公开(公告)号：US09006777B2

公开(公告)日：2015-04-14

申请号：US14036479

申请日：2013-09-25

Applicant: Samsung Display Co., Ltd.

Inventor： Ung-Soo Lee ,  Jae-Sun Lee ,  Hun Kim ,  Jai-Hyuk Choi ,  Su-Hyuk Choi ,  Jin-Woo Park

IPC: H01L27/32 ,  H01L33/56

CPC classification number: H01L27/32 ,  H01L27/3244 ,  H01L33/56 ,  H01L51/5253

Abstract: An organic light-emitting display and methods of manufacturing the same are disclosed. In one aspect, an organic light-emitting apparatus includes a substrate, a display unit on the substrate, a step compensation layer formed on the display unit and supplementing a step on a surface of the display unit, a first intermediate layer formed on the step compensation layer, and an encapsulation layer formed on the first intermediate layer and sealing the display unit.

Abstract translation: 公开了一种有机发光显示器及其制造方法。 一方面，有机发光装置包括基板，基板上的显示单元，在显示单元上形成的台阶补偿层，并且在显示单元的表面上补充台阶，形成在台阶上的第一中间层 补偿层，以及形成在第一中间层上并密封显示单元的封装层。

公开(公告)号：US09624575B2

公开(公告)日：2017-04-18

申请号：US14262088

申请日：2014-04-25

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Ung-Soo Lee ,  Jin-Woo Park ,  Su-Hyuk Choi

IPC: H01L23/10 ,  H01L23/12 ,  C23C14/50 ,  C23C14/34 ,  H01L51/56 ,  H01L51/00 ,  H01J37/34 ,  H01L21/687 ,  H01J37/32

CPC classification number: C23C14/505 ,  C23C14/3407 ,  H01J37/32715 ,  H01J37/3405 ,  H01L21/68764 ,  H01L21/68785 ,  H01L21/68792 ,  H01L51/001 ,  H01L51/56

Abstract: A thin film deposition apparatus, a deposition method using the same, and a method of manufacturing an organic light-emitting display apparatus by using the apparatus are provided. A thin film deposition apparatus is provided that includes a chamber containing a substrate holder on which a substrate is mounted, a plurality of rotary shaft units that change rotation and an inclination angle of the substrate holder, and a target unit that supplies a thin film material for formation on the substrate.

公开(公告)号：US09406901B2

公开(公告)日：2016-08-02

申请号：US13966237

申请日：2013-08-13

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Ung-Soo Lee ,  Jae-Sun Lee ,  Hun Kim ,  Jai-Hyuk Choi ,  Su-Hyuk Choi ,  Jin-Woo Park

IPC: H01L21/00 ,  H01L51/52 ,  H01L27/32

CPC classification number: H01L51/5237 ,  H01L27/3244 ,  H01L51/5253

Abstract: An organic light-emitting display apparatus and a method of manufacturing the organic light-emitting display apparatus. The organic light-emitting display apparatus includes a substrate; a display unit on the substrate; and an encapsulating layer encapsulating the display unit. The encapsulating layer is formed of a low-temperature viscosity transition inorganic material. The encapsulating layer includes nitrogen.

Abstract translation: 一种有机发光显示装置及其制造方法。 有机发光显示装置包括：基板; 基板上的显示单元; 以及封装所述显示单元的封装层。 封装层由低温粘度转变无机材料形成。 封装层包括氮。

公开(公告)号：US09324967B2

公开(公告)日：2016-04-26

申请号：US14061421

申请日：2013-10-23

Applicant: Samsung Display Co., Ltd.

Inventor： Jai-Hyuk Choi ,  Jin-Woo Park ,  Ung-Soo Lee ,  Su-Hyuk Choi

IPC: H01L51/56 ,  H01L33/52 ,  H01L33/56 ,  H01L51/52 ,  H01L27/32

CPC classification number: H01L51/5253 ,  H01L27/3244 ,  H01L33/52 ,  H01L33/56

Abstract: A method of manufacturing an organic light-emitting display apparatus includes disposing a low melting glass (LMG) thin film to cover a display unit disposed on a substrate, and radiating an energy beam onto the LMG thin film. Accordingly, an encapsulation layer having excellent sealing characteristics may be rapidly formed, and thus manufacturing process efficiency and product reliability may be improved.

Abstract translation: 制造有机发光显示装置的方法包括：设置低熔点玻璃（LMG）薄膜以覆盖设置在基板上的显示单元，并将能量束照射到LMG薄膜上。 因此，可以快速形成具有优异的密封特性的封装层，从而可以提高制造工艺效率和产品可靠性。

公开(公告)号：US20150028295A1

公开(公告)日：2015-01-29

申请号：US14096587

申请日：2013-12-04

Applicant: Samsung Display Co., Ltd.

Inventor： Su-Hyuk Choi

IPC: H01L51/56 ,  H01L51/52

CPC classification number: H01L51/56 ,  H01J37/3405 ,  H01J37/3417 ,  H01J37/3458 ,  H01L51/5253

Abstract: A method of manufacturing an organic light-emitting display apparatus includes preparing a deposition target in which an organic light-emitting portion is formed on a substrate, forming a pre-encapsulation layer for encapsulating the organic light-emitting portion by using a facing target sputtering apparatus, and forming an encapsulation layer by performing a plasma surface process on the pre-encapsulation layer by using the facing target sputtering apparatus. The facing target sputtering apparatus includes a chamber in which a mounting portion for accommodating the deposition target is provided, a gas supply portion facing the mounting portion and supplying gas to the chamber, a first target portion and a second target portion disposed in the chamber and facing each other, and an induced magnetic field coil surrounding the exterior of the chamber.

Abstract translation: 一种制造有机发光显示装置的方法包括制备在基板上形成有机发光部分的沉积靶，通过使用面对靶溅射形成用于封装有机发光部分的预封装层 装置，并且通过使用面对靶溅射装置在预封装层上执行等离子体表面处理来形成封装层。 面对靶溅射装置包括：设置有用于容纳沉积靶的安装部分的腔室，面向安装部分并将气体供应到腔室的气体供应部分，设置在腔室中的第一靶部分和第二靶部分， 并且围绕室的外部的感应磁场线圈。

公开(公告)号：US20140224644A1

公开(公告)日：2014-08-14

申请号：US14010383

申请日：2013-08-26

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Su-Hyuk Choi

IPC: H01J37/32

CPC classification number: H01J37/3244 ,  H01J37/3417

Abstract: A deposition apparatus includes a chamber, a chamber, a substrate placing unit which is located in the chamber and on which a substrate is placed, and a sputter unit for forming a thin film on the substrate. The sputter unit includes a first target unit and a second target unit facing the first target unit. A pair of targets are mounted on each of the first target unit and the second target unit. Argon gas is directly injected between the pair of targets. Accordingly, plasma may be more effectively and stably formed. A method of manufacturing an organic light-emitting display apparatus using the deposition apparatus is also disclosed.

Abstract translation: 沉积设备包括腔室，腔室，位于腔室中并且其上放置基底的衬底放置单元以及用于在衬底上形成薄膜的溅射单元。 溅射单元包括面向第一目标单元的第一目标单元和第二目标单元。 一对目标安装在第一目标单元和第二目标单元中的每一个上。 氩气直接注入到一对靶之间。 因此，可以更有效且稳定地形成等离子体。 还公开了使用该沉积装置制造有机发光显示装置的方法。