公开(公告)号：US5874012A

公开(公告)日：1999-02-23

申请号：US611758

申请日：1996-03-08

申请人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

发明人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

IPC分类号： C30B25/10 ,  C23F4/00 ,  C30B25/16 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  B44C1/22 ,  C23C16/00 ,  C23F1/02

CPC分类号： H01J37/32504 ,  H01J37/32522 ,  H01L21/3065 ,  H01L21/67069 ,  H01L21/67109 ,  H01L21/6831 ,  H01J2237/022

摘要： A plasma processing apparatus is provided. In the apparatus, an inside surface of a process chamber is prevented from having its quality varied or becoming a heavy metal contamination source by plasma in the chamber, and at the same time the plasma characteristic is stabilized over time. In a plasma processing apparatus including a plasma generating unit, a process chamber capable of having its inside pressure reduced, a gas supply system for supplying a gas to the process chamber, a sample table for holding a sample and a vacuum pumping system, the process chamber has an outer cylinder capable of withstanding depressurization and an inner cylinder arranged inside the outer cylinder and being spaced therefrom through a gap, and a heater and a temperature control are provided in the outer cylinder. A non-magnetic metallic material not containing heavy metals, or ceramic, carbon, silicon or quartz is used for the inner cylinder. The temperature of the inner cylinder is controlled to a desired value by heating the outer cylinder using the heater and the temperature control. By controlling the temperature of the inner cylinder to, for example, 100.degree. C. to 350.degree. C., the surface temperature of the inner cylinder can be maintained at a desired value.

摘要翻译： 提供了一种等离子体处理装置。 在该装置中，通过室内的等离子体防止了处理室的内表面的质量变化或变成重金属污染源，同时等离子体特性随时间稳定。 在包括等离子体发生单元的等离子体处理装置中，能够使其内部压力降低的处理室，用于向处理室供给气体的气体供给系统，用于保持样品的样品台和真空泵送系统，该方法 腔室具有能够承受减压的外筒和布置在外筒内部并通过间隙与其间隔开的内筒，并且在外筒中设置加热器和温度控制。 内筒使用不含重金属或陶瓷，碳，硅或石英的非磁性金属材料。 通过使用加热器和温度控制加热外筒来将内筒的温度控制到期望值。 通过将内筒的温度控制在例如100〜350℃，能够将内筒的表面温度保持在期望值。

公开(公告)号：US4368839A

公开(公告)日：1983-01-18

申请号：US197350

申请日：1980-05-06

申请人： Kouichi Okamura ,  Nobuya Mizumura ,  Ei Nigorikawa

发明人： Kouichi Okamura ,  Nobuya Mizumura ,  Ei Nigorikawa

IPC分类号： B65B51/04 ,  B65B51/05 ,  B65D5/66 ,  B25C5/02 ,  B25C5/16

CPC分类号： B65B51/05 ,  B65D5/6611

摘要： This invention relates to a device for fixing fasteners to the flaps of corrugated cardboard boxes for sealing the flaps. With the fastener placed across the adjoining edges of at least two flaps, piercing nails in the form of a cow horn and attached to a pair of turnable pieces on the fastener are driven into the flaps by the device. The device is characterized in that two reciprocally movable sliders (12, 13) move to drive a cutting blade (17), causing the blade to separate a fastener from other fasteners, and subsequently drive pivotal members (29a, 29b) to depress the turnable pieces on the fastener, driving the piercing nails into the flaps. Fasteners can be fixed in place easily and reliably.

摘要翻译： PCT No.PCT / JP79 / 00233 Sec。 371日期1980年5月6日 102（e）日期1980年5月6日PCT申请日1979年9月3日PCT公布。 公开号WO80 / 00555 日本公报1980年4月3日。本发明涉及一种用于将紧固件固定到瓦楞纸箱的襟翼上用于密封襟翼的装置。 通过将紧固件放置在至少两个襟翼的相邻边缘之间，牛角形形式的穿刺钉和附接到紧固件上的一对可转动件被该装置驱动到襟翼中。 该装置的特征在于，两个可往复运动的滑动件（12,13）移动以驱动切割刀片（17），使得刀片将紧固件与其他紧固件分离，并随后驱动枢转构件（29a，29b）以将可转动 紧固件上的片，将穿刺指甲推入襟翼。 紧固件可以轻松可靠地固定就位。

公开(公告)号：US20100140224A1

公开(公告)日：2010-06-10

申请号：US12709641

申请日：2010-02-22

申请人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

发明人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

IPC分类号： B44C1/22 ,  C23F1/08

CPC分类号： H01J37/32504 ,  H01J37/32522 ,  H01J2237/022 ,  H01L21/3065 ,  H01L21/67069 ,  H01L21/67109 ,  H01L21/6831

摘要： A plasma processing apparatus and method which includes a vacuum processing chamber, a plasma generating unit, a process gas supply unit, a specimen table, and a vacuum pumping unit. The specimen table includes an electrostatic arrangement for holding a specimen on a holding surface of the specimen table, a specimen table cover made of an insulator arranged around the specimen table, and first and second heat transfer gas supply units. The first heat transfer gas supply unit has a main path for supplying a heat transfer gas to the specimen holding surface, and the second heat transfer gas supply unit has a branch path branched from the main path of the first heat transfer gas supply unit for directly supplying a part of the heat transfer gas to a gap between an outer portion of the specimen holding surface and the specimen table cover for cooling the specimen table cover.

摘要翻译： 一种等离子体处理装置和方法，其包括真空处理室，等离子体产生单元，处理气体供应单元，样品台和真空泵送单元。 样本台包括用于将样本保持在样本台的保持表面上的静电布置，由布置在样本台周围的绝缘体制成的样本台盖以及第一和第二传热气体供应单元。 第一传热气体供给单元具有用于向试样保持面供给传热气体的主路径，第二传热气体供给单元具有从第一传热气体供给单元的主路径分支直接分支的分支路径 将一部分传热气体供应到样品保持表面的外部与样品台盖之间的间隙，以冷却样品台盖。

公开(公告)号：US07565879B2

公开(公告)日：2009-07-28

申请号：US10953539

申请日：2004-09-30

申请人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

发明人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

IPC分类号： C23C16/511 ,  C23C16/52 ,  C23C16/22 ,  C23C16/06

CPC分类号： H01J37/32504 ,  H01J37/32522 ,  H01J2237/022 ,  H01L21/3065 ,  H01L21/67069 ,  H01L21/67109 ,  H01L21/6831

摘要： A plasma processing apparatus having a plasma generating unit, a process chamber including an outer cylinder for withstanding a reduced pressure, and an inner cylinder made of non-magnetic material and being replaceable, arranged inside the outer cylinder, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen and a vacuum pumping unit. A temperature monitoring unit monitors temperature of the inner cylinder, and a controller controls temperature of the outer cylinder. A desired inner cylinder temperature which is inputted in advance in response to a processing condition of the specimen is compared with the monitored temperature of the inner cylinder, and the controller controls the temperature of the outer cylinder in response to a result of the comparison so as to control the inner cylinder temperature to a predetermined value.

摘要翻译： 一种具有等离子体发生单元的等离子体处理装置，包括用于承受减压的外筒的处理室和布置在外筒内的非磁性材料制成的可变更内筒， 气体到处理室，用于保持样品的样品台和真空抽吸单元。 温度监视单元监视内筒的温度，控制器控制外筒的温度。 将根据试样的处理条件预先输入的期望的内筒温度与内筒的监测温度进行比较，并且控制器响应于比较的结果来控制外筒的温度，以便 以将内筒温度控制到预定值。

公开(公告)号：US20060249254A1

公开(公告)日：2006-11-09

申请号：US11478629

申请日：2006-07-03

申请人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

发明人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

IPC分类号： H01L21/306

CPC分类号： H01J37/32504 ,  H01J37/32522 ,  H01J2237/022 ,  H01L21/3065 ,  H01L21/67069 ,  H01L21/67109 ,  H01L21/6831

摘要： A plasma processing apparatus and method which includes a vacuum processing chamber, a plasma generating unit, a process gas supply unit, a specimen table, and a vacuum pumping unit. The specimen table includes an electrostatic arrangement for holding a specimen on a holding surface of the specimen table by electrostatic force, a specimen table cover arranged around the specimen table, and first and second heat transfer gas supply units. The first heat transfer gas supply unit has a main path for supplying a heat transfer gas to the specimen holding surface for cooling the specimen, and the second heat transfer gas supply unit has a branch path branched from the main path of the first heat transfer gas supply unit for supplying a part of the heat transfer gas to a gap between an outer portion of the specimen holding surface and the specimen table cover.

摘要翻译： 一种等离子体处理装置和方法，其包括真空处理室，等离子体产生单元，处理气体供应单元，样品台和真空泵送单元。 样本台包括用于通过静电力将样本保持在样品台的保持表面上的静电装置，设置在样本台周围的样本台盖以及第一和第二传热气体供应单元。 第一传热气体供给单元具有用于向试样保持面供给传热气体以冷却试样的主路径，第二传热气体供给单元具有从第一传热气体的主路径分支的分支路径 供应单元，用于将一部分传热气体供应到样品保持表面的外部与样品台盖之间的间隙。

公开(公告)号：US20050064717A1

公开(公告)日：2005-03-24

申请号：US10953539

申请日：2004-09-30

申请人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

发明人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

IPC分类号： C30B25/10 ,  C23F4/00 ,  C30B25/16 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/461

CPC分类号： H01J37/32504 ,  H01J37/32522 ,  H01J2237/022 ,  H01L21/3065 ,  H01L21/67069 ,  H01L21/67109 ,  H01L21/6831

摘要： A plasma processing apparatus having a plasma generating unit, a process chamber including an outer cylinder for withstanding a reduced pressure, and an inner cylinder made of non-magnetic material and being replaceable, arranged inside the outer cylinder, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen and a vacuum pumping unit. A temperature monitoring unit monitors temperature of the inner cylinder, and a controller controls temperature of the outer cylinder. A desired inner cylinder temperature which is inputted in advance in response to a processing condition of the specimen is compared with the monitored temperature of the inner cylinder, and the controller controls the temperature of the outer cylinder in response to a result of the comparison so as to control the inner cylinder temperature to a predetermined value.

摘要翻译： 一种具有等离子体发生单元的等离子体处理装置，包括用于承受减压的外筒的处理室和布置在外筒内的非磁性材料制成的可变更内筒， 气体到处理室，用于保持样品的样品台和真空抽吸单元。 温度监视单元监视内筒的温度，控制器控制外筒的温度。 将根据试样的处理条件预先输入的期望的内筒温度与内筒的监测温度进行比较，并且控制器响应于比较的结果来控制外筒的温度，以便 以将内筒温度控制到预定值。

公开(公告)号：US20050039683A1

公开(公告)日：2005-02-24

申请号：US10953537

申请日：2004-09-30

申请人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

发明人： Saburo Kanai ,  Kazue Takahashi ,  Kouichi Okamura ,  Ryoji Hamasaki ,  Satoshi Ito

IPC分类号： C30B25/10 ,  C23F4/00 ,  C30B25/16 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  C23C16/00

CPC分类号： H01J37/32504 ,  H01J37/32522 ,  H01J2237/022 ,  H01L21/3065 ,  H01L21/67069 ,  H01L21/67109 ,  H01L21/6831

摘要： A plasma processing method utilizing a plasma processing apparatus having a plasma generating unit, a process chamber including an outer cylinder for withstanding a reduced pressure, and an inner cylinder made of non-magnetic material and being replaceable arranged inside the outer cylinder, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen and a vacuum pumping unit. A temperature of the inner cylinder is monitored, and a desired inner cylinder temperature which is inputted in advance in response to a processing condition of the specimen is compared with the monitored temperature of the inner cylinder. A temperature of the outer cylinder is controlled in response to a result of the comparison so as to control the inner cylinder temperature to a predetermined value.

摘要翻译： 一种利用等离子体处理装置的等离子体处理方法，该等离子体处理装置具有等离子体发生单元，具有用于承受减压的外筒的处理室，以及由非磁性材料制成的可更换的内筒， 用于向处理室供给气体的供给单元，用于保持试样的试样台和真空泵送单元。 监测内筒的温度，并将根据试样的加工条件预先输入的期望的内筒温度与内筒的监测温度进行比较。 响应于比较的结果来控制外筒的温度，以将内筒温度控制到预定值。

公开(公告)号：US4945232A

公开(公告)日：1990-07-31

申请号：US413646

申请日：1989-09-28

申请人： Masayuki Ikeuchi ,  Kouichi Okamura

发明人： Masayuki Ikeuchi ,  Kouichi Okamura

IPC分类号： G01D5/36

CPC分类号： G01D5/36

摘要： An angle measuring device for measuring the turning angle of a crankshaft in an internal combustion engine in order to control the ignition timing, etc. thereof comprises: a rotating disc adapted to rotate in synchronization with the rotation of a crankshaft and having a plurality of slits formed along the circumference thereof; light-emitting elements arranged in the vicinity of the rotating disc; light-receiving elements adapted to receive light emitted from the light-emitting elements through the slits of the rotating disc; a signal processing circuit adapted to measure the turning angle of the rotating disc by processing signals output from the light-receiving elements; a power-source line for supplying power-source voltage to the signal processing circuit; a first diode whose anode and cathode are connected to the input terminal of the signal processing circuit and to the power source line, respectively; and a second diode whose anode and cathode are connected to a ground line and to the input terminal of the signal processing circuit, respectively.

摘要翻译： 一种用于测量内燃机中的曲轴的转角以便控制点火正时等的角度测量装置包括：旋转盘，其适于与曲轴的旋转同步地旋转并具有多个狭缝 沿其圆周形成; 布置在旋转盘附近的发光元件; 光接收元件，适于通过旋转盘的狭缝接收从发光元件发射的光; 信号处理电路，适于通过处理从光接收元件输出的信号来测量旋转盘的转角; 用于向所述信号处理电路提供电源电压的电源线; 第一二极管，其阳极和阴极分别连接到信号处理电路的输入端和电源线; 以及第二二极管，其阳极和阴极分别连接到接地线和信号处理电路的输入端。

公开(公告)号：US4899715A

公开(公告)日：1990-02-13

申请号：US249735

申请日：1988-09-26

申请人： Mitsuru Koiwa ,  Kouichi Okamura

发明人： Mitsuru Koiwa ,  Kouichi Okamura

IPC分类号： F02P3/05

CPC分类号： F02P3/051

摘要： An ignition device for an internal combustion engine includes a transistor circuit used to turn a primary current of an ignition coil on and off to produce a high voltage for spark ignition. A reference voltage generator produces a temperature compensated reference voltage. A primary current detecting circuit produces a voltage corresponding to a primary current of the ignition coil. A comparator compares the temperature compensated reference voltage with the voltage produced by the primary current detecting circuit. A control circuit responsive to an output of the comparator controls a base voltage of the transistor circuit to a predetermined constant value.

公开(公告)号：US4019764A

公开(公告)日：1977-04-26

申请号：US637301

申请日：1975-12-03

申请人： Kouichi Okamura

发明人： Kouichi Okamura

IPC分类号： F16B5/06 ,  E05C19/18

CPC分类号： F16B5/0642 ,  Y10T292/34

摘要： A clamping device especially adapted to detachably and easily clamp plate-like members such as corrugated cardboard. The clamping device comprises two clamping members with a U-shaped channel for receiving therein the plate-like members to be clamped, a flexible member interconnecting the two clamping members, and an intermediate member formed integrally with the two clamping members and adapted to be placed between the two clamping members to extend the flexible interconnecting member to the locking position. The above members are formed integrally by forming suitable flexible plastic. When the clamping device is inserted into the clamping holes formed through the plate-like members to be clamped, it is bent along the flexible interconnecting member in such a way that the U-shaped channels of the clamping members receive therein the plate-like members. Thereafter, the intermediate member is forced into the position between the two clamping members so that the interconnecting member may be extended and consequently the edges of the clamping holes may be firmly clamped by the clamping members.

摘要翻译： 一种夹紧装置，特别适于可拆卸地且容易地夹紧诸如瓦楞纸板的板状构件。 夹紧装置包括具有U形通道的两个夹紧构件，用于在其中容纳待夹紧的板状构件，将两个夹紧构件互连的柔性构件和与两个夹紧构件一体形成并适于放置的中间构件 在两个夹紧构件之间以将柔性互连构件延伸到锁定位置。 上述构件通过形成合适的柔性塑料而一体地形成。 当夹持装置插入通过待夹紧的板状构件形成的夹紧孔中时，其沿着柔性互连构件弯曲，使得夹紧构件的U形通道容纳板状构件 。 此后，中间构件被迫进入两个夹紧构件之间的位置，使得互连构件可以延伸，因此夹紧孔的边缘可以被夹紧构件牢固地夹紧。