公开(公告)号：US20250047258A1

公开(公告)日：2025-02-06

申请号：US18924099

申请日：2024-10-23

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Sean MCHUGH ,  Bryant GARCIA ,  Ventsislav YANTCHEV ,  Greg DYER

IPC: H03H9/17 ,  H03H9/13 ,  H03H9/54

Abstract: An acoustic resonator device is provided that includes a substrate; a piezoelectric plate having front and back surfaces, the back surface attached to the substrate; a decoupling dielectric layer on the front surface of the piezoelectric plate; and an interdigital transducer (IDT) on the decoupling dielectric layer such that interleaved fingers of the IDT are over a portion of the piezoelectric plate that is over a cavity. Moreover, a thickness of the interleaved fingers is greater than or equal to 0.6 times a thickness of the piezoelectric plate and less than or equal to 1.7 times the thickness of the piezoelectric plate.

公开(公告)号：US20230327644A1

公开(公告)日：2023-10-12

申请号：US18194012

申请日：2023-03-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Sean MCHUGH ,  Greg DYER ,  Bryant GARCIA

IPC: H03H9/13 ,  H03H9/56 ,  H03H9/02 ,  H03H9/205

CPC classification number: H03H9/132 ,  H03H9/568 ,  H03H9/02047 ,  H03H9/205

Abstract: A filter device is provided that includes a substrate having a surface and a piezoelectric plate supported by the substrate. A plurality of interdigital transducers (IDTs) for multiple resonators are provided that each have interleaved fingers at respective diaphragms of the piezoelectric plate disposed over one or more cavities. Moreover, a first resonator includes a first plurality of interleaved fingers having a first pitch and a second resonator includes a second plurality of interleaved fingers having a second pitch that is different than the first pitch. This configuration adjusts the resonance frequencies of each resonator. Moreover, a dielectric layer may be uniformly disposed over at least one surface of the respective diaphragms of the piezoelectric plate.

公开(公告)号：US20240429893A1

公开(公告)日：2024-12-26

申请号：US18825027

申请日：2024-09-05

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Sean MCHUGH

IPC: H03H9/02 ,  H03H3/02 ,  H03H9/205 ,  H03H9/56

Abstract: An acoustic filter device is provided that includes a substrate and a piezoelectric layer having a first portion spanning a first cavity of the acoustic filter device and a second portion spanning a second cavity of the acoustic filter device. Moreover, a decoupling dielectric layer is on a surface of the first and second portions of the piezoelectric layer. The decoupling dielectric layer has a first thickness td1 on the first portion and a second thickness td2 on the second portion. The second thickness td2 being greater than the first thickness td1. First and second interdigital transducers (IDTs) are provided with interleaved fingers of the first IDT on the decoupling dielectric layer over the first portion of the piezoelectric layer and interleaved fingers of the second IDT on the decoupling dielectric layer over the second portion of the piezoelectric layer.

公开(公告)号：US20240030896A1

公开(公告)日：2024-01-25

申请号：US18478605

申请日：2023-09-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Sean MCHUGH ,  Gregory L. HEY-SHIPTON ,  Garrett WILLIAMS

IPC: H03H9/64 ,  H03H9/60 ,  H03H9/02 ,  H03H9/72

CPC classification number: H03H9/6483 ,  H03H9/605 ,  H03H9/02559 ,  H03H9/725

Abstract: Filter devices. A first chip includes a first base, a first piezoelectric membrane having a first thickness, and a first acoustic Bragg reflector sandwiched between the first piezoelectric membrane and the first base. A first interdigital transducer (IDT) of a first solidly-mounted membrane resonator is formed on a surface of the first piezoelectric membrane. A second chip includes a second base, a second piezoelectric membrane having a second thickness less than the first thickness, and a second acoustic Bragg reflector sandwiched between the second piezoelectric membrane and the second base. A second IDT of a second solidly-mounted membrane resonator is formed on a surface of the second piezoelectric membrane. A circuit card is coupled to the first chip and the second chip, the circuit card including at least one conductor for making an electrical connection between the first IDT and the second IDT.

公开(公告)号：US20250096769A1

公开(公告)日：2025-03-20

申请号：US18966231

申请日：2024-12-03

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Andrew KAY ,  Sean MCHUGH ,  John KOULAKIS ,  Albert CARDONA

IPC: H03H9/02 ,  H03H3/02 ,  H03H9/13 ,  H03H9/17 ,  H03H9/56

Abstract: A filter device is provided that includes a plurality of bulk acoustic resonators that each includes a piezoelectric layer; a conductor pattern on the piezoelectric layer and including an interdigital transducer (IDT) having a first plurality of fingers extending from a first busbar and a second plurality of fingers extending from the second busbar, such that the first plurality of fingers and the second plurality of fingers are interleaved with each other; a dielectric strip that overlaps a margin of the first plurality of fingers and that extends into a gap between ends of the first plurality of fingers and the second busbar. Moreover, a thickness ts of the dielectric strip a first bulk acoustic resonator of the plurality of bulk acoustic resonators is different than a thickness ts of the dielectric strip of a second bulk acoustic resonator of the plurality of bulk acoustic resonators.

公开(公告)号：US20240022228A1

公开(公告)日：2024-01-18

申请号：US18477307

申请日：2023-09-28

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Sean MCHUGH

IPC: H03H9/02 ,  H03H3/04 ,  H03H9/17 ,  H03H9/56

CPC classification number: H03H9/02228 ,  H03H3/04 ,  H03H9/02031 ,  H03H9/02102 ,  H03H9/174 ,  H03H9/562 ,  H03H9/564 ,  H03H9/568 ,  H03H9/176 ,  H03H2003/0442 ,  H03H2003/023

Abstract: Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate supported by the substrate. A portion of the piezoelectric plate suspended across a cavity in the substrate forms a diaphragm. A decoupling dielectric layer is on a front surface of the diaphragm. An interdigital transducer (IDT) has interleaved fingers on the decoupling dielectric layer over the diaphragm. The IDT and piezoelectric plate are configured such that a radio frequency signal applied to the IDT excites shear acoustic waves in the diaphragm.

公开(公告)号：US20240429895A1

公开(公告)日：2024-12-26

申请号：US18824232

申请日：2024-09-04

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Sean MCHUGH ,  Gregory L. HEY-SHIPTON ,  Garrett WILLIAMS

IPC: H03H9/64 ,  H03H9/02 ,  H03H9/60 ,  H03H9/72

Abstract: A filter device is proved that includes a first chip having a first interdigital transducer (IDT) of a first bulk acoustic resonator at a first piezoelectric plate, the first IDT disposed on a portion of the first piezoelectric plate over a first cavity of the first bulk acoustic resonator, and a second chip having a second IDT of a second bulk acoustic resonator formed at a second piezoelectric plate, the second IDT disposed on a portion of the second piezoelectric plate over a second cavity of the second bulk acoustic resonator. The filter device includes a circuit card coupled to the first chip and the second chip. A thickness of the first piezoelectric plate is greater than a thickness of the second piezoelectric plate.

公开(公告)号：US20240235525A9

公开(公告)日：2024-07-11

申请号：US18488277

申请日：2023-10-17

Applicant: Murata Manufacturing Co., Ltd.

Inventor： John KOULAKIS ,  Greg DYER ,  Sean MCHUGH ,  Patrick TURNER

IPC: H03H9/17 ,  H03H9/02 ,  H03H9/56

CPC classification number: H03H9/174 ,  H03H9/02228 ,  H03H9/568

Abstract: An apparatus for filtering radio frequency signals is provided. The apparatus includes a substrate and a membrane coupled to the substrate that includes piezoelectric material. The apparatus also includes an interdigital transducer (IDT) coupled to the membrane and includes a plurality of interleaved fingers. The apparatus also includes a lid, in which the membrane is arranged between the substrate and the lid with a first cavity having a first height between the lid and a first main surface of the membrane and a second cavity having a second height between the substrate and a second main surface of the membrane that opposes the first main surface. Moreover, the first height between the lid and the first main surface of the membrane is greater than a pitch of at least one pair of interleaved fingers of the plurality of interleaved fingers and at most four times greater than the second height.

公开(公告)号：US20240137004A1

公开(公告)日：2024-04-25

申请号：US18488277

申请日：2023-10-16

Applicant: Murata Manufacturing Co., Ltd.

Inventor： John KOULAKIS ,  Greg DYER ,  Sean MCHUGH ,  Patrick TURNER

IPC: H03H9/17 ,  H03H9/02 ,  H03H9/56

CPC classification number: H03H9/174 ,  H03H9/02228 ,  H03H9/568

Abstract: An apparatus for filtering radio frequency signals is provided. The apparatus includes a substrate and a membrane coupled to the substrate that includes piezoelectric material. The apparatus also includes an interdigital transducer (IDT) coupled to the membrane and includes a plurality of interleaved fingers. The apparatus also includes a lid, in which the membrane is arranged between the substrate and the lid with a first cavity having a first height between the lid and a first main surface of the membrane and a second cavity having a second height between the substrate and a second main surface of the membrane that opposes the first main surface. Moreover, the first height between the lid and the first main surface of the membrane is greater than a pitch of at least one pair of interleaved fingers of the plurality of interleaved fingers and at most four times greater than the second height.

公开(公告)号：US20230327637A1

公开(公告)日：2023-10-12

申请号：US18194256

申请日：2023-03-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ventsislav YANTCHEV ,  Sean MCHUGH ,  Bryant GARCIA ,  Patrick TURNER ,  John P. KOULAKIS

IPC: H03H9/02 ,  H03H9/17 ,  G01N29/02 ,  G01N29/036

CPC classification number: H03H9/02228 ,  H03H9/02015 ,  H03H9/174 ,  G01N29/022 ,  G01N29/036 ,  G01N2291/0256 ,  G01N2291/0426

Abstract: A bulk acoustic resonator that includes a substrate, a piezoelectric plate, and an interdigital transducer (IDT) formed on the front surface of the piezoelectric plate. The IDT is configured to excite a primary shear acoustic mode within the piezoelectric plate. Also included is a half-lambda dielectric layer on at least one of the front surface or the back surface of the piezoelectric plate, where a thickness of the half-lambda dielectric layer is related to a wavelength of a fundamental shear bulk acoustic wave resonance in the half-lambda dielectric layer. The device further includes an acoustic Bragg reflector sandwiched between the surface of the substrate and the back surface of the piezoelectric plate, the acoustic Bragg reflector configured to reflect the primary acoustic mode. A top layer of the alternating layers of the acoustic Bragg reflector contacts the piezoelectric plate or the half-lambda dielectric layer.