公开(公告)号：US20220238306A1

公开(公告)日：2022-07-28

申请号：US17718047

申请日：2022-04-11

Applicant: Samsung Display Co., Ltd.

Inventor： Jong-hoon Park ,  Sukwon Jung ,  Hyunwoo Joo ,  Jaihyuk Choi ,  Kyungjoo Min ,  Wonwoong Park

IPC: H01J37/32 ,  C23C16/44 ,  H01L51/56 ,  C23C16/505 ,  C23C16/455 ,  C23C16/509

Abstract: A chemical vapor deposition apparatus includes a chamber, a susceptor supporting a substrate, a backing plate to which power is applied, a diffuser providing a deposition gas, and a first insulator. The first insulator may include a first portion covering a top surface of the backing plate, and a second portion assembled with the first portion and covering a sidewall of the backing plate.

公开(公告)号：US20190341277A1

公开(公告)日：2019-11-07

申请号：US16173950

申请日：2018-10-29

Applicant: Samsung Display Co., Ltd.

Inventor： Haeyoung Yoo ,  Taejong Kim ,  Juhee Lee ,  Myungsoo Huh ,  Jaekyu Park ,  Hyunwoo Joo

IPC: H01L21/67 ,  H01J37/32 ,  H01L27/12 ,  H01L21/311 ,  H01L27/32 ,  H01L21/027

Abstract: Provided is a display device manufacturing apparatus and a manufacturing method of a display device. The display device manufacturing apparatus includes: a chamber; a supporter arranged in the chamber and supporting a substrate; an electrode arranged in the chamber so as to face the supporter; a gas supply arranged in the chamber and configured to supply process gas into the chamber; a first baffle arranged at a rim of the supporter and having at least one first through hole; and a second baffle arranged between the first baffle and the chamber and covering the at least one first through hole in a plan view to alter a path of by-products discharged from the chamber.

公开(公告)号：US10361263B2

公开(公告)日：2019-07-23

申请号：US15949614

申请日：2018-04-10

Applicant: Samsung Display Co., Ltd.

Inventor： Jaihyuk Choi ,  Sukwon Jung ,  Myungsoo Huh ,  Seok-jin Ko ,  Hyunwoo Joo

IPC: H01L27/32 ,  H01L27/12 ,  H01L29/786

Abstract: Provided is a display apparatus. The display apparatus includes a base substrate, a first transistor disposed on the base substrate and including a first semiconductor layer including a first layer and a second layer disposed to come into contact with a first layer and including a compound made of at least two materials of a Group IV elements, a first control electrode overlapping the first semiconductor layer, a first input electrode connected to the first semiconductor layer, and a first output electrode connected to the first semiconductor layer, a second transistor and an organic light emitting diode.

公开(公告)号：US10211427B2

公开(公告)日：2019-02-19

申请号：US15640945

申请日：2017-07-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Myungsoo Huh ,  Sunghun Key ,  Sungchul Kim ,  Cheollae Roh ,  Sukwon Jung ,  Hyunwoo Joo ,  Jaihyuk Choi

IPC: H01L51/52 ,  H01J37/32 ,  C23C16/04 ,  C23C16/34 ,  C23C16/455 ,  C23C16/505

Abstract: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.