摘要:
A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.
摘要:
A ring light source system for an interferometer with adjustable ring radius and ring radial width may comprise a laser light source, an expander and collimator optical system, an adjustable aperture, a binary phase grating, a variable-focus optical system, and a spatial filter. The expander and collimator optical system is configured to convert a light beam from the light source into a parallel light beam. The adjustable aperture is configured to adjust a diameter of the parallel light beam. The light beam with the diameter adjusted by the adjustable aperture is incident perpendicularly onto the binary phase grating, followed by the variable-focus optical system. The filter is positioned on a back focal plane of the variable-focus optical system, and is configured to receive a ring light source. The ring radius and radial width of the light source are adjustable by adjusting a focus length f1 of the variable-focus optical system.
摘要:
A power switch circuit providing voltage to an output port is provided. The switch circuit includes a single power supply, a switch unit, a controlling unit, and a logic unit. The switch unit is connected between the single power supply and an output port and capable of being turned on and off alternatively for continuing or discontinuing power from the single power supply to the output port; the single power supply provides power to the output port. The controlling unit is configured for generating a voltage controlling signal and transmitting the voltage controlling signal to the logic unit. The logic unit receives and inverts the voltage controlling signal, and outputs the inverted voltage controlling signal to turn on or turn off the switch unit.
摘要:
Disclosed is a system and program for task processing and monitoring of configuration and state information. A first server process and a second server process are detected. A first agent process is registered with the first server process. A second agent process is registered with the second server process. When a task is to be executed by the first server process, the task is executed with the first agent process. When the task is to be executed by the second server process, the task is executed with the second agent process.
摘要:
A helicase-mediated amplification method for circular DNA templates and target DNA sequences within the templates is provided. The method combines a DNA polymerase and a helicase preparation to amplify a target sequence as well as the entire circular DNA template.
摘要:
A system such as a multicast VOD system communicates content, e.g., delivers content or receives content, responsive to a user request for content and according to a schedule adapted to a user-specified acceptable latency for content delivery. The schedule may be modified to minimize initiation of delivery of content in response to the user's request. The schedule may also be modified to delay delivery of subsequent portions of the content as late as possible to allow subsequent requests to share a content stream while not exceeding the acceptable latency parameter specified by the user.
摘要:
Provided are methods, wherein a first application and a second application are executed in a first process space in a node, wherein a third application is capable of executing in a second process space. A common interface to the first, the second, and the third applications are provided by a remote proxy class. The third application is executed in the first process space by securing a plurality of attributes for the third application from the common interface.
摘要:
A plurality of broadcast messages are sent from at least one node of a plurality of nodes of a network. A node is discovered based on a received message. An entry is stored, wherein the entry corresponds to the node and a timestamp that indicates a time at which the node was last discovered. A notification is made that the node is offline, in response to determining that a predetermined time has elapsed since the timestamp was last updated.
摘要:
An apparatus, system and method to optimize load distribution across logical and physical resources in a storage system. An apparatus in accordance with the invention may include an availability module and an allocation module. The availability module may dynamically assign values to resources in a hierarchical tree structure. Each value may correspond to an availability parameter such as allocated volumes, current resource utilization, and historic resource utilization. The allocation module may serially process the values and allocate a load to a least busy resource in the hierarchical tree structure based on the assigned values.
摘要:
Provided are a system and article of manufacture, wherein a first application and a second application are executed in a first process space in a node, wherein a third application is capable of executing in a second process space. A common interface to the first, the second, and the third applications are provided by a remote proxy class. The third application is executed in the first process space by securing a plurality of attributes for the third application from the common interface.