公开(公告)号：US10352811B2

公开(公告)日：2019-07-16

申请号：US15712916

申请日：2017-09-22

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker ,  Timothy C. Swinney ,  Brandon J. Kelly ,  Alfred A. Funari ,  Michael N. Schott ,  Kristian S. Schartau

IPC: H01J9/50 ,  G01L19/06 ,  G01L21/34 ,  H01J41/06

Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

公开(公告)号：US10337940B2

公开(公告)日：2019-07-02

申请号：US15499064

申请日：2017-04-27

Applicant: MKS Instruments, Inc.

Inventor： Timothy C. Swinney ,  Clinton L. Percy ,  Duane W. Marion ,  Brandon J. Kelly

IPC: G01L21/34 ,  H01J41/06 ,  G01L21/32 ,  G01L21/30

Abstract: A cold cathode ionization gauge includes multiple cathodes providing different spacings between the cathodes and an anode. The multiple cathodes allow for pressure measurements over wider ranges of pressure. A first cathode with a larger spacing may provide current based on Townsend discharge; whereas, a second cathode having a smaller spacing may provide current based on both Townsend discharge at higher pressures and on Paschen's Law discharge at still higher pressures. A feature on the second cathode may support Paschen's Law discharge. Large resistances between the cathodes and a return to power supply enable control of output profiles to extend the pressure ranges with accurate responses and avoid output minima. Pressure measurements may be made based on currents from respective cathodes dependent on the outputs of the cathodes through the wide pressure range of measurement. The multiple cathodes may also provide measurements that avoid the discontinuities found in current outputs of the respective cathodes.

公开(公告)号：US20180010977A1

公开(公告)日：2018-01-11

申请号：US15712916

申请日：2017-09-22

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker ,  Timothy C. Swinney ,  Brandon J. Kelly ,  Alfred A. Funari ,  Michael N. Schott ,  Kristian S. Schartau

IPC: G01L21/34 ,  H01J9/50 ,  G01L19/06 ,  H01J41/06

CPC classification number: G01L21/34 ,  G01L19/06 ,  H01J9/50 ,  H01J41/06 ,  Y02W30/828 ,  Y10T29/49007

Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.