material layer, and a high resistance conductive material layer on the insulating film layer, patterning the three-layer structure in the same shape, and using the low resistance conductive material layer as the upper electrode of the cell capacitor and the high resistance conductive material layer as the resistance element.

    摘要翻译: 使用具有低电阻率的导电材料形成具有MIM或MIS结构的电池电容器的半导体器件,并且电阻元件使用具有高电阻的导电材料形成,而不增加制造工艺的复杂性。 用于电池电容器和电阻元件的上电极的平板电极是通过在低电阻导电材料层上形成包括低电阻导电材料层,绝缘膜层和高电阻的三层结构制成的 在绝缘膜层上形成导电材料层,对相同形状的三层结构进行构图,并使用低电阻导电材料层作为电池电容器和高电阻导电材料层的上电极作为电阻元件。