公开(公告)号：US07531060B2

公开(公告)日：2009-05-12

申请号：US11178250

申请日：2005-07-07

申请人： Paul Wirth ,  Daniel J. Woodruff

发明人： Paul Wirth ,  Daniel J. Woodruff

IPC分类号： C23F1/00 ,  H01L21/306

CPC分类号： H01L21/67201 ,  H01L21/6719 ,  H01L21/67775

摘要： An intermediate module comprising a dimensionally stable mounting module and a first device attached to the dimensionally stable mounting module. The dimensionally stable mounting module can include a front docking unit with front alignment elements for connecting the mounting module to a load/unload module, and a rear docking unit with rear alignment elements for connecting the mounting module to a main processing unit. The mounting module can further include a deck between the front docking unit and the rear docking unit, positioning elements at the deck, and attachment elements at the deck. The first device can be a processing chamber, an annealing station, a metrology station, a buffer station, or another type of component for holding or otherwise performing a function on a workpiece. The first device has a device interface member engaged with one of the positioning elements and a device fastener engaged with one of the attachment elements so that the first device is positioned precisely at a known location in a fixed reference frame defined by the mounting module.

摘要翻译： 一种中间模块，包括尺寸稳定的安装模块和附接到尺寸稳定的安装模块的第一装置。 尺寸稳定的安装模块可以包括具有用于将安装模块连接到装载/卸载模块的前对准元件的前对接单元和具有用于将安装模块连接到主处理单元的后对准元件的后对接单元。 安装模块还可以包括在前对接单元和后对接单元之间的甲板，位于甲板处的定位元件和甲板上的附接元件。 第一装置可以是处理室，退火站，计量站，缓冲站或用于在工件上保持或以其他方式执行功能的另一类型的部件。 所述第一装置具有与所述定位元件中的一个接合的设备接口构件和与所述附接元件中的一个接合的设备紧固件，使得所述第一设备精确地定位在由所述安装模块限定的固定参考框架中的已知位置处。

公开(公告)号：US20080181758A1

公开(公告)日：2008-07-31

申请号：US11699762

申请日：2007-01-29

申请人： Daniel J. Woodruff ,  David P. Mattson

发明人： Daniel J. Woodruff ,  David P. Mattson

IPC分类号： B25J18/00

CPC分类号： H01L21/67742 ,  H01L21/67745 ,  H01L21/67751 ,  H01L21/68

摘要： Microfeature workpiece transfer devices with rotational orientation sensors, and associated systems and methods are disclosed. A transfer device in accordance with one embodiment includes a base unit movable along a guidepath, and a carrier movable relative to the base unit. The device further includes a position sensor located to identify a rotational orientation of the workpiece while the workpiece is carried by the carrier (e.g., by one or more edge grippers or other end-effector devices). In particular embodiments, the rotational orientation of the workpiece is corrected by appropriately moving articulatable links of the transfer device, and/or by rotating a support that carries the workpiece for processing at a process chamber.

摘要翻译： 公开了具有旋转定向传感器的微特征工件传送装置以及相关联的系统和方法。 根据一个实施例的传送装置包括可沿着导轨移动的基座单元和可相对于基座单元移动的托架。 该装置还包括位置传感器，位置用于在工件由载体（例如由一个或多个边缘夹持器或其它末端执行器装置）承载的同时识别工件的旋转取向。 在具体实施例中，通过适当地移动传送装置的可铰接连接件和/或通过旋转承载工件以在处理室处理的支撑件来校正工件的旋转取向。

公开(公告)号：US20080048306A1

公开(公告)日：2008-02-28

申请号：US11467232

申请日：2006-08-25

申请人： Nigel Stewart ,  Daniel J. Woodruff ,  Paul R. McHugh ,  Gregory J. Wilson ,  Kyle M. Hanson ,  Erik Lund ,  Steven L. Peace

发明人： Nigel Stewart ,  Daniel J. Woodruff ,  Paul R. McHugh ,  Gregory J. Wilson ,  Kyle M. Hanson ,  Erik Lund ,  Steven L. Peace

IPC分类号： H01L23/06

CPC分类号： H01L21/6719 ,  H01L21/67115 ,  H01L21/67126

摘要： A processor for making porous silicon or processing other substrates has first and second chamber assemblies. The first and second chamber assemblies include first and second seals for sealing against a wafer, and first and second electrodes, respectively. The second seal is moveable towards and away from a wafer in the processor, to move between a wafer load/unload position, and a wafer process position. The second electrode may move with the second seal. A light source shines light onto the first side of the wafer. The processor may be pivotable from a substantially horizontal orientation, for loading and unloading a wafer, to a substantially vertical orientation, for processing a wafer.

摘要翻译： 用于制造多孔硅或处理其它衬底的处理器具有第一和第二室组件。 第一和第二室组件包括分别用于密封晶片的第一和第二密封件以及第一和第二电极。 第二密封件可朝向和远离处理器中的晶片移动，以在晶片装载/卸载位置与晶片工艺位置之间移动。 第二电极可以与第二密封件一起移动。 光源将光照射到晶片的第一面上。 处理器可以从用于加载和卸载晶片的基本上水平的方向枢转到基本垂直的取向，用于处理晶片。

公开(公告)号：US07281741B2

公开(公告)日：2007-10-16

申请号：US10195137

申请日：2002-07-11

申请人： Daniel J. Woodruff ,  Thomas H. Oberlitner ,  Randy A. Harris ,  James J. Erickson ,  Douglas W. Carr

发明人： Daniel J. Woodruff ,  Thomas H. Oberlitner ,  Randy A. Harris ,  James J. Erickson ,  Douglas W. Carr

IPC分类号： B66C1/42

CPC分类号： H01L21/67259 ,  H01L21/68707 ,  Y10S294/907

摘要： End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.

摘要翻译： 终端效应器可用于掌握微电子工件以便通过自动运输装置进行处理。 一个这样的端部执行器包括多个端部执行器和适于检测至少一个基台的工件的边缘的接合的检测器。 替代的末端执行器包括至少三个邻接部分，其中至少一个邻接部分弹性地连接到致动器，用于在缩回位置和展开位置之间移动，其中它接合工件。

公开(公告)号：US06428660B2

公开(公告)日：2002-08-06

申请号：US09811379

申请日：2001-03-15

申请人： Daniel J. Woodruff ,  Kyle M. Hanson

发明人： Daniel J. Woodruff ,  Kyle M. Hanson

IPC分类号： C28D1700

CPC分类号： C25D17/001 ,  C25D5/08 ,  C25D7/123 ,  C25D17/06

摘要： An improved anode, cup and conductor assembly for a reactor vessel includes an anode assembly supported within a cup which holds a supply of process fluid. The cup is supported around its perimeter within the reactor vessel. The anode assembly has an anode shield carrying an anode, the anode shield having upwardly extending brackets with radially extending members. A diffusion plate is supported above the anode by the anode brackets using first bayonet connections. The anode shield and the anode are supported from below by a delivery tube which also serves to deliver process fluid to the cup. A second bayonet connection is provided between a top portion of the delivery tube and the anode assembly. The fluid delivery tube has a fixed height within the vessel. The anode elevation is adjusted by the interposing of a spacer of desired thickness between the anode and the tube. An electrical conductor is connected to the anode, and passes through the tube to be electrically accessible outside the vessel. The conductor is connected to the anode with a plug-in connection which is completed when the tube is coupled to the anode by the second bayonet connection. A spring loaded bellows seal and a corrugated sleeve seal the electrical conductor from the anode, through the delivery tube, and to the outside electrical accessibility. The diffusion plate and the anode assembly are installable and removable from a top side of the reactor vessel using a tool which is lockable to the diffusion plate or to the anode. The tool provides a handle for manual engagement or disengagement of the first and second bayonet connections.

摘要翻译： 用于反应器容器的改进的阳极，杯和导体组件包括支撑在保持供给工艺流体的杯内的阳极组件。 杯子围绕反应堆容器内的周边支撑。 阳极组件具有承载阳极的阳极屏蔽件，阳极屏蔽件具有向上延伸的具有径向延伸构件的托架。 扩散板通过第一个卡口连接由阳极支架支撑在阳极的上方。 阳极护罩和阳极从下方被输送管支撑，输送管也用于将工艺流体输送到杯子。 在输送管的顶部和阳极组件之间设置第二卡口连接。 流体输送管在容器内具有固定的高度。 通过在阳极和管之间插入所需厚度的间隔物来调节阳极高度。 电导体连接到阳极，并且通过管以在电容器外部电可通达。 导体通过插入式连接方式连接到阳极，该插入式连接在管通过第二卡口连接与阳极连接时完成。 弹簧加载的波纹管密封件和波纹套筒将电导体从阳极密封，通过输送管和外部电气可接近性。 扩散板和阳极组件可以使用可被锁定到扩散板或阳极的工具从反应器容器的顶侧安装和移除。 该工具提供用于手动接合或解除第一和第二卡口连接的手柄。

公开(公告)号：US06322677B1

公开(公告)日：2001-11-27

申请号：US09604041

申请日：2000-06-27

申请人： Daniel J. Woodruff ,  Martin C. Bleck

发明人： Daniel J. Woodruff ,  Martin C. Bleck

IPC分类号： C25D1704

CPC分类号： H01L21/67017 ,  C25D7/123 ,  C25D17/001

摘要： A lift and rotate assembly for use in a workpiece processing station. The lift and rotate assembly includes a body having a slim profile and pins located on opposite sides for mounting the assembly onto a tool frame. The lift and rotating assembly further includes a rotating mechanism coupling a processing head to the body, and for rotating the process head with respect to the body. The rotating mechanism includes a motor, wherein the motor is located within the processing head and the shaft of the motor is coupled to and rotationally fixed with respect to the body. The lift and rotate assembly further includes a lift mechanism for lifting the process head with respect to the body. A cable assembly within the lift and rotate assembly includes a common cable loop for feeding additional length of cable along both the lift direction and the rotational direction of movement.

摘要翻译： 用于工件加工台的升降和旋转组件。 提升和旋转组件包括具有细长轮廓的主体和位于相对侧上的销，用于将组件安装到工具框架上。 提升和旋转组件还包括将处理头连接到主体并且用于相对于主体旋转处理头的旋转机构。 旋转机构包括电动机，其中电动机位于处理头内并且电动机的轴相对于主体联接并旋转地固定。 提升和旋转组件还包括用于相对于主体提升处理头的升降机构。 提升和旋转组件内的电缆组件包括用于沿着提升方向和旋转运动方向进给额外长度的电缆的公共电缆环。

公开(公告)号：US06203582B1

公开(公告)日：2001-03-20

申请号：US08680068

申请日：1996-07-15

申请人： Robert W. Berner ,  Daniel J. Woodruff ,  Wayne J. Schmidt ,  Kevin W. Coyle ,  Vladimir Zila ,  Worm Lund

发明人： Robert W. Berner ,  Daniel J. Woodruff ,  Wayne J. Schmidt ,  Kevin W. Coyle ,  Vladimir Zila ,  Worm Lund

IPC分类号： H01L2100

CPC分类号： H01L21/67173 ,  C25D7/12 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/6723 ,  H01L21/67742 ,  Y10S414/141 ,  Y10T29/40 ,  Y10T29/41

摘要： The present invention provides for a semiconductor workpiece processing tool. The semiconductor workpiece processing tool includes an interface section comprising at least one interface module and a processing section comprising a plurality of processing modules for processing the semiconductor workpieces. The semiconductor workpiece processing tool has a conveyor for transferring the semiconductor workpieces between the interface modules and the processing modules.

摘要翻译： 本发明提供一种半导体工件加工工具。 半导体工件加工工具包括一个接口部分，该接口部分包括至少一个接口模块和一个包括用于处理半导体工件的多个处理模块的处理部分。 半导体工件加工工具具有用于在接口模块和处理模块之间传送半导体工件的输送机。

公开(公告)号：US5153862A

公开(公告)日：1992-10-06

申请号：US432914

申请日：1989-11-06

申请人： Wilhelm Taylor ,  Michael D. Faucett ,  Daniel J. Woodruff

发明人： Wilhelm Taylor ,  Michael D. Faucett ,  Daniel J. Woodruff

IPC分类号： G11B23/033 ,  G11B7/00 ,  G11B7/004 ,  G11B17/22 ,  G11B17/28 ,  G11B23/023

CPC分类号： G11B17/221

摘要： A mass loader stores a plurality of cartridges for loading a selected one of the cartridges into an optical disk reader. The loader comprises a magazine carrier and a cartridge loading apparatus. The cartridges are stored in a vertical and parallel orientation within slots in a magazine which is then inserted into the magazine carrier. The magazine carrier depends from a follower nut which travels along a lead screw in a direction transverse to the parallel orientation of the cartridges. As the leadscrew turns, the follower nut travels therealong to move the magazine into the correct position to load the selected one of the cartridges into the reader. After the magazine is properly positioned, another lead screw is driven to propel another follower nut therealong. The follower nut has a loading pin protruding therefrom which engages the selected one of the cartridges for loading. The leadscrew is then driven to propel the cartridge via the pin on the follower nut into the reader.

公开(公告)号：US09309603B2

公开(公告)日：2016-04-12

申请号：US13232152

申请日：2011-09-14

申请人： Daniel J. Woodruff

发明人： Daniel J. Woodruff

IPC分类号： B08B7/00 ,  B08B7/04 ,  C25D17/00 ,  C25D21/08

CPC分类号： C25D17/001 ,  C25D17/004 ,  C25D21/08

摘要： A plating apparatus includes a vessel for holding a bath of plating liquid. A head is adapted to hold a work piece, such as a silicon wafer, in the vessel, with a seal on the head sealing against the work piece. A component cleaner assembly may be used to automatically clean a component of the plating apparatus, such as a seal or a contact ring. The cleaner assembly has a component contactor, such as a brush, on an arm. An arm actuator is linked to the arm for moving the arm from a retracted position, to a deployed position, where the contactor is in physical contact with the component. A method for cleaning a component of a plating apparatus includes moving a scrubber or contactor into contact with the component and applying a cleaning liquid onto the component adjacent to the contactor.

摘要翻译： 电镀装置包括用于保持镀液的浴的容器。 头部适于将诸如硅晶片的工件保持在容器中，头部上的密封件密封抵靠工件。 组件清洁器组件可用于自动清洁电镀设备的部件，例如密封件或接触环。 清洁器组件在臂上具有诸如刷子的部件接触器。 臂致动器连接到臂上，用于将臂从缩回位置移动到展开位置，其中接触器与部件物理接触。 一种用于清洁电镀设备的部件的方法包括将洗涤器或接触器移动到与部件接触并将清洁液体施加到与接触器相邻的部件上。

公开(公告)号：US20130061875A1

公开(公告)日：2013-03-14

申请号：US13232152

申请日：2011-09-14

申请人： Daniel J. Woodruff

发明人： Daniel J. Woodruff

IPC分类号： C25D17/00 ,  B08B3/10

CPC分类号： C25D17/001 ,  C25D17/004 ,  C25D21/08

摘要： A plating apparatus includes a vessel for holding a bath of plating liquid. A head is adapted to hold a work piece, such as a silicon wafer, in the vessel, with a seal on the head sealing against the work piece. A component cleaner assembly may be used to automatically clean a component of the plating apparatus, such as a seal or a contact ring. The cleaner assembly has a component contactor, such as a brush, on an arm. An arm actuator is linked to the arm for moving the arm from a retracted position, to a deployed position, where the contactor is in physical contact with the component. A method for cleaning a component of a plating apparatus includes moving a scrubber or contactor into contact with the component and applying a cleaning liquid onto the component adjacent to the contactor.

摘要翻译： 电镀装置包括用于保持镀液的浴的容器。 头部适于将诸如硅晶片的工件保持在容器中，头部上的密封件密封抵靠工件。 组件清洁器组件可用于自动清洁电镀设备的部件，例如密封件或接触环。 清洁器组件在臂上具有诸如刷子的部件接触器。 臂致动器连接到臂上，用于将臂从缩回位置移动到展开位置，其中接触器与部件物理接触。 一种用于清洁电镀设备的部件的方法包括将洗涤器或接触器移动到与部件接触并将清洁液体施加到与接触器相邻的部件上。