Ion beam extractor
    12.
    发明申请
    Ion beam extractor 失效
    离子束提取器

    公开(公告)号:US20060152164A1

    公开(公告)日:2006-07-13

    申请号:US11208728

    申请日:2005-08-23

    IPC分类号: H01J1/46

    CPC分类号: H01J37/08 H01J27/024

    摘要: An ion beam extractor controls a direction and an intensity of ion beams by adjusting a voltage applied to a grid having slits formed therein, thereby enhancing uniformity of an etching rate of a wafer, leading to an increase of productivity of semiconductor diodes. The ion beam extractor comprises an ion source to produce an ion beam and at least one grid located at a rear end of the ion source in a progressing path of the ion beam produced by the ion source to adjust a direction of the ion beam by controlling a voltage applied to the at least one grid.

    摘要翻译: 离子束提取器通过调节施加到其上形成有狭缝的栅格的电压来控制离子束的方向和强度,从而提高晶片的蚀刻速率的均匀性,从而提高半导体二极管的生产率。 离子束提取器包括离子源以产生离子束和位于离子源的后端处的离子源的至少一个格栅,在由离子源产生的离子束的前进路径中,通过控制离子束来调节离子束的方向 施加到所述至少一个栅格的电压。

    Method of manufacturing a color filter substrate for in-plane switching mode liquid crystal display device
    13.
    发明授权
    Method of manufacturing a color filter substrate for in-plane switching mode liquid crystal display device 有权
    制造面内切换模式液晶显示装置的滤色器基板的方法

    公开(公告)号:US06900867B2

    公开(公告)日:2005-05-31

    申请号:US09735519

    申请日:2000-12-14

    申请人: Jin Seok Lee

    发明人: Jin Seok Lee

    CPC分类号: G02F1/134363 G02F1/133514

    摘要: In a method of manufacturing a color filter for an in-plane switching mode liquid crystal display a black matrix for light-shielding and color filter layers of red, green and blue are formed on a glass substrate and an overcoat layer is coated thereon for minimizing a stepped difference of an overlapped part between the black matrix and the color filter layers, the overcoat layer being formed of a non-exposing type material.

    摘要翻译: 在制造面内切换模式液晶显示器的滤色器的方法中,在玻璃基板上形成用于遮光的黑色矩阵和用​​于红色,绿色和蓝色的滤色器层,并且在其上涂覆外涂层以最小化 黑色矩阵和滤色器层之间的重叠部分的阶梯差,外涂层由非曝光型材料形成。

    Apparatus and method for improving stability of transmitting frequency
by using costas loop section in communication system of half duplex
transmitting method
    14.
    发明授权
    Apparatus and method for improving stability of transmitting frequency by using costas loop section in communication system of half duplex transmitting method 失效
    通过半双工传输方式的通信系统中的costas loop section提高发射频率的稳定性的装置和方法

    公开(公告)号:US5828709A

    公开(公告)日:1998-10-27

    申请号:US525092

    申请日:1995-09-08

    申请人: Jin Seok Lee

    发明人: Jin Seok Lee

    摘要: An apparatus and a method for improving the stability of the transmitting frequency by using a costas loop section in a communication system of a half duplex transmitting method is disclosed, in which a receiving terminal is provided with an A/D converter, a D/A converter, a switching circuit, and a central processing unit, and thus, during a data transmission, a reference frequency is extracted through the costas loop section without installing a separate reference frequency extracting facility, thereby improving the stability of the transmitting frequency. In the conventional technique, in forming a reference frequency for a transmitting frequency, additional devices such as a pilot signal detector, a transmission reference frequency oscillator and the like are required, with the result that the cost for establishing the system becomes high, and that too much man hours and too many additional components are required. However, in the present invention, low cost facilities such as A/D and D/A converters, a switch circuit and a central processing unit are installed to the costas loop of the currently used receiving terminal, so that a transmitting reference frequency can be extracted from the data carrying carrier waves through the costas loop without using the high cost conventional reference frequency extracting facility, thereby improving the stability of the transmitting frequency.

    摘要翻译: 公开了一种通过在半双工发送方式的通信系统中使用costas环路部分来提高发送频率的稳定性的装置和方法,其中接收终端设置有A / D转换器,D / A 转换器,开关电路和中央处理单元,因此,在数据传输期间,通过Costas环路部分提取参考频率,而不安装单独的参考频率提取设备,从而提高发射频率的稳定性。 在现有技术中,在形成发送频率的基准频率的情况下,需要诸如导频信号检测器,发送基准频率振荡器等附加装置,结果是建立系统的成本变高,并且 太多的工时,需要太多的附加部件。 然而,在本发明中,诸如A / D和D / A转换器的低成本设施,开关电路和中央处理单元安装在当前使用的接收终端的成本环中,使得发送参考频率可以 从携带载波的数据通过costas循环提取而不使用高成本的常规参考频率提取设备,从而提高发射频率的稳定性。

    Apparatus for manufacturing polysilicon based electron-beam melting using dummy bar and method of manufacturing polysilicon using the same
    15.
    发明授权
    Apparatus for manufacturing polysilicon based electron-beam melting using dummy bar and method of manufacturing polysilicon using the same 有权
    使用虚拟棒制造基于多晶硅的电子束熔化的装置和使用其制造多晶硅的方法

    公开(公告)号:US08997524B2

    公开(公告)日:2015-04-07

    申请号:US13464488

    申请日:2012-05-04

    IPC分类号: C01B33/037 C30B13/22

    摘要: Methods and apparatus for manufacturing high purity polysilicon. The apparatus includes a vacuum chamber; first and second electron guns disposed at an upper side of the vacuum chamber to irradiate electron beams into the vacuum chamber; a silicon melting unit which is placed on a first electron beam-irradiating region corresponding to the first electron gun and to which powdery raw silicon is fed and melted by the first electron beam; and a unidirectional solidification unit placed on a second electron beam-irradiating region corresponding to the second electron gun. The unidirectional solidification unit is provided therein with a start block driven in a downward direction to transfer molten silicon in the downward direction and is formed at a lower side thereof with a cooling channel. The start block includes a dummy bar having a silicon button joined to an upper portion of the dummy bar.

    摘要翻译: 制造高纯度多晶硅的方法和装置。 该装置包括真空室; 第一和第二电子枪设置在真空室的上侧以将电子束照射到真空室中; 硅熔融单元,其放置在对应于第一电子枪的第一电子束照射区域上,并且通过第一电子束将粉末原料硅熔化; 以及放置在对应于第二电子枪的第二电子束照射区域上的单向凝固单元。 单向凝固单元在其中设置有向下驱动的起始块,以沿向下方向转移熔融硅,并在其下侧形成有冷却通道。 起始块包括具有连接到虚拟棒的上部的硅按钮的虚拟棒。

    Apparatus for manufacturing high purity polysilicon using electron-beam melting and method of manufacturing high purity polysilicon using the same
    16.
    发明授权
    Apparatus for manufacturing high purity polysilicon using electron-beam melting and method of manufacturing high purity polysilicon using the same 有权
    使用电子束熔化制造高纯度多晶硅的装置和使用其制造高纯度多晶硅的方法

    公开(公告)号:US08794035B2

    公开(公告)日:2014-08-05

    申请号:US13464416

    申请日:2012-05-04

    IPC分类号: C01B33/037 C30B13/22

    摘要: Apparatus and method for manufacturing high purity polysilicon. The apparatus includes a vacuum chamber maintaining a vacuum atmosphere; first and second electron guns disposed at an upper side of the vacuum chamber to irradiate electron beams into the vacuum chamber; a silicon melting unit placed on a first electron beam-irradiating region corresponding to the first electron gun and in which powdery raw silicon is placed and melted by the first electron beam; and a unidirectional solidification unit placed on a second electron beam-irradiating region corresponding to the second electron gun and connected to the silicon melting unit via a runner. The unidirectional solidification unit is formed at a lower part thereof with a cooling channel and is provided therein with a start block driven in a downward direction.

    摘要翻译: 用于制造高纯度多晶硅的装置和方法。 该装置包括保持真空气氛的真空室; 第一和第二电子枪设置在真空室的上侧以将电子束照射到真空室中; 放置在对应于第一电子枪的第一电子束照射区域上的硅熔融单元,其中粉状原料硅由第一电子束放置和熔化; 以及放置在与第二电子枪相对应的第二电子束照射区域上的单向凝固单元,并且经由流道连接到硅熔融单元。 单向凝固单元在其下部形成有冷却通道,并且在其中设置有向下驱动的起始块。

    Processing apparatus
    17.
    发明授权
    Processing apparatus 有权
    处理装置

    公开(公告)号:US08758513B2

    公开(公告)日:2014-06-24

    申请号:US11639224

    申请日:2006-12-15

    IPC分类号: C23F1/00 C23C16/00

    摘要: A processing apparatus includes a loading chamber; a buffer chamber connected to the loading chamber; a first process chamber connected to the buffer chamber; and an unloading chamber connected to the first process chamber, wherein a processing path through the processing apparatus is a forward in-line path in a direction through the loading chamber, the buffer chamber, the first process chamber, and the unloading chamber.

    摘要翻译: 一种处理装置,包括装载室; 连接到所述装载室的缓冲室; 连接到缓冲室的第一处理室; 以及连接到所述第一处理室的卸载室,其中通过所述处理装置的处理路径是沿着穿过所述装载室,所述缓冲室,所述第一处理室和所述卸载室的方向的前向一线路径。

    APPARATUS FOR MANUFACTURING POLYSILICON BASED ELECTRON-BEAM MELTING USING DUMMY BAR AND METHOD OF MANUFACTURING POLYSILICON USING THE SAME
    18.
    发明申请
    APPARATUS FOR MANUFACTURING POLYSILICON BASED ELECTRON-BEAM MELTING USING DUMMY BAR AND METHOD OF MANUFACTURING POLYSILICON USING THE SAME 有权
    用于制造基于多晶硅的电子束熔融的装置和使用其制造多晶硅的方法

    公开(公告)号:US20130291596A1

    公开(公告)日:2013-11-07

    申请号:US13464488

    申请日:2012-05-04

    摘要: Methods and apparatus for manufacturing high purity polysilicon. The apparatus includes a vacuum chamber; first and second electron guns disposed at an upper side of the vacuum chamber to irradiate electron beams into the vacuum chamber; a silicon melting unit which is placed on a first electron beam-irradiating region corresponding to the first electron gun and to which powdery raw silicon is fed and melted by the first electron beam; and a unidirectional solidification unit placed on a second electron beam-irradiating region corresponding to the second electron gun. The unidirectional solidification unit is provided therein with a start block driven in a downward direction to transfer molten silicon in the downward direction and is formed at a lower side thereof with a cooling channel. The start block includes a dummy bar having a silicon button joined to an upper portion of the dummy bar.

    摘要翻译: 制造高纯度多晶硅的方法和装置。 该装置包括真空室; 第一和第二电子枪设置在真空室的上侧以将电子束照射到真空室中; 硅熔融单元,其放置在对应于第一电子枪的第一电子束照射区域上,并且通过第一电子束将粉末原料硅熔化; 以及放置在对应于第二电子枪的第二电子束照射区域上的单向凝固单元。 单向凝固单元在其中设置有向下驱动的起始块,以沿向下方向转移熔融硅,并在其下侧形成有冷却通道。 起始块包括具有连接到虚拟棒的上部的硅按钮的虚拟棒。