摘要:
An ultrasonic motor comprises a piezoelectric element having first and second surfaces, a plurality of electrode patterns disposed on the first surface of the piezoelectric element, first and second circuits for short-circuiting every other one of the electrode patterns to form two electrode pattern groups, a vibrating member disposed on the second surface of and electrically connected to the piezoelectric element, a moving member movably disposed on the vibrating member, a pressure-regulating member for urging the moving member into pressure contact with the vibrating member, and an oscillation drive circuit having at least two power amplifiers and a pre-amplifier. Each of the power amplifiers has an output terminal connected to one of the electrode pattern groups. The pre-amplifier has an input terminal and an output terminal, the input terminal being connected to one of the first and second surfaces of the piezoelectric element, and the output terminal being connected to input terminals of the at least two power amplifiers.
摘要:
In a method of manufacturing a piezoelectric actuator there are provided a piece of piezoelectric material having piezoelectric bodies, a first piece of material having vibrational bodies, a second piece of material having movable bodies, and a third piece of material having pressurizing members. The first, second and third pieces of materials are superimposed over the piece of piezoelectric material to form a multilayered structure having piezoelectric actuators. The multilayered structure is cut to separate each of the piezoelectric actuators from one another.
摘要:
An ultrasonic motor has a vibrating body polarized in a given direction. The vibrating body comprises a first piezoelectric body and a second piezoelectric body laminated to the first piezoelectric body in a preselected direction generally parallel to the polarized direction. Each of the first piezoelectric body and the second piezoelectric body has a first polarized portion and a second polarized portion. The first polarized portion of the first piezoelectric body is aligned in the preselected direction with the second polarized portion of the second piezoelectric body. The second polarized portion of the first piezoelectric body is aligned in the preselected direction with the first polarized portion of the second piezoelectric body. A movable member is frictionally driven by a combination of a stretching vibration and a bending vibration generated by applying a driving signal to the first polarized portions of the first and second piezoelectric bodies or to the second polarized portions of the first and second piezoelectric bodies.
摘要:
An ultrasonic motor has a vibrating member vibrationally driven for undergoing periodic vibration by the application of a high-frequency voltage. A moving body is frictionally driven by the periodic vibration of the vibrating member. A node supporting/pressurizing member supports a vibration node of the vibrating member and presses the vibrating member on the moving body.
摘要:
An ultrasonic motor has a piezoelectric element driven by application of a voltage thereto to undergo expansion and contraction. A vibrating body is vibrationally driven by the expansion and contraction movement of the piezoelectric element to thereby produce standing waves. A moving body is frictionally driven by the standing waves of the vibrating body. Power transmission projections apply a frictional force to the moving body to thereby frictionally drive the moving body in accordance with the standing waves. The power transmission projections are disposed only every preselected number of wavelengths at intermediate positions between loops and nodes of the standing waves, the preselected number being a natural number.
摘要:
A stage comprises a first moving body mounted on a support base for movement in a first direction (e.g., X direction) relative to the support base. A second moving body is mounted on the first moving body for movement in the first direction and in a second direction (e.g., Y direction) relative to the support base and the first moving body. A first piezoelectric actuator is in contact with the first moving body for moving the first moving body in the first direction. A second piezoelectric actuator is in contact with the second moving body for moving the second moving body in the second direction.
摘要:
An ultrasonic wave motor device comprises an oscillating body having a piezo-electric element and a driving circuit for applying an exciting signal to the piezo-electric element to oscillate the oscillating body in self-excited oscillation. The driving circuit has an amplifying circuit for amplifying the exciting signal and a phase setting circuit for setting a phase of the exciting signal amplified by the amplifying circuit. A measuring device measures a characteristic of the driving circuit or a characteristic of the oscillating body. A phase adjusting circuit corrects a shift of the phase of the exciting signal in accordance with a measurement by the measuring device.
摘要:
A piezoelectric actuator comprises a plurality of piezoelectric elements stacked in a thickness direction thereof for undergoing expansion/contraction movement to vibrationally drive the piezoelectric actuator in accordance with a driving signal applied to the piezoelectric elements. Each of the piezoelectric elements has a length extending in a direction generally perpendicular to the stacking direction. The length of each of at least two of the piezoelectric elements being different from the length of at least one other of the piezoelectric elements.
摘要:
A control portion always monitors a present-position signal from a position sensor and monitors whether the present position of a moving body is a desired position, or not (Step 101). In the case where the control portion detects that the present position of the moving body reaches the desired position, the control portion generates a stop command signal and gives the stop command signal to an oscillation drive circuit (S102). Then, the control portion checks whether overshooting occurs, or not (S103), and in the case where the control portion judges that overshooting occurs, the control portion retains a stop command signal as it is for a stop command retaining time t (S104). After the stop command retaining time t elapses, the control portion gives a reverse command signal to the oscillation drive circuit to conduct reverse operation (S105). After Step S105, the control is returned to Step S101 and the above operation is repeated. Then, in the case where the control portion judges that overshooting does not occur in Step S103, position correcting operation is completed.
摘要:
To provide a control system provided with a positioning mechanism including plural ultrasonic motors in the device, which can keep good operational stability as compared with a conventional system with a servo mechanism, is of an energy saving type suppressing power consumption and is compact in structure including the motor and a control circuit therefor. A control circuit in a control system of the present invention uses a common drive control circuit for a plurality of ultrasonic motors among the positioning mechanisms in which when the drive control circuit inputs a signal that specifies any ultrasonic motor and a desired-position designation signal, the drive control circuit conducts control operation that transmits an on signal to a driver of the subject motor to start the driving, and stops the driving when the motor reaches a desired position while receiving a position detection signal. Thus, the control system has a function of transmitting a signal indicating that the positioning operation is being conducted from a time point when commands are received to a time point when the positioning operation is completed. Then, an error signal is outputted when the motor is out of the desired position.