公开(公告)号：US20240022227A1

公开(公告)日：2024-01-18

申请号：US18353979

申请日：2023-07-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： John P. KOULAKIS ,  Greg DYER

IPC: H03H9/02 ,  H03H3/013

CPC classification number: H03H9/02228 ,  H03H9/02015 ,  H03H3/013 ,  H03H9/02086

Abstract: An acoustic resonator is provided that includes a substrate; a piezoelectric layer supported by the substrate; and an interdigital transducer (IDT) at a surface of the piezoelectric layer. The IDT includes a pair of busbars and a plurality of electrode fingers extending from the first and second busbars to be interleaved with each other. The respective widths of at least a portion of the electrode fingers increases in a direction from respective first ends of the first and second busbars to the respective second end of the first and second busbars. Moreover, a pitch of the portion of the electrode fingers decreases in the direction from the respective first ends of the first and second busbar to the respective second ends of the first and second busbars.

公开(公告)号：US20230327644A1

公开(公告)日：2023-10-12

申请号：US18194012

申请日：2023-03-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Sean MCHUGH ,  Greg DYER ,  Bryant GARCIA

IPC: H03H9/13 ,  H03H9/56 ,  H03H9/02 ,  H03H9/205

CPC classification number: H03H9/132 ,  H03H9/568 ,  H03H9/02047 ,  H03H9/205

Abstract: A filter device is provided that includes a substrate having a surface and a piezoelectric plate supported by the substrate. A plurality of interdigital transducers (IDTs) for multiple resonators are provided that each have interleaved fingers at respective diaphragms of the piezoelectric plate disposed over one or more cavities. Moreover, a first resonator includes a first plurality of interleaved fingers having a first pitch and a second resonator includes a second plurality of interleaved fingers having a second pitch that is different than the first pitch. This configuration adjusts the resonance frequencies of each resonator. Moreover, a dielectric layer may be uniformly disposed over at least one surface of the respective diaphragms of the piezoelectric plate.

公开(公告)号：US20230231534A1

公开(公告)日：2023-07-20

申请号：US18075889

申请日：2022-12-06

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Greg DYER ,  William Lu ,  Douglas Jachowski ,  Bryant Garcia

IPC: H03H9/02 ,  H03H9/17

CPC classification number: H03H9/02228 ,  H03H9/171 ,  H03H9/02015

Abstract: An acoustic resonator has a piezoelectric plate having first and second surfaces, the second surface facing a substrate, and a diaphragm of the piezoelectric plate spanning a cavity. A conductor pattern is formed on at least one of the first and second surfaces and has an interdigital transducer (IDT) having interleaved fingers on the diaphragm portion of the piezoelectric plate. At least one of a pitch of the interleaved IDT fingers or a mark of the interleaved IDT fingers varies over an area of the IDT to compensate for process-induced distortion of the diaphragm portion of the piezoelectric plate.